CN109143424B - Micro lens array and preparation method thereof - Google Patents
Micro lens array and preparation method thereof Download PDFInfo
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- CN109143424B CN109143424B CN201810961148.XA CN201810961148A CN109143424B CN 109143424 B CN109143424 B CN 109143424B CN 201810961148 A CN201810961148 A CN 201810961148A CN 109143424 B CN109143424 B CN 109143424B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/02—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor
- C03B37/025—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor from reheated softened tubes, rods, fibres or filaments, e.g. drawing fibres from preforms
- C03B37/027—Fibres composed of different sorts of glass, e.g. glass optical fibres
Abstract
The invention relates to a preparation method of a micro-lens array, which comprises the following steps: preparing a blank plate: the blank is made into a blank plate with a periodic composite structure through rod and tube combination, wire drawing, plate arrangement and melt pressing; ion beam etching: etching the surface of the blank plate by using an ion beam. The invention also provides a micro-lens array prepared by the method. The invention does not use photoresist, avoids the processes of photoetching, hot melting and the like, and the obtained micro-lens array is made of glass material and has better optical performance and physical and chemical stability.
Description
Technical Field
The invention relates to the technical field of micro-lens arrays, in particular to a micro-lens array and a preparation method thereof.
Background
Microlens arrays have become one of the most important optical elements in micro-optical systems due to their advantages of small unit size, high integration, and easy assembly and integration, and have been widely used in optical connections, detector arrays, flat panel displays, biomedical test chips, etc., and have become a research hotspot in the fields of micro-optics and optical manufacturing. At present, commonly used forming processes of a micro-lens array mainly comprise diamond cutting, photoresist hot melting forming, a mould pressing forming method, an ink-jet printing type technology, a liquid drop method, a photoetching ion exchange technology, a gel method and the like, but the diamond cutting method has low efficiency and low processing precision; the lens manufactured by the photoresist hot-melt forming method is an organic material, has poor stability and is not high-temperature resistant; the mould pressing method has higher cost and easy abrasion, and the lens is easy to damage when being demoulded; the ink-jet method is difficult to accurately control the surface shape of the lens, and the surface shape is similar to a spherical surface; the process uniformity of the photoetching ion exchange method is poor. With the rapid increase of the demand of the market for the microlens array, the development of a microlens array molding process with high precision, large batch and low cost becomes a key for further widening the application field of the microlens array and meeting the market demand.
Disclosure of Invention
The invention mainly aims to provide a micro-lens array and a preparation method thereof, which are prepared by directly adopting ion beam etching by means of the structural design of materials; firstly, selecting a proper glass rod tube, obtaining a blank through the working procedures of monofilament drawing, multifilament arranging, multifilament drawing, plate arranging, melt pressing and cold machining, and then preparing the blank into a micro-lens array through a plasma etching process.
The purpose of the invention and the technical problem to be solved are realized by adopting the following technical scheme. The invention provides a preparation method of a micro-lens array, which comprises the following steps:
1) preparing a blank plate:
preparing a blank plate with a periodic composite structure through rod and tube combination, wire drawing, plate arrangement and melt pressing;
2) ion beam etching:
etching the surface of the blank plate by using an ion beam.
Further, in step 1), the blank plate for preparing the periodic composite structure specifically comprises:
combining the sheath glass tube and the core glass rod into a prefabricated rod, and drawing the prefabricated rod into round, square column or hexagonal column monofilaments by using a drawing furnace; closely stacking and arranging the round, square column or hexagonal column-shaped monofilaments into a square column-shaped or hexagonal column-shaped multifilament rod, and drawing the square column-shaped or hexagonal column-shaped multifilament rod into square column-shaped or hexagonal column-shaped multifilaments through a drawing furnace; tightly packing and arranging the square column-shaped or hexagonal column-shaped multifilaments into a square column-shaped or hexagonal column-shaped blank rod; the blank rod is placed into a hot pressing furnace, and the temperature and the pressure are increased, so that the multifilaments are bonded together to form a blank plate. It should be noted here that since round multifilament bars are unstable, round monofilaments are generally arranged in hexagonal multifilament bars.
