CN109085204A - A kind of transparent flexible humidity sensor and preparation method thereof - Google Patents
A kind of transparent flexible humidity sensor and preparation method thereof Download PDFInfo
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Abstract
The present invention provides a kind of transparent flexible humidity sensors and preparation method thereof, comprising: flexible substrate, flexible conductive film, co-planar waveguide resonance circuit and humidity sensitive fexible film.Wherein: flexible substrate has the characteristics that high light transmission rate and flexible, stretching；The flexible conductive film has the physical characteristic of low square resistance and high light transmission rate, the humidity sensitive fexible film is equably spun on flexible conductive film surface, it is characterized by: flexible substrate and flexible conductive film form a flexible, stretching, low-loss and resonance circuit with high light transmission rate, a regulation unit of the humidity sensitive fexible film as the resonance frequency.Transparent flexible humidity sensor of the present invention has that flexible extensible, the high grade of transparency, low in cost, preparation is simple, high sensitivity advantage, can be widely applied to wearable electronic device, flexible electronic and as fields such as " electronic skins ".
Description
Technical field
The invention belongs to sensor application fields, and in particular to a kind of transparent flexible humidity sensor and preparation method thereof.
Background technique
The existence and social activities of the mankind and the humidity of environment are closely related.With the development of modernization, different field pair
Ambient humidity proposes strict demand, this to become even more important to the detection of ambient humidity.Humidity sensor
(Humidity Sensor) as a kind of electronic device that can detect ambient enviroment or human body surface humidity, industrial and agricultural production,
Extensive use has been obtained in the fields such as meteorology, environmental protection, space flight.In recent years, with the continuous development of electronic technology, minimize,
Integrated, flexibility electronics becomes the hot spot of current electronic information technology.Novel field mentions traditional humidity sensor
New requirement out.For example, " electronic skin " not only needs accurately and rapidly to incude the humidity condition of human peripheral's environment, but also
" electronic skin " is also required to have the good mechanical performances such as flexible, stretching.In addition, high light transmission rate is also one important
Physical property.Conventional humidity sensor is usually rigid, and is no longer satisfied current scalable, wearable electronics and is produced
Product market.And the circuit structure of existing flexible humidity sensor is based on transistor arrangement or micro-system, and circuit is complicated, existing
In technology, many flexible substrates use silicon wafer or the materials such as CNT or graphene, these base materials are very expensive and there are devices
The problems such as structure complex process during the preparation process, repeatability difference, it is difficult to realize large-scale industrial production.Furthermore humidity
Important performance indexes of the sensibility as humidity sensor, directly restrict the application of humidity sensor.In transparent flexible humidity
Sensor, under the premise of guarantee is flexible, exploring higher moisture sensitivity becomes the technical problem of flexible humidity sensor.
Therefore, while humidity sensor is obtained and is widely applied, how while guaranteeing performance to make humidity sensor
Device have good mechanical properties, high light transmission rate, high moisture sensitivity and prepare it is simple and fast, to meet practical need
Hope for success in order to which those skilled in the art want the technical problem solved.
Summary of the invention
The present invention is for problems existing for background technique, it is intended to which overcome the deficiencies in the prior art proposes a kind of letter
Single efficiently flexible humidity sensor.Efficiently solve the low light transmission rate of conventional flex sensor, basis material degree of flexibility
Poor and manufacturing process is at high cost, complex process, technique is difficult to control, moisture sensitivity is poor and is unfavorable for quickly being mass produced
The problems such as.The present invention provides a kind of transparent flexible humidity sensor and preparation method thereof, and electrode or conductive layer are with low side
Block resistance, the ITO (AZO) or AgNW flexible conductive film of high transmittance, PVA the and PVP laminated film with good water imbibition
As the humidity sensitive fexible film of the humidity sensor, its dielectric constant and loss after the film absorption hydrone
Variation is so that resonance circuit generates frequency response.
To achieve the above object, the invention provides the following technical scheme:
A kind of transparent flexible humidity sensor, comprising: transparent flexible substrate (1), flexible conductive film (2), co-planar waveguide
Resonance circuit (3) and humidity sensitive fexible film (4)；Wherein: the transparent flexible substrate is made of PDMS, transparent flexible
The top surface of substrate (1) is equipped with tin indium oxide (ITO) conductive film (2), and co-planar waveguide resonance circuit (3) passes through laser ablation conduction
Film forms, and there is one layer of humidity sensitive fexible film (4) on ITO conductive film (2) surface, which passes through spin coating polyvinyl alcohol
(PVA) it is prepared with polyvinylpyrrolidone with the drying of (PVP) mixed solution；When connecting microwave circuit, by inserting for coaxial line
Seat is mounted on the back side of earth plate, and outer conductor directly connects on earth plate, and inner conductor, that is, coaxial probe of coaxial line passes through ground connection
Plate and transparent flexible substrate (1) connect on conductive film (2)；The flexible substrate and flexible conductive film form a bendable
Bent, stretching, low-loss and the resonance circuit with high light transmission rate, humidity sensitive fexible film are humorous as the resonance circuit
One regulation unit of vibration frequency.
The transparent flexible substrate (1) is combined by hot pressing or cured method one with flexible conductive film (2)
It rises.
The flexible conductive film (2) is a kind of with stretchable, bending, low square resistance, the flexibility of high transparency
Conductive film is tin indium oxide (ITO) ZnO transparent conductive glass (AZO) or nano-silver thread (AgNW) that either aluminium adulterates
Flexible conductive film.
