CN109087848A - A kind of efficient monocrystalline silicon piece washing degumming device - Google Patents
A kind of efficient monocrystalline silicon piece washing degumming device Download PDFInfo
- Publication number
- CN109087848A CN109087848A CN201810761448.3A CN201810761448A CN109087848A CN 109087848 A CN109087848 A CN 109087848A CN 201810761448 A CN201810761448 A CN 201810761448A CN 109087848 A CN109087848 A CN 109087848A
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- CN
- China
- Prior art keywords
- power cylinder
- monocrystalline silicon
- service sink
- screen frame
- silicon piece
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02101—Cleaning only involving supercritical fluids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses a kind of efficient monocrystalline silicon pieces to wash degumming device, including bracket, crossbeam, sliding block, hanging rod, clean screen frame, service sink, rinsing bath, pedestal and ultrasonic oscillator, the service sink and rinsing bath are arranged on pedestal, and service sink is not connected to mutually with rinsing bath, the bottom of service sink and rinsing bath is respectively connected with drainpipe, crossbeam is fixed by the bracket in the surface of service sink, horizontal power cylinder one is installed on crossbeam, sliding block is installed on the output end of power cylinder one, power cylinder two is installed on sliding block, the output end of power cylinder two is connected with hanging rod by hook, the end of two hanging rods is connect with the hanging rod attachment base of cleaning screen frame two sides, the beneficial effects of the present invention are: can efficiently realize cleaning and the rinse operation of monocrystalline silicon piece using moveable cleaning screen frame, and angle can be occurred by cleaning screen frame Deflection, convenient for pouring out the monocrystalline silicon piece cleaned in screen frame.
Description
Technical field
The present invention relates to a kind of ultrasonic cleaning equipment, specifically a kind of efficient monocrystalline silicon piece washes degumming device.
Background technique
Monocrystalline silicon is a kind of nonmetalloid that comparison is active, is the important component of crystalline material, is in new material
The forward position of development.Its main application is used as semiconductor material and utilizes solar energy power generating, heat supply etc..Since solar energy has
The many advantages such as have cleaning, environmental protection, facilitate, in the late three decades, solar utilization technique research and develop, commercially produce, city
Developing aspect all obtains tremendous development, become the world quickly, one of the new industry of stable development.
Monocrystalline silicon can be used for the life of diode grade, rectifying device grade, circuit-level and solar battery grade single crystal product article
It produces and deep processing manufactures, subsequent product integrated circuit and semiconductor separation part are widely used to every field, in military affairs
It is also occupied an important position in electronic equipment.
Existing monocrystalline silicon piece, block need to carry out degumming operation, and the prior art largely uses method for washing, but its water
It is lower to wash efficiency.
Summary of the invention
The purpose of the present invention is to provide a kind of efficient monocrystalline silicon pieces to wash degumming device, to solve above-mentioned background technique
The problem of middle proposition.
To achieve the above object, the invention provides the following technical scheme:
A kind of efficient monocrystalline silicon piece washing degumming device, including bracket, crossbeam, sliding block, hanging rod, cleaning screen frame, service sink, drift
Wash pool, pedestal and ultrasonic oscillator, the service sink and rinsing bath are arranged on pedestal, and service sink and rinsing bath do not connect mutually
Logical, the bottom of service sink and rinsing bath is respectively connected with drainpipe, and crossbeam is fixed by the bracket on the surface of service sink, crossbeam
Horizontal power cylinder one is installed, sliding block is installed on the output end of power cylinder one, power cylinder two, power cylinder are installed on sliding block
Two output end is connected with hanging rod by hook, and the end of two hanging rods and the hanging rod attachment base of cleaning screen frame two sides connect
It connects, i.e., cleaning screen frame, which is hung, is located on power cylinder two, and multiple ultrasonic oscillators are equipped on the inner wall of the service sink.
As a further solution of the present invention: the guiding for being oriented to slide block movement is also equipped on the bracket
Optical axis.
