CN109097747A - 一种管型靶材的生产方法 - Google Patents

一种管型靶材的生产方法 Download PDF

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Publication number
CN109097747A
CN109097747A CN201811061946.3A CN201811061946A CN109097747A CN 109097747 A CN109097747 A CN 109097747A CN 201811061946 A CN201811061946 A CN 201811061946A CN 109097747 A CN109097747 A CN 109097747A
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molybdenum
molybdenum tube
production method
stainless steel
embryo
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曾墩风
罗永春
王志强
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Wuhu Yingri Technology Co Ltd
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Wuhu Yingri Technology Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3407Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/12Both compacting and sintering
    • B22F3/14Both compacting and sintering simultaneously
    • B22F3/15Hot isostatic pressing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/20Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces by extruding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/24After-treatment of workpieces or articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F5/00Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
    • B22F5/10Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product of articles with cavities or holes, not otherwise provided for in the preceding subgroups
    • B22F5/106Tube or ring forms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/24After-treatment of workpieces or articles
    • B22F2003/247Removing material: carving, cleaning, grinding, hobbing, honing, lapping, polishing, milling, shaving, skiving, turning the surface
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10Processes characterised by the sequence of their steps

Abstract

本发明提供一种管型靶材的生产方法,所述生产方法步骤如下:步骤一:选用费氏粒度2~5μm的钼粉备用;步骤二:将钼粉装入设计好的管型不锈钢包套中,充分振实;步骤三:对不锈钢包套进行抽真空处理,并且进行封焊;步骤四:在预定条件下对物料进行压缩加热成型;步骤五:将不锈钢包套去除,得到钼管胚;步骤六:将钼管胚加热,同时进行挤压加工;步骤七:将完成挤压加工的钼管胚进行机械加工,得到成品钼管。通过热等静压成型及挤压加工的方式对钼材料进行处理加工,制成钼管,提高工作效率,降低生产成本,缩短生产时间,提高钼管的品质,并且通过较少的工艺步骤完成钼管靶材的制造,节约人力成本。

Description

一种管型靶材的生产方法
技术领域
本发明涉及管型靶材制造生产领域,尤其涉及一种管型靶材的生产方法。
背景技术
目前在制造管型靶材时,会使用钼管或钼合金管作为原料进行加工,目前对钼管进行制造时,通常使用的方式为将钼粉末使用砂芯的挠性铸模进行挤压烧结,但是上述工作在制造中成本较大,且制造时间较长,并且需要使用退火工艺进行处理,增加工艺步骤,进而增加加工时间。因此,解决管型靶材制造时成本较高且加工时间较长的问题就显得尤为重要了。
发明内容
为解决上述问题,本发明的目的提供一种管型靶材的生产方法,通过热等静压成型及挤压加工的方式对钼材料进行处理加工,制成钼管,提高工作效率,降低生产成本,缩短生产时间,解决了管型靶材制造时成本较高且加工时间较长的问题。
本发明提供一种管型靶材的生产方法,所述生产方法步骤如下:
步骤一:选用费氏粒度2~5μm的钼粉备用;
步骤二:将钼粉装入设计好的管型不锈钢包套中,充分振实;
步骤三:对不锈钢包套进行抽真空处理,并且进行封焊;
步骤四:在预定条件下对物料进行压缩加热成型;
步骤五:将不锈钢包套去除,得到钼管胚;
步骤六:将钼管胚加热,同时进行挤压加工;
步骤七:将完成挤压加工的钼管胚进行机械加工,得到成品钼管。
进一步改进在于:所述步骤四中进行压缩预成型的温度为1100~1400℃,压力为100~200Mpa。
进一步改进在于:所述步骤六中对钼管胚将进行加热时的加热温度为1100~1400℃。
进一步改进在于:所述步骤七中对钼管胚进行机械加工,是将钼管胚上多余的部分去除,多余的废料回收后重复进行钼管修补工作。
本发明的有益效果:通过热等静压成型及挤压加工的方式对钼材料进行处理加工,制成钼管,提高工作效率,降低生产成本,缩短生产时间,提高钼管的品质,并且通过较少的工艺步骤完成钼管靶材的制造,节约人力成本。
具体实施方式
为了加深对本发明的理解,下面将结合实施例对本发明作进一步详述,该实施例仅用于解释本发明,并不构成对本发明保护范围的限定。
本实施例提供一种管型靶材的生产方法,所述生产方法步骤如下:
步骤一:选用费氏粒度2~5μm的钼粉备用;
步骤二:将钼粉装入设计好的管型不锈钢包套中,充分振实;
步骤三:对不锈钢包套进行抽真空处理,并且进行封焊;
步骤四:在预定条件下对物料进行压缩加热成型;
步骤五:将不锈钢包套去除,得到钼管胚;
步骤六:将钼管胚加热,同时进行挤压加工;
步骤七:将完成挤压加工的钼管胚进行机械加工,得到成品钼管。
所述步骤四中进行压缩预成型的温度为1350℃,压力为180Mpa。所述步骤六中对钼管胚将进行加热时的加热温度为1250℃。所述步骤七中对钼管胚进行机械加工,是将钼管胚上多余的部分去除,多余的废料回收后重复进行钼管修补工作。通过热等静压成型及挤压加工的方式对钼材料进行处理加工,制成钼管,提高工作效率,降低生产成本,缩短生产时间,提高钼管的品质,并且通过较少的工艺步骤完成钼管靶材的制造,节约人力成本。