The humidity sensitive fexible film (4) is the mixed solution by polyvinyl alcohol, polyvinylpyrrolidone using rotation
Coating preparation, is equably spun on flexible conductive film (2) surface, and film thickness is regulated and controled by the mixed solution concentration.
The flexible conductive film (2) is by magnetron sputtering or sprays the method plating of (spin coating) or is imprinted on PET flexibility
On thin plate, then pass through the resonance circuit of laser etching method one co-planar waveguide type of formation；Wherein, the co-planar waveguide resonance
Circuit (3) operating frequency range in 2~4.5GHz, resonance frequency can by institute's etched recesses size, flexible conductive film thickness,
PET sheet thickness and flexible substrate thickness are determined that adjustable extent is in 3.0GHz~3.5GHz, the flexible conductive film
Resonator only has a co-planar waveguide resonance circuit composition.
The humidity sensitive fexible film (4) of the PVA and PVP is a square structure, thin-film width and co-planar waveguide
It is of same size.
The humidity sensitive fexible film (4) is dielectric constant humidity sensitive fexible film, and dielectric constant can be with ring
Border humidity changes and significant change occurs, so as to cause the offset of resonance frequency.
The dielectric constant of the humidity sensitive fexible film (4) and loss can be by adding different proportion polyethylene pyrrole
Pyrrolidone realizes regulation.
A kind of preparation method of transparent flexible humidity sensor, which comprises the following steps:
Step 1: tin indium oxide (ITO) conductive film (2) is sputtered to the PET sheet of transparent flexible by magnetically controlled sputter method
On；
Step 2: co-planar waveguide resonance circuit (3) passes through on laser ablation to ITO conductive film；
Step 3: in one layer of humidity sensitive fexible film (4) of ITO conductive film (2) surface spin coating, and the film passes through rotation
The drying of PVA and PVP mixed solution is applied to be prepared；
Step 4: the socket of coaxial line is mounted on the back side of earth plate, outer conductor, which directly connects, to be connect by connection microwave circuit
On floor, inner conductor, that is, coaxial probe of coaxial line passes through earth plate and transparent flexible substrate (1) connects on conductive film (2),
To which transparent flexible humidity sensor be made.
Humidity sensitive fexible film (4) preparation includes: to be by the mass ratio of polyvinyl alcohol and polyvinylpyrrolidone
10:1~10:4 is mixed, then is added 1.0wt.% glycerine as plasticizer and carried out deaeration processing, and mixing gained is then taken
Glue drop forms wet film in homogeneous thickness by sol evenning machine on flexible conductive film (2), and humidity sensitive is made through drying and forming-film
Fexible film (4).
The beneficial effects of the present invention are:
Flexible sensor of the invention innovatively migrates to sensor circuit in flexible substrates, and realize sensor can
Stretching and flexible function, and under the premise of stretchable, improve the sensitivity and the high grade of transparency of sensor.Of the invention is soft
Property sensor use transparent flexible substrate, flexible conductive film is bent or is stretched certain respectively as substrate and conductive layer
Under the conditions of can still keep original physical property, achieve the purpose that ambient humidity detect；Further, transparent flexible of the present invention is wet
The humidity sensitive fexible film of degree sensor is the laminated film formed using polyvinyl alcohol and polyvinylpyrrolidone, has and is situated between
Excellent electrical property, light weight, the small in size and advantage that is easily integrated solve performance difference of the sensor integration to flexible substrates
Technical problem.And the mechanical performance and dielectric properties of the film are adjusted by the mixed proportion of PVA and PVP, innovation
Ground is made with good mechanical properties and low-loss film, and then efficiently controls the detection range of humidity sensor and big
Its sensitivity is increased greatly.Meanwhile the introducing of glycerine can largely improve the flexibility of film.Therefore, institute of the present invention
State humidity sensor with flexible extensible, the high grade of transparency, high sensitivity, fast-response speed, circuit structure it is simple and it is cheap at
This advantage can be widely applied to wearable electronic device, implanted tele-medicine device, flexible electronic and as " electronics
The fields such as skin ".
Detailed description of the invention
Fig. 1 is transparent flexible humidity sensor overall structure diagram of the invention；
Fig. 2 is to process pictorial diagram according to the flexible co-planar waveguide resonance circuit of the embodiment of the present invention 3；
Fig. 3 is the flexible humidity sensor pictorial diagram transparent according to the embodiment of the present invention 3；
Fig. 4 is according to 3 humidity sensitive fexible film examination of infrared spectrum figure of the embodiment of the present invention；
Fig. 5 is according to 3 humidity sensitive fexible film dielectric properties of the embodiment of the present invention with the change curve of humidity；
Fig. 6 is according to 3S of the embodiment of the present invention11Test result of the curve within the scope of 11.3%~97.3%RH；
Fig. 7 is according to 3 co-planar waveguide resonance circuit S of the embodiment of the present invention21,S11Parameters simulation schematic diagram；
Fig. 8 is the change in dielectric constant according to the embodiment of the present invention 3 and comparative example under various circumstances, under 1.4GHz；
Fig. 9 is that the dielectric loss according to the embodiment of the present invention 3 and comparative example under various circumstances, under 1.4GHz changes.