As further scheme of the invention: the bottom discharge pipe of the rinsing bath is connected by return pipe and rinsing bath
It connects, water pump and valve is installed on return pipe.
As further scheme of the invention: being also equipped with filter mechanism on the return pipe.
As further scheme of the invention: being further fixed on vertical plate on the sliding block, pass through power cylinder on vertical plate and install
Seat is equipped with the power cylinder three being obliquely installed, and the output end of power cylinder three is hinged with engaging lug by pin shaft, and engaging lug is mounted on
The top of screen frame is cleaned, and engaging lug and two hanging rod attachment bases form isosceles triangular structure.
As the present invention further scheme: the power cylinder one, power cylinder two and power cylinder three be cylinder, oil cylinder or
Electric cylinders, power cylinder one, power cylinder two and power cylinder three are controlled by controller.
As further scheme of the invention: the service sink also passes through pipeline and the liquid storage machine for storing cleaning solution
Structure connection.
Compared with prior art, the beneficial effects of the present invention are: can efficiently realize list using moveable cleaning screen frame
The cleaning of crystal silicon chip and rinse operation, and clean screen frame angular deflection can occur, convenient for the monocrystalline silicon piece in screen frame will be cleaned
It pours out.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of efficient monocrystalline silicon piece washing degumming device.
Fig. 2 washes the scheme of installation of power cylinder three in degumming device for a kind of efficient monocrystalline silicon piece.
Fig. 3 washes the structural schematic diagram of service sink and rinsing bath in degumming device for a kind of efficient monocrystalline silicon piece.
Fig. 4 is a kind of structural schematic diagram of efficient monocrystalline silicon piece washing degumming device middle cross beam.
In figure: 1- bracket, 2- crossbeam, 3- power cylinder one, 4- sliding block, 5- power cylinder two, 6- are oriented to optical axis, 7- power cylinder
Three, 8- vertical plate, 9- engaging lug, 10- hanging rod attachment base, 11- hanging rod, 12- clean screen frame, 13- service sink, 14- rinsing bath, 15-
Pedestal, 16- drainpipe, 17- ultrasonic oscillator, 18- pin shaft, 19- hook, 20- power cylinder mounting base.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Embodiment 1
Please refer to Fig. 1,3 and 4, in the embodiment of the present invention, a kind of efficient monocrystalline silicon piece washes degumming device, including bracket 1, horizontal
Beam 2, sliding block 4, hanging rod 11, cleaning screen frame 12, service sink 13, rinsing bath 14, pedestal 15 and ultrasonic oscillator 17, the service sink
13 and rinsing bath 14 be arranged on pedestal 15, and service sink 13 is not connected to mutually with rinsing bath 14, service sink 13 and rinsing bath 14
Bottom be respectively connected with drainpipe 16, certainly, service sink 13 is also connect by pipeline with being used to store the liquid storage mechanism of cleaning solution,
Crossbeam 2 is fixed on the surface of service sink 13 by bracket 1, is equipped with horizontal power cylinder 1 on crossbeam 2, power cylinder 1
Sliding block 4 is installed on output end, power cylinder 25 is installed on sliding block 4, the output end of power cylinder 25 is connected with by hook 19
The end of hanging rod 11, two hanging rods 11 is connect with the hanging rod attachment base 10 of cleaning 12 two sides of screen frame, i.e. cleaning screen frame 12 is
It hangs and is located on power cylinder 25, cleaning screen frame 12 is mainly used for holding monocrystalline silicon piece, pacifies on the inner wall of the service sink 13
Equipped with multiple ultrasonic oscillators 17, ultrasonic oscillator 17 is to be controlled from supersonic generator to service sink 13 to input ultrasonic wave,
The forward directed radiation of ultrasonic wave density interphase in cleaning solution makes cleaning solution flow and generate micro-bubble, and bubble is gradually increased, and breaks
Shock wave is generated when splitting, the colloid for being attached to monocrystalline silicon sheet surface is removed completely, reaches cleaning effect, also, clean and complete
Afterwards, power cylinder 25 is shunk, and cleaning screen frame 12 is driven to leave service sink 13, and then power cylinder 1 stretches out, and drives cleaning screen frame 12
The surface of rinsing bath 14 is moved to, power cylinder 25 stretches out later, and cleaning screen frame 12 is put into rinsing bath 14 and is floated
It washes, after the completion of rinsing, cleaning screen frame 12 is taken out.
