CN109142378A - A kind of display material open defect detection device - Google Patents
A kind of display material open defect detection device Download PDFInfo
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- CN109142378A CN109142378A CN201811079673.5A CN201811079673A CN109142378A CN 109142378 A CN109142378 A CN 109142378A CN 201811079673 A CN201811079673 A CN 201811079673A CN 109142378 A CN109142378 A CN 109142378A
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- reflecting mirror
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- camera lens
- spectroscope
- light source
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
Abstract
The application discloses a kind of display material open defect detection device, including line sweeps camera, industrial personal computer, data center, spectroscope, the first reflecting mirror, the second reflecting mirror, third reflecting mirror, dark field and grey field light source；Line sweeps camera, and industrial personal computer and data center are sequentially connected；The lower section that line sweeps camera is equipped with camera lens, and spectroscope and the first reflecting mirror are sequentially arranged in the lower section of camera lens；Second reflecting mirror is used to the light that dark field issues reflexing to spectroscope；Third reflective mirror is used to the light that grey field light source issues reflexing to the first reflective mirror.The application sweeps camera, industrial personal computer and data center in the same camera lens of two detection position time-sharing multiplexes, line, reduces the quantity of the hardware such as camera lens, improves the utilization rate of camera lens, camera, reduces cost.The application reduces the missing inspection of this kind of defect, to reduce omission factor so that the defects of being not easy the display material surface undulation being imaged originally is imaged using grey field imaging pattern.
Description
Technical field
This application involves technical field of optical detection, in particular to a kind of display material open defect detection device.
Background technique
As universal and the update and user's grade of display terminal are constantly promoted, to the appearance matter of display material
More stringent requirements are proposed for amount.In the manufacturing process of display material, it often will appear such as raised, the various defects such as missing,
Influence the flatness or optical quality of display material.Therefore, it is necessary to carry out strict inspection to display material appearance.
The detection of major part display material appearance uses manual detection mode, low efficiency, standard disunity at present.A part is aobvious
Although showing that material maker uses automatic optics inspection (Auto Optical Inspection, AOI) detection mode, by
Lack Depth Study in the optical characteristics to display material open defect, causes detection scheme unreasonable, the defect kind of covering
Not comprehensively, omission factor is high；Or in order to improve defect kind coverage rate, though using multiple station, each station respectively has one
The vision hardwares such as camera lens, camera are covered, the complexity and cost of AOI equipment is improved, reduces reliability.
Summary of the invention
The application's is designed to provide a kind of display material open defect detection device, to solve existing display material inspection
Survey technology omission factor height and problem at high cost.
According to an embodiment of the present application, a kind of display material open defect detection device is provided, comprising: line sweeps camera,
Industrial personal computer, data center, spectroscope, the first reflecting mirror, the second reflecting mirror, third reflecting mirror, dark field and grey field light source；
The line sweeps camera, and the industrial personal computer and the data center are sequentially connected；
The lower section that the line sweeps camera is equipped with camera lens, and the spectroscope and first reflecting mirror are sequentially arranged in the camera lens
Lower section；
Second reflecting mirror is used to the light that the dark field issues reflexing to the spectroscope；
The third reflective mirror is used to the light that the grey field light source issues reflexing to first reflective mirror.
Further, the dark field includes a column light source of Low coherence degree line laser or LED particle composition, and,
Elliptic cylinder.
Further, the grey field light source includes several columns LED particle, and the half intensity angle of divergence of the LED particle is 5-
10°。
Further, described device further includes transport mechanism and objective table, and the transport mechanism is set to first reflection
Mirror, the lower section of second reflecting mirror and the third reflecting mirror, the objective table are set to the top of the transport mechanism.
Further, described device further includes rotating mechanism, and the objective table and the transport mechanism pass through the rotation
Mechanism connection.
Optionally, the transport mechanism includes guide rail or linear motor.
Optionally, the rotating mechanism includes electric rotary table.
Optionally, high speed image acquisition board is equipped in the industrial personal computer.