Specific embodiment
The principle of the invention is described in detail below in conjunction with the specific embodiment of the invention and Figure of description:
Fig. 1 is a kind of transparent flexible humidity sensor overall structure diagram provided in an embodiment of the present invention, comprising:
Transparent flexible substrate 1, flexible conductive film 2, co-planar waveguide resonance circuit 3 and humidity sensitive fexible film 4；
Wherein: the transparent flexible substrate is made of PDMS, and the top surface of transparent flexible substrate 1 is equipped with tin indium oxide (ITO) conductive film
2, co-planar waveguide resonance circuit 3 is formed by laser ablation conductive film, and 2 surface of ITO conductive film has one layer of humidity sensitive soft
Property film 4, which is dried by spin coating polyvinyl alcohol (PVA) and polyvinylpyrrolidone (PVP) mixed solution and is prepared；
When connecting microwave circuit, the socket of coaxial line is mounted on to the back side of earth plate, outer conductor directly connects on earth plate, coaxial line
Inner conductor, that is, coaxial probe pass through earth plate and transparent flexible substrate 1 and connect on conductive film 2；The flexible substrate and flexibility
Conductive film forms flexible, stretching, low-loss and the resonance circuit with high light transmission rate, humidity sensitive flexible thin
A regulation unit of the film as the resonance frequency.
Wherein, a kind of preparation method of transparent flexible humidity sensor, comprising:
Step 1:ITO conductive film is sputtered on the PET sheet of transparent flexible by magnetically controlled sputter method；
Step 2: co-planar waveguide resonance circuit 3 passes through on laser ablation to ITO conductive film；
Step 3: in ITO conductive film 2 surface spin coating, one layer of humidity sensitive fexible film 4, and the film passes through spin coating PVA
It is prepared with the drying of PVP mixed solution；
Step 4: the socket of coaxial line is mounted on the back side of earth plate, outer conductor, which directly connects, to be connect by connection microwave circuit
On floor, inner conductor, that is, coaxial probe of coaxial line passes through earth plate and transparent flexible substrate 1 connects on conductive film 2.
The transparent flexible substrate 1 is combined with flexible conductive film 2 by hot pressing or cured method.Institute
The humidity sensitive fexible film 4 of the PVA and PVP that state are a square structure, and thin-film width is of same size with co-planar waveguide.It is described
The material of flexible conductive film 2 is the ito thin film of low square resistance, high light transmission rate.The flexible conductive film 2 passes through magnetic
The method of control sputtering or spraying (spin coating) is plated or is imprinted on PET flexible thin, then forms one altogether by laser etching method
The resonance circuit of surface wave conductivity type；Wherein, 3 operating frequency range of co-planar waveguide resonance circuit is in 2~4.5GHz, resonance frequency
Rate can be determined by institute's etched recesses size, flexible conductive film thickness, PET sheet thickness and flexible substrate thickness, adjustable
For range in 3.0GHz~3.5GHz, the flexible conductive film resonator only has a co-planar waveguide resonance circuit composition.
The humidity sensitive fexible film 4 is by the mixed solution of polyvinyl alcohol, polyvinylpyrrolidone and glycerine
The laminated film prepared using spin-coating method, is equably spun on 2 surface of flexible conductive film, film thickness is by the mixing
Solution concentration regulation.The humidity sensitive fexible film 4 is dielectric constant humidity sensitive fexible film, and dielectric constant can be with
Ambient humidity changes and significant change occurs, so as to cause the offset of resonance frequency, dielectric constant and loss
Regulation can be realized by addition different proportion polyvinylpyrrolidone.
It is 10 that the preparation of humidity sensitive fexible film 4, which includes: by the mass ratio of polyvinyl alcohol and polyvinylpyrrolidone:
1~10:4 is mixed, then is added 1.0wt.% glycerine as plasticizer and carried out deaeration processing, polyvinyl alcohol and polyethylene pyrrole
The mass ratio of pyrrolidone is 10:1~10:4, then takes mixing gained glue drop in flexible conductive film 2 by sol evenning machine shape
At wet film in homogeneous thickness, humidity sensitive fexible film 4 is made through drying and forming-film.
Flexible substrate can be connected by curing method with flexible conductive film layer in the present invention, can also pass through hot pressing
Mode is bonded together with flexible conductive film.
Polyvinyl alcohol (PVA) in the present invention in humidity sensitive fexible film is a kind of height for containing great amount of hydroxy group (- OH)
Molecularly Imprinted Polymer.Since the hydrogen on-OH is connected with the very strong oxygen atom of electronegativity, make hydrogen-oxygen key high degree of polarization, the upper band an of-OH
There is the hydrogen of part positive charge, can attract each other with the oxygen for having partial negative charge on another-OH, intramolecular can be formed and divided
Hydrogen bond between son, therefore PVA has good water imbibition.Alcoholysis degree is to measure another important indicator of water-solubility PVA, as excellent
Embodiment is selected, the degree of polymerization of polyvinyl alcohol is 1700 ± 50 in the present invention, and alcoholysis degree is 87%~89mol%.
Polyvinylpyrrolidone (PVP) in humidity sensitive fexible film, is a kind of non-ionic macromolecule compound, tool
There are the characteristics such as colloid protective effect, film forming, caking property, hygroscopicity.Not only have in addition, PVP and PVA are mixed to form laminated film
There is better mechanical performance, and the dielectric properties of film can be improved.
Further, the thickness of the humidity sensitive fexible film can be controlled according to PVA and PVP solution concentration.
Further, the flexible conductive film is transparent soft by depositing to the methods of magnetron sputtering or spin coating (spraying)
On the PET sheet of property.
Further, the co-planar waveguide circuit pattern is formed by laser ablation flexible conductive film.
Further, the mechanical performance and dielectric properties of the humidity sensitive fexible film pass through the mixing ratio of PVA and PVP
Example is adjusted, and being made has good mechanical properties and low-loss film；And film can be improved in the introducing of glycerine
Flexibility.
