CN109143424A - A kind of microlens array and preparation method thereof - Google Patents
A kind of microlens array and preparation method thereof Download PDFInfo
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- CN109143424A CN109143424A CN201810961148.XA CN201810961148A CN109143424A CN 109143424 A CN109143424 A CN 109143424A CN 201810961148 A CN201810961148 A CN 201810961148A CN 109143424 A CN109143424 A CN 109143424A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/02—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor
- C03B37/025—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor from reheated softened tubes, rods, fibres or filaments, e.g. drawing fibres from preforms
- C03B37/027—Fibres composed of different sorts of glass, e.g. glass optical fibres
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Abstract
The present invention relates to a kind of preparation methods of microlens array, comprising the following steps: prepares blank flat: the blank flat of period composite construction is made by the combination of stick pipe, wire drawing, plate-laying and fusion pressure for blank；Ion beam etching: the surface of the ion beam etching blank flat is utilized.The present invention also provides microlens arrays made from the above method.The present invention does not use photoresist, avoids the processes such as photoetching, hot melt, and the microlens array obtained is glass material, has better optical property and physicochemical stability.
Description
Technical field
The present invention relates to microlens array technical fields, more particularly to a kind of microlens array and preparation method thereof.
Background technique
Microlens array is small with unit size, integrated level is high, is easily assembled the advantages that integrated becomes most heavy in micro-optical systems
One of optical element wanted had obtained already in terms of optics connection, detector array, flat-panel monitor, raw doctor's test
It is widely applied, becomes the research hotspot of micro-optics and optics manufacturing field.The common moulding process of microlens array at present
Mainly there are Diamond Cutting, melting photoresist molding, compression molding method, ink jet printing formula technology and sessile drop method, photoetching ion to hand over
Technology and gel method etc. are changed, but Diamond Cutting method low efficiency, machining accuracy are low；Lens are made in the melting photoresist method of forming
Organic material, stability is poor, non-refractory；Die pressing, higher cost, and being prone to wear, when demoulding, are easily damaged lens；Ink-jet
Method is difficult to control accurately lens face shape deflection, and it is spherical surface that its face shape is similar；Photoetching ion-exchange, process uniformity are poor.With
Market increases microlens array demand rapidly, and exploitation high-precision, high-volume, the microlens array moulding process of low cost are
As the key further widened microlens array application field, meet the market demand.
Summary of the invention
It is a primary object of the present invention to provide a kind of microlens array and preparation method thereof, by the knot of material itself
Structure design directlys adopt ion beam etching and is made；Suitable glass bar pipe is chosen first, by drawing monofilament, arrangement multifilament stick, drawing
Multifilament, plate-laying, fusion pressure, cold working process obtain blank, and blank is then prepared into lenticule battle array by plasma etching industrial
Column.
The object of the invention to solve the technical problems adopts the following technical solutions to realize.It provides according to the present invention
A kind of preparation method of microlens array, comprising the following steps:
1) blank flat is prepared:
The blank flat of period composite construction is made by the combination of stick pipe, wire drawing, plate-laying and fusion pressure；
2) ion beam etching:
Utilize the surface of the ion beam etching blank flat.
Further, in step 1), wherein the blank flat of the manufacturing cycle composite construction specifically:
Skin glass tube and core rod are combined into prefabricated rods, with fiber drawing furnace by preform at round, cubic cylindricality
Or hexagonal prism shape monofilament；By the circle, cubic cylindricality or hexagonal prism shape monofilament close packed array at cubic cylindricality or hexagonal prism
The four directions cylindricality or hexagonal prism shape multifilament stick are drawn into cubic cylindricality or hexagonal prism shape multifilament through fiber drawing furnace by shape multifilament stick；It will
The four directions cylindricality or hexagonal prism shape multifilament close packed array are at cubic cylindricality or hexagonal prism shape blank stick；The blank stick is put into
In hot pressing furnace, heating pressurization is bonded together multifilament, forms blank flat.What needs to be explained here is that due to round multifilament stick
Unstable, circular monofilaments are generally arranged in hexagon multifilament stick.