From the above technical scheme, the embodiment of the present application provides a kind of display material open defect detection device, packet
Include: line sweeps camera, industrial personal computer, data center, spectroscope, the first reflecting mirror, the second reflecting mirror, third reflecting mirror, dark field
With grey field light source；The line sweeps camera, and the industrial personal computer and the data center are sequentially connected；The line is swept and is set below camera
There is camera lens, the spectroscope and first reflecting mirror are sequentially arranged in the lower section of the camera lens；Second reflecting mirror is used for will
The light that the dark field issues reflexes on the spectroscope；What the third reflective mirror was used to issue the grey field light source
Light reflexes on first reflective mirror.The application sweeps camera, industry control in the same camera lens of two detection position time-sharing multiplexes, line
Machine and data center, reduce camera lens, line sweeps the quantity of the hardware such as camera, improve camera lens, line sweeps the utilization rate of camera, reduce
Cost.The defects of device provided by the present application has used dark-field imaging mode, detects scratch, foreign matter, meanwhile, use grey field
Imaging pattern reduces the leakage of this kind of defect so that the defects of being not easy the display material surface undulation being imaged originally is imaged
Inspection, to reduce omission factor.
Detailed description of the invention
In order to illustrate the technical solutions in the embodiments of the present application or in the prior art more clearly, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the application
Example, for those of ordinary skill in the art, without creative efforts, can also obtain according to these attached drawings
Obtain other attached drawings.
Fig. 1 is the schematic diagram according to the display material open defect imaging pattern shown in the embodiment of the present application；
Fig. 2 is the structural schematic diagram according to a kind of display material open defect detection device shown in the embodiment of the present application；
Fig. 3 is to be easy the angular range of imaging according to the strip defect shown in the embodiment of the present application and be not easy the angle being imaged
Spend the schematic diagram of range.
It illustrates:
Wherein, 1- line sweeps camera, 2- industrial personal computer, 3- data center, 4- spectroscope, the first reflecting mirror of 5-, the reflection of 6- second
Mirror, 7- third reflecting mirror, 8- dark field, 9- ash field light source, 10- camera lens, 11- transport mechanism, 12- rotating mechanism, 13- loading
Platform, 14- measured object.
Specific embodiment
Refering to fig. 1, display material open defect imaging pattern is divided into 3 kinds: light field, grey field and dark field.
Under light field imaging pattern, bias light of the light source by issuing, after being detected display material reflection can be filled up completely mirror
The aperture diaphragm of head；Signal light after defect scattering/reflection can also be filled up completely the aperture diaphragm of camera lens, and the two can not divide
From.Under grey field imaging pattern, light source sending, the bias light after being detected display material reflection can be partially filled with the aperture of camera lens
Diaphragm；Signal light after defect scattering/reflection is filled up completely the aperture diaphragm of camera lens, and the two is partially separated.Dark-field imaging mould
Under formula, light source sending, the bias light after being detected display material reflection cannot fill the aperture diaphragm of camera lens；Through defect scattering/
Signal light after reflection is filled up completely the aperture diaphragm of camera lens, and the two is kept completely separate.
Realize that light field, Hui Chang, the method for dark-field imaging mode are varied, simplest method is around camera lens optical axis and quilt
The focal line A rotation light source of inspection object translates light source in the horizontal direction, and Fig. 1 is exactly to pass through rotation light source to realize from light field, Hui Chang
With the transition of dark field.
Theory analysis and experiment (carrying out inside our company, be not found in public material) show: defect imaging contrast is most
High mode is grey field and dark field, and both fields can cover most defects.
Below in conjunction with the attached drawing in the embodiment of the present application, technical solutions in the embodiments of the present application carries out clear, complete
Whole description, it is clear that described embodiments are only a part of embodiments of the present application, instead of all the embodiments.It is based on
Embodiment in the application, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall in the protection scope of this application.
