CN110108625B - Adhesion force testing method based on micro-tweezers - Google Patents
Adhesion force testing method based on micro-tweezers Download PDFInfo
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- CN110108625B CN110108625B CN201910409056.5A CN201910409056A CN110108625B CN 110108625 B CN110108625 B CN 110108625B CN 201910409056 A CN201910409056 A CN 201910409056A CN 110108625 B CN110108625 B CN 110108625B
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- 238000012360 testing method Methods 0.000 title claims abstract description 10
- 238000006073 displacement reaction Methods 0.000 claims abstract description 103
- 239000002245 particle Substances 0.000 claims abstract description 71
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 230000003287 optical effect Effects 0.000 claims abstract description 23
- 230000001276 controlling effect Effects 0.000 claims description 13
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- 238000000926 separation method Methods 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000002210 silicon-based material Substances 0.000 claims description 3
- 238000012545 processing Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 2
- 238000012827 research and development Methods 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 description 16
- 239000000523 sample Substances 0.000 description 11
- 239000011859 microparticle Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 4
- 229920000647 polyepoxide Polymers 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000005459 micromachining Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
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- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000007648 laser printing Methods 0.000 description 1
- 238000011326 mechanical measurement Methods 0.000 description 1
- 239000006187 pill Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N19/00—Investigating materials by mechanical methods
- G01N19/04—Measuring adhesive force between materials, e.g. of sealing tape, of coating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/28—Adhesion force microscopy
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Abstract
The invention relates to the field of new material research and development, in particular to an adhesion testing method based on micro tweezers, which comprises a base, a displacement table I, a mechanical measuring unit, a laser displacement meter, a cantilever, a camera frame, a camera, a displacement table II, a substrate, a particle sample, micro tweezers, an actuator, a displacement table III, a bracket, an optical microscope, a computer and a cable.
Description
Technical Field
The invention relates to the field of new material research and development, in particular to an adhesion testing method based on micro-tweezers for manipulating micro-particles by adopting the micro-tweezers to conduct adhesion testing.
Background
The study of the adhesion of fine particles is of great importance for various industrial applications involving powders, such as toners in laser printing, pill particles in pharmaceutical, related powders in food processing; a colloid probe atomic force microscope is a technology capable of precisely researching the adhesion of particles, estimating the stress between a probe and a surface by measuring the deflection of a cantilever, and has the disadvantages that the particles to be measured need to be fixed to the cantilever of the atomic force microscope by using epoxy resin, a long preparation time is required, and the epoxy resin may be deformed during the adhesion measurement process, thereby affecting the accuracy of the measurement result, and the adhesion test method based on micro tweezers can solve the problems.
Disclosure of Invention
In order to solve the problems, the method combines the micro-tweezers driven by the micro-electromechanical system with the cantilever of the atomic force microscope, and the adhesion force of single micro-particles is measured by the contact of the micro-tweezers with the cantilever after clamping the particles, and the particles to be measured are not required to be fixed by epoxy resin, so that the measurement time can be saved, and the measurement accuracy is high.