Further, in step 1), the preparing the blank plate specifically comprises:
combining a sheath glass tube and a core glass rod into a prefabricated rod, drawing the prefabricated rod into a hexagonal cylindrical monofilament with the outer diameter of 0.2-1 mm and the length of 200-1500 mm by using a drawing furnace, wherein the temperature of the drawing furnace is 500-1800 ℃; tightly stacking and arranging 0.2-1 mm square hexagonal column-shaped monofilaments into a square hexagonal column-shaped multifilament rod with the opposite side dimension of 10-60 mm and the length of 200-1500 mm, drawing the square hexagonal column-shaped multifilament rod into a pair of 0.1-1 mm square hexagonal column-shaped multifilaments through a drawing furnace, wherein the temperature of the drawing furnace is 500-1800 ℃; tightly stacking and arranging the regular hexagonal prism multifilaments into regular hexagonal prism blank rods with the side size of 20-100 mm and the length of 20-500 mm; putting the regular hexagonal prism-shaped blank rod into a hot pressing furnace, heating to 300-900 ℃, and pressurizing to 0.1-30 Mpa to bond the regular hexagonal prism-shaped multifilaments together to form a blank plate.
Further, in step 1), the preparing the blank plate specifically comprises:
combining a sheath glass tube and a core glass rod into a prefabricated rod, and drawing the prefabricated rod into a square column-shaped monofilament with the opposite side of 0.2-1 mm and the length of 200-1500 mm by using a drawing furnace, wherein the temperature of the drawing furnace is 500-1800 ℃; tightly stacking and arranging the square column-shaped monofilaments into square column-shaped multifilament rods with the opposite side dimension of 10-60 mm and the length of 200-1500 mm, drawing the square column-shaped multifilament rods into square column-shaped multifilaments with the opposite sides of 0.5mm through a drawing furnace, and controlling the temperature of the drawing furnace to be 500-1800 ℃; tightly stacking and arranging the square column-shaped multifilaments into square column-shaped blank rods with the side size of 20-100 mm and the length of 20-500 mm; putting the square column-shaped blank rod into a hot pressing furnace, heating to 300-900 ℃, and pressurizing to 0.1-30 Mpa to bond the square column-shaped multifilaments together to form a blank plate.
Further, in step 2), the ion beam etching specifically includes:
and etching the blank plate by using an ion beam etching technology, wherein the ion beam energy is 200-5000 ev, the etching angle is 10-80 degrees, the sample rotation speed is 10-200 r/min, and the etching speed of the blank skin material is 0.2-5 times of the etching speed of the blank core material, so as to prepare the micro-lens array.
Further, in step 2), the gas source for ion beam etching includes, but is not limited to, one of argon, helium, nitrogen, oxygen, or hydrogen, which is not listed here, and generally, argon is selected as the gas source more frequently, because argon is used as the gas source for etching better.
Further, after the step 1), before the step 2), a step of processing the blank plate into a finished size through a cold working process is further included.
Further, after the step 1), before the step 2), the step of processing the blank plate into a finished size through a wire cutting, grinding and polishing process is further included.
Further, the method also comprises the step of preparing the core material rod and the leather material pipe before the step 1).
In addition, the invention also provides a micro lens array, and the aperture of the micro lens array is 1-100 mu m.
Further, the microlens array is manufactured by the method.
The invention has the following beneficial effects:
1) the method is based on the difference of the etching rate of the core skin in the blank with the composite structure, and the micro-lens array is obtained by directly etching through ion beams; the preparation method has reasonable theoretical basis and feasible operation process, and provides a new idea for the preparation of the micro-lens array.
2) The process can be applied to various composite structure glass substrates, and when the etching speed of the core material is greater than that of the cladding material, the concave lens array can be prepared; when the etching speed of the cladding is higher than that of the core, the convex lens array can be prepared; in addition, the core material can be designed into a circle, a square and a hexagon so as to respectively prepare a circle, a square and a hexagon microlens array.