In the description of the present application, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to
Convenient for describe the application simplify description, rather than the device or component of indication or suggestion meaning must have a particular orientation,
It is constructed and operated in a specific orientation, therefore should not be understood as the limitation to the application.In addition, term " first ", " second ",
" third " is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.Wherein, term " the first reflecting mirror " and
" the second reflecting mirror " is two different reflecting mirrors.Moreover, the terms "include", "comprise" or its any other variant are intended to contain
Lid non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those
Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or equipment
Intrinsic element.
It should be noted that unless otherwise clearly defined and limited in the description of the present application, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
The connection of two component internals.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in application.
Referring to Fig.2, the embodiment of the present application provides a kind of display material open defect detection device, comprising: line sweeps camera 1,
Industrial personal computer 2, data center 3, spectroscope 4, the first reflecting mirror 5, the second reflecting mirror 6, third reflecting mirror 7, dark field 8 and Hui Chang
Light source 9；
The line sweeps camera 1, and the industrial personal computer 2 and the data center 3 are sequentially connected；
Line is swept when camera 1 is taken pictures through mechanical movement, is formed relative motion, is obtained desired image.Line sweeps camera 1 right
The smear output of required realization when high-speed moving object is shot needs not move through the shutter outside plus, institute
Camera 1 is swept with very high message transmission rate with line, and the assembly line preferably met in industrial production now surveys object
Amount, the demand of monitoring and detection.Line, which sweeps camera 1, can possess multiple K unit pixels, and high resolution is suitable for high-precision and detects
Measurement application.It is big that line sweeps 1 dynamic range of camera, high sensitivity.
Line is swept camera 1 and can be acquired in real time what measured object 14 was waited when running continuously to picture, will collect
Image, industrial personal computer 2 is transmitted to by image pick-up card, then industrial personal computer 2 handles image.
The lower section that the line sweeps camera 1 is equipped with camera lens 10, and the spectroscope 4 and first reflecting mirror 5 are sequentially arranged in institute
State the lower section of camera lens 10；
Second reflecting mirror 6 is used to the light that the dark field 8 issues reflexing to the spectroscope 4；
The third reflective mirror 7 is used to the light that the grey field light source 9 issues reflexing to first reflective mirror 5.
Second reflecting mirror 6 and the third reflecting mirror 7 may be provided at any direction of 10 surrounding of camera lens.
Optionally, second reflecting mirror 6 and the third reflecting mirror 7 can be respectively arranged on the two sides of the camera lens 10,
Position A is widened at a distance from the B of position, measured object 14 it is more convenient can to detect open defect from position A linear transport to position B.
Optionally, the center of second reflecting mirror 6 is located at sustained height with the center of the spectroscope 4 and mirror surface is parallel
Setting convenient for not omitting the signal light generated by position A reaches line through the second reflecting mirror 6, spectroscope 4, camera lens 10 and sweeps phase
Machine 1 is imaged.The center of the third reflective mirror 7 and the center of first reflective mirror 5 are located at sustained height and mirror surface is parallel sets
It sets.Convenient for the signal light generated by position B is not omitted through through third reflecting mirror 7, the first reflecting mirror 5, spectroscope 4, camera lens
10 arrival lines sweep the imaging of camera 1.
It should be noted that the beginning and closing of dark field 8 and grey field light source 9 are by light-source controller controls.
Display material open defect detection device provided by the present application is divided into two detection stations of position A and position B；Position
A is dark-field imaging mode, inside to the defect imaging being easily imaged under dark fieid conditions, such as scratch, foreign matter, display material
It is dirty the defects of；Position B is grey field imaging pattern, for the defect imaging being easily imaged under grey field condition, such as protrusion
And recess；Position A and the same camera lens of position B time-sharing multiplex, line sweep camera, industrial personal computer and data center.
