CN109115607A - A kind of mechanical property measurement method of film sample - Google Patents
A kind of mechanical property measurement method of film sample Download PDFInfo
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- CN109115607A CN109115607A CN201811083995.7A CN201811083995A CN109115607A CN 109115607 A CN109115607 A CN 109115607A CN 201811083995 A CN201811083995 A CN 201811083995A CN 109115607 A CN109115607 A CN 109115607A
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- 238000000691 measurement method Methods 0.000 title claims abstract description 9
- 239000000523 sample Substances 0.000 claims abstract description 341
- 238000005259 measurement Methods 0.000 claims abstract description 17
- 230000003993 interaction Effects 0.000 claims abstract description 11
- 239000002184 metal Substances 0.000 claims description 33
- 229910052751 metal Inorganic materials 0.000 claims description 33
- 239000000835 fiber Substances 0.000 claims description 28
- 230000003287 optical effect Effects 0.000 claims description 28
- 238000006073 displacement reaction Methods 0.000 claims description 20
- 230000005611 electricity Effects 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 10
- 238000002474 experimental method Methods 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 5
- 238000012360 testing method Methods 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 4
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical group C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 claims description 4
- 240000007594 Oryza sativa Species 0.000 claims description 2
- 235000007164 Oryza sativa Nutrition 0.000 claims description 2
- 235000009566 rice Nutrition 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 25
- 238000003384 imaging method Methods 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 238000000418 atomic force spectrum Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 208000002173 dizziness Diseases 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2605—Measuring capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/12—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
- G01R31/1227—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing of components, parts or materials
- G01R31/1263—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing of components, parts or materials of solid or fluid materials, e.g. insulation films, bulk material; of semiconductors or LV electronic components or parts; of cable, line or wire insulation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0058—Kind of property studied
- G01N2203/0069—Fatigue, creep, strain-stress relations or elastic constants
- G01N2203/0075—Strain-stress relations or elastic constants
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/06—Indicating or recording means; Sensing means
- G01N2203/067—Parameter measured for estimating the property
- G01N2203/0676—Force, weight, load, energy, speed or acceleration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/06—Indicating or recording means; Sensing means
- G01N2203/067—Parameter measured for estimating the property
- G01N2203/0682—Spatial dimension, e.g. length, area, angle
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- Physics & Mathematics (AREA)
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- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The present invention relates to materials science field, lens probe is switched to the probe position I of probe by a kind of mechanical property measurement method of film sample；Control microdrive makes lens probe be moved to just contact sample surfaces；Micro objective records sample image in real time；Normal force measurement: control microdrive makes lens probe continue to apply pressure to sample surfaces, record the deviation of reflecting mirror I and reflecting mirror II, the interaction force of normal direction is obtained by computer, and it is combined analysis with the sample image of micro objective record, obtain the relationship between sample surfaces deformation and normal force；Tangential force measurement: control microdrive is to keep the normal force of lens probe and sample constant, make sample stage mobile in the direction z simultaneously, record the deviation of reflecting mirror I and reflecting mirror II, tangential interaction force is obtained by computer, and it is combined analysis with the sample image of micro objective record, obtain the relationship of sample deformation and normal force and sample stage movement speed.
Description
Technical field
The present invention relates to materials science field, the one of especially a kind of mechanics that can measure film simultaneously and electrical properties
The mechanical property measurement method of kind film sample.
Background technique
Dielectric film material is widely used, and in the insulation for electronic device surface, needs to have Low dark curient rate and height
The electrology characteristics such as dielectric constant, meanwhile, the mechanical characteristic of film such as surface force has an important research significance, including normal direction and tangential
Deformation and frictional force imaging, still, the prior art is poor to the effect for having the film surface of larger deformation quantity to be imaged,
And the charging process carried out when electrical measurement to film is not easy to control, a kind of mechanical property measurement method energy of film sample
Enough solve the problems, such as.
