CN103453854B - Parallelism detecting device and detection method - Google Patents
Parallelism detecting device and detection method Download PDFInfo
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- CN103453854B CN103453854B CN201310411983.3A CN201310411983A CN103453854B CN 103453854 B CN103453854 B CN 103453854B CN 201310411983 A CN201310411983 A CN 201310411983A CN 103453854 B CN103453854 B CN 103453854B
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Abstract
The invention provides a kind of structure is simple, can detect the tested planar lens both side surface depth of parallelism fast and efficiently parallelism detecting device and detection method.This parallelism detecting device, parallel light source, zoom camera lens are positioned on same optical axis; The catoptron with inclined light shaft certain angle is had between light source and zoom camera lens; There is cross recessed reflectance coating in the mirror surface relative with zoom camera lens; The direction vertical with reflectance coating is provided with enlarging objective and imageing sensor, and the output of imageing sensor connects image display; The light beam that parallel light source sends is through inciding on measured lens with directional light after the cross recess of catoptron, zoom camera lens, and the light beam of measured lens upper and lower surface reflection forms two cross pictures through enlarging objective again through reflecting film reflects and shows on image display.Parallel testing method, is the ultimate range of two the cross pictures shown, determines the depth of parallelism of the upper and lower surface of measured lens.
Description
Technical field
The present invention relates to lens parallelism detecting device and detection method, specifically, is the pick-up unit and detection method that utilize the depth of parallelism of optical system to tested planar lens upper and lower surface to detect.
Background technology
For planar lens, the depth of parallelism on the surface of lens both sides is crucial indexs.If the parallel misalignment of both side surface is comparatively large, through the BEAM SQUINT optical axis of lens.The general three-dimensional method that adopts detects at present, and it is relatively more painstaking that data are read in each measurement, and consuming time long, efficiency is low, and precision is not high.At present also not simply, effective pick-up unit and detection method.
Summary of the invention
The object of this invention is to provide the parallelism detecting device that a kind of structure is simple, can detect the tested planar lens both side surface depth of parallelism fast and efficiently.
This parallelism detecting device, comprises parallel light source, zoom camera lens, catoptron, enlarging objective, imageing sensor, image display; Parallel light source, zoom camera lens are positioned on same optical axis; The catoptron with inclined light shaft certain angle is had between light source and zoom camera lens; The reflectance coating of catoptron on the surface relative with zoom camera lens, and reflectance coating has cross recess; The direction vertical with reflectance coating is provided with the enlarging objective being positioned at zoom camera lens side, and amplify the imageing sensor of rear image information at zoom camera lens opposite side for recording enlarging objective, the output of imageing sensor connects image display; Light path between enlarging objective and imageing sensor is provided with from enlarging objective light reflection out to the plane mirror of imageing sensor; Zoom camera lens comprises index glass group and quiet mirror group, and index glass group can move along optical axis relative to quiet mirror group;
The light beam that parallel light source sends is through inciding on measured lens with directional light after the cross recess of catoptron, zoom camera lens, the light beam of measured lens upper and lower surface reflection forms two cross pictures through enlarging objective again through reflecting film reflects, reflex to after imageing sensor through plane mirror again, image display shows.
Above-mentioned parallelism detecting device, described enlarging objective and plane mirror are arranged in same lens barrel, formed and removably connect between this lens barrel and the agent set be made up of parallel light source, catoptron, zoom camera lens, imageing sensor.Best, described lens barrel has multiple, and each lens barrel physical dimension is identical, but the enlargement ratio of enlarging objective in each lens barrel is different; Agent set all can be connected with arbitrary lens barrel.Different lens barrels can be changed as required like this, use the enlarging objective of different multiplying.
Zoom camera lens belongs to prior art, by the movement of index glass group, can make to form converging light, diverging light or directional light by zoom camera lens.Namely this device is utilize the both side surface depth of parallelism of directional light to planar lens formed by zoom camera lens to detect.
Conveniently fix measured lens, above-mentioned parallelism detecting device, it also comprises the measured lens bearing for placing measured lens.Preferably, measured lens bearing comprise support measured lens lower surface back up pad, for driving back up pad at the level(l)ing device perpendicular to movement in the plane of optical axis, for driving back up pad around the perpendicularity regulating device of a pivot swinging; Described pivot and back up pad coplanar.By level(l)ing device, back up pad (and measured lens) can be driven to be moved horizontally to the below of optical axis.By perpendicularity regulating device, back up pad (and measured lens) can be driven to pivot, regulate the verticality of back up pad (and measured lens) and optical axis.The measured lens bearing with level(l)ing device and perpendicularity regulating device all belongs to prior art, repeats no more.