The technical scheme adopted by the invention is as follows:
the adhesive force testing device based on the micro-tweezers comprises a base, a displacement table I, a mechanical measuring unit, a laser displacement meter, a cantilever, a camera frame, a camera, a displacement table II, a substrate, a particle sample, the micro-tweezers, an actuator, a displacement table III, a support, an optical microscope, a computer and a cable, wherein xyz is a three-dimensional coordinate system, the displacement table I, the camera frame, the displacement table II and the support are sequentially connected onto the base, the displacement table I, the camera frame, the micro-tweezers, the actuator and the displacement table III are respectively connected with the computer through the cable, the mechanical measuring unit is arranged on the displacement table I, the mechanical measuring unit can respectively linearly move in the xyz three directions through controlling the displacement table I by the computer, the cantilever is a metal sheet with a fixed end and a movable end, the fixed end is fixed onto the mechanical measuring unit, the fixed end and the movable end are positioned on the same horizontal plane under the condition of not being subjected to external force, the laser displacement meter is connected onto the side of the mechanical measuring unit, and the laser displacement meter is positioned at 20 mm below the movable end of the cantilever for monitoring the displacement of the movable end of the cantilever in the y direction; the camera is arranged on the camera frame and used for monitoring the deformation of the cantilever, and the camera frame is controlled by the computer to enable the camera to respectively move in the xyz three directions in a straight line; the substrate is positioned on the displacement table II, and a particle sample is adsorbed on the substrate; the displacement table III and the optical microscope are arranged on the support from bottom to top, the positions of the displacement table III and the optical microscope can be adjusted through the support, the actuator is arranged below the displacement table III, the actuator can respectively linearly move in the xyz three directions through the control of the displacement table III by the computer, the actuator can be stretched in the y direction through the application of different voltages to the actuator by the computer, the micro-tweezers are fixed below the actuator, the front ends of the micro-tweezers are provided with two operating fingers, the operating fingers can be opened or closed through the control of the computer, the operating fingers can grasp particle samples, the particle samples to be grasped and tested are called particles to be tested, the micro-tweezers are provided with micro-electromechanical force sensors, and the micro-electromechanical force sensors can transmit information of forces received by the measured micro-tweezers to the computer; the cantilever is a cantilever of an atomic force microscope, the length of the cantilever is 250 micrometers, the width of the cantilever is 30 micrometers, the thickness of the cantilever is 0.9 micrometer, the elastic coefficient of the cantilever is 0.09 newton/meter, the size range of a particle sample is 0.5 micrometers to 5 micrometers, the micro-tweezers are made of silicon materials through micromachining, the maximum gap between two operating fingers at the front end of the micro-tweezers is 8 micrometers, the maximum force which can be applied between the two operating fingers is 400 micro-newtons, the actuator is made of piezoelectric ceramics, and the minimum telescopic stepping of the actuator in the y direction is 50 nanometers.
The adhesion force measurement experiment based on the adhesion force test method of the micro-tweezers comprises the following steps:
the method comprises the steps that firstly, the position of an optical microscope is adjusted through a support, the optical microscope is located right above a substrate and used for observing the surface condition of the substrate and the moving condition of micro tweezers, the position of a displacement table III is adjusted through the support, the displacement table III is located above the side of the substrate, and the displacement table III and an actuator are controlled through a computer, so that the micro tweezers move to a position 200 microns above the substrate;
step two, the actuator is extended in the y direction by computer control, the front end of the micro-tweezers is moved to be in contact with the surface of the substrate, and then the actuator is contracted in the y direction by computer control, and the front end of the micro-tweezers is moved upwards by 1 micron;
thirdly, controlling a displacement table III through a computer to enable the micro-tweezers to move in a horizontal plane, enabling two operating fingers at the front end of the micro-tweezers to be positioned on two sides of one particle to be detected, and controlling the operating fingers at the front end of the micro-tweezers to perform closing operation through the computer so that the two operating fingers clamp the particle to be detected;
regulating the position of the optical microscope through the bracket so that the optical microscope is positioned right above the cantilever and used for observing the deformation condition of the cantilever and the movement condition of the micro-tweezers, regulating the position of the displacement table III through the bracket so that the displacement table III is positioned above the side of the cantilever, and controlling the displacement table III through the computer so that the actuator and the micro-tweezers move to a position of 200 micrometers right above the cantilever;
step five, the actuator is controlled by a computer to extend in the y direction, and particles to be detected at the front end of the micro-tweezers are enabled to move at a speed of 2 microns/second from top to bottom until the particles contact with the upper surface of the movable end of the cantilever, and meanwhile, the micro-electromechanical force sensor in the micro-tweezers detects that the stress of the micro-tweezers changes, or the laser displacement meter detects that the movable end of the cantilever moves along the y negative direction, so that the particles to be detected are in contact with the cantilever;
step six, the actuator is extended in the y direction under the control of a computer, and particles to be detected at the front end of the micro-tweezers continuously move at a speed of 0.5 micron/second from top to bottom until the movable end of the cantilever measured by the laser displacement meter deviates downwards from the initial position by 1 micron;
step seven, controlling a displacement table I through a computer to enable the mechanical measuring unit to drive the fixed end of the cantilever to move at a speed of 0.5 micron/second along the y negative direction until particles to be measured are separated from the cantilever;
step eight, recording the displacement of the movable end of the cantilever in the y direction by a laser displacement meter, and obtaining the position y of the movable end of the cantilever in the y direction at the moment of separating from the particles to be detected 1 Calculating the deflection distance delta y=y of the movable end of the cantilever 1 -y 0 Wherein y is 0 The movable end of the cantilever is at the initial position in the y direction when the movable end is not subjected to external force;
and step nine, obtaining the adhesion force of the particles to be detected on the surface of the cantilever through the product of the elastic coefficient of the cantilever and the deflection distance deltay between the movable end of the cantilever and the separation moment of the particles to be detected.