Summary of the invention
To solve the above-mentioned problems, the present invention can carry out mechanical meaurement to film sample surface, and carry out in situ imaging,
The mechanical characteristic of film is obtained with this, and can carry out associated electrical measurement to film.
The technical scheme adopted by the invention is that:
Films test device mainly include fibre optical sensor I, reflecting mirror I, fibre optical sensor II, reflecting mirror II, probe, thoroughly
Mirror probe, high-voltage constant current source, metal cap, aperture plate, displacement platform, DC power supply, voltage source, sample, sample stage, connects corona probe
Ground ring electrode, main electrode, micro objective, computer, galvanometer and current controller, xyz is three-dimensional coordinate system, described
Probe has front end and end, and the probe is formed by connecting from front end to end by probe disk, cantilever and microdrive, micro-move device
Device can be mobile in the direction y, and minimum movement stepping is 60 nanometers, maximum moving range is 30 millimeters, maximum rate travel is 2 millis
Meter per second, the probe disk be it is discoid, probe disk lower surface have probe position I, probe position II and probe position III, the probe
Position I is located at probe distal end, probe position I can mounted lens probe, corona probe can be also installed, probe position II can be installed
Mirror probe, probe position III can install corona probe, lens probe can be switched to probe position I from probe position II to carry out
Corona probe can be switched to probe position I from probe position II to carry out Experiments of Electricity, the installation of probe disk upper surface by experiment of machanics
There is reflecting mirror II, reflecting mirror II is parallel with xz plane, and probe disc side is equipped with reflecting mirror I, and reflecting mirror I is parallel with x/y plane；
Fibre optical sensor I and fibre optical sensor II distinguishes cable connection computer, and the position of fibre optical sensor I is fixed and faces reflection
Reflecting mirror II is fixed and faced in the position of mirror I, fibre optical sensor II, and lens tips of probes is that a diameter range is 1.5 millis
The hemispheric glass lens of rice to 4 millimeters, corona probe cable connect high-voltage constant current source, and corona probe is 20 millimeters a length of, straight
Diameter is 0.3 millimeter；Be sequentially installed with metal cap and aperture plate below the lens probe and corona probe of probe, the metal cap and
Aperture plate is all connected to displacement platform, and displacement platform can control metal cap respectively and aperture plate is mobile, and metal cap is connected by displacement platform cable
Connect DC power supply, metal cap is the cylindrical surface that length is 24 millimeters, basal diameter is 18 millimeters, the axis on cylindrical surface in the y-direction,
The square net that aperture plate is 2 millimeters by the side length that the metal wire that diameter is 0.2 millimeter forms, aperture plate pass through displacement platform cable
Connect voltage source, voltage source cable connection current controller；Sample stage is located at below aperture plate, and sample stage can move in xz plane
Dynamic, minimum movement stepping is 60 nanometers, maximum moving range is 30 millimeters, maximum rate travel is 2 mm/seconds, sample stage bottom
Portion has ground connection ring electrode and main electrode, and the ground connection ring electrode outer diameter is 20 millimeters, internal diameter is 18 millimeters, and the main electrode is
The disk that 14 millimeter of diameter and can light transmission, sample is located in sample stage, and sample is contacted with ground connection ring electrode and main electrode respectively,
Successively cable connection galvanometer, current controller and computer, micro objective are located at below sample stage main electrode；Electric current measurement
The sample charging current I obtained1It is input to current controller, preset sample charging current I in computer2It is input to current control
Device, current controller compare I1And I2Output feedback signal is to voltage source afterwards, can control the voltage being applied on aperture plate.