3) The invention does not use photoresist, avoids the processes of photoetching, hot melting and the like, can obtain the glass microlens array, and has better optical performance (such as transmittance) and physical and chemical stability (such as high temperature resistance).
Drawings
FIG. 1 is a flow chart illustrating the preparation of a microlens according to an embodiment of the present invention.
FIG. 2 is a schematic diagram of a plasma etching process for a microlens according to an embodiment of the present invention.
Detailed Description
To further illustrate the technical means and effects of the present invention adopted to achieve the predetermined objects, the following detailed description will be made on the electrolyte for solid-state all-inorganic electrochromic device and the preparation method thereof, the specific implementation, the features and the effects thereof according to the present invention with reference to the accompanying drawings and the preferred embodiments. In the following description, different "one embodiment" or "an embodiment" refers to not necessarily the same embodiment. Furthermore, the particular features or characteristics of one or more embodiments may be combined in any suitable manner.
The invention provides a preparation method of a micro-lens array, which comprises the steps of preparing a periodic composite structure blank by rod-tube combination, wire drawing, plate arrangement, melt pressing and cold processing, wherein the ion etching speed of a cladding is higher than that of a core material, then directly carrying out ion beam etching, and obtaining the micro-lens array through the etching speed difference of the core cladding. According to the scheme, photoresist is not used, processes such as photoetching and hot melting are avoided, and the obtained micro-lens array is made of glass and has better optical performance and physical and chemical stability.
Example 1:
as shown in fig. 1, this embodiment provides a method for manufacturing a microlens array, which includes the following steps:
(1) silicate glass is selected to prepare a cylindrical core material rod (a core glass rod hereinafter), the outer diameter is 29mm, and the length is 500 mm; a cylindrical leather material pipe (hereinafter, a leather glass pipe) is prepared from borate glass, and has the outer diameter of 36mm, the wall thickness of 3mm and the length of 600 mm.
(2) Combining a sheath glass tube and a core glass rod into a prefabricated rod, and drawing the prefabricated rod into a cylindrical monofilament with the outer diameter of 0.6mm and the length of 600mm by using a drawing furnace, wherein the temperature of the drawing furnace is 800 ℃; tightly stacking and arranging 0.6mm cylindrical monofilaments into a hexagonal cylindrical multifilament rod with the opposite side dimension of 30mm and the length of 600mm, drawing the hexagonal cylindrical multifilament rod into a hexagonal cylindrical multifilament with the opposite side dimension of 0.5mm by a drawing furnace, wherein the temperature of the drawing furnace is 900 ℃; closely stacking and arranging the multifilaments into hexagonal cylindrical blank rods with the opposite side dimension of 25mm and the length of 60 mm; and (3) putting the blank bar into a hot pressing furnace, heating to 900 ℃, and pressurizing to 10Mpa to bond the multifilaments together to form a blank plate.
(3) Processing the blank plate into a finished product size through a cold processing technology, wherein the cold processing technology specifically comprises the following steps: firstly, rolling a blank into a circle to obtain a cylinder with the diameter of 15 mm; then, performing linear cutting on the cylinder to obtain a wafer with the thickness of 1 mm; and finally, grinding and polishing the wafer, wherein the thickness of the polished wafer is 0.8 mm.
(4) And etching the blank plate with the finished product size (the diameter is 15mm, the thickness is 0.8mm) by using an ion etching technology, wherein the gas source is argon, the ion beam energy is 1000ev, the etching angle is 70 degrees, and the sample rotation speed is 60 r/min.
(5) The circular micro-lens array with the aperture of 10 mu m and the sphere diameter of the sub-lens of 40 mu m is prepared by the process. As shown in fig. 2, when the cladding etching rate is greater than the cladding etching rate, a circular convex lens array having an aperture of 10 μm can be formed.
Example 2:
as shown in fig. 1, this embodiment provides a method for manufacturing a microlens array, which includes the following steps:
(1) silicate glass is selected to prepare a square cylindrical core rod, the opposite side is 29mm, and the length is 500 mm; borate glass is selected to prepare a square cylindrical leather material pipe, the opposite side is 36mm, the wall thickness is 3mm, and the length is 600 mm.
