Parallelism detecting device and detection method
Technical field
The present invention relates to lens parallelism detecting device and detection method, specifically, is pick-up unit and the detection method of utilizing optical system to be detected the depth of parallelism of tested planar lens upper and lower surface.
Background technology
For planar lens, the depth of parallelism on the surface of lens both sides is crucial indexs.If the parallel misalignment of both side surface is larger, through the BEAM SQUINT optical axis of lens.The general three-dimensional method that adopts is detected at present, measures reading out data more painstaking at every turn, and consuming time long, efficiency is low, and precision is not high.At present also not simply, effective pick-up unit and detection method.
Summary of the invention
The purpose of this invention is to provide a kind of simple in structure, parallelism detecting device that can detect fast and efficiently the tested planar lens both side surface depth of parallelism.
This parallelism detecting device, comprise parallel light source, zoom camera lens, catoptron, enlarging objective, imageing sensor, image display; Parallel light source, zoom camera lens are positioned on same optical axis; Catoptron with the inclined light shaft certain angle is arranged between light source and zoom camera lens; The reflectance coating of catoptron, on the surface relative with the zoom camera lens, and has cross recess on reflectance coating; Be provided with the enlarging objective that is positioned at zoom camera lens one side and be useful on the direction vertical with reflectance coating and record the imageing sensor that enlarging objective amplifies rear image information, the output map interlinking of imageing sensor is as display;
The light beam that parallel light source sends incides on measured lens with directional light after seeing through the cross recess, zoom camera lens of catoptron, and the light beam of measured lens upper and lower surface reflection forms two cross pictures and shows on image display through enlarging objective again through the reflectance coating reflection.
Above-mentioned parallelism detecting device, on the light path between enlarging objective and imageing sensor, be provided with from enlarging objective light reflection out to the plane mirror of imageing sensor.Preferably, described enlarging objective and plane mirror are arranged in same lens barrel, between this lens barrel and the agent set that is comprised of parallel light source, catoptron, zoom camera lens, imageing sensor, form and removably connect.Best, described lens barrel has a plurality of, and each lens barrel physical dimension is identical, but the enlargement ratio difference of the enlarging objective in each lens barrel; Agent set all can be connected with arbitrary lens barrel.Can change as required different lens barrels like this, use the enlarging objective of different multiplying.
Above-mentioned parallelism detecting device, the zoom camera lens comprises index glass group and quiet mirror group, the index glass group can move along optical axis with respect to quiet mirror group.The zoom camera lens belongs to prior art, by the movement of index glass group, and can be so that form converging light, diverging light or directional light by the zoom camera lens.This device is to utilize the directional light that forms by the zoom camera lens to be detected the both side surface depth of parallelism of planar lens.
For convenient fixedly measured lens, above-mentioned parallelism detecting device, it also comprises for placing the measured lens bearing of measured lens.Preferably, the measured lens bearing comprise the back up pad that supports the measured lens lower surface, for drive back up pad in the plane perpendicular to optical axis mobile level(l)ing device, for driving the perpendicularity regulating device of back up pad around a pivot swinging; Described pivot and back up pad are coplanar.By level(l)ing device, can drive the below that back up pad (and measured lens) is moved horizontally to optical axis.By perpendicularity regulating device, can drive back up pad (and measured lens) and pivot, regulate the verticality of back up pad (and measured lens) and optical axis.Measured lens bearing with level(l)ing device and perpendicularity regulating device all belongs to prior art, repeats no more.
The present invention provides a kind of Parallel testing method that can detect fast and efficiently the measured lens both side surface depth of parallelism simultaneously.
This Parallel testing method, used above-mentioned parallelism detecting device to be detected, and with the ultimate range of two cross pictures showing, determines the depth of parallelism of the upper and lower surface of measured lens.
Above-mentioned Parallel testing method, change light path angle of divergence size by regulating zoom camera lens index glass group, makes light beam perpendicular to the measured lens surface.