Further, in step 1), wherein described prepare blank flat specifically:
Skin glass tube and core rod are combined into prefabricated rods, with fiber drawing furnace by preform at 0.2~1mm of outer diameter,
The positive hexagonal prism shape monofilament of long 200~1500mm, 500~1800 DEG C of wire drawing furnace temperature；By the positive hexagonal prism shape list of 0.2~1mm
Silk close packed array at 10~60mm of opposite side size, long 200~1500mm positive hexagonal prism shape multifilament stick, by positive hexagonal prism shape
Multifilament stick is drawn into the positive hexagonal prism shape multifilament of 0.1~1mm of opposite side through fiber drawing furnace, and 500~1800 DEG C of wire drawing furnace temperature；By positive six
Square column type multifilament close packed array at 20~100mm of opposite side size, 20~500mm of length positive hexagonal prism shape blank stick；It will
Positive hexagonal prism shape blank stick is put into hot pressing furnace, is warming up to 300~900 DEG C, is forced into 0.1~30Mpa, keeps positive hexagonal prism shape multiple
Silk is bonded together, and forms blank flat.
Further, in step 1), wherein described prepare blank flat specifically:
Skin glass tube and core rod are combined into prefabricated rods, with fiber drawing furnace by preform at 0.2~1mm of opposite side,
The positive cubic cylindricality monofilament of long 200~1500mm, 500~1800 DEG C of wire drawing furnace temperature；Positive cubic cylindricality monofilament is tightly packed
It is arranged in the positive cubic cylindricality multifilament stick of 10~60mm of opposite side size, long 200~1500mm, by positive cubic cylindricality multifilament stick through drawing
Silk furnace is drawn into the positive cubic cylindricality multifilament of opposite side 0.5mm, and 500~1800 DEG C of wire drawing furnace temperature；Positive cubic cylindricality multifilament is tight
Close packed array at 20~100mm of opposite side size, 20~500mm of length positive cubic cylindricality blank stick；It will positive cubic cylindricality hair
Base stick is put into hot pressing furnace, is warming up to 300~900 DEG C, is forced into 0.1~30Mpa, and positive cubic cylindricality multifilament is made to be bonded in one
It rises, forms blank flat.
Further, in step 2), wherein the ion beam etching specifically:
It is performed etching on blank flat with ion beam etching technology, wherein ion beam energy is 200~5000ev, etches angle
Degree is 10~80 degree, and sample rotates speed is 10~200r/min, and blank cladding etching speed is blank core material etch rate
0.2~5 times, microlens array is made.
Further, in step 2), wherein the gas source of the ion beam etching includes but are not limited to argon gas, helium, nitrogen
One of gas, oxygen or hydrogen, it is numerous to list herein, select argon gas relatively more as gas source under normal circumstances, this be by
It is preferable in the effect that argon gas is etched as gas source.
It further, further include being processed into blank flat by cold machining process after step 1), before step 2)
The step of product size.
It further, further include by blank flat before step 2) by wire cutting, grinding, throwing wherein after step 1)
Light technology is processed into the step of finished size.
Further, further include the steps that preparing core material stick and cladding pipe before step 1).
In addition, the present invention also provides a kind of microlens array, 1~100 μm of the aperture of the microlens array.
Further, the microlens array is made by above-mentioned method.
Beneficial effects of the present invention are as follows:
1) present invention is the difference of the blank core skin etch rate based on composite construction, is obtained by ion beam direct etching
Obtain microlens array；The theoretical basis of this preparation method is reasonable, and operating procedure is feasible, provides newly for the preparation of microlens array
Thinking.
2) this technique can be applied to a variety of composite construction glass matrix, when core material etching speed is greater than cladding etching speed
Concave mirror arrangements can be prepared；And convex lens array can be prepared when cladding etching speed is greater than core material etching speed；In addition may be used also
Core material is designed to round, rectangular, hexagon, to prepare round, rectangular, hexagon microlens array respectively.
3) present invention does not use photoresist, avoids the processes such as photoetching, hot melt, and can obtain the lenticule of glass material
Array has better optical property (such as transmitance) and physicochemical stability (such as high temperature resistance).
Detailed description of the invention
Fig. 1 is the preparation flow figure of the lenticule of the embodiment of the present invention.