Claims (4)

1.一种管型靶材的生产方法,其特征在于:所述生产方法步骤如下:
步骤一:选用费氏粒度2~5μm的钼粉备用;
步骤二:将钼粉装入设计好的管型不锈钢包套中,充分振实;
步骤三:对不锈钢包套进行抽真空处理,并且进行封焊;
步骤四:在预定条件下对物料进行压缩加热成型;
步骤五:将不锈钢包套去除,得到钼管胚;
步骤六:将钼管胚加热,同时进行挤压加工;
步骤七:将完成挤压加工的钼管胚进行机械加工,得到成品钼管。
2.如权利要求1所述的一种管型靶材的生产方法,其特征在于:所述步骤四中进行压缩预成型的温度为1100~1400℃,压力为100~200Mpa。
3.如权利要求1所述的一种管型靶材的生产方法,其特征在于:所述步骤六中对钼管胚将进行加热时的加热温度为1100~1400℃。
4.如权利要求1所述的一种管型靶材的生产方法,其特征在于:所述步骤七中对钼管胚进行机械加工,是将钼管胚上多余的部分去除,多余的废料回收后重复进行钼管修补工作。
CN201811061946.3A 2018-09-12 2018-09-12 一种管型靶材的生产方法 Pending CN109097747A (zh)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110000391A (zh) * 2019-02-28 2019-07-12 株洲硬质合金集团有限公司 一种钼管的制备方法
CN112589099A (zh) * 2020-12-15 2021-04-02 江苏应用元素科技有限公司 一种降低多弧铬靶生产成本的方法
CN113275575A (zh) * 2021-03-05 2021-08-20 芜湖映日科技股份有限公司 一种管型靶材的生产方法
CN115041685A (zh) * 2022-05-25 2022-09-13 邯郸新兴特种管材有限公司 一种钼管成型的方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101259584A (zh) * 2008-04-25 2008-09-10 胡延槽 高密度钼管的制备方法
CN104087903A (zh) * 2014-07-25 2014-10-08 安泰科技股份有限公司 钼钠管型靶材及其制造方法和钼钠靶材
CN104439247A (zh) * 2014-12-30 2015-03-25 山东昊轩电子陶瓷材料有限公司 钼合金靶材的制备方法
CN106319457A (zh) * 2015-06-19 2017-01-11 宁波江丰电子材料股份有限公司 钨钛管靶的制造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101259584A (zh) * 2008-04-25 2008-09-10 胡延槽 高密度钼管的制备方法
CN104087903A (zh) * 2014-07-25 2014-10-08 安泰科技股份有限公司 钼钠管型靶材及其制造方法和钼钠靶材
CN104439247A (zh) * 2014-12-30 2015-03-25 山东昊轩电子陶瓷材料有限公司 钼合金靶材的制备方法
CN106319457A (zh) * 2015-06-19 2017-01-11 宁波江丰电子材料股份有限公司 钨钛管靶的制造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110000391A (zh) * 2019-02-28 2019-07-12 株洲硬质合金集团有限公司 一种钼管的制备方法
CN112589099A (zh) * 2020-12-15 2021-04-02 江苏应用元素科技有限公司 一种降低多弧铬靶生产成本的方法
CN113275575A (zh) * 2021-03-05 2021-08-20 芜湖映日科技股份有限公司 一种管型靶材的生产方法
CN115041685A (zh) * 2022-05-25 2022-09-13 邯郸新兴特种管材有限公司 一种钼管成型的方法

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