When measured object moves to position A, dark field is opened, when dark field defect motion will generate signal to the detection position
Light, signal light successively reach line through the second reflecting mirror 6, spectroscope 4, camera lens 10 and sweep the imaging of camera 1；Due to being dark-field imaging mould
Formula, bias light cannot be introduced into camera lens and participate in imaging, therefore image background is very dark, but the signal light that defect generates can enter camera lens
The target surface that line sweeps camera 1 is reached, image grayscale is apparently higher than background, therefore readily recognizes defect.The figure that position A is obtained
As being transmitted to industrial personal computer 2 in real time, defects detection work is completed on industrial personal computer 2, and last testing result is uploaded to data center
3。
Measured object moves to position B later, closes dark field, opens grey field light source.When grey field defect motion to the inspection
Location, which is set, will generate signal light, and signal light successively reaches line and sweep through third reflecting mirror 7, the first reflecting mirror 5, spectroscope 4, camera lens 10
Camera 1 is imaged.Due to being grey field imaging pattern, bias light is partially filled with the aperture diaphragm of camera lens, therefore image background has centainly
Gray scale, the signal that grey field defect generates can enter camera lens 10 and reach the target surface that line sweeps camera 1, and signal light is often in background
Near light, in same magnitude, the result of signal light and background optical superposition makes grey field defect imaging one for intensity and bias light
Part is apparently higher than background, and a part is significantly lower than background, therefore can identify ash discharge field defect.The image that position B is obtained
It is transmitted to industrial personal computer 2 in real time, defects detection work is completed on industrial personal computer 2, and last testing result is uploaded to data center 3.
From the above technical scheme, the embodiment of the present application provides a kind of display material open defect detection device, packet
It includes: including: that line sweeps camera 1, industrial personal computer 2, data center 3, spectroscope 4, the first reflecting mirror 5, the second reflecting mirror 6, third reflection
Mirror 7, dark field 8 and grey field light source 9；The line sweeps camera 1, and the industrial personal computer 2 and the data center 3 are sequentially connected；Institute
State line sweep camera 1 lower section be equipped with camera lens 10, the spectroscope 4 and first reflecting mirror 5 are sequentially arranged in the camera lens 10
Lower section；Second reflecting mirror 6 is used to the light that the dark field 8 issues reflexing to the spectroscope 4；The third is anti-
Light microscopic 7 is used to the light that the grey field light source 9 issues reflexing to first reflective mirror 5.The application is two detection positions
The same camera lens 10 of time-sharing multiplex, line sweep camera 1, industrial personal computer 2 and data center 3, reduce camera lens 10, line sweeps camera 1 etc. firmly
The quantity of part, improves camera lens 10 and line sweeps the utilization rate of camera 1 etc., reduces costs.Device provided by the present application uses
The defects of dark-field imaging mode, detection scratch, foreign matter, meanwhile, grey field imaging pattern is used, so that being not easy to be imaged originally aobvious
Show that the defects of material surface rises and falls is imaged, the missing inspection of this kind of defect is reduced, to reduce omission factor.
Further, the dark field 8 includes a column light source of Low coherence degree line laser or LED particle composition, and,
Elliptic cylinder.Dark field 8 is a column light source of Low coherence degree line laser or LED particle composition, a part through elliptic cylinder
Target sight line is converged to after reflection.The energy density for the light that dark field 8 provided by the present application generates is relatively high, is suitable for height
Fast line is swept；Second is that the angle changing rate of illumination to measured object 14 is abundant, so as to compatible different depth, width, material defect,
Expand defects detection range, reduces omission factor.
Further, the grey field light source 9 includes several columns LED particle, and the half intensity angle of divergence of the LED particle is 5-
10°.Grey field light source 9 is made of several columns LED particle, the vertical paper of each column；Each column include several LED particles, each
Grain the half intensity angle of divergence be less than particular value, generally 5~10 °.Each column LED particle pair in ash field provided by the present application light source 9
The illuminating ray of different angle is answered, is not associated between these light, is conducive to improve illumination uniformity.The half intensity angle of divergence is small
It helps to improve in the LED particle of particular value by the optical energy density on 14 surface of measured object, is suitable for line and sweeps.What the application selected
Grey field light source 9 reduces the leakage of this kind of defect so that the defects of being not easy the display material surface undulation being imaged originally is imaged
Inspection, to reduce omission factor.