The operation advantages in the second step and the third step are that the bottom of the particles to be detected is lower than the bottom of the operating finger of the micro-tweezers, and the bottom of the particles to be detected is ensured to be contacted with the cantilever, and the micro-tweezers are not contacted with the cantilever.
The beneficial effects of the invention are as follows:
according to the method, the adhesion force of the single microparticles is measured by contacting the microparticles with the cantilever after the microparticles are clamped by the micro forceps, epoxy resin is not needed to fix the microparticles to be measured in the experimental process, the measurement precision is improved, and the measurement time is saved.
Drawings
The following is further described in connection with the figures of the present invention:
FIG. 1 is a schematic illustration of the present invention;
FIG. 2 is a schematic illustration of one of the cantilever positions during an adhesion measurement;
FIG. 3 is a schematic illustration of a second cantilever position during an adhesion measurement;
FIG. 4 is a schematic view of the third cantilever position during an adhesion measurement.
In the figure, 1, base, 2, displacement stage I,3, mechanical measuring unit, 4, laser displacement meter, 5, cantilever, 6, camera frame, 7, camera, 8, displacement stage II,9, substrate, 10, particle sample, 11, micropin, 12, actuator, 13, displacement stage III,14, bracket, 15, optical microscope.
Detailed Description
As shown in fig. 1, the invention is a schematic diagram, which comprises a base (1), a displacement table I (2), a mechanical measuring unit (3), a laser displacement meter (4), a cantilever (5), a camera frame (6), a camera (7), a displacement table II (8), a substrate (9), a particle sample (10), micro tweezers (11), an actuator (12), a displacement table III (13), a support (14), an optical microscope (15), a computer and a cable, xyz is a three-dimensional coordinate system, the displacement table I (2), the camera frame (6), the displacement table II (8) and the support (14) are sequentially connected to the base (1), the displacement table I (2), the camera frame (6), the micro tweezers (11), the actuator (12) and the displacement table III (13) are respectively connected to the computer through the cable, the mechanical measuring unit (3) is arranged on the displacement table I (2), the displacement table I (2) is controlled by the computer, the mechanical measuring unit (3) can respectively linearly move in three directions of xyz, the cantilever (5) is a metal sheet with a fixed end and a movable end, the fixed end is not fixed end is fixed on the mechanical measuring unit (3) and is not connected to the mechanical measuring unit (4) at the same side surface and is not connected to the mechanical measuring unit, the laser displacement meter (4) is positioned at a position 20 mm below the movable end of the cantilever (5) and is used for monitoring the displacement of the movable end of the cantilever (5) in the y direction; the camera (7) is arranged on the camera frame (6) and used for monitoring the deformation of the cantilever (5), and the camera frame (6) is controlled by a computer so that the camera (7) can respectively linearly move in three directions of xyz; the substrate (9) is positioned on the displacement table II (8), and a particle sample (10) is adsorbed on the substrate (9); the displacement table III (13) and the optical microscope (15) are arranged on the support (14) from bottom to top, the positions of the displacement table III (13) and the optical microscope (15) can be adjusted through the support (14), the actuator (12) is arranged below the displacement table III (13), the displacement table III (13) is controlled by a computer to enable the actuator (12) to respectively move in the xyz three directions in a straight line, different voltages are applied to the actuator (12) by the computer to enable the actuator (12) to stretch in the y direction, the micro-forceps (11) are fixed below the actuator (12), two operating fingers are arranged at the front end of the micro-forceps (11), the operating fingers can be opened or closed through the computer control of the micro-forceps (11), the particle sample (10) to be tested can be grasped, the micro-forceps (11) are called particles to be tested, the micro-electro-mechanical force sensor is arranged, and the micro-mechanical force sensor can transmit information of the measured micro-forceps (11) to the computer; the cantilever (5) is a cantilever of an atomic force microscope, the length of the cantilever (5) is 250 micrometers, the width of the cantilever is 30 micrometers, the thickness of the cantilever is 0.9 micrometer, the elastic coefficient of the cantilever (5) is 0.09 newton/meter, the size range of the particle sample (10) is 0.5 micrometers to 5 micrometers, the micro-tweezers (11) are made of silicon materials in a micro-machining mode, the maximum gap between two operating fingers at the front end of the micro-tweezers (11) is 8 micrometers, the maximum force which can be applied between the two operating fingers is 400 micrometers, the actuator (12) is made of piezoelectric ceramics, and the minimum telescopic stepping of the actuator (12) in the y direction is 50 nanometers; the cantilever (5) adopts an atomic force microscope cantilever manufactured by Bruke company, and the micro forceps (11) adopts ATN-PM010A model manufactured by AOI company.
As shown in fig. 2, which is a schematic diagram of one of the cantilever positions in the adhesion measurement process, the actuator (12) is extended in the y direction by computer control, and the particles to be measured at the front end of the micro-tweezers (11) continue to move at a speed of 0.5 micrometers/second from top to bottom until the movable end of the cantilever (5) measured by the laser displacement meter (4) deviates downwards from the initial position by 1 micrometer.
As shown in fig. 3, which is a schematic diagram of a second cantilever position in the adhesion force measurement process, the displacement table I (2) is controlled by the computer, so that the mechanical measurement unit (3) drives the fixed end of the cantilever (5) to move at a speed of 0.5 μm/s along the negative y direction until the particles to be measured are separated from the cantilever (5), and the moment that the particles to be measured still have adhesion force with the cantilever (5) is reflected in the figure, so that the movable end of the cantilever (5) is tilted upwards.
As in FIG. 4, the adhesion measurement procedureA third diagram of the middle cantilever position reflects the separation of the particles to be detected from the cantilever (5), the displacement of the movable end of the cantilever (5) in the y direction is recorded by the laser displacement meter (4), and the y position of the movable end of the cantilever (5) in the y direction at the moment of separating the particles to be detected is obtained 1 Calculating the deflection distance delta y=y of the movable end of the cantilever (5) 1 -y 0 Wherein y is 0 Is the initial position of the movable end of the cantilever (5) in the y direction when no external force is applied.