(2) Combining a sheath glass tube and a core glass rod into a prefabricated rod, and drawing the prefabricated rod into square column-shaped monofilaments with opposite sides of 0.6mm and length of 600mm by using a drawing furnace, wherein the temperature of the drawing furnace is 800 ℃; tightly stacking and arranging the monofilaments into square column-shaped multifilament rods with the opposite side size of 30mm and the length of 600mm, drawing the multifilament rods into square column-shaped multifilaments with the opposite side size of 0.5mm by a drawing furnace, wherein the temperature of the drawing furnace is 900 ℃; closely stacking and arranging the multifilaments into square column-shaped blank rods with the opposite side dimension of 25mm and the length of 60 mm; and (3) putting the blank bar into a hot pressing furnace, heating to 500 ℃, and pressurizing to 30Mpa to bond the multifilaments together to form a blank plate.
(3) The blank plate is processed into a finished product with the size of 15mm at the opposite side and the thickness of 0.8mm by the processes of linear cutting, grinding and polishing.
(4) And etching the blank plate with the finished product size by using an ion etching technology, wherein the gas source is argon, the ion beam energy is 1000ev, the etching angle is 70 degrees, and the sample rotation speed is 60 r/min.
(5) The square micro-lens array with the aperture of 10 mu m and the sphere diameter of the sub-lens of 30 mu m is prepared by the process. As shown in fig. 2, when the cladding etching rate is greater than the cladding etching rate, a square convex lens array having an aperture of 10 μm can be formed.
Example 3:
as shown in fig. 1, this embodiment provides a method for manufacturing a microlens array, which includes the following steps:
(1) silicate glass is selected to prepare a hexagonal cylindrical core rod, the opposite side is 29mm, and the length is 500 mm; borate glass is selected to prepare a hexagonal cylindrical leather material pipe, the opposite side is 36mm, the wall thickness is 3mm, and the length is 600 mm.
(2) Combining a sheath glass tube and a core glass rod into a prefabricated rod, and drawing the prefabricated rod into a hexagonal columnar monofilament with the opposite side of 0.6mm and the length of 600mm by using a drawing furnace, wherein the temperature of the drawing furnace is 800 ℃; tightly stacking and arranging the 0.6mm square column-shaped monofilaments into a square column-shaped multifilament rod with the opposite side size of 30mm and the length of 600mm, drawing the square column-shaped multifilament rod into a pair of 0.5mm square column-shaped multifilaments through a drawing furnace, wherein the temperature of the drawing furnace is 900 ℃; tightly stacking and arranging the regular hexagonal prism-shaped multifilaments into a regular hexagonal prism-shaped blank rod with the opposite side dimension of 25mm and the length of 60 mm; putting the hexagonal prism-shaped blank bar into a hot pressing furnace, heating to 300 ℃, and pressurizing to 30Mpa to bond the hexagonal prism-shaped multifilaments together to form a blank plate.
(3) And (3) processing the blank plate into a finished product with the size of 15mm at the opposite side and the thickness of 0.8mm through linear cutting, grinding and polishing.
(4) And etching the blank plate with the finished product size by using an ion etching technology, wherein the gas source is argon, the ion beam energy is 1000ev, the etching angle is 70 degrees, and the sample rotation speed is 60 r/min.
(5) The hexagonal micro-lens array with the aperture of 10 mu m and the sphere diameter of the sub-lens of 35 mu m is prepared by the process. As shown in fig. 2, when the cladding etching rate is greater than the cladding etching rate, a hexagonal convex lens array having an aperture of 10 μm can be formed.
Example 4:
as shown in fig. 1, this embodiment provides a method for manufacturing a microlens array, which includes the following steps:
(1) silicate glass is selected to prepare a core material rod, the outer diameter is 27mm, and the length is 500 mm; a skin material pipe is prepared from borate glass, and has the outer diameter of 32mm, the wall thickness of 2mm and the length of 600 mm.