Fig. 2 is the plasma etching schematic diagram of the lenticule of the embodiment of the present invention.
Specific embodiment
It is of the invention to reach the technical means and efficacy that predetermined goal of the invention is taken further to illustrate, below in conjunction with
Attached drawing and preferred embodiment, to the electrolyte proposed according to the present invention for solid-state full-inorganic electrochromic device and its preparation
Method its specific embodiment, feature and its effect, detailed description is as follows.In the following description, different " embodiment " or
What " embodiment " referred to is not necessarily the same embodiment.In addition, the special characteristic or feature in one or more embodiments can be by any
Suitable form combination.
The present invention provides a kind of preparation method of microlens array, first by stick pipe combination, wire drawing, plate-laying, fusion pressure, cold
Period composite construction blank is made in processing technology, and wherein the ion etching speed of cladding is greater than core material, then directly carries out ion
Beam etching obtains microlens array by the etching speed difference of core skin.The program does not use photoresist, avoids photoetching, heat
The processes such as molten, and the microlens array obtained is glass material, has better optical property and physicochemical stability.
Embodiment 1:
As shown in Figure 1, present embodiments providing a kind of preparation method of microlens array, comprising the following steps:
(1) silicate glass preparation cylindrical core charge bar (core rod i.e. hereafter), outer diameter 29mm, long 500mm are selected；
Borate glass is selected to prepare cylinder-shaped cladding pipe (skin glass tube i.e. hereafter), outer diameter 36mm, wall thickness 3mm, long 600mm.
(2) skin glass tube and core rod are combined into prefabricated rods, with fiber drawing furnace by preform at outer diameter 0.6mm,
The cylindrical monofilament of long 600mm, 800 DEG C of wire drawing furnace temperature；By the cylindrical monofilament close packed array of 0.6mm at opposite side size
Hexagonal prism shape multifilament stick, is drawn into the hexagonal prism of opposite side 0.5mm by the hexagonal prism shape multifilament stick of 30mm, long 600mm through fiber drawing furnace
Shape multifilament, 900 DEG C of wire drawing furnace temperature；By multifilament close packed array at the hexagonal prism shape hair of opposite side size 25mm, length 60mm
Base stick；Blank stick is put into hot pressing furnace, 900 DEG C is warming up to, is forced into 10Mpa, be bonded together multifilament, forms blank
Plate.
(3) blank flat is processed into finished size, the cold machining process by cold machining process specifically: first by hair
Base is round as a ball, obtains the cylinder that diameter is 15mm；Then wire cutting is carried out to cylinder, is cut into the disk with a thickness of 1mm；Finally
Disk is ground, is polished, with a thickness of 0.8mm after polishing.
(4) it is carved on the blank flat of finished size (diameter 15mm, with a thickness of 0.8mm) with ion etching technology
Erosion, wherein gas source be argon gas, ion beam energy 1000ev, 70 degree of etching angle, sample rotates speed 60r/min.
(5) the circular microlens array that aperture is 10 μm, sub- mirror sphere diameter is 40 μm is made by above-mentioned technique.Such as Fig. 2 institute
Show, when cladding etching speed is greater than cladding etching speed, the bull's-eye array that aperture is 10 μm can be formed.
Embodiment 2:
As shown in Figure 1, present embodiments providing a kind of preparation method of microlens array, comprising the following steps:
(1) the positive cubic cylindricality core material stick of silicate glass preparation, opposite side 29mm, long 500mm are selected；Select borate glass
Prepare positive four square tube shapes cladding pipe, opposite side 36mm, wall thickness 3mm, long 600mm.
(2) skin glass tube and core rod are combined into prefabricated rods, with fiber drawing furnace by preform at opposite side 0.6mm,
The positive cubic cylindricality monofilament of long 600mm, 800 DEG C of wire drawing furnace temperature；By monofilament close packed array at opposite side size 30mm, length
Multifilament stick is drawn into the positive cubic cylindricality multifilament of opposite side 0.5mm, wire drawing by the positive cubic cylindricality multifilament stick of 600mm through fiber drawing furnace
900 DEG C of furnace temperature；By multifilament close packed array at the positive cubic cylindricality blank stick of opposite side size 25mm, length 60mm,；By hair
Base stick is put into hot pressing furnace, is warming up to 500 DEG C, is forced into 30Mpa, is bonded together multifilament, and blank flat is formed.
