CN109140147B - Parallelism regulator with three degrees of freedom - Google Patents
Parallelism regulator with three degrees of freedom Download PDFInfo
- Publication number
- CN109140147B CN109140147B CN201811028695.9A CN201811028695A CN109140147B CN 109140147 B CN109140147 B CN 109140147B CN 201811028695 A CN201811028695 A CN 201811028695A CN 109140147 B CN109140147 B CN 109140147B
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- Prior art keywords
- adjusting
- knob
- parallelism
- regulating
- platform body
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters
- F16M11/20—Undercarriages with or without wheels
Abstract
The invention discloses a three-degree-of-freedom parallelism adjuster which is arranged on one side of a platform body and comprises a base, a first adjusting knob, a second adjusting knob and a locking screw, wherein the base is arranged on one side of the platform body; the adjusting table is provided with an adjusting groove, the first adjusting knob and the second adjusting knob are matched with the adjusting groove, and the first adjusting shaft and the second adjusting shaft of the adjusting table are respectively matched with the first adjusting knob and the second adjusting knob. The invention has the advantages that the adjusting shafts with the included angle of 120 degrees realize the adjustment of three degrees of freedom, the flexibility is high, the two adjusting shafts adopt a series mode, the mutual interference can not be generated during the adjustment, the adjuster is arranged at one side of the parallelism adjuster, the occupied volume is small, the inclination adjustment in a single direction is realized by adopting the flexible hinge, and the adjusting precision is effectively improved.
Description
Technical Field
The invention belongs to the technical field of precision instrument detection equipment, and particularly relates to a three-degree-of-freedom parallelism adjuster.
Background
A parallelism adjuster, also called a tilt stage, is a stage for adjusting the tilt angle of a sample, and is widely used in fields requiring angles such as optics and measurement. With the rapid development of the nano-scale high-precision positioning technology, the nano-scale detection technology has become mature, and the requirement for parallelism between the detection instrument and the detected object is higher and higher.
At present, in a traditional parallelism adjuster (as shown in fig. 1), an adjusting surface is connected with a base through a spring, when the base is vibrated, the angle of the adjusting surface is not easy to keep and is easy to change, an included angle between two adjusting shafts is 90 degrees, the adjusting flexibility is low, the two adjusting shafts are in a parallel mode, and can interfere with each other when being adjusted, so that the adjusting precision is influenced; in addition, the traditional parallelism adjuster has larger volume and is inconvenient to use.
Disclosure of Invention
The invention aims to provide a three-degree-of-freedom parallelism adjuster which is simple in structure, simple to operate, high in adjustment precision, capable of adjusting in three degrees of freedom and small in occupied size.
The technical scheme of the invention is as follows:
a three-degree-of-freedom parallelism adjustor comprises a platform body, an adjustor and an adjusting platform, wherein the adjustor is arranged on one side of the platform body, and the platform body is connected with the adjusting platform;
the regulator comprises a base, a first adjusting knob, a second adjusting knob and a locking screw, wherein the base is installed on one side of the platform body of the platform, and the first adjusting knob, the second adjusting knob and the locking screw are all installed on the base and used for adjusting and locking the positions of the first adjusting knob and the second adjusting knob;
the adjusting device is characterized in that an adjusting groove is formed in the adjusting platform, the first adjusting knob and the second adjusting knob are matched with the adjusting groove, a first adjusting shaft and a second adjusting shaft are arranged on the adjusting platform, the first adjusting shaft and the second adjusting shaft are respectively matched with the first adjusting knob and the second adjusting knob, the first adjusting knob is used for adjusting in the direction of the first adjusting shaft, and the second adjusting knob is used for adjusting in the direction of the second adjusting shaft.
In the above technical solution, an included angle between the first adjusting shaft and the second adjusting shaft is 120 °.
In the above technical scheme, the adjusting table adopts a flexible hinge with an arc structure.
In the above technical solution, one end of the first adjusting knob and one end of the second adjusting knob facing the adjusting groove are cones.
In the above technical solution, the error of the cone angle of the cone is ± 10 urad.
In the above technical solution, the error of the adjustment groove is ± 10 urad.
In the above technical solution, the cross section of the platform body is a regular hexagon.
The invention has the advantages and positive effects that: due to the adoption of the technical scheme, the included angle is 120 degrees of the adjusting shafts, the adjustment of three degrees of freedom is realized, the adjustment flexibility is high, the two adjusting shafts adopt a series mode and cannot interfere with each other when being adjusted, the adjuster is installed on one side of the parallelism adjuster, the occupied volume is reduced, the inclination is adjusted in a single direction by adopting the flexible hinge, the adjustment precision is effectively improved, and the use is convenient.