Principle of adhesion measurement experiment: when the device is used for carrying out adhesion force test on particles, firstly, the micro-tweezers (11) are used for clamping one particle in a particle sample (10) adsorbed on a substrate (9) to serve as the particles to be tested, then, the displacement table III (13) and an actuator (12) are adjusted to enable the micro-tweezers (11) to enable the clamped particles to be tested to be in contact with the movable end of the cantilever (5) from top to bottom at a speed of 2 microns/second and bear force, and enable the cantilever (5) to bend. Then the displacement table I (2) is controlled by a computer so that the mechanical measuring unit (3) drives the fixed end of the cantilever (5) to move downwards along the negative y direction at the moving speed of 0.5 microns/second until particles to be measured are separated from the cantilever (5), the deformation of the cantilever (5) and the micro-tweezers (11) is recorded by the camera (7) in the process, the displacement of the movable end of the cantilever (5) in the y direction is recorded by the laser displacement meter (4), and the position y of the movable end of the cantilever (5) in the y direction at the moment of separating the particles to be measured is obtained 1 Calculating the deflection distance delta y=y of the movable end of the cantilever (5) 1 -y 0 Wherein y is 0 The adhesive force of the particles to be measured on the surface of the cantilever (5) is finally obtained by multiplying the elastic coefficient of the cantilever (5) by the deflection distance deltay of the movable end of the cantilever (5) at the moment of separating from the particles to be measured when the movable end of the cantilever (5) is not subjected to external force. The calculation is based on the ideal case that the cantilever (5) is regarded as elastic, the micro-forceps (11) is regarded as approximate rigid body, and in the actual case, the micro-forceps (11) have slight bending and guiding in the measuring processThe deflection of the cantilever (5) is reduced, so that the measuring sensitivity of the device is reduced, and the cantilever (5) with a small enough elastic coefficient compared with the elastic coefficient is required to be selected because the elastic coefficient of the micro-forceps is 0.9N/m.
The adhesion force testing method based on the micro-tweezers comprises the following steps:
the method comprises the steps that firstly, the position of an optical microscope (15) is adjusted through a support (14), the optical microscope (15) is located right above a substrate (9) and used for observing the surface condition of the substrate (9) and the moving condition of micro-tweezers (11), the position of a displacement table III (13) is adjusted through the support (14), the displacement table III (13) is located above the side of the substrate (9), and the displacement table III (13) and an actuator (12) are controlled through a computer, so that the micro-tweezers (11) move to a position 200 microns right above the substrate (9);
step two, the actuator (12) is extended in the y direction by computer control, the front end of the micro-tweezers (11) is moved to be in contact with the surface of the substrate (9), and then the actuator (12) is contracted in the y direction by computer control, and the front end of the micro-tweezers (11) is moved upwards by 1 micrometer;
thirdly, controlling a displacement table III (13) through a computer to enable the micro-tweezers (11) to move in a horizontal plane, enabling two operating fingers at the front end of the micro-tweezers (11) to be located on two sides of one particle to be detected, and controlling the operating fingers at the front end of the micro-tweezers (11) to conduct closing operation through the computer to enable the two operating fingers to clamp the particle to be detected;
regulating the position of an optical microscope (15) through a support (14) so that the optical microscope (15) is positioned right above the cantilever (5) and is used for observing the deformation condition of the cantilever (5) and the movement condition of the micro-forceps (11), regulating the position of a displacement table III (13) through the support (14) so that the displacement table III (13) is positioned above the side of the cantilever (5), and controlling the displacement table III (13) through a computer so that an actuator (12) and the micro-forceps (11) move to a position of 200 micrometers right above the cantilever (5);
step five, the actuator (12) is extended in the y direction through computer control, and particles to be detected at the front end of the micro-tweezers (11) move at a speed of 2 microns/second from top to bottom until the particles contact with the upper surface of the movable end of the cantilever (5), and meanwhile, a micro-electromechanical force sensor in the micro-tweezers (11) measures that the stress of the micro-tweezers (11) changes, or a laser displacement meter (4) measures that the movable end of the cantilever (5) moves along the y negative direction, so that the particles to be detected are in contact with the cantilever (5);
step six, the actuator (12) is extended in the y direction by computer control, and the particles to be detected at the front end of the micro-tweezers (11) continue to move at the speed of 0.5 micron/second from top to bottom until the movable end of the cantilever (5) measured by the laser displacement meter (4) deviates downwards from the initial position by 1 micron;
step seven, controlling a displacement table I (2) through a computer, so that a mechanical measuring unit (3) drives a fixed end of a cantilever (5) to move at a speed of 0.5 micrometers/second along a y negative direction until particles to be measured are separated from the cantilever (5);
step eight, recording the displacement of the movable end of the cantilever (5) in the y direction by a laser displacement meter (4), and obtaining the position y of the movable end of the cantilever (5) in the y direction at the moment of separating from the particles to be detected 1 Calculating the deflection distance delta y=y of the movable end of the cantilever (5) 1 -y 0 Wherein y is 0 The movable end of the cantilever (5) is at an initial position in the y direction when no external force is applied;
and step nine, obtaining the adhesion force of the particles to be detected on the surface of the cantilever (5) through the product of the elastic coefficient of the cantilever (5) and the deflection distance deltay between the movable end of the cantilever (5) and the separation moment of the particles to be detected.