Further, described device further includes transport mechanism 11 and objective table 13, and the transport mechanism 11 is set to described the
One reflecting mirror 5, the lower section of second reflecting mirror 6 and the third reflecting mirror 7, the objective table 13 are set to the transport mechanism
11 top.Measured object 14 is set on objective table 13, and transport mechanism 11 is mobile from position A to position B with dynamic object stage 13, thus
So that measured object 14 is first passed through position A, using dark-field imaging mode, the defects of detecting scratch, foreign matter, after by position B, use ash
Field imaging pattern reduces this kind of defect so that the defects of being not easy the display material surface undulation being imaged originally is imaged
Missing inspection, to reduce omission factor.
Further, described device further includes rotating mechanism 12, and the objective table 13 passes through institute with the transport mechanism 11
State the connection of rotating mechanism 12.Measured object is placed on objective table；Objective table is mounted on electric rotary table, and electric rotary table can be with
It is rotated within the scope of 0~180 °；Electric rotary table is mounted in linear guide, can be moved before and after guide rail under the drive of the motor
It is dynamic.For strip defects detection, after the completion of measured object 14 detects defect by position A to position B, after leaving position B, rotation
90 °, position B, position A imaging are again passed by respectively.The design in the path is the direction choosing in order to solve strip defect imaging
Selecting property.The direction selection of so-called strip defect imaging refers to, if the direction of strip defect and the direction of motion (such as Fig. 3
Middle arrow is signified) angle be less than some numerical value, will be unable to be imaged, which is about 30 °, 30 ° < 45 °.Therefore by tested display
Material, which is rotated by 90 °, again passes by position B and position A, and the strip defect that can not be imaged before rotation will be imaged, due to this
Numerical value < 45 °, therefore the detection for rotating front and back can cover all strip defects.
For strip defect, using scheme is imaged twice, second of imaging of measured object is relative to first time imaging rotation
It 90 °, if the angle in direction and the direction of motion of the program based on strip defect is less than some numerical value, will be unable to be imaged,
Numerical value < 45 ° are based on this result of study.This kind of imaging scheme can cover the directive strip defect imaging of institute, theoretical
On do not omit.The application can effectively detect strip defect, expand the type of defects detection, to reduce omission factor.
Optionally, the transport mechanism 11 includes guide rail or linear motor.Guide rail is made of metal or other materials
Slot or ridge can bear, fix, guiding mobile device or equipment and reducing a kind of device of its friction.Guide rail is also known as sliding rail, linear
Guide rail, linear slide rail are used for straight reciprocating motion occasion, possess nominal load more higher than linear bearing, while can undertake
Certain torque can realize high-precision linear motion in high-load situations, this.Linear motor is a kind of that electric energy is direct
It is converted into the electric drive of linear motion mechanical energy.It can save a large amount of intermediate transmission mechanisms, accelerate system reflection speed
Degree improves system accuracies.
Optionally, the rotating mechanism 12 includes electric rotary table.Electric rotary table is specially to directly drive rotation motor
(DD motor), also known as torque motor.Different from traditional motor, the high-torque of the motor allows to directly connect with telecontrol equipment
It connects, so that such as retarder is eliminated, gear-box, the bindiny mechanisms such as belt pulley, therefore can just be called straight driving motor.In addition
The motor is all configured with the encoder of high-res, therefore the motor is made to can achieve the essence of a grade higher than generic servo
Degree.And using mode is directly connected to, reduce the position error generated due to mechanical structure, so that craft precision is protected
Card.And reduce error in terms of generating size due to mechanical structure friction and using when noise etc. reduce very
It is more.
Optionally, high speed image acquisition board is equipped in the industrial personal computer 2.High speed image acquisition board turns for caching with data
It moves, for the data buffer storage of camera to be got off, hard disk is written.Working efficiency can be improved in high speed image acquisition board.