(3) blank flat is processed into finished size, opposite side 15mm, thickness 0.8mm by wire cutting, grinding, polishing process.
(4) it is performed etching on the blank flat of finished size with ion etching technology, wherein gas source is argon gas, ion beam energy
Measure 1000ev, 70 degree of etching angle, sample rotates speed 60r/min.
(5) the square microlens array that aperture is 10 μm, sub- mirror sphere diameter is 30 μm is made by above-mentioned technique.Such as Fig. 2
It is shown, when cladding etching speed is greater than cladding etching speed, the square convex lens array that aperture is 10 μm can be formed.
Embodiment 3:
As shown in Figure 1, present embodiments providing a kind of preparation method of microlens array, comprising the following steps:
(1) silicate glass is selected to prepare positive hexagonal prism shape core material stick, opposite side 29mm, long 500mm；Select borate glass
Prepare positive six square tube shapes cladding pipe, opposite side 36mm, wall thickness 3mm, long 600mm.
(2) skin glass tube and core rod are combined into prefabricated rods, with fiber drawing furnace by preform at opposite side 0.6mm,
The positive hexagonal prism shape monofilament of long 600mm, 800 DEG C of wire drawing furnace temperature；By the positive hexagonal prism shape monofilament close packed array of 0.6mm at
Positive hexagonal prism shape multifilament stick is drawn into opposite side through fiber drawing furnace by the positive hexagonal prism shape multifilament stick of opposite side size 30mm, long 600mm
The positive hexagonal prism shape multifilament of 0.5mm, 900 DEG C of wire drawing furnace temperature；By positive hexagonal prism shape multifilament close packed array at opposite side size
The positive hexagonal prism shape blank stick of 25mm, length 60mm；Positive hexagonal prism shape blank stick is put into hot pressing furnace, 300 DEG C is warming up to, adds
It is depressed into 30Mpa, is bonded together positive hexagonal prism shape multifilament, forms blank flat.
(3) blank flat is passed through into wire cutting, grinding, polishing into finished size, opposite side 15mm, thickness 0.8mm.
(4) it is performed etching on the blank flat of finished size with ion etching technology, wherein gas source is argon gas, ion beam energy
Measure 1000ev, 70 degree of etching angle, sample rotates speed 60r/min.
(5) the hexagon microlens array that aperture is 10 μm, sub- mirror sphere diameter is 35 μm is made by above-mentioned technique.Such as Fig. 2
It is shown, when cladding etching speed is greater than cladding etching speed, the hexagon convex lens array that aperture is 10 μm can be formed.
Embodiment 4:
As shown in Figure 1, present embodiments providing a kind of preparation method of microlens array, comprising the following steps:
(1) silicate glass is selected to prepare core material stick, outer diameter 27mm, long 500mm；Borate glass is selected to prepare cladding
Pipe, outer diameter 32mm, wall thickness 2mm, long 600mm.
(2) skin glass tube and core rod are combined into prefabricated rods, with fiber drawing furnace by preform at outer diameter 0.8mm,
The cylindrical monofilament of long 600mm, 800 DEG C of wire drawing furnace temperature；By cylindrical monofilament close packed array at opposite side size 40mm, length
The positive hexagonal prism shape multifilament stick of 600mm, the positive hexagonal prism shape that positive hexagonal prism shape multifilament stick is drawn into opposite side 1mm through fiber drawing furnace is answered
Silk, 900 DEG C of wire drawing furnace temperature；By positive hexagonal prism shape multifilament close packed array at opposite side size 25mm, length 60mm positive six
Square column type blank stick；Positive hexagonal prism shape blank stick is put into hot pressing furnace, 600 DEG C is warming up to, is forced into 10Mpa, makes positive six side
Cylindricality multifilament is bonded together, and forms blank flat.