A kind of the step of mechanical property measurement method of film sample are as follows:
Lens probe is switched to the probe position I of probe by one,；
Two, control microdrive makes lens probe be moved to just contact sample surfaces；
Three, micro objectives record sample image in real time；
The measurement of four, normal force: control microdrive makes lens probe continue to apply pressure to sample surfaces, record reflection
The deviation of mirror I and reflecting mirror II obtain the interaction force of normal direction, and the sample drawing with micro objective record by computer
As being combined analysis, the relationship between sample surfaces deformation and normal force is obtained；
The measurement of five, tangential forces: control microdrive is to keep the normal force of lens probe and sample constant, normal force profile
For 4mN to 15mN, while controlling sample stage keeps it mobile in the direction z, and movement speed range is 1 to 10 micro- meter per second, record reflection
The deviation of mirror I and reflecting mirror II obtain tangential interaction force, and the sample drawing with micro objective record by computer
As being combined analysis, the relationship of sample deformation and normal force and sample stage movement speed is obtained；
Six, are according to step 4 and step 5 as a result, and combining power between sample deformation, sample and lens probe, sample
Relationship between product mechanical characteristic obtains the bulk modulus of sample.
The step of measuring the electrical properties of film sample using films test device are as follows:
Preparation process is as follows:
Corona probe is switched to the probe position I of probe by one,；
Aperture plate is moved to above sample at three millimeters of distances by two, control bit moving stage, and applies electricity to it by voltage source
Pressure, the voltage representative value are 50V；
Metal cap is moved to above aperture plate at four millimeters of distances by three, control bit moving stage, and is applied by DC power supply to it
Making alive, the voltage representative value are 1.5kV to 2.5kV；
Four, charge to sample: applying electric current to corona probe by high-voltage constant current source, electric current representative value is two microamperes；
The step of measuring the potential decay of sample surfaces is as follows:
One, presets sample charging current I in a computer2=0 and it is input to current controller, to change the electricity on aperture plate
Pressure, so that the sample charging current I that galvanometer measures1=0；
Two, preset sample charging current I in a computer2, current controller compares I1And I2Feedback signal is exported afterwards to electricity
Potential source starts to charge to sample to control the voltage being applied on aperture plate；
After three, mono- minute, sample charging current I is preset in a computer again2=0, the potential for starting sample surfaces declines
The measurement subtracted；
Four, pass through real time monitoring Vg(t) it changes with time to obtain the potential V (t) of sample surfaces.
The method for measuring the capacitor of sample are as follows: when charging process is incipient, pass through calculatingTo obtain sample
Capacitor, be by the total current of film sampleIts, JCIt (t) is the flat of conductive current density in sample
Mean value, C is the capacitance of the sample thin film of average area, when the time is close to zero, JC(t) it is similar to zero, simplification obtains J0=
C(dV(t)/dt)0, by Vg(t)=V (t)+VagObtain J0=C (dV (t)/dt)0, in this way, the capacitor of sample can be directly from grid
Net potential VagVariation in obtain.
The beneficial effects of the present invention are:
The method of the present invention has the active force between the cantilever and film sample surface of lens probe by measurement, and combines
The imaging of sample surfaces, it is preferable to the imaging effect for the film surface for having larger deformation quantity to study the mechanical characteristic of film, it mentions
The high confidence level of mechanical meaurement, in addition, associated electrical measurement can be carried out to film simultaneously.
Detailed description of the invention
It is further illustrated below with reference to figure of the invention:
Fig. 1 is schematic side view of the present invention；
Fig. 2 is the bottom view of probe；
Fig. 3 is the side view of Fig. 2.
In figure, 1. fibre optical sensor I, 2. reflecting mirror I, 3. fibre optical sensor II, 4. reflecting mirror II, 5. pop one's head in, and 5-1. is visited
Dials, 5-1-1. probe position I, 5-1-2. probe position II, 5-1-3. probe position III, 5-2. cantilever, 5-3. microdrive, 6. thoroughly
Mirror probe, 7. corona probes, 8 high-voltage constant current source, 9. metal caps, 10. aperture plates, 11. displacement platforms, 12. DC power supplies, 13. voltages
Source, 14. samples, 15. sample stages, 16. ground connection ring electrodes, 17. main electrodes, 18. micro objectives, 19. computers, 20. electric currents
Meter, 21. current controllers.