Drawings
FIG. 1 is a front view of the prior art;
FIG. 2 is a side view of the prior art;
FIG. 3 is a front view of the three degree-of-freedom parallelism adjuster of the present invention;
FIG. 4 is a side view of the three degree-of-freedom parallelism adjuster of the present invention;
FIG. 5 is a partial enlarged view of A in the present invention;
in the figure:
1. platform body 2, regulator 3, regulation platform
4. Base 5, first adjust knob 6, second adjust knob
7. Locking screw 8, adjusting groove 9, first regulating shaft
10. Second adjusting shaft
Detailed Description
The present invention will be described in further detail with reference to specific examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the scope of the invention in any way.
Example 1
As shown in fig. 1 and 2, in the parallelism adjuster in the prior art, an adjusting table a is connected with a table body B through a spring D, an angle of adjustment is adjusted by a vertical direction adjusting mechanism C and a horizontal direction adjusting mechanism E, an included angle between the vertical direction adjusting mechanism C and the horizontal direction adjusting mechanism E is 90 °, the adjustment flexibility is low, and the two adjusting mechanisms are in a parallel mode and interfere with each other during adjustment.
As shown in fig. 3-5, the three-degree-of-freedom parallelism adjuster of the present invention includes a platform body 1, an adjuster 2, and an adjusting table 3, wherein the adjuster 2 is installed on one side of the platform body 1, and the platform body 1 is connected to the adjusting table 3; the cross section of the platform body 1 is a regular hexagon, the regulator 2 comprises a base 4, a first adjusting knob 5, a second adjusting knob 6 and a locking screw 7, the base 4 is installed on one side of the platform body 1, the first adjusting knob 5, the second adjusting knob 6 and the locking screw 7 are all installed on the base 4, and the locking screw 7 is used for adjusting and locking the positions of the first adjusting knob 5 and the second adjusting knob 6; the adjusting table 3 is an arc-shaped flexible hinge, a first adjusting shaft 9 and a second adjusting shaft 10 are arranged on the arc-shaped flexible hinge, an included angle between the first adjusting shaft 9 and the second adjusting shaft 10 is 120 degrees, an adjusting groove 8 is formed in the flexible hinge, a first adjusting knob 5 and a second adjusting knob 6 are matched with the adjusting groove 8, the first adjusting knob 5 is used for adjusting in the direction of the first adjusting shaft 9, and the second adjusting knob 6 is used for adjusting in the direction of the second adjusting shaft 10. The ends of the first adjusting knob 5 and the second adjusting knob 6 facing the adjusting groove 8 are cones, the error of the cone angle of the cone is +/-10 urad, and the error of the adjusting groove 8 is +/-10 urad, so that the accuracy of the adjusting knobs is improved.
When the parallelism regulator is used, the first adjusting knob 5 is adjusted along the direction of the first adjusting shaft 9, the second adjusting knob 6 is adjusted along the direction of the second adjusting shaft 10, the cone of the adjusting knob is matched with the adjusting groove 8, and the two adjusting shafts adopt a series adjusting mode, so that the coupling between the two adjusting shafts is effectively avoided; after the adjustment to the proper position, the locking screw 7 is tightened to limit the adjustment position of the adjuster 2.
The freedom degree of the platform body 1 is expanded into three freedom degrees with included angles of 120 degrees by adopting an adjusting shaft with an included angle of 120 degrees, and the adjusting flexibility is high; the platform is suitable for more complicated and changeable working conditions, and the positions of the adjusting knobs can be better arranged by adopting the regular hexagonal platform body, so that the platform has the same adjusting moment and adjusting precision; through the characteristic of single degree of freedom of the flexible hinge, the inclination of a single adjusting shaft can be adjusted only in a single direction, and the angle change cannot be generated in the vertical direction; the adjusting shaft adopts a series adjusting mode, cannot be influenced mutually, and has high adjusting precision.
Spatially relative terms, such as "upper," "lower," "left," "right," and the like, may be used in the embodiments for ease of description to describe one element or feature's relationship to another element or feature as illustrated in the figures. It will be understood that the spatial terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary term "lower" can encompass both an upper and a lower orientation. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
Moreover, relational terms such as "first" and "second," and the like, may be used solely to distinguish one element from another element having the same name, without necessarily requiring or implying any actual such relationship or order between such elements.
While one embodiment of the present invention has been described in detail, the present invention is only a preferred embodiment of the present invention and should not be construed as limiting the scope of the present invention. All equivalent changes and modifications made within the scope of the present invention shall fall within the scope of the present invention.