(3) blank flat is processed into finished size, opposite side 15mm, thickness by round as a ball, wire cutting, grinding, polishing process
0.8mm。
(4) it is performed etching on the blank flat of finished size with ion etching technology, wherein gas source is argon gas, ion beam energy
Measure 1200ev, 70 degree of etching angle, sample rotates speed 40r/min.
(5) the circular microlens array that aperture is 20 μm, sub- mirror sphere diameter is 80 μm is made by above-mentioned technique.Such as Fig. 2 institute
Show, when cladding etching speed is greater than cladding etching speed, the bull's-eye array that aperture is 10 μm can be formed.
The surface rough overshoot of microlens array described in above-described embodiment 1-4 is less than 10nm, and Array Uniformity is less than 0.1 μm
(focal length is determined by lens radius of curvature, is designed according to application demand).
The particular use of the microlens array of above-described embodiment 1-4 is as follows:
(1) photoelectricity can be improved by microlens array is mutually integrated described in optoelectronic sensor and above-described embodiment 1-4
Senser element is irradiated to light meeting after the refraction of lenticule on optoelectronic sensor surface to the acquisition capacity of optical signal
Gather in the photosensitive area of array element, has been obviously improved optoelectronic sensor to the utilization rate of optical signal.Particularly with high-resolution
For the optoelectronic sensor of rate, integral micro-lens array can under detection array unit size will while guarantee optical telecommunications
Number the skilful ratio of intensity and letter.
(2) in panoramic imagery application, 3D solid of the microlens array described in 1-4 to object space through the foregoing embodiment
It is imaged, each lenticule, which is equivalent to, to carry out projective transformation to target from a specific viewpoint and obtain on as plane
It, can be by direction that 3D solid emits beam and strong by this Multi-visual point image structure to corresponding two-dimensional element subgraph
Degree information is recorded in image sensing device；In the phase of regeneration of 3-D image, the integrated image of two-dimensional element subgraph is placed in
On the focal plane for having the display microlens array of identical structure and arrangement with Image Acquisition microlens array, each element subgraph
The light emitted will integrate again after corresponding lenticule refraction and rebuild a 3-D image.
(3) after increasing microlens array described in above-described embodiment 1-4 in the optical system of projector, light is by being somebody's turn to do
The focussing force of microlens array can be hooked brightly according to flooding, and image outline lines are clear, entire screen intensity one
It causes, greatly improves the image quality of projector (brightness of screen center and the luminance difference of screen edge reduce by 10% or more).
In addition, the major advantage of the present invention compared with the prior art is glass material, and high temperature resistant, 500 DEG C, high transmittance,
Greater than 90%.
The above described is only a preferred embodiment of the present invention, be not intended to limit the present invention in any form, according to
According to technical spirit any simple modification, equivalent change and modification to the above embodiments of the invention, this hair is still fallen within
In the range of bright technical solution.
Claims (11)
1. a kind of preparation method of microlens array, which comprises the following steps:
1) blank flat is prepared:
The blank flat of period composite construction is made by the combination of stick pipe, wire drawing, plate-laying and fusion pressure；
2) ion beam etching:
Utilize the surface of the ion beam etching blank flat.
2. preparation method as described in claim 1, which is characterized in that in step 1), wherein the manufacturing cycle composite construction
Blank flat specifically:
Skin glass tube and core rod are combined into prefabricated rods, with fiber drawing furnace by preform at round, cubic cylindricality or six
Square column type monofilament；The circle, cubic cylindricality or hexagonal prism shape monofilament close packed array are answered at cubic cylindricality or hexagonal prism shape
Silk stick, is drawn into cubic cylindricality or hexagonal prism shape multifilament through fiber drawing furnace for the four directions cylindricality or hexagonal prism shape multifilament stick；By this four
Square column type or hexagonal prism shape multifilament close packed array are at cubic cylindricality or hexagonal prism shape blank stick；The blank stick is put into hot pressing
In furnace, heating pressurization is bonded together multifilament, forms blank flat.