Invention also provides a kind of Parallel testing method that can detect the measured lens both side surface depth of parallelism fast and efficiently.
This Parallel testing method, uses above-mentioned parallelism detecting device to detect, and with the ultimate range of show two cross pictures, determines the depth of parallelism of the upper and lower surface of measured lens.
Above-mentioned Parallel testing method, by regulating zoom camera lens index glass group to change light path angle of divergence size, makes beam orthogonal in measured lens surface.
Beneficial effect of the present invention: during detection, first tested planar lens is placed on bearing, then open light source switch, the directional light that parallel light source sends illuminates catoptron.Because having reflectance coating on the surface that catoptron is relative with zoom camera lens, reflectance coating has cross recess; So only have the cross slotted portion of catoptron to be transmission region.Through cross recessed light beam by zoom camera lens.By regulating zoom camera lens, make to beat on measured lens from zoom camera lens directional light out.The light beam respectively upper and lower surface of measured lens reflexes to catoptron and forms two cross reflection images, forms two cross pictures again, and show on image display through reflecting film reflects through enlarging objective.If the upper and lower surface of measured lens is parallel, two cross reflection images overlap completely, and certain two cross pictures also overlap completely.If the upper and lower surface of measured lens is uneven, two cross reflection images will be separated, and certain two cross pictures are also be separated.And the nonparallelism of upper and lower surface is larger, the degree that two cross reflection images (or two cross pictures) are separated is larger, and the distance namely between two cross reflection images (or two cross pictures) is larger.Namely this device is the depth of parallelism being carried out Reaction plane lens upper and lower surface by the distance of testing between cross reflection image (or two cross pictures).
Generally, because the parallelism error of the both side surface of planar lens is very little, two the cross reflection images formed in catoptron and the spacing of two cross reflection images all very little, if do not amplified by enlarging objective, be difficult to differentiate.Therefore, by after reflecting film reflects again after the amplification of enlarging objective, define enlarged image, be convenient to observe.
Therefore, this parallelism detecting device structure is simple, and measuring accuracy is high, and this detection method is easy to operate, can detect the depth of parallelism of measured lens both side surface fast and efficiently.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of parallelism detecting device.
Fig. 2 is the enlarged diagram such as catoptron, reflectance coating in Fig. 1.
Fig. 3 is the enlarged diagram of catoptron, reflectance coating etc.
Fig. 4 is the schematic diagram of another one lens barrel etc.
Fig. 5 is the schematic diagram of crank slot cylinder 44.
Fig. 6 is the schematic diagram of straight trough cylinder 43.
Fig. 7 is the schematic diagram of continuous zoom lens in another kind of state.
Fig. 8 is display display schematic diagram.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described.
See the parallelism detecting device of Fig. 1, there is on support 1 top the parallel light source 2 of the composition such as LED lamp 21, condenser 22 sending white light, in the bottom of support 1, there is continuous zoom lens 4.
See Fig. 1,7, continuous zoom lens comprises screw 40, index glass group 41, the quiet mirror group 42 be arranged in index glass group cover 48, have the straight trough cylinder 43 of three straight troughs 47, have crank slot cylinder 44, three guide pillars 45, pivoted housings 46 etc. of three helicla flutes 49.Straight trough cylinder 43 upper end is threaded connection and is fixed on support 1.The periphery of straight trough cylinder 43 is crank slot cylinders 44, and the periphery of crank slot cylinder 44 is pivoted housings 46.Index glass group cover 48 is set in straight trough cylinder 43.Index glass group cover 48, straight trough cylinder 43, crank slot cylinder 44, pivoted housing 46 are all coaxial.Crank slot cylinder 44 is fixedly connected with by screw 40 with pivoted housing.Crank slot cylinder 44 (with pivoted housing 46) can rotate relative to straight trough cylinder 43 around axis, and index glass group cover 48 can slide along axis relative to straight trough cylinder 43.Guide pillar 45 along index glass group cover 48 radial direction extend.Each guide pillar 45 overlaps 48 through a helicla flute 49, straight trough 47 and index glass group and is fixedly connected, and guide pillar 45 can slide along helicla flute 49, can slide along straight trough 47 simultaneously.When rotating pivoted housing 46 (with crank slot cylinder 44), namely guide pillar 45 moves up and down (guide pillar 45 slides simultaneously in helicla flute 49) along straight trough 47 on the direction of paralleling to the axis, under the drive of guide pillar 45, index glass group cover 48 moves up and down along axis.Thus change the relative distance of index glass group 41 relative to quiet mirror group 42.As in Fig. 1, index glass group 41 is distant relative to quiet mirror group 42; And in Fig. 7, index glass group 41 is relative to the close together of quiet mirror group 42.