The operation advantages in the second step and the third step are that the bottom of the particles to be detected is lower than the bottom of the operating finger of the micro-tweezers (11), so that the bottom of the particles to be detected is ensured to be contacted with the cantilever (5), and the micro-tweezers (11) are not contacted with the cantilever (5).
The method is based on micro tweezers driven by a micro electro mechanical system and a cantilever of an atomic force microscope, is used for measuring the adhesion force of single micro particles, and has the advantages of short measurement time and high measurement accuracy.
Claims (1)
1. The adhesion force testing device based on the micro-tweezers comprises a base (1), a displacement table I (2), a mechanical measuring unit (3), a laser displacement meter (4), a cantilever (5), a camera frame (6), a camera (7), a displacement table II (8), a substrate (9), a particle sample (10), the micro-tweezers (11), an actuator (12), a displacement table III (13), a bracket (14), an optical microscope (15), a computer and a cable, wherein xyz is a three-dimensional coordinate system, the displacement table I (2), the camera frame (6), the displacement table II (8) and the bracket (14) are sequentially connected onto the base (1), the displacement table I (2), the camera frame (6), the micro-tweezers (11), the actuator (12) and the displacement table III (13) are respectively connected with the computer through the cable, the mechanical measuring unit (3) is arranged on the displacement table I (2), the mechanical measuring unit (3) can respectively linearly move in three directions of xyz through the computer, the fixed end (5) is a metal sheet with the fixed end and the fixed end which is not fixed on the mechanical measuring unit (4) and the mechanical measuring unit is not fixed on the horizontal plane, the laser displacement meter (4) is positioned at a position 20 mm below the movable end of the cantilever (5) and is used for monitoring the displacement of the movable end of the cantilever (5) in the y direction; the camera (7) is arranged on the camera frame (6) and used for monitoring the deformation of the cantilever (5), and the camera frame (6) is controlled by a computer so that the camera (7) can respectively linearly move in three directions of xyz; the substrate (9) is positioned on the displacement table II (8), and a particle sample (10) is adsorbed on the substrate (9); the displacement table III (13) and the optical microscope (15) are arranged on the support (14) from bottom to top, the positions of the displacement table III (13) and the optical microscope (15) can be adjusted through the support (14), the actuator (12) is arranged below the displacement table III (13), the displacement table III (13) is controlled by a computer to enable the actuator (12) to respectively move in the xyz three directions in a straight line, different voltages are applied to the actuator (12) by the computer to enable the actuator (12) to stretch in the y direction, the micro-forceps (11) are fixed below the actuator (12), two operating fingers are arranged at the front end of the micro-forceps (11), the operating fingers can be opened or closed through the computer control of the micro-forceps (11), the particle sample (10) to be tested can be grasped, the micro-forceps (11) are called particles to be tested, the micro-electro-mechanical force sensor is arranged, and the micro-mechanical force sensor can transmit information of the measured micro-forceps (11) to the computer; the cantilever (5) is a cantilever of an atomic force microscope, the length of the cantilever (5) is 250 micrometers, the width is 30 micrometers, the thickness is 0.9 micrometer, the elastic coefficient of the cantilever (5) is 0.09 newton/meter, the size range of the particle sample (10) is 0.5 micrometers to 5 micrometers, the micro-tweezers (11) are made of silicon materials by micro-processing, the maximum gap between two operating fingers at the front end of the micro-tweezers (11) is 8 micrometers, the maximum force which can be applied between the two operating fingers is 400 micro-newtons, the actuator (12) is made of piezoelectric ceramics, the minimum telescopic stepping of the actuator (12) in the y direction is 50 nanometers,