3. preparation method as claimed in claim 2, which is characterized in that in step 1), wherein described prepare blank flat specifically:
Skin glass tube and core rod are combined into prefabricated rods, with fiber drawing furnace by preform at 0.2~1mm of outer diameter, long 200
The positive hexagonal prism shape monofilament of~1500mm, 500~1800 DEG C of wire drawing furnace temperature；The positive hexagonal prism shape monofilament of 0.2~1mm is close
Stacked arrangement at 10~60mm of opposite side size, long 200~1500mm positive hexagonal prism shape multifilament stick, by positive hexagonal prism shape multifilament stick
It is drawn into the positive hexagonal prism shape multifilament of 0.1~1mm of opposite side through fiber drawing furnace, 500~1800 DEG C of wire drawing furnace temperature；By positive hexagonal prism shape
Multifilament close packed array at 20~100mm of opposite side size, 20~500mm of length positive hexagonal prism shape blank stick；By positive six side
Cylindricality blank stick is put into hot pressing furnace, is warming up to 300~900 DEG C, is forced into 0.1~30Mpa, and positive hexagonal prism shape multifilament is bonded
Together, blank flat is formed.
4. preparation method as claimed in claim 2, which is characterized in that in step 1), wherein described prepare blank flat specifically:
Skin glass tube and core rod are combined into prefabricated rods, with fiber drawing furnace by preform at 0.2~1mm of opposite side, long 200
The positive cubic cylindricality monofilament of~1500mm, 500~1800 DEG C of wire drawing furnace temperature；Will positive cubic cylindricality monofilament close packed array at
The positive cubic cylindricality multifilament stick of 10~60mm of opposite side size, long 200~1500mm draw positive cubic cylindricality multifilament stick through fiber drawing furnace
It is made the positive cubic cylindricality multifilament of opposite side 0.5mm, 500~1800 DEG C of wire drawing furnace temperature；Positive cubic cylindricality multifilament is tightly packed
It is arranged in the positive cubic cylindricality blank stick of 20~100mm of opposite side size, 20~500mm of length；Positive cubic cylindricality blank stick is put
Enter in hot pressing furnace, be warming up to 300~900 DEG C, be forced into 0.1~30Mpa, is bonded together positive cubic cylindricality multifilament, is formed
Blank flat.
5. preparation method as described in claim 1, which is characterized in that in step 2), wherein the ion beam etching specifically:
It is performed etching on blank flat with ion beam etching technology, wherein ion beam energy is 200~5000ev, and etching angle is
10~80 degree, sample rotates speed be 10~200r/min, blank cladding etching speed be blank core material etch rate 0.2~
5 times, microlens array is made.
6. preparation method as claimed in claim 5, which is characterized in that in step 2), wherein the gas source of the ion beam etching
Including one of argon gas, helium, nitrogen, oxygen or hydrogen.
7. preparation method as described in claim 1, which is characterized in that further include by hair before step 2) after step 1)
The step of blanket is processed into finished size by cold machining process.
8. preparation method as claimed in claim 7, which is characterized in that further include by hair before step 2) after step 1)
The step of blanket is processed into finished size by wire cutting, grinding, polishing process.
9. preparation method as described in claim 1, which is characterized in that before the step 1) further include preparing core material stick and cladding
The step of pipe.
10. a kind of microlens array, which is characterized in that 1~100 μm of the aperture of the microlens array.
11. microlens array as claimed in claim 10, which is characterized in that the microlens array is by claim 1-
9 described in any item methods are made.
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| CN111522085A (en) * | 2020-05-12 | 2020-08-11 | 深圳大学 | Method for manufacturing two-dimensional X-ray absorption grating |
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| CN110231677A (en) * | 2019-06-06 | 2019-09-13 | 中国建筑材料科学研究总院有限公司 | Microlens array and preparation method thereof |
| CN111522085A (en) * | 2020-05-12 | 2020-08-11 | 深圳大学 | Method for manufacturing two-dimensional X-ray absorption grating |
| WO2021227332A1 (en) * | 2020-05-12 | 2021-11-18 | 深圳大学 | Two-dimensional x-ray absorption grating manufacturing method |
| CN111679348A (en) * | 2020-05-29 | 2020-09-18 | 中国建筑材料科学研究总院有限公司 | Micro lens array and preparation method thereof |
| CN111679348B (en) * | 2020-05-29 | 2022-03-18 | 中国建筑材料科学研究总院有限公司 | Micro lens array and preparation method thereof |
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