LED lamp 21, condenser 22, index glass group 41, quiet mirror group 42 are positioned on same optical axis, and index glass group moving up and down along optical axis can change the air layer between index glass group and quiet mirror group, thus can change light from continuous zoom lens out time emission angle.
See Fig. 2,3, catoptron and inclined light shaft certain angle.The surface that catoptron is relative with continuous zoom lens is coated with reflectance coating 32, reflectance coating has cross recess 33.
With the direction that reflectance coating is vertical has the lens barrel 5 that be connected pluggable with support, have enlarging objective 51 and plane mirror 52 in lens barrel.Lens barrel 5 has multiple, and another one lens barrel is see Fig. 4, and each lens barrel is measure-alike, but the enlargement ratio difference (as 3 times, 5 times, 10 times) of enlarging objective 51 in each lens barrel; Support is connected with arbitrary lens barrel is all pluggable.Ccd imageing sensor (or cmos imageing sensor) 6 and lens barrel 5 lay respectively at the both sides of continuous zoom lens.Plane mirror 52 is from enlarging objective light reflection out to imageing sensor.The output of imageing sensor connects image display.
See Fig. 1,7, have a bearing 8 in the bottom of continuous zoom lens 4, bearing comprises pedestal, is arranged on the back up pad that pedestal can be arranged on pivot relative to the slide plate of pedestal horizontal slip, the pivot be fixed on slide plate, rotation; Pivot is coaxial in back up pad.Measured lens 7 is placed on the supporting plate.By moving slide board, pivot back up pad, the measured lens in adjustment back up pad and the relative position (coarse adjustment) of zoom camera lens, make measured lens be positioned on optical axis, and substantially vertical with optical axis.
The directional light that parallel light source sends gets to catoptron, illuminates with cross recessed catoptron.Form directional light 80 through cross recessed light beam by continuous zoom lens, beat on tested planar lens 7.In catoptron, cross reflection image 91 ' (the dynamic picture 91 ' of one of object space that can be understood as enlarging objective cross reflection) is formed through zoom camera lens again by the light 81 that measured lens lower surface 71 reflects.In catoptron, cross reflection image 92 ' (the dynamic picture 92 ' of one of object space that can be understood as enlarging objective cross reflection) is formed through zoom camera lens again by the light 82 that measured lens upper surface 72 reflects.Cross reflection image 91 ', 92 ', again after enlarging objective amplifies, is reflexed to imageing sensor by plane mirror and demonstrates the cross picture (cross moves picture) 91,92 after amplification in the display.By regulating zoom camera lens, can see three cross pictures in the display, wherein namely two be aforesaid cross picture (cross moves picture) 91,92; Another one is the cross picture (cross still image) 93 of the amplification that plane mirror is directly formed to imageing sensor by the cross recess (one of object space that can be understood as enlarging objective cross recess 93 ') of printing opacity after enlarging objective again.When mobile measured lens, cross reflection image 91 ', 92 ', cross as the position of 91,92 can change (so also can claim they be the dynamic picture of cross reflection 91 ', 92 ', the dynamic picture 91,92 of cross), and cross is motionless (so also can be referred to as cross still image 93) as 93, the dynamic picture of cross and cross still image can be distinguished with this.In Fig. 1,2, in order to represent clear, the object space of enlarging objective and the dynamic picture 91 ', 92 ' of cross reflection all replace with single line with cross recess 93 ', and in fact they are all cruciforms.
The display of display, see Fig. 8, can see three cross pictures and the dynamic picture 91 of cross, the dynamic picture 92 of cross, cross still image 93.Also show in display with reference to grid.Move the ultimate range between picture according to two crosses, determine the depth of parallelism of the upper and lower surface of measured lens.In Fig. 6, cross moves as 91, cross moves and is about 2 grids as the distance between 92.
Claims (7)
1. parallelism detecting device, is characterized in that: it comprises parallel light source, zoom camera lens, catoptron, enlarging objective, imageing sensor, image display; Parallel light source, zoom camera lens are positioned on same optical axis; The catoptron with inclined light shaft certain angle is had between light source and zoom camera lens; The reflectance coating of catoptron on the surface relative with zoom camera lens, and reflectance coating has cross recess; The direction vertical with reflectance coating is provided with the enlarging objective being positioned at zoom camera lens side, and amplify the imageing sensor of rear image information at zoom camera lens opposite side for recording enlarging objective, the output of imageing sensor connects image display; Light path between enlarging objective and imageing sensor is provided with from enlarging objective light reflection out to the plane mirror of imageing sensor; Zoom camera lens comprises index glass group and quiet mirror group, and index glass group can move along optical axis relative to quiet mirror group;
The light beam that parallel light source sends is through inciding on measured lens with directional light after the cross recess of catoptron, zoom camera lens, the light beam of measured lens upper and lower surface reflection forms two cross pictures through enlarging objective again through reflecting film reflects, reflex to after imageing sensor through plane mirror again, image display shows.