Specific embodiment
If Fig. 1 is schematic side view of the present invention, xyz is three-dimensional coordinate system, mainly includes fibre optical sensor I (1), anti-
Penetrate mirror I (2), fibre optical sensor II (3), reflecting mirror II (4), probe (5), lens probe (6), corona probe (7), high voltage and constant current
Source (8), metal cap (9), aperture plate (10), displacement platform (11), DC power supply (12), voltage source (13), sample (14), sample stage
(15), ring electrode (16), main electrode (17), micro objective (18), computer (19), galvanometer (20) and current control are grounded
Device (21), fibre optical sensor I (1) and fibre optical sensor II (3) difference cable connection computer (19), fibre optical sensor I's (1)
Position is fixed and is faced reflecting mirror I (2), and the position of fibre optical sensor II (3) is fixed and faces reflecting mirror II (4), lens
Probe (6) top is the hemispheric glass lens that a diameter range is 1.5 millimeters to 4 millimeters, and corona probe (7) cable connects
It connects high-voltage constant current source (8), corona probe (7) is 20 millimeters a length of, diameter is 0.3 millimeter；The lens probe (6) and electricity of probe (5)
It is sequentially installed with metal cap (9) and aperture plate (10) below dizzy probe (7), the metal cap (9) and aperture plate (10) are all connected to
Displacement platform (11), displacement platform (11) can control metal cap (9) respectively and aperture plate (10) is mobile, and metal cap (9) passes through displacement platform
(11) cable connection DC power supply (12), metal cap (9) are the cylindrical surfaces that length is 24 millimeters, basal diameter is 18 millimeters, circle
The axis of cylinder in the y-direction, the square that aperture plate (10) is 2 millimeters by the side length that the metal wire that diameter is 0.2 millimeter forms
Grid, aperture plate (10) pass through displacement platform (11) cable connection voltage source (13), voltage source (13) cable connection current controller
(21)；Sample stage (15) is located at below aperture plate (10), and sample stage (15) can move in xz plane, and minimum movement stepping is 60
Nanometer, maximum moving range are 30 millimeters, maximum rate travel is 2 mm/seconds, and sample stage (15) bottom has ground connection ring electrode
(16) and main electrode (17), ground connection ring electrode (16) outer diameter is 20 millimeters, internal diameter is 18 millimeters, and the main electrode (17) is
The disk that 14 millimeter of diameter and can light transmission, sample (14) is located in sample stage (15), sample (14) respectively with ground connection ring electrode
(16) it is contacted with main electrode (17), main electrode (17) successively cable connection galvanometer (20), current controller (21) and computer
(19), micro objective (18) is located at below sample stage (15)；Sample (14) charging current I that galvanometer (20) measures1Input
To current controller (21), preset sample (14) charging current I in computer (19)2It is input to current controller (21), electricity
Stream controller (21) compares I1And I2Output feedback signal is applied on aperture plate (10) to voltage source (13) with that can control afterwards
Voltage.
If Fig. 2 is the bottom view of probe, if Fig. 3 is the side view of Fig. 2, xyz is three-dimensional coordinate system, the probe
(5) there is front end and end, the probe (5) is from front end to end by probe disk (5-1), cantilever (5-2) and microdrive (5-
3) it is formed by connecting, microdrive (5-3) can be mobile in the direction y, and minimum movement stepping is 60 nanometers, maximum moving range is 30
Millimeter, maximum rate travel are 2 mm/seconds, the probe disk (5-1) be it is discoid, the probe disk lower surface (5-1) has probe
Position I (5-1-1), probe position II (5-1-2) and probe position III (5-1-3), before the probe position I (5-1-1) is located at probe (5)
End, probe position I (5-1-1) can mounted lens probe (6), can also install corona probe (7), probe position II (5-1-2) energy
Enough mounted lens probe (6), probe position III (5-1-3) can install corona probe (7), can be by lens probe (6) from probe
Position II (5-1-2) switches to probe position I (5-1-1) to carry out experiment of machanics, can be by corona probe (7) from probe position II (5-
Switch to probe position I (5-1-1) 1-2) to carry out Experiments of Electricity, the upper surface probe disk (5-1) is equipped with reflecting mirror II (4), instead
It is parallel with xz plane to penetrate mirror II (4), the side probe disk (5-1) is equipped with reflecting mirror I (2), and reflecting mirror I (2) is parallel with x/y plane.