the method is characterized in that: the adhesion force testing method based on the micro-tweezers comprises the following steps:
the method comprises the steps that firstly, the position of an optical microscope (15) is adjusted through a support (14), the optical microscope (15) is located right above a substrate (9) and used for observing the surface condition of the substrate (9) and the moving condition of micro-tweezers (11), the position of a displacement table III (13) is adjusted through the support (14), the displacement table III (13) is located above the side of the substrate (9), and the displacement table III (13) and an actuator (12) are controlled through a computer, so that the micro-tweezers (11) move to a position 200 microns right above the substrate (9);
step two, the actuator (12) is extended in the y direction by computer control, the front end of the micro-tweezers (11) is moved to be in contact with the surface of the substrate (9), and then the actuator (12) is contracted in the y direction by computer control, and the front end of the micro-tweezers (11) is moved upwards by 1 micrometer;
thirdly, controlling a displacement table III (13) through a computer to enable the micro-tweezers (11) to move in a horizontal plane, enabling two operating fingers at the front end of the micro-tweezers (11) to be located on two sides of one particle to be detected, and controlling the operating fingers at the front end of the micro-tweezers (11) to conduct closing operation through the computer to enable the two operating fingers to clamp the particle to be detected;
regulating the position of an optical microscope (15) through a support (14) so that the optical microscope (15) is positioned right above the cantilever (5) and is used for observing the deformation condition of the cantilever (5) and the movement condition of the micro-forceps (11), regulating the position of a displacement table III (13) through the support (14) so that the displacement table III (13) is positioned above the side of the cantilever (5), and controlling the displacement table III (13) through a computer so that an actuator (12) and the micro-forceps (11) move to a position of 200 micrometers right above the cantilever (5);
step five, the actuator (12) is extended in the y direction through computer control, and particles to be detected at the front end of the micro-tweezers (11) move at a speed of 2 microns/second from top to bottom until the particles contact with the upper surface of the movable end of the cantilever (5), and meanwhile, a micro-electromechanical force sensor in the micro-tweezers (11) measures that the stress of the micro-tweezers (11) changes, or a laser displacement meter (4) measures that the movable end of the cantilever (5) moves along the y negative direction, so that the particles to be detected are in contact with the cantilever (5);
step six, the actuator (12) is extended in the y direction by computer control, and the particles to be detected at the front end of the micro-tweezers (11) continue to move at the speed of 0.5 micron/second from top to bottom until the movable end of the cantilever (5) measured by the laser displacement meter (4) deviates downwards from the initial position by 1 micron;
step seven, controlling a displacement table I (2) through a computer, so that a mechanical measuring unit (3) drives a fixed end of a cantilever (5) to move at a speed of 0.5 micrometers/second along a y negative direction until particles to be measured are separated from the cantilever (5);
step eight, recording the displacement of the movable end of the cantilever (5) in the y direction by a laser displacement meter (4), and obtaining the position y of the movable end of the cantilever (5) in the y direction at the moment of separating from the particles to be detected 1 Calculating the deflection distance delta y=y of the movable end of the cantilever (5) 1 -y 0 Wherein y is 0 The movable end of the cantilever (5) is at an initial position in the y direction when no external force is applied;
and step nine, obtaining the adhesion force of the particles to be detected on the surface of the cantilever (5) through the product of the elastic coefficient of the cantilever (5) and the deflection distance deltay between the movable end of the cantilever (5) and the separation moment of the particles to be detected.
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