From the above technical scheme, the embodiment of the present application provides a kind of display material open defect detection device, packet
It includes: including: that line sweeps camera 1, industrial personal computer 2, data center 3, spectroscope 4, the first reflecting mirror 5, the second reflecting mirror 6, third reflection
Mirror 7, dark field 8 and grey field light source 9；The line sweeps camera 1, and the industrial personal computer 2 and the data center 3 are sequentially connected；Institute
State line sweep camera 1 lower section be equipped with camera lens 10, the spectroscope 4 and first reflecting mirror 5 are sequentially arranged in the camera lens 10
Lower section；Second reflecting mirror 6 is used to the light that the dark field 8 issues reflexing to the spectroscope 4；The third is anti-
Light microscopic 7 is used to the light that the grey field light source 9 issues reflexing to first reflective mirror 5.The application is two detection positions
The same camera lens 10 of time-sharing multiplex, line sweep camera 1, industrial personal computer 2 and data center 3, reduce camera lens 10, line sweeps camera 1 etc. firmly
The quantity of part, improves camera lens 10 and line sweeps the utilization rate of camera 1 etc., reduces costs.Device provided by the present application uses
The defects of dark-field imaging mode, detection scratch, foreign matter, meanwhile, grey field imaging pattern is used, so that being not easy to be imaged originally aobvious
Show that the defects of material surface rises and falls is imaged, the missing inspection of this kind of defect is reduced, to reduce omission factor.
Those skilled in the art will readily occur to its of the application after considering specification and practicing application disclosed herein
Its embodiment.This application is intended to cover any variations, uses, or adaptations of the application, these modifications, purposes or
Person's adaptive change follows the general principle of the application and including the undocumented common knowledge in the art of the application
Or conventional techniques.The description and examples are only to be considered as illustrative, and the true scope and spirit of the application are by following
Claim is pointed out.
It should be understood that the application is not limited to the precise structure that has been described above and shown in the drawings, and
And various modifications and changes may be made without departing from the scope thereof.Scope of the present application is only limited by the accompanying claims.
Claims (8)
1. a kind of display material open defect detection device characterized by comprising line is swept camera (1), industrial personal computer (2), data
Center (3), spectroscope (4), the first reflecting mirror (5), the second reflecting mirror (6), third reflecting mirror (7), dark field (8) and grey field
Light source (9)；
The line is swept camera (1), and the industrial personal computer (2) and the data center (3) are sequentially connected；
The lower section that the line sweeps camera (1) is equipped with camera lens (10), and the spectroscope (4) and first reflecting mirror (5) are successively set
In the lower section of the camera lens (10)；
Second reflecting mirror (6) is used to the light that the dark field (8) issue reflexing to the spectroscope (4)；
The third reflective mirror (7) is used to the light that the grey field light source (9) issues reflexing to first reflective mirror (5).
2. the apparatus according to claim 1, which is characterized in that the dark field (8) include Low coherence degree line laser or
One column light source of LED particle composition, and, elliptic cylinder.
3. the apparatus according to claim 1, which is characterized in that the ash field light source (9) includes several columns LED particle, institute
The half intensity angle of divergence for stating LED particle is 5-10 °.
4. the apparatus according to claim 1, which is characterized in that it further include transport mechanism (11) and objective table (13), it is described
Transport mechanism (11) be set to first reflecting mirror (5), the lower section of second reflecting mirror (6) and the third reflecting mirror (7),
The objective table (13) is set to the top of the transport mechanism (11).
5. device according to claim 4, which is characterized in that further include rotating mechanism (12), the objective table (13) with
The transport mechanism (11) is connected by the rotating mechanism (12).
6. device according to claim 4, which is characterized in that the transport mechanism (11) includes guide rail or linear motor.
7. device according to claim 5, which is characterized in that the rotating mechanism (12) includes electric rotary table.
8. the apparatus according to claim 1, which is characterized in that be equipped with high speed image acquisition board in the industrial personal computer (2).
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| CN201811079673.5A CN109142378A (en) | 2018-09-17 | 2018-09-17 | A kind of display material open defect detection device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111430259A (en) * | 2020-04-08 | 2020-07-17 | 江苏匠岭半导体有限公司 | Silicon wafer detection device used after development in semiconductor process |
| CN111707670A (en) * | 2020-06-28 | 2020-09-25 | 武汉精立电子技术有限公司 | Defect detection method and device based on rotary carrying platform |
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