(2) Combining a sheath glass tube and a core glass rod into a prefabricated rod, and drawing the prefabricated rod into a cylindrical monofilament with the outer diameter of 0.8mm and the length of 600mm by using a drawing furnace, wherein the temperature of the drawing furnace is 800 ℃; tightly stacking and arranging the cylindrical monofilaments into a hexagonal cylindrical multifilament rod with 40mm side size and 600mm length, drawing the hexagonal cylindrical multifilament rod into a hexagonal cylindrical multifilament with 1mm side through a drawing furnace, wherein the temperature of the drawing furnace is 900 ℃; tightly stacking and arranging the regular hexagonal prism-shaped multifilaments into a regular hexagonal prism-shaped blank rod with the opposite side dimension of 25mm and the length of 60 mm; putting the hexagonal prism-shaped blank bar into a hot pressing furnace, heating to 600 ℃, and pressurizing to 10Mpa to bond the hexagonal prism-shaped multifilaments together to form a blank plate.
(3) And (3) processing the blank plate into a finished product with the size of 15mm at the opposite side and the thickness of 0.8mm by the processes of rounding, linear cutting, grinding and polishing.
(4) And etching the blank plate with the finished product size by using an ion etching technology, wherein the gas source is argon, the ion beam energy is 1200ev, the etching angle is 70 degrees, and the sample rotation speed is 40 r/min.
(5) The circular micro-lens array with the aperture of 20 mu m and the sphere diameter of the sub-lens of 80 mu m is prepared by the process. As shown in fig. 2, when the cladding etching rate is greater than the cladding etching rate, a circular convex lens array having an aperture of 10 μm can be formed.
The microlens arrays described in examples 1-4 above have a surface roughness of less than 10nm and an array uniformity of less than 0.1 μm (the focal length is determined by the radius of curvature of the lens, and is designed according to the application requirements).
Specific uses of the microlens arrays of the above examples 1-4 are as follows:
(1) the photoelectric sensor device and the microlens arrays described in embodiments 1 to 4 are integrated with each other, so that the collection capability of the photoelectric sensor device for optical signals can be improved, light rays irradiated onto the surface of the photoelectric sensor device are converged into the photosensitive region of the array unit after being refracted by the microlenses, and the utilization rate of the photoelectric sensor device for optical signals is remarkably improved. Especially for high-resolution photosensor devices, the integrated microlens array can ensure the intensity-to-coincidence ratio of photoelectric signals while detecting the size of the array unit.
(2) In panoramic imaging applications, a three-dimensional entity in an object space is imaged by the microlens array described in embodiments 1 to 4, each microlens is equivalent to performing projection transformation on a target from a specific viewpoint and obtaining a corresponding two-dimensional element sub-image on an image plane, and the direction and intensity information of light emitted by the three-dimensional entity can be recorded in an image sensing device by the multi-viewpoint imaging structure; in the reconstruction stage of the three-dimensional image, the integrated image of the two-dimensional element subgraphs is placed on a focal plane of a display micro-lens array which has the same structure and arrangement with the image acquisition micro-lens array, and light rays emitted by each element subgraph are refracted by the corresponding micro-lens to be re-integrated and reconstruct a three-dimensional image.
(3) After the micro-lens array described in the above embodiments 1 to 4 is added to the optical system of the projector, the light can be uniformly and brightly illuminated on the screen by the focusing action of the micro-lens array, the image contour lines are clear, the brightness of the whole screen is consistent, and the imaging quality of the projector is greatly improved (the difference between the brightness at the center of the screen and the brightness at the edge of the screen is reduced by more than 10%).
In addition, compared with the prior art, the invention has the main advantages of glass material, high temperature resistance, 500 ℃, high transmittance which is more than 90 percent.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and any simple modification, equivalent change and modification made to the above embodiment according to the technical spirit of the present invention are still within the scope of the technical solution of the present invention.