By coaxial feeder by transparent flexible humidity sensor microwave circuit of the invention, according to embodiments of the present invention may be used
To find out: having apparent resonance, insertion loss S in 3.1GHz or so based on resonance circuit made from transparent flexible substrate21It is low；It will
Transparent flexible humidity sensor of the present invention is put into the closed box under the conditions of different humidity, due to PVA and PVP sensitive thin-film material
After absorbing hydrone, thin-film dielectric constant is gradually increased.Therefore, the S of the flexible resonance circuit based on the sensitive thin film21Parameter with
Dielectric constant increase it is significantly mobile toward low frequency, to realize the detection of humidity.When ambient humidity increases, fexible film
Start to reach equilibrium state after absorbing hydrone, so thin-film dielectric constant obviously increases, due to the increase of thin-film dielectric constant,
Resonance peak is resulted in toward low frequency field offset；With the decline of ambient humidity, fexible film starts " to discharge " hydrone, so dielectric
Constant reduces, and resonance peak starts again toward high-frequency mobile.Since in fexible film, intermolecular and intramolecular has a large amount of hydroxyl
(- OH), thus the conversion process can with ambient humidity variation quickly, can progress repeatedly, to realize ambient humidity
Detection.
As shown in Fig. 2, the co-planar waveguide resonance circuit 3 of design of the embodiment of the present invention is by magnetron sputtering method that ITO is thin
Film, which deposits in transparent flexible PET base, forms a length of 57mm, and width is the Thinfilm pattern of 37.7mm, resulting ITO conductive film
With a thickness of 150~200nm；Then it is formed by ITO conductive film described in laser ablation.The present embodiment provides the shape of etched recesses
Shape is rectangle, is not limited to rectangle according to the shape of those skilled in the art's common sense groove, the present embodiment designs transparent
The size of transparent flexible substrate 1 in flexible humidity sensor are as follows: length × width × height=65mm × 50mm × 1.6mm.
Embodiment 1:
A kind of transparent flexible humidity sensor, comprising:
Transparent flexible substrate 1, flexible conductive film 2, co-planar waveguide resonance circuit 3 and humidity sensitive fexible film 4；
Wherein: the transparent flexible substrate is made of PDMS, and the top surface of transparent flexible substrate 1 is equipped with tin indium oxide (ITO) conductive film
2, co-planar waveguide resonance circuit 3 is formed by laser ablation conductive film, and 2 surface of ITO conductive film has one layer of humidity sensitive soft
Property film 4, which is dried by spin coating polyvinyl alcohol (PVA) and polyvinylpyrrolidone (PVP) mixed solution and is prepared；
When connecting microwave circuit, the socket of coaxial line is mounted on to the back side of earth plate, outer conductor directly connects on earth plate, coaxial line
Inner conductor, that is, coaxial probe pass through earth plate and transparent flexible substrate 1 and connect on conductive film 2；The flexible substrate and flexibility
Conductive film forms flexible, stretching, low-loss and the resonance circuit with high light transmission rate, humidity sensitive flexible thin
A regulation unit of the film as the resonance frequency.
Wherein, a kind of preparation method of transparent flexible humidity sensor, comprising:
Step 1:ITO conductive film is sputtered on the PET sheet of transparent flexible by magnetically controlled sputter method；
Step 2: co-planar waveguide resonance circuit 3 passes through on laser ablation to ITO conductive film；
Step 3: in ITO conductive film 2 surface spin coating, one layer of humidity sensitive fexible film 4, and the film passes through spin coating PVA
It is prepared with the drying of PVP mixed solution；
Step 4: the socket of coaxial line is mounted on the back side of earth plate, outer conductor, which directly connects, to be connect by connection microwave circuit
On floor, inner conductor, that is, coaxial probe of coaxial line passes through earth plate and transparent flexible substrate 1 connects on conductive film 2.
The transparent flexible substrate 1 is combined with flexible conductive film 2 by hot pressing or cured method.Institute
The humidity sensitive fexible film 4 for PVA and the PVP mixing stated is a square structure, and thin-film width is of same size with co-planar waveguide.
The material of the flexible conductive film 2 is the ito thin film of low square resistance, high light transmission rate.The flexible conductive film 2 is logical
It crosses magnetron sputtering or sprays the method plating of (spin coating) or be imprinted on PET flexible thin, then form one by laser etching method
The resonance circuit of a co-planar waveguide type；Wherein, 3 operating frequency range of co-planar waveguide resonance circuit is humorous in 2~4.5GHz
Vibration frequency can be determined by institute's etched recesses size, flexible conductive film thickness, PET sheet thickness and flexible substrate thickness,
For adjustable extent in 3.0GHz~3.5GHz, the flexible conductive film resonator only has a co-planar waveguide resonance circuit group
At.
The humidity sensitive fexible film 4 is by polyvinyl alcohol and polyvinylpyrrolidone mixed solution using spin coating legal system
Standby laminated film is equably spun on 2 surface of flexible conductive film, and film thickness is by the mixed solution concentration tune
Control.The humidity sensitive fexible film 4 is dielectric constant humidity sensitive fexible film, and dielectric constant can become with ambient humidity
Change and significant change occurs, so as to cause the offset of resonance frequency, dielectric constant and loss can pass through addition
Different proportion polyvinylpyrrolidone realizes regulation.
It is 10 that the preparation of humidity sensitive fexible film 4, which includes: by the mass ratio of polyvinyl alcohol and polyvinylpyrrolidone:
1 is mixed, then is added 1.0wt.% glycerine as plasticizer and carried out deaeration processing, then takes mixing gained glue drop soft
Wet film in homogeneous thickness is formed by sol evenning machine on property conductive film 2, humidity sensitive fexible film 4 is made through drying and forming-film.