Claims (7)
1. A three-degree-of-freedom parallelism adjuster is characterized in that: the device comprises a platform body (1), an adjuster (2) and an adjusting platform (3), wherein the adjuster (2) is arranged on one side of the platform body (1), and the platform body (1) is connected with the adjusting platform (3);
the regulator (2) comprises a base (4), a first regulating knob (5), a second regulating knob (6) and a locking screw (7), wherein the base (4) is installed on one side of the platform body (1), the first regulating knob (5), the second regulating knob (6) and the locking screw (7) are all installed on the base (4), and the locking screw is used for regulating and locking the positions of the first regulating knob (5) and the second regulating knob (6);
adjustment tank (8) have been seted up on regulation platform (3), first adjust knob (5), second adjust knob (6) with adjustment tank (8) cooperate, be equipped with first regulating spindle (9) and second regulating spindle (10) on regulation platform (3), first regulating spindle (9) and second regulating spindle (10) respectively with first adjust knob (5), second adjust knob (6) cooperate, first adjust knob (5) are used for adjust in the direction of first regulating spindle (9), second adjust knob (6) are used for adjust in the direction of second regulating spindle (10).
2. The parallelism adjuster according to claim 1, wherein: the included angle between the first adjusting shaft (9) and the second adjusting shaft (10) is 120 degrees.
3. The parallelism adjuster according to claim 2, wherein: the adjusting table (3) adopts a flexible hinge with an arc-shaped structure.
4. The parallelism adjuster according to claim 3, wherein: one ends, facing the adjusting groove (8), of the first adjusting knob (5) and the second adjusting knob (6) are cones.
5. The parallelism adjuster according to claim 4, wherein: the error of the cone angle of the cone is +/-10 urad.
6. The parallelism adjuster according to claim 5, wherein: the error of the adjusting groove (8) is +/-10 urad.
7. The parallelism adjuster according to any one of claims 1 to 6, wherein: the cross section of the platform body (1) is a regular hexagon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811028695.9A CN109140147B (en) | 2018-09-05 | 2018-09-05 | Parallelism regulator with three degrees of freedom |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811028695.9A CN109140147B (en) | 2018-09-05 | 2018-09-05 | Parallelism regulator with three degrees of freedom |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109140147A CN109140147A (en) | 2019-01-04 |
| CN109140147B true CN109140147B (en) | 2020-05-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811028695.9A Active CN109140147B (en) | 2018-09-05 | 2018-09-05 | Parallelism regulator with three degrees of freedom |
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| Country | Link |
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| CN (1) | CN109140147B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111230036A (en) * | 2020-01-10 | 2020-06-05 | 珠海格力智能装备有限公司 | Bearing structure and riveter |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0193991A1 (en) * | 1985-03-05 | 1986-09-10 | Koninklijke KPN N.V. | Fine-adjusting device for accurate positioning an adjusting element |
| EP1048924A2 (en) * | 1999-04-28 | 2000-11-02 | Juri F. Jourtchenko | High-precision work table for a projector |
| CN2782326Y (en) * | 2005-03-10 | 2006-05-24 | 中国科学院上海光学精密机械研究所 | Six freedom precision positioning working table |
| CN204102579U (en) * | 2014-09-15 | 2015-01-14 | 镇江超纳仪器有限公司（中外合资） | The device of a kind of two dimension independent adjustment platform inclination angle |
| CN204946549U (en) * | 2015-07-12 | 2016-01-06 | 江西理工大学 | One kind planar monolithic Grazing condition nano-positioning stage in parallel |
| CN107705821A (en) * | 2017-09-14 | 2018-02-16 | 山东大学 | A kind of two degrees of freedom Inchworm type micro-nano locating platform |
| CN108198588A (en) * | 2017-12-29 | 2018-06-22 | 三英精控（天津）仪器设备有限公司 | A kind of single-degree-of-freedom large-stroke nanometer displacement locating platform based on flexible hinge |
-
2018
- 2018-09-05 CN CN201811028695.9A patent/CN109140147B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0193991A1 (en) * | 1985-03-05 | 1986-09-10 | Koninklijke KPN N.V. | Fine-adjusting device for accurate positioning an adjusting element |
| EP1048924A2 (en) * | 1999-04-28 | 2000-11-02 | Juri F. Jourtchenko | High-precision work table for a projector |
| CN2782326Y (en) * | 2005-03-10 | 2006-05-24 | 中国科学院上海光学精密机械研究所 | Six freedom precision positioning working table |
| CN204102579U (en) * | 2014-09-15 | 2015-01-14 | 镇江超纳仪器有限公司（中外合资） | The device of a kind of two dimension independent adjustment platform inclination angle |
| CN204946549U (en) * | 2015-07-12 | 2016-01-06 | 江西理工大学 | One kind planar monolithic Grazing condition nano-positioning stage in parallel |
| CN107705821A (en) * | 2017-09-14 | 2018-02-16 | 山东大学 | A kind of two degrees of freedom Inchworm type micro-nano locating platform |
| CN108198588A (en) * | 2017-12-29 | 2018-06-22 | 三英精控（天津）仪器设备有限公司 | A kind of single-degree-of-freedom large-stroke nanometer displacement locating platform based on flexible hinge |
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| CN109140147A (en) | 2019-01-04 |
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