Electrical measurement principle:
High-voltage constant current source (8) to corona probe (7) apply high voltage make corona probe (7) generate cation or bear from
Son, metal cap (9) are located on the outside of corona probe (7), and the DC power supply (12) for floating ground applies high-voltage potential to metal cap (9), make
It obtains metal cap (9) to work in the form of electrostatic lenses, aperture plate (10) made of metal is located above sample stage (15), floats for controlling
The quantity of sample stage (15) corona ion is moved on to, sample (14) is located on specimen holder, and corona ion passes through the master of sample stage (15)
Electrode (17) charges to sample (14), and galvanometer (20) is used to measure the charging current by sample (14), the high voltage and constant current
Source (8) ensure that corona ion current that corona probe (7) is launched be it is constant, without by the potential size on aperture plate (10)
It influences, aperture plate (10) connects voltage source (13), so that the charging current I of sample2It keeps constant.Voltage V on aperture plate (10)g(t)
With the relationship V between sample (14) surface voltage V (t)g(t)=V (t)+Vag, wherein VagFor sample (14) surface and aperture plate (10)
Between potential difference, when sample (14) charging process starts, Vg(t) sport Δ Vgi=Vag(I2)-Vag0(I2), wherein I2
To preset sample (14) charging current, V in computer (19)ag(I2) it be sample (14) charging current is I2When corresponding sample
(14) potential difference between surface and aperture plate (10), Vag0(I2) it is sample (14) charging current I2Corresponding sample (14) when=0
Potential difference between surface and aperture plate (10)；When sample (14) charging process stops, Vg(t) sport Δ Vgf=-Δ Vgi,
Due to sample (14) carry out constant-current charge when, Δ Vag=0, therefore, Δ V (t)=Δ Vg(t), i.e. V (t) can pass through Vg
(t) it changes with time to obtain.
Mechanical meaurement principle:
The mechanical characteristic such as rigidity and coefficient of elasticity of cantilever (5-2) are it is known that lens probe (6) and sample (14) surface
Interaction force makes cantilever (5-2) that small deviation occurs, and also occurs so as to cause reflecting mirror I (2) and reflecting mirror II (4)
It is biased to, fibre optical sensor I (1) and fibre optical sensor II (3) can separately detect the inclined of reflecting mirror I (2) and reflecting mirror II (4)
To, and the data of acquisition are inputted into computer (19), to obtain the deviation information of cantilever (5-2), further analysis can be obtained
Lens probe (6) and sample (14) surface are respectively in normal direction and tangential interaction force.Meanwhile passing through micro objective (18)
Record the image of the sample (14) when the interaction of lens probe (6) and sample (14) surface, and the deviation with cantilever (5-2)
Information combines, and can obtain the mechanical information in sample (14) deformation and relaxation process.Sample (14) deformation, sample (14) with
The relationship between power, sample (14) mechanical characteristic between lens probe (6) is as followsWherein a is the radius of the contact area of sample (14) and lens probe (6), R
For the radius of the glass lens on lens probe (6) top, k is the bulk modulus of sample (14), E*For effective modulus, W is
Adhesion work, power of the p between sample (14) and lens probe (6).