Beneficial effect of the present invention: during detection, first tested planar lens is placed on bearing, then opens light source switch, the directional light that parallel light source sends illuminates catoptron.Because on the surface relative with the zoom camera lens at catoptron, reflectance coating being arranged, have cross recess on reflectance coating; So only having the cross recess of catoptron is partly transmission region.See through the cross recessed light beam by the zoom camera lens.Regulate the zoom camera lens by adjusting, make from the zoom camera lens directional light out beat on measured lens.The light beam upper and lower surface of measured lens respectively reflexes to two cross reflection images of catoptron formation, forms two cross pictures through enlarging objective again through the reflectance coating reflection, and shows on image display.If the upper and lower surface of measured lens is parallel, two cross reflection images overlap fully, and certain two cross pictures also overlap fully.If the upper and lower surface of measured lens is uneven, two cross reflection images will be separated, and certain two cross pictures also separate.And the nonparallelism of upper and lower surface is larger, the degree that two cross reflection images (or two cross pictures) are separated is larger, and the distance between two cross reflection images (or two cross pictures) is larger.This device is to react the depth of parallelism of planar lens upper and lower surface by the distance between test cross reflection image (or two cross pictures).
Generally, because the parallelism error of the both side surface of planar lens is very little, between two cross reflection images that form in catoptron and two cross reflection images, distance is all very little, if does not amplify by enlarging objective, is difficult to resolution.Therefore, after reflecting by reflectance coating, again after the amplification of enlarging objective, formed enlarged image, be convenient to observe.
Therefore, this parallelism detecting device is simple in structure, and measuring accuracy is high, and this detection method is easy to operate, can detect fast and efficiently the depth of parallelism of measured lens both side surface.
The accompanying drawing explanation
Fig. 1 is the schematic diagram of parallelism detecting device.
Fig. 2 is the enlarged diagrams such as catoptron in Fig. 1, reflectance coating.
Fig. 3 is the enlarged diagram of catoptron, reflectance coating etc.
Fig. 4 is the schematic diagram of another one lens barrel etc.
Fig. 5 is the schematic diagram of crank slot cylinder 44.
Fig. 6 is the schematic diagram of straight trough cylinder 43.
Fig. 7 is the schematic diagram of continuous zoom lens at another kind of state.
Fig. 8 is that display shows schematic diagram.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described.
Referring to the parallelism detecting device of Fig. 1, there is the parallel light source 2 that the LED lamp 21 that sends white light, condenser 22 etc. form on support 1 top, there is continuous zoom lens 4 in the bottom of support 1.
Referring to Fig. 1,7, continuous zoom lens comprises screw 40, be arranged on index glass group 41, quiet mirror group 42 in index glass group cover 48, have the straight trough cylinder 43 of three straight troughs 47, the crank slot cylinder 44 with three helicla flutes 49, three guide pillars 45, pivoted housing 46 etc.Straight trough cylinder 43 upper ends are threaded connection and are fixed on support 1.The periphery of straight trough cylinder 43 is crank slot cylinders 44, and the periphery of crank slot cylinder 44 is pivoted housings 46.The interior index glass group cover 48 that arranges of straight trough cylinder 43.Index glass group cover 48, straight trough cylinder 43, crank slot cylinder 44, pivoted housing 46 are all coaxial.Crank slot cylinder 44 is fixedly connected with by screw 40 with pivoted housing.Crank slot cylinder 44(and pivoted housing 46) can with respect to straight trough cylinder 43, rotate around axis, index glass group cover 48 can slide with respect to straight trough cylinder 43 along axis.Guide pillar 45 along the radially extension of index glass group cover 48.Each guide pillar 45 is fixedly connected with index glass group cover 48 through a helicla flute 49, a straight trough 47, and guide pillar 45 can slide along helicla flute 49, can slide along straight trough 47 simultaneously.When rotating pivoted housing 46(and crank slot cylinder 44) time, guide pillar 45 moves up and down (guide pillar 45 is simultaneously in the interior slip of helicla flute 49) along straight trough 47 on the direction paralleled to the axis, and under the drive of guide pillar 45, index glass group cover 48 moves up and down along axis.Thereby change index glass group 41 relative distances with respect to quiet mirror group 42.In Fig. 1, index glass group 41 is distant with respect to quiet mirror group 42; And, in Fig. 7, index glass group 41 is with respect to the close together of quiet mirror group 42.