Embodiment 2:
A kind of transparent flexible humidity sensor, comprising:
Transparent flexible substrate 1, flexible conductive film 2, co-planar waveguide resonance circuit 3 and humidity sensitive fexible film 4；
Wherein: the transparent flexible substrate is made of PDMS, and the top surface of transparent flexible substrate 1 is equipped with tin indium oxide (ITO) conductive film
2, co-planar waveguide resonance circuit 3 is formed by laser ablation conductive film, and 2 surface of ITO conductive film has one layer of humidity sensitive soft
Property film 4, which is dried by spin coating polyvinyl alcohol (PVA) and polyvinylpyrrolidone (PVP) mixed solution and is prepared；
When connecting microwave circuit, the socket of coaxial line is mounted on to the back side of earth plate, outer conductor directly connects on earth plate, coaxial line
Inner conductor, that is, coaxial probe pass through earth plate and transparent flexible substrate 1 and connect on conductive film 2；The flexible substrate and flexibility
Conductive film forms flexible, stretching, low-loss and the resonance circuit with high light transmission rate, humidity sensitive flexible thin
A regulation unit of the film as the resonance frequency.
Wherein, a kind of preparation method of transparent flexible humidity sensor, comprising:
Step 1:ITO conductive film is sputtered on the PET sheet of transparent flexible by magnetically controlled sputter method；
Step 2: co-planar waveguide resonance circuit 3 passes through on laser ablation to ITO conductive film；
Step 3: in ITO conductive film 2 surface spin coating, one layer of humidity sensitive fexible film 4, and the film passes through spin coating PVA
It is prepared with the drying of PVP mixed solution；
Step 4: the socket of coaxial line is mounted on the back side of earth plate, outer conductor, which directly connects, to be connect by connection microwave circuit
On floor, inner conductor, that is, coaxial probe of coaxial line passes through earth plate and transparent flexible substrate 1 connects on conductive film 2.
The transparent flexible substrate 1 is combined with flexible conductive film 2 by hot pressing or cured method.Institute
The humidity sensitive fexible film 4 for PVA and the PVP mixing stated is a square structure, and thin-film width is of same size with co-planar waveguide.
The material of the flexible conductive film 2 is the ito thin film of low square resistance, high light transmission rate.The flexible conductive film 2 is logical
It crosses magnetron sputtering or sprays the method plating of (spin coating) or be imprinted on PET flexible thin, then form one by laser etching method
The resonance circuit of a co-planar waveguide type；Wherein, 3 operating frequency range of co-planar waveguide resonance circuit is humorous in 2~4.5GHz
Vibration frequency can be determined by institute's etched recesses size, flexible conductive film thickness, PET sheet thickness and flexible substrate thickness,
For adjustable extent in 3.0GHz~3.5GHz, the flexible conductive film resonator only has a co-planar waveguide resonance circuit group
At.
The humidity sensitive fexible film 4 is by polyvinyl alcohol, polyvinylpyrrolidone mixed solution using spin coating legal system
Standby laminated film is equably spun on 2 surface of flexible conductive film, and film thickness is by the mixed solution concentration tune
Control.The humidity sensitive fexible film 4 is dielectric constant humidity sensitive fexible film, and dielectric constant can become with ambient humidity
Change and significant change occurs, so as to cause the offset of resonance frequency, dielectric constant and loss can pass through addition
Different proportion polyvinylpyrrolidone realizes regulation.
It is 10 that the preparation of humidity sensitive fexible film 4, which includes: by the mass ratio of polyvinyl alcohol and polyvinylpyrrolidone:
2 are mixed, then are added 1.0wt.% glycerine as plasticizer and carried out deaeration processing, then take mixing gained glue drop soft
Wet film in homogeneous thickness is formed by sol evenning machine on property conductive film 2, humidity sensitive fexible film 4 is made through drying and forming-film.
Embodiment 3:
A kind of transparent flexible humidity sensor, comprising:
Transparent flexible substrate 1, flexible conductive film 2, co-planar waveguide resonance circuit 3 and humidity sensitive fexible film 4；
Wherein: the transparent flexible substrate is made of PDMS, and the top surface of transparent flexible substrate 1 is equipped with tin indium oxide (ITO) conductive film
2, co-planar waveguide resonance circuit 3 is formed by laser ablation conductive film, and 2 surface of ITO conductive film has one layer of humidity sensitive soft
Property film 4, which is dried by spin coating polyvinyl alcohol (PVA) and polyvinylpyrrolidone (PVP) mixed solution and is prepared；
When connecting microwave circuit, the socket of coaxial line is mounted on to the back side of earth plate, outer conductor directly connects on earth plate, coaxial line
Inner conductor, that is, coaxial probe pass through earth plate and transparent flexible substrate 1 and connect on conductive film 2；The flexible substrate and flexibility
Conductive film forms flexible, stretching, low-loss and the resonance circuit with high light transmission rate, humidity sensitive flexible thin
A regulation unit of the film as the resonance frequency.
Wherein, a kind of preparation method of transparent flexible humidity sensor, comprising:
Step 1:ITO conductive film is sputtered on the PET sheet of transparent flexible by magnetically controlled sputter method；
Step 2: co-planar waveguide resonance circuit 3 passes through on laser ablation to ITO conductive film；
Step 3: in ITO conductive film 2 surface spin coating, one layer of humidity sensitive fexible film 4, and the film passes through spin coating PVA
It is prepared with the drying of PVP mixed solution；
Step 4: the socket of coaxial line is mounted on the back side of earth plate, outer conductor, which directly connects, to be connect by connection microwave circuit
On floor, inner conductor, that is, coaxial probe of coaxial line passes through earth plate and transparent flexible substrate 1 connects on conductive film 2.