Films test device mainly includes fibre optical sensor I (1), reflecting mirror I (2), fibre optical sensor II (3), reflecting mirror
II (4), probe (5), lens probe (6), corona probe (7), high-voltage constant current source (8), metal cap (9), aperture plate (10), displacement platform
(11), DC power supply (12), voltage source (13), sample (14), sample stage (15), ground connection ring electrode (16), main electrode (17), aobvious
Objective (18), computer (19), galvanometer (20) and current controller (21), xyz are three-dimensional coordinate system, the spy
Head (5) has front end and end, and the probe (5) is from front end to end by probe disk (5-1), cantilever (5-2) and microdrive
(5-3) is formed by connecting, and microdrive (5-3) can be mobile in the direction y, and minimum movement stepping is 60 nanometers, maximum moving range
For 30 millimeters, maximum rate travel be 2 mm/seconds, the probe disk (5-1) be it is discoid, the lower surface probe disk (5-1) has
Probe position I (5-1-1), probe position II (5-1-2) and probe position III (5-1-3), the probe position I (5-1-1) are located at probe
(5) front end, probe position I (5-1-1) can mounted lens probe (6), can also install corona probe (7), probe position II (5-1-
2) can mounted lens probe (6), probe position III (5-1-3) can install corona probe (7), can by lens probe (6) from
Probe position II (5-1-2) switches to probe position I (5-1-1) to carry out experiment of machanics, can be by corona probe (7) from probe position II
(5-1-2) switches to probe position I (5-1-1) to carry out Experiments of Electricity, and the upper surface probe disk (5-1) is equipped with reflecting mirror II (4),
Reflecting mirror II (4) is parallel with xz plane, and the side probe disk (5-1) is equipped with reflecting mirror I (2), and reflecting mirror I (2) and x/y plane are flat
Row；Fibre optical sensor I (1) and fibre optical sensor II (3) difference cable connection computer (19), the position of fibre optical sensor I (1)
It fixes and faces reflecting mirror I (2), the position of fibre optical sensor II (3) is fixed and faces reflecting mirror II (4), lens probe
(6) top is the hemispheric glass lens that a diameter range is 1.5 millimeters to 4 millimeters, and corona probe (7) cable connection is high
It presses constant-current source (8), corona probe (7) is 20 millimeters a length of, diameter is 0.3 millimeter；The lens probe (6) and corona of probe (5) are visited
Metal cap (9) and aperture plate (10) are sequentially installed with below needle (7), the metal cap (9) and aperture plate (10) are all connected to be displaced
Platform (11), displacement platform (11) can control metal cap (9) respectively and aperture plate (10) is mobile, and metal cap (9) passes through displacement platform (11)
Cable connection DC power supply (12), metal cap (9) are the cylindrical surface that length is 24 millimeters, basal diameter is 18 millimeters, cylindrical surface
Axis in the y-direction, the square net that aperture plate (10) is 2 millimeters by the side length that the metal wire that diameter is 0.2 millimeter forms,
Aperture plate (10) passes through displacement platform (11) cable connection voltage source (13), voltage source (13) cable connection current controller (21)；Sample
Sample platform (15) is located at below aperture plate (10), and sample stage (15) can move in xz plane, and minimum movement stepping is 60 nanometers, most
Big moving range is 30 millimeters, maximum rate travel is 2 mm/seconds, sample stage (15) bottom have ground connection ring electrode (16) and
Main electrode (17), ground connection ring electrode (16) outer diameter is 20 millimeters, internal diameter is 18 millimeters, and the main electrode (17) is diameter 14
The disk of millimeter and can light transmission, it is interior that sample (14) is located at sample stage (15), sample (14) respectively be grounded ring electrode (16) and
Main electrode (17) contact, main electrode (17) successively cable connection galvanometer (20), current controller (21) and computer (19) are aobvious
Objective (18) is located at below sample stage (15)；Sample (14) charging current I that galvanometer (20) measures1It is input to electric current control
Device (21) processed, preset sample (14) charging current I in computer (19)2It is input to current controller (21), current controller
(21) compare I1And I2Output feedback signal is to voltage source (13) afterwards, can control the voltage being applied on aperture plate (10).