LED lamp 21, condenser 22, index glass group 41, quiet mirror group 42 are positioned on same optical axis, and the index glass group moves up and down along optical axis, can change the air layer between index glass group and quiet mirror group, thus can change light from continuous zoom lens the emission angle out the time.
Referring to Fig. 2,3, catoptron and inclined light shaft certain angle.Be coated with reflectance coating 32 at catoptron on the surface relative with continuous zoom lens, have cross recess 33 on reflectance coating.
Have on the direction vertical with reflectance coating with support and can plug the lens barrel 5 be connected, enlarging objective 51 and plane mirror 52 are arranged in lens barrel.Lens barrel 5 has a plurality of, and the another one lens barrel is referring to Fig. 4, and each lens barrel is measure-alike, but the enlargement ratio of the enlarging objective 51 in each lens barrel different (as 3 times, 5 times, 10 times); Support all can plug and be connected with arbitrary lens barrel.Ccd imageing sensor (or cmos imageing sensor) 6 and lens barrel 5 lay respectively at the both sides of continuous zoom lens.Plane mirror 52 from enlarging objective light reflection out to imageing sensor.The output map interlinking of imageing sensor is as display.
Referring to Fig. 1,7, a bearing 8 is arranged in the bottom of continuous zoom lens 4, bearing comprises pedestal, is arranged on pedestal and can be arranged on the back up pad on pivot with respect to the slide plate of pedestal horizontal slip, pivot, the rotation be fixed on slide plate; Pivot is coaxial in back up pad.Measured lens 7 is placed on back up pad.By moving slide board, pivot back up pad, regulate measured lens on back up pad and the relative position (coarse adjustment) of zoom camera lens, make measured lens be positioned on optical axis, and substantially vertical with optical axis.
The directional light that parallel light source sends is got to catoptron, illuminates with the cross recessed catoptron.See through the cross recessed light beam and form directional light 80 by continuous zoom lens, beat on tested planar lens 7.Is formed again cross reflection image 91 ' (can be understood as one of the object space of enlarging objective the cross reflection is moving look like 91 ') through the zoom camera lens by the light 81 of measured lens lower surface 71 reflection in catoptron.Is formed again cross reflection image 92 ' (can be understood as one of the object space of enlarging objective the cross reflection is moving look like 92 ') through the zoom camera lens by the light 82 of measured lens upper surface 72 reflection in catoptron.Cross reflection image 91 ', 92 ' again after enlarging objective amplifies, the cross picture after being reflexed to imageing sensor by plane mirror and demonstrate amplification in display (the moving picture of cross) 91,92.By regulating the zoom camera lens, can see three cross pictures in display, wherein two be aforesaid cross picture (the moving picture of cross) 91,92; Another one is the cross picture (cross still image) 93 of the amplification that directly again plane mirror to imageing sensor formed after enlarging objective of the cross recess (can be understood as one of the object space cross recess 93 ' of enlarging objective) of printing opacity.When mobile measured lens, cross reflection image 91 ', 92 ', cross can change (so also can claim that they are the moving picture 91 ', 92 ' of cross reflection, the moving picture 91,92 of cross) as 91,92 position, and cross is motionless (so also can be referred to as cross still image 93) as 93, with this, can distinguish the moving picture of cross and cross still image.In Fig. 1,2, clear in order to mean, the object space of enlarging objective is that the moving picture 91 ', 92 ' of cross reflection and cross recess 93 ' all replace with single line, and in fact they are all cruciforms.
The demonstration of display, referring to Fig. 8, can see that it is the moving picture 91 of cross, the moving picture 92 of cross, cross still image 93 that three crosses look like.In display, also show with reference to grid.According to the ultimate range between the moving picture of two crosses, determine the depth of parallelism of the upper and lower surface of measured lens.In Fig. 6, cross moving as 91, cross is moving as the distance between 92, is about 2 grids.