The transparent flexible substrate 1 is combined with flexible conductive film 2 by hot pressing or cured method.Institute
The humidity sensitive fexible film 4 for PVA and the PVP mixing stated is a square structure, and thin-film width is of same size with co-planar waveguide.
The material of the flexible conductive film 2 is the ito thin film of low square resistance, high light transmission rate.The flexible conductive film 2 is logical
It crosses magnetron sputtering or sprays the method plating of (spin coating) or be imprinted on PET flexible thin, then form one by laser etching method
The resonance circuit of a co-planar waveguide type；Wherein, 3 operating frequency range of co-planar waveguide resonance circuit is humorous in 2~4.5GHz
Vibration frequency can be determined by institute's etched recesses size, flexible conductive film thickness, PET sheet thickness and flexible substrate thickness,
For adjustable extent in 3.0GHz~3.5GHz, the flexible conductive film resonator only has a co-planar waveguide resonance circuit group
At.
The humidity sensitive fexible film 4 is the mixed solution by polyvinyl alcohol, polyvinylpyrrolidone using spin-coating method
The laminated film of preparation is equably spun on 2 surface of flexible conductive film, and film thickness is by the mixed solution concentration tune
Control.The humidity sensitive fexible film 4 is dielectric constant humidity sensitive fexible film, and dielectric constant can become with ambient humidity
Change and significant change occurs, so as to cause the offset of resonance frequency, dielectric constant and loss can pass through addition
Different proportion polyvinylpyrrolidone realizes regulation.
It is 10 that the preparation of humidity sensitive fexible film 4, which includes: by the mass ratio of polyvinyl alcohol and polyvinylpyrrolidone:
3 are mixed, then are added 1.0wt.% glycerine as plasticizer and carried out deaeration processing, then take mixing gained glue drop soft
Wet film in homogeneous thickness is formed by sol evenning machine on property conductive film 2, humidity sensitive fexible film 4 is made through drying and forming-film.
Fig. 3 is a kind of transparent flexible humidity sensor of actual processing of the embodiment of the present invention 3, which has very big
Transparency (its light transmittance be greater than 80%), the characteristics of stretchable, bending, it mainly by flexible substrate, flexible conductive film with
And three kinds of fexible film compositions of humidity sensitive fexible film.
It is 10 that the above-mentioned preparation of humidity sensitive fexible film 4, which includes: by the mass ratio of polyvinyl alcohol and polyvinylpyrrolidone:
3 are mixed, then are added 1.0wt.% glycerine as plasticizer and carried out deaeration processing, then take mixing gained glue drop soft
Wet film in homogeneous thickness is formed by sol evenning machine on property conductive film 2, humidity sensitive fexible film 4 is made through drying and forming-film.It is logical
Cross magnetic agitation after mixing, carry out deaeration processing under vacuum conditions, then will mixing gained glue-coating to smooth clean
Wet film in homogeneous thickness is formed in net flexible conductive film, freeze-day with constant temperature at being 50 DEG C in temperature, obtained thickness is about 0.1mm
Uniform film, Fig. 4 be 3 humidity sensitive fexible film examination of infrared spectrum figure of embodiment.
Embodiment 4:
A kind of transparent flexible humidity sensor, comprising:
Transparent flexible substrate 1, flexible conductive film 2, co-planar waveguide resonance circuit 3 and humidity sensitive fexible film 4；
Wherein: the transparent flexible substrate is made of PDMS, and the top surface of transparent flexible substrate 1 is equipped with tin indium oxide (ITO) conductive film
2, co-planar waveguide resonance circuit 3 is formed by laser ablation conductive film, and 2 surface of ITO conductive film has one layer of humidity sensitive soft
Property film 4, which is dried by spin coating polyvinyl alcohol (PVA) and polyvinylpyrrolidone (PVP) mixed solution and is prepared；
When connecting microwave circuit, the socket of coaxial line is mounted on to the back side of earth plate, outer conductor directly connects on earth plate, coaxial line
Inner conductor, that is, coaxial probe pass through earth plate and transparent flexible substrate 1 and connect on conductive film 2；The flexible substrate and flexibility
Conductive film forms flexible, stretching, low-loss and the resonance circuit with high light transmission rate, humidity sensitive flexible thin
A regulation unit of the film as the resonance frequency.
Wherein, a kind of preparation method of transparent flexible humidity sensor, comprising:
Step 1:ITO conductive film is sputtered on the PET sheet of transparent flexible by magnetically controlled sputter method；
Step 2: co-planar waveguide resonance circuit 3 passes through on laser ablation to ITO conductive film；
Step 3: in ITO conductive film 2 surface spin coating, one layer of humidity sensitive fexible film 4, and the film passes through spin coating PVA
It is prepared with the drying of PVP mixed solution；
Step 4: the socket of coaxial line is mounted on the back side of earth plate, outer conductor, which directly connects, to be connect by connection microwave circuit
On floor, inner conductor, that is, coaxial probe of coaxial line passes through earth plate and transparent flexible substrate 1 connects on conductive film 2.
The transparent flexible substrate 1 is combined with flexible conductive film 2 by hot pressing or cured method.Institute
The humidity sensitive fexible film 4 of the PVA and PVP that state are a square structure, and thin-film width is of same size with co-planar waveguide.It is described
The material of flexible conductive film 2 is the ito thin film of low square resistance, high light transmission rate.The flexible conductive film 2 passes through magnetic
The method of control sputtering or spraying (spin coating) is plated or is imprinted on PET flexible thin, then forms one altogether by laser etching method
The resonance circuit of surface wave conductivity type；Wherein, 3 operating frequency range of co-planar waveguide resonance circuit is in 2~4.5GHz, resonance frequency
Rate can be determined by institute's etched recesses size, flexible conductive film thickness, PET sheet thickness and flexible substrate thickness, adjustable
For range in 3.0GHz~3.5GHz, the flexible conductive film resonator only has a co-planar waveguide resonance circuit composition.