Moreover, because therefore the quality that sliding block 4 bears cleaning screen frame 12 and power cylinder 25 etc. is only fixed in
It is excessively high to the intensity requirement of installation place on power cylinder 1, therefore, be also equipped on the bracket 1 for sliding block 4 move into
The guiding optical axis 6 of row guiding, guiding optical axis 6 can share the quality of cleaning screen frame 12 and power cylinder 25 etc., ensure that
The stability of structure.
In addition, the bottom discharge pipe 16 of the rinsing bath 14 is connect by return pipe with rinsing bath 14, installed on return pipe
There are water pump and valve, be used to form circulating water flow in rinsing bath 14, convenient for being carried out to the monocrystalline silicon piece in cleaning screen frame 12
Rinsing.
Further, it is also equipped with filter mechanism on return pipe, for the impurity at rinsing to be filtered, specifically,
The concrete composition and connection type of filter mechanism do not do specific restriction.
Embodiment 2
Referring to Fig. 2, although the high-efficiency washing to monocrystalline silicon piece may be implemented in embodiment 1, its loading and unloading, especially for
It is not convenient enough for blanking, so, the present embodiment has made following improvement:
It is further fixed on vertical plate 8 on the sliding block 4, passes through power cylinder mounting base 20 on vertical plate 8 and the power cylinder being obliquely installed is installed
37, the output end of power cylinder 37 is hinged by pin shaft 18 and engaging lug 9, and engaging lug 9 is mounted on the top of cleaning screen frame 12, and
Engaging lug 9 and two hanging rod attachment bases 10 form isosceles triangular structure and can control power cylinder three after the completion of rinsing
7 stretch out, and angular deflection can be occurred by cleaning screen frame 12 at this time, convenient for pouring out the monocrystalline silicon piece cleaned in screen frame 12.
Further, the power cylinder 1, power cylinder 25 and power cylinder 37 can be cylinder, oil cylinder or electric cylinders etc., tool
Without limitation, power cylinder 1, power cylinder 25 and power cylinder 37 are controlled body by controller.
It should be strongly noted that in the technical program, bracket 1, sliding block 4, hanging rod 11, cleans screen frame 12, is clear crossbeam 2
Wash pool 13, rinsing bath 14, pedestal 15 and ultrasonic oscillator 17 etc. are the application of the prior art, and the cleaning for moving, overturning
Screen frame 12 is the innovative point of the application, can efficiently realize cleaning and the rinse operation of monocrystalline silicon piece, and clean screen frame 12
Angular deflection can occur, convenient for pouring out the monocrystalline silicon piece cleaned in screen frame 12.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie
In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power
Benefit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent elements of the claims
Variation is included within the present invention.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (7)
1. a kind of efficient monocrystalline silicon piece washes degumming device, including it is bracket (1), crossbeam (2), sliding block (4), hanging rod (11), clear
Wash screen frame (12), service sink (13), rinsing bath (14), pedestal (15) and ultrasonic oscillator (17), which is characterized in that the cleaning
Pond (13) and rinsing bath (14) are arranged on pedestal (15), and service sink (13) is not connected to mutually with rinsing bath (14), service sink
(13) it is respectively connected with drainpipe (16) with the bottom of rinsing bath (14), crossbeam (2) is fixed on service sink (13) by bracket (1)
Surface is equipped with horizontal power cylinder one (3) on crossbeam (2), is equipped on the output end of power cylinder one (3) sliding block (4), sliding
Power cylinder two (5) is installed, the output end of power cylinder two (5) is connected with hanging rod (11) by linking up with (19), two institutes on block (4)
The end for stating hanging rod (11) is connect with the hanging rod attachment base (10) of cleaning screen frame (12) two sides, i.e., cleaning screen frame (12) is to hang to be located at
On power cylinder two (5), multiple ultrasonic oscillators (17) are installed on the inner wall of the service sink (13).