Claims (7)
1. A method for preparing a micro-lens array is characterized by comprising the following steps:
1) preparing a blank plate:
combining the sheath glass tube and the core glass rod into a prefabricated rod, and drawing the prefabricated rod into round, square column or hexagonal column monofilaments by using a drawing furnace; closely stacking and arranging the round, square column or hexagonal column-shaped monofilaments into a square column-shaped or hexagonal column-shaped multifilament rod, and drawing the square column-shaped or hexagonal column-shaped multifilament rod into square column-shaped or hexagonal column-shaped multifilaments through a drawing furnace; tightly packing and arranging the square column-shaped or hexagonal column-shaped multifilaments into a square column-shaped or hexagonal column-shaped blank rod; putting the blank bar into a hot pressing furnace, heating and pressurizing to bond the multifilaments together to form a blank plate;
2) ion beam etching:
and etching the blank plate by using an ion beam etching technology, wherein the ion beam energy is 200-5000 ev, the etching angle is 10-80 degrees, the sample rotation speed is 10-200 r/min, and the etching speed of the blank skin material is 0.2-5 times of the etching speed of the blank core material, so as to prepare the micro-lens array.
2. The method according to claim 1, wherein in step 1), the preparation of the blank sheet is in particular:
combining a sheath glass tube and a core glass rod into a prefabricated rod, drawing the prefabricated rod into a hexagonal cylindrical monofilament with the outer diameter of 0.2-1 mm and the length of 200-1500 mm by using a drawing furnace, wherein the temperature of the drawing furnace is 500-1800 ℃; tightly stacking and arranging 0.2-1 mm square hexagonal column-shaped monofilaments into a square hexagonal column-shaped multifilament rod with the opposite side dimension of 10-60 mm and the length of 200-1500 mm, drawing the square hexagonal column-shaped multifilament rod into a pair of 0.1-1 mm square hexagonal column-shaped multifilaments through a drawing furnace, wherein the temperature of the drawing furnace is 500-1800 ℃; tightly stacking and arranging the regular hexagonal prism multifilaments into regular hexagonal prism blank rods with the side size of 20-100 mm and the length of 20-500 mm; putting the regular hexagonal prism-shaped blank rod into a hot pressing furnace, heating to 300-900 ℃, and pressurizing to 0.1-30 Mpa to bond the regular hexagonal prism-shaped multifilaments together to form a blank plate.
3. The method according to claim 1, wherein in step 1), the preparation of the blank sheet is in particular:
combining a sheath glass tube and a core glass rod into a prefabricated rod, and drawing the prefabricated rod into a square column-shaped monofilament with the opposite side of 0.2-1 mm and the length of 200-1500 mm by using a drawing furnace, wherein the temperature of the drawing furnace is 500-1800 ℃; tightly stacking and arranging the square column-shaped monofilaments into square column-shaped multifilament rods with the opposite side dimension of 10-60 mm and the length of 200-1500 mm, drawing the square column-shaped multifilament rods into square column-shaped multifilaments with the opposite sides of 0.5mm through a drawing furnace, and controlling the temperature of the drawing furnace to be 500-1800 ℃; tightly stacking and arranging the square column-shaped multifilaments into square column-shaped blank rods with the side size of 20-100 mm and the length of 20-500 mm; putting the square column-shaped blank rod into a hot pressing furnace, heating to 300-900 ℃, and pressurizing to 0.1-30 Mpa to bond the square column-shaped multifilaments together to form a blank plate.
4. The method of claim 1, wherein in step 2), the ion beam etching gas source comprises one of argon, helium, nitrogen, oxygen, or hydrogen.
5. The method of claim 1, further comprising, after step 1) and before step 2), the step of cold working the blank to a finished size.
6. The method of claim 5, wherein after step 1) and before step 2), the method further comprises the step of subjecting the blank plate to wire cutting, grinding and polishing processes to obtain a final size.
7. The method of claim 1, further comprising the step of preparing a core rod and a sheath tube before step 1).
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| CN111522085A (en) * | 2020-05-12 | 2020-08-11 | 深圳大学 | Method for manufacturing two-dimensional X-ray absorption grating |
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| CN103524031A (en) * | 2013-09-13 | 2014-01-22 | 中国建筑材料科学研究总院 | Preparation method of glass micropipette array |
| CN105242332B (en) * | 2015-11-16 | 2016-09-14 | 中国电子科技集团公司第四十四研究所 | Big array high uniformity microlens array preparation method |
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