The humidity sensitive fexible film 4 is the mixed solution by polyvinyl alcohol, polyvinylpyrrolidone using spin-coating method
The laminated film of preparation is equably spun on 2 surface of flexible conductive film, and film thickness is by the mixed solution concentration tune
Control.The humidity sensitive fexible film 4 is dielectric constant humidity sensitive fexible film, and dielectric constant can become with ambient humidity
Change and significant change occurs, so as to cause the offset of resonance frequency, dielectric constant and loss can pass through addition
Different proportion polyvinylpyrrolidone realizes regulation.
It is 10 that the preparation of humidity sensitive fexible film 4, which includes: by the mass ratio of polyvinyl alcohol and polyvinylpyrrolidone:
4 are mixed, then are added 1.0wt.% glycerine as plasticizer and carried out deaeration processing, then take mixing gained glue drop soft
Wet film in homogeneous thickness is formed by sol evenning machine on property conductive film 2, humidity sensitive fexible film 4 is made through drying and forming-film.
Comparative example:
A kind of transparent flexible humidity sensor, comprising:
Transparent flexible substrate 1, flexible conductive film 2, co-planar waveguide resonance circuit 3 and humidity sensitive fexible film 4；
Wherein: the transparent flexible substrate is made of PDMS, and the top surface of transparent flexible substrate 1 is equipped with tin indium oxide (ITO) conductive film
2, co-planar waveguide resonance circuit 3 is formed by laser ablation conductive film, and 2 surface of ITO conductive film has one layer of humidity sensitive soft
Property film 4, which is dried by spin coating polyvinyl alcohol (PVA) and polyvinylpyrrolidone (PVP) mixed solution and is prepared；
When connecting microwave circuit, the socket of coaxial line is mounted on to the back side of earth plate, outer conductor directly connects on earth plate, coaxial line
Inner conductor, that is, coaxial probe pass through earth plate and transparent flexible substrate 1 and connect on conductive film 2；The flexible substrate and flexibility
Conductive film forms flexible, stretching, low-loss and the resonance circuit with high light transmission rate, humidity sensitive flexible thin
A regulation unit of the film as the resonance frequency.
Wherein, a kind of preparation method of transparent flexible humidity sensor, comprising:
Step 1:ITO conductive film is sputtered on the PET sheet of transparent flexible by magnetically controlled sputter method；
Step 2: co-planar waveguide resonance circuit 3 passes through on laser ablation to ITO conductive film；
Step 3: in ITO conductive film 2 surface spin coating, one layer of humidity sensitive fexible film 4, and the film passes through spin coating PVA
It is prepared with the drying of PVP mixed solution；
Step 4: the socket of coaxial line is mounted on the back side of earth plate, outer conductor, which directly connects, to be connect by connection microwave circuit
On floor, inner conductor, that is, coaxial probe of coaxial line passes through earth plate and transparent flexible substrate 1 connects on conductive film 2.
The transparent flexible substrate 1 is combined with flexible conductive film 2 by hot pressing or cured method.Institute
The humidity sensitive fexible film 4 of the PVA and PVP that state are a square structure, and thin-film width is of same size with co-planar waveguide.It is described
The material of flexible conductive film 2 is the ito thin film of low square resistance, high light transmission rate.The flexible conductive film 2 passes through magnetic
The method of control sputtering or spraying (spin coating) is plated or is imprinted on PET flexible thin, then forms one altogether by laser etching method
The resonance circuit of surface wave conductivity type；Wherein, 3 operating frequency range of co-planar waveguide resonance circuit is in 2~4.5GHz, resonance frequency
Rate can be determined by institute's etched recesses size, flexible conductive film thickness, PET sheet thickness and flexible substrate thickness, adjustable
For range in 3.0GHz~3.5GHz, the flexible conductive film resonator only has a co-planar waveguide resonance circuit composition.
The humidity sensitive fexible film 4 is the laminated film that spin-coating method preparation is used by polyvinyl alcohol, equably spin coating
In 2 surface of flexible conductive film, film thickness is regulated and controled by the mixed solution concentration.The humidity sensitive fexible film
4 be dielectric constant humidity sensitive fexible film, and dielectric constant can change with ambient humidity and significant change occurs, so as to cause
The offset of resonance frequency, dielectric constant and loss can be realized by addition different proportion polyvinylpyrrolidone
Regulation.
It is 10:0 that the preparation of humidity sensitive fexible film 4, which includes by the mass ratio of polyvinyl alcohol and polyvinylpyrrolidone,
It is mixed, then adds 1.0wt.% glycerine as plasticizer and carry out deaeration processing, then take mixing gained glue drop soft
Wet film in homogeneous thickness is formed by sol evenning machine on property conductive film 2, humidity sensitive fexible film 4 is made through drying and forming-film.
Fig. 5 is change curve of the 3 humidity sensitive fexible film dielectric properties of embodiment with humidity.By the wet of above-mentioned preparation
The sensitive fexible film 4 of degree cuts into size and uses peace for 15mm*15mm with a thickness of the uniform film square of 0.4~0.5mm
Prompt human relations E4991B impedance analyzer tests its dielectric constant and loss, test frequency under the conditions of different humidity in closed environment
Range is 10MHz~1.5GHz, and the dielectric properties (including dielectric constant and dielectric loss) of test are as shown in figure 5, from figure
It can be seen that in embodiment 3 humidity sensitive fexible film humidity RH be 30%~90% range in its dielectric constant and low Jie
The increase of electrical loss and ambient humidity and obviously increase, this is because hydrone dielectric constant is far longer than film itself；Also,
When one timing of ambient humidity, the dielectric properties of the humidity sensitive fexible film 4 change little with frequency.