A kind of the step of mechanical property measurement method of film sample are as follows:
Lens probe (6) is switched to the probe position I (5-1-1) of probe (5) by one:
Two, control microdrive (5-3) makes lens probe (6) be moved to just contact sample (14) surface；
Three, micro objectives (18) record sample (14) image in real time；
The measurement of four, normal force: control microdrive (5-3) makes lens probe (6) continue to apply to sample (14) surface
Pressure records the deviation of reflecting mirror I (2) and reflecting mirror II (4), obtains the interaction force of normal direction by computer (19), and
It is combined analysis with sample (14) image of micro objective (18) record, sample (14) surface deformation is obtained and normal direction acts on
Relationship between power；
The measurement of five, tangential forces: control microdrive (5-3) is permanent to keep the normal force of lens probe (6) and sample (14)
Fixed, normal force profile is 4mN to 15mN, while controlling sample stage (15) keeps it mobile in the direction z, movement speed range be 1 to
10 micro- meter per seconds record the deviation of reflecting mirror I (2) and reflecting mirror II (4), obtain tangential interaction by computer (19)
Power, and it is combined analysis with sample (14) image of micro objective (18) record, obtain sample (14) deformation and normal force
And the relationship of sample stage (15) movement speed；
Six, are according to step 4 and step 5 as a result, and combining sample (14) deformation, sample (14) and lens probe (6)
Between power, the relationship between sample (14) mechanical characteristic, obtain the bulk modulus of sample (14).
The method of the present invention has the active force between the cantilever and film sample surface of lens probe by measurement, and combines
The imaging of sample surfaces, to study the mechanical characteristic of film, in addition, associated electrical measurement can be carried out to film simultaneously.
Claims (1)
1. a kind of mechanical property measurement method of film sample, films test device mainly includes fibre optical sensor I (1), reflection
Mirror I (2), fibre optical sensor II (3), reflecting mirror II (4), probe (5), lens probe (6), corona probe (7), high-voltage constant current source
(8), metal cap (9), aperture plate (10), displacement platform (11), DC power supply (12), voltage source (13), sample (14), sample stage
(15), ring electrode (16), main electrode (17), micro objective (18), computer (19), galvanometer (20) and current control are grounded
Device (21), xyz are three-dimensional coordinate system, and the probe (5) has front end and end, and the probe (5) is from front end to end
It being formed by connecting by probe disk (5-1), cantilever (5-2) and microdrive (5-3), microdrive (5-3) can be mobile in the direction y,
Minimum movement stepping is 60 nanometers, maximum moving range is 30 millimeters, maximum rate travel is 2 mm/seconds, the probe disk
(5-1) be it is discoid, the probe disk lower surface (5-1) have probe position I (5-1-1), probe position II (5-1-2) and probe position III
(5-1-3), the probe position I (5-1-1) be located at probe (5) front end, probe position I (5-1-1) can mounted lens probe (6),
Also can install corona probe (7), probe position II (5-1-2) can mounted lens probe (6), probe position III (5-1-3) can
It installs corona probe (7), lens probe (6) can be switched to probe position I (5-1-1) from probe position II (5-1-2) to carry out
Corona probe (7) can be switched to probe position I (5-1-1) from probe position II (5-1-2) to carry out electricity reality by experiment of machanics
It tests, the upper surface probe disk (5-1) is equipped with reflecting mirror II (4), and reflecting mirror II (4) is parallel with xz plane, the side probe disk (5-1)
It is equipped with reflecting mirror I (2), reflecting mirror I (2) is parallel with x/y plane；Fibre optical sensor I (1) and fibre optical sensor II (3) is electric respectively
Cable connects computer (19), and the position of fibre optical sensor I (1) is fixed and faced reflecting mirror I (2), fibre optical sensor II's (3)
Position is fixed and is faced reflecting mirror II (4), and lens probe (6) top is half that a diameter range is 1.5 millimeters to 4 millimeters
Spherical glass lens, corona probe (7) cable connection high-voltage constant current source (8), corona probe (7) is 20 millimeters a length of, diameter is