2. a kind of efficient monocrystalline silicon piece according to claim 1 washes degumming device, which is characterized in that the bracket
(1) it is also equipped on for moving the guiding optical axis (6) being oriented to sliding block (4).
3. a kind of efficient monocrystalline silicon piece according to claim 1 washes degumming device, which is characterized in that the rinsing bath
(14) bottom discharge pipe (16) is connect by return pipe with rinsing bath (14), and water pump and valve are equipped on return pipe.
4. a kind of efficient monocrystalline silicon piece according to claim 3 washes degumming device, which is characterized in that the return pipe
On be also equipped with filter mechanism.
5. a kind of efficient monocrystalline silicon piece according to claim 1 washes degumming device, which is characterized in that the sliding block
(4) it is further fixed on vertical plate (8), the power cylinder three being obliquely installed is installed by power cylinder mounting base (20) on vertical plate (8)
(7), the output end of power cylinder three (7) passes through pin shaft (18) and engaging lug (9) hingedly, and engaging lug (9) is mounted on cleaning screen frame
(12) top, and engaging lug (9) forms isosceles triangular structure with two hanging rod attachment bases (10).
6. a kind of efficient monocrystalline silicon piece according to claim 5 washes degumming device, which is characterized in that the power cylinder
One (3), power cylinder two (5) and power cylinder three (7) are cylinder, oil cylinder or electric cylinders, power cylinder one (3), power cylinder two (5) and power
Cylinder three (7) is controlled by controller.
7. a kind of efficient monocrystalline silicon piece according to claim 1 washes degumming device, which is characterized in that the service sink
(13) it is also connect by pipeline with the liquid storage mechanism for storing cleaning solution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810761448.3A CN109087848A (en) | 2018-07-12 | 2018-07-12 | A kind of efficient monocrystalline silicon piece washing degumming device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810761448.3A CN109087848A (en) | 2018-07-12 | 2018-07-12 | A kind of efficient monocrystalline silicon piece washing degumming device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109087848A true CN109087848A (en) | 2018-12-25 |
Family
ID=64837566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810761448.3A Withdrawn CN109087848A (en) | 2018-07-12 | 2018-07-12 | A kind of efficient monocrystalline silicon piece washing degumming device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109087848A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111005008A (en) * | 2019-11-28 | 2020-04-14 | 江苏润阳悦达光伏科技有限公司 | Automatic clap boat device |
| CN113773130A (en) * | 2021-09-26 | 2021-12-10 | 屈敏 | Biological organic liquid fertilizer and preparation process thereof |
| TWI829537B (en) * | 2022-12-07 | 2024-01-11 | 大陸商西安奕斯偉材料科技股份有限公司 | Devices and equipment for silicon wafer degumming |
-
2018
- 2018-07-12 CN CN201810761448.3A patent/CN109087848A/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111005008A (en) * | 2019-11-28 | 2020-04-14 | 江苏润阳悦达光伏科技有限公司 | Automatic clap boat device |
| CN113773130A (en) * | 2021-09-26 | 2021-12-10 | 屈敏 | Biological organic liquid fertilizer and preparation process thereof |
| TWI829537B (en) * | 2022-12-07 | 2024-01-11 | 大陸商西安奕斯偉材料科技股份有限公司 | Devices and equipment for silicon wafer degumming |
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|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20181225 |
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| WW01 | Invention patent application withdrawn after publication |