2. parallelism detecting device as claimed in claim 1, it is characterized in that: described enlarging objective and plane mirror are arranged in same lens barrel, formed between this lens barrel and the agent set be made up of parallel light source, catoptron, zoom camera lens, imageing sensor and removably connect.
3. parallelism detecting device as claimed in claim 2, it is characterized in that: described lens barrel has multiple, each lens barrel physical dimension is identical, but the enlargement ratio of enlarging objective in each lens barrel is different; Agent set all can be connected with arbitrary lens barrel.
4. parallelism detecting device as claimed in claim 1, it is characterized in that: further comprising the measured lens bearing for placing measured lens.
5. parallelism detecting device as claimed in claim 4, is characterized in that: measured lens bearing comprise support measured lens lower surface back up pad, for driving back up pad at the level(l)ing device perpendicular to movement in the plane of optical axis, for driving back up pad around the perpendicularity regulating device of a pivot swinging; Described pivot and back up pad coplanar.
6. Parallel testing method, is characterized in that: use the parallelism detecting device described in claim 1 to detect, with the ultimate range of show two cross pictures, determine the depth of parallelism of the upper and lower surface of measured lens.
7. Parallel testing method as claimed in claim 6, is characterized in that: by regulating zoom camera lens index glass group to change light path angle of divergence size, make beam orthogonal in measured lens surface.
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| CN105783788B (en) * | 2016-04-26 | 2018-04-06 | 长春理工大学 | With a wide range of expanding and self-checking function multiaxis device for detecting parallelism |
| CN106767420B (en) * | 2017-02-13 | 2022-07-26 | 苏州迅威光电科技有限公司 | Full-automatic detection device and method for precision images of vertical axis group of total station |
| CN110108237B (en) * | 2018-02-01 | 2021-06-08 | 上海信及光子集成技术有限公司 | Optical detection device and detection method for parallel states of different surfaces in short distance |
| CN115299843B (en) * | 2022-06-17 | 2023-04-07 | 中山市微视医用科技有限公司 | Endoscope lens flatness adjusting system and using method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2597944Y (en) * | 2003-01-17 | 2004-01-07 | 中国科学院国家天文台南京天文光学技术研究所 | Apparatus for measuring workpiece parallel degree |
| CN1621798A (en) * | 2003-11-28 | 2005-06-01 | 佳能株式会社 | Eccentricity measuring method and eccentricity measuring apparatus |
| CN102096337A (en) * | 2010-12-31 | 2011-06-15 | 中国科学院光电技术研究所 | Detection device for eccentricity and focal plane position of spherical surface or curved surface in projection lithography |
| CN203422071U (en) * | 2013-09-11 | 2014-02-05 | 南京东利来光电实业有限责任公司 | Parallelism detection apparatus |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001324314A (en) * | 2000-05-12 | 2001-11-22 | Sankyo Seiki Mfg Co Ltd | Measuring instrument |
| KR100854265B1 (en) * | 2004-04-27 | 2008-08-26 | 스미도모쥬기가이고교 가부시키가이샤 | Detector and stage device |
-
2013
- 2013-09-11 CN CN201310411983.3A patent/CN103453854B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2597944Y (en) * | 2003-01-17 | 2004-01-07 | 中国科学院国家天文台南京天文光学技术研究所 | Apparatus for measuring workpiece parallel degree |
| CN1621798A (en) * | 2003-11-28 | 2005-06-01 | 佳能株式会社 | Eccentricity measuring method and eccentricity measuring apparatus |
| CN102096337A (en) * | 2010-12-31 | 2011-06-15 | 中国科学院光电技术研究所 | Detection device for eccentricity and focal plane position of spherical surface or curved surface in projection lithography |
| CN203422071U (en) * | 2013-09-11 | 2014-02-05 | 南京东利来光电实业有限责任公司 | Parallelism detection apparatus |
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Denomination of invention: Device and method for detecting parallelism Effective date of registration: 20180815 Granted publication date: 20160224 Pledgee: Bank of Nanjing, Limited by Share Ltd, Nanjing branch Pledgor: Nanjing Donglilai Photoelectric Industrial Co., Ltd. Registration number: 2018320000135 |
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