0.3 millimeter；It is sequentially installed with metal cap (9) and aperture plate (10) below the lens probe (6) and corona probe (7) of probe (5),
The metal cap (9) and aperture plate (10) are all connected to displacement platform (11), and displacement platform (11) can control metal cap (9) and grid respectively
Net (10) is mobile, and for metal cap (9) by displacement platform (11) cable connection DC power supply (12), metal cap (9) is that length is 24 millis
Rice, the cylindrical surface that basal diameter is 18 millimeters, in the y-direction, aperture plate (10) is the gold for being 0.2 millimeter by diameter to the axis on cylindrical surface
Belong to the square net that the side length of line composition is 2 millimeters, aperture plate (10) passes through displacement platform (11) cable connection voltage source (13), electricity
Potential source (13) cable connection current controller (21)；Sample stage (15) is located at below aperture plate (10), and sample stage (15) can be in xz
It is moved in plane, minimum movement stepping is 60 nanometers, maximum moving range is 30 millimeters, maximum rate travel is 2 mm/seconds,
Sample stage (15) bottom has ground connection ring electrode (16) and main electrode (17), ground connection ring electrode (16) outer diameter is 20 millimeters,
Internal diameter is 18 millimeters, the disk that the main electrode (17) is 14 millimeters of diameter and can light transmission, sample (14) is located at sample stage
(15) in, sample (14) is contacted with ground connection ring electrode (16) and main electrode (17) respectively, and successively cable connection is electric for main electrode (17)
Flowmeter (20), current controller (21) and computer (19), micro objective (18) are located at below sample stage (15)；Galvanometer
(20) sample (14) the charging current I measured1It is input to current controller (21), preset sample (14) is filled in computer (19)
Electric current I2It is input to current controller (21), current controller (21) compares I1And I2Feedback signal is exported afterwards to voltage source
(13), the voltage being applied on aperture plate (10) can be controlled,
It is characterized in that: a kind of the step of mechanical property measurement method of film sample are as follows:
Lens probe (6) is switched to the probe position I (5-1-1) of probe (5) by one,；
Two, control microdrive (5-3) makes lens probe (6) be moved to just contact sample (14) surface；
Three, micro objectives (18) record sample (14) image in real time；
The measurement of four, normal force: control microdrive (5-3) makes lens probe (6) continue to apply pressure to sample (14) surface,
The deviation for recording reflecting mirror I (2) and reflecting mirror II (4) obtains the interaction force of normal direction by computer (19), and with it is micro-
Sample (14) image of endoscope objective lens (18) record is combined analysis, obtains sample (14) between surface deformation and normal force
Relationship；
The measurement of five, tangential forces: control microdrive (5-3) is to keep lens probe (6) and the normal force of sample (14) constant, method
It is 4mN to 15mN to power range, while controlling sample stage (15) keeps it mobile in the direction z, movement speed range is 1 to 10 micro-
Meter per second records the deviation of reflecting mirror I (2) and reflecting mirror II (4), obtains tangential interaction force by computer (19), and
It is combined analysis with sample (14) image of micro objective (18) record, obtains sample (14) deformation and normal force and sample
The relationship of platform (15) movement speed；
Six, are according to step 4 and step 5 as a result, and combining between sample (14) deformation, sample (14) and lens probe (6)
Power, the relationship between sample (14) mechanical characteristic, obtain the bulk modulus of sample (14).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811083995.7A CN109115607B (en) | 2018-09-06 | 2018-09-06 | Method for measuring mechanical properties of film sample |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110108625A (en) * | 2019-05-11 | 2019-08-09 | 金华职业技术学院 | A kind of adherency force test method based on micro- tweezer |
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| CN109115607B (en) | 2024-01-30 |
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