The embodiment of the present invention uses the coaxially connected mode of co-planar waveguide-, by coaxial connection by the present embodiment transparent flexible
Humidity sensor accesses in microwave circuit, carries out emulation testing using HFSS software, obtains embodiment 3S as shown in Figure 611Curve
Test result within the scope of 11.3%~97.3%RH.It will be appreciated from fig. 6 that resonance frequency is substantially reduced, and frequency is with humidity
Increase and increases.Meanwhile the absolute value of S11 is begun to decline.
It is illustrated in figure 73 co-planar waveguide resonance circuit S of embodiment21,S11Parameters simulation schematic diagram, as can be seen from Figure 7:
The resonance frequency of co-planar waveguide resonance circuit prepared by the present embodiment 3 is about 3.17GHz, in the Frequency point resonator | S11|>
45dB, | S21|<0.5dB；Illustrate that this implementation co-planar waveguide resonance circuit and circuit reach good matching.Fig. 8 is embodiment 3
Change in dielectric constant with comparative example under various circumstances, under 1.4GHz, Fig. 9 are embodiment 3 and comparative example in varying environment
Under, the variation of dielectric loss under 1.4GHz.Such as Fig. 7, shown in 8, embodiment 3 and comparative example relatively under, can significantly find reality
It applies example 3 and has smaller dielectric constant and dielectric loss, then can prove to be added suitable polyvinylpyrrolidone (PVP) can be with
Apparent to reduce dielectric loss, change in dielectric constant explanation has good moisture sensitivity smaller.This is for transparent flexible
Humidity sensor application is played the role of greatly improving.
The embodiment of the present invention is expounded in conjunction with attached drawing above, but the invention is not limited to above-mentioned specific
Embodiment, above-mentioned specific embodiment is only schematical, rather than restrictive, and those skilled in the art exist
Under enlightenment of the invention, without breaking away from the scope protected by the purposes and claims of the present invention, many shapes can be also made
Formula, all of these belong to the protection of the present invention.
Claims (10)
1. a kind of transparent flexible humidity sensor, comprising: transparent flexible substrate (1), flexible conductive film (2), co-planar waveguide is humorous
Shake circuit (3) and humidity sensitive fexible film (4)；Wherein: the transparent flexible substrate is made of PDMS, transparent flexible lining
The top surface at bottom (1) is equipped with tin indium oxide (ITO) conductive film (2), and co-planar waveguide resonance circuit (3) passes through laser ablation conductive thin
Film forms, and there is one layer of humidity sensitive fexible film (4) on ITO conductive film (2) surface, which passes through spin coating polyvinyl alcohol
(PVA) it is prepared with the drying of polyvinylpyrrolidone (PVP) mixed solution；When connecting microwave circuit, by the socket of coaxial line
It is mounted on the back side of earth plate, outer conductor directly connects on earth plate, and inner conductor, that is, coaxial probe of coaxial line passes through earth plate
It is connect on conductive film (2) with transparent flexible substrate (1)；The flexible substrate and flexible conductive film formed one it is flexible,
It stretches, low-loss and the resonance circuit with high light transmission rate, humidity sensitive fexible film is as the resonance
One regulation unit of frequency.
2. a kind of transparent flexible humidity sensor according to claim 1, which is characterized in that the transparent flexible substrate
(1) it is combined with flexible conductive film (2) by hot pressing or cured method.
3. a kind of transparent flexible humidity sensor according to claim 1, which is characterized in that the flexible conductive film
(2) be it is a kind of there is stretchable, bending, low square resistance, the flexible conductive film of high transparency, be tin indium oxide (ITO) or
The ZnO transparent conductive glass (AZO) or nano-silver thread (AgNW) flexible conductive film of person's aluminium doping.
4. a kind of transparent flexible humidity sensor according to claim 1, which is characterized in that the humidity sensitive is flexible
The film thickness of film (4) is regulated and controled by the polyvinyl alcohol (PVA) and polyvinylpyrrolidone (PVP) mixed solution concentration.
5. a kind of transparent flexible humidity sensor according to claim 1, which is characterized in that the flexible conductive film
(2) it is plated or is imprinted on PET flexible thin by magnetron sputtering or the method for spraying (spin coating), then pass through laser etching method shape
At the resonance circuit of a co-planar waveguide type；Wherein, co-planar waveguide resonance circuit (3) operating frequency range 2~
4.5GHz, resonance frequency can be by institute's etched recesses size, flexible conductive film thickness, PET sheet thickness and flexible substrate thickness
It is determined, for adjustable extent in 3.0GHz~3.5GHz, it is humorous that the flexible conductive film resonator only has a co-planar waveguide
Shake circuit composition.
6. a kind of transparent flexible humidity sensor according to claim 1, which is characterized in that the PVA's and PVP is wet
Spending sensitive fexible film (4) is a square structure, and thin-film width is of same size with co-planar waveguide.
7. a kind of transparent flexible humidity sensor according to claim 1, which is characterized in that the humidity sensitive is flexible
Film (4) is dielectric constant humidity sensitive fexible film, and dielectric constant can change with ambient humidity and significant change occurs, from
And cause the offset of resonance frequency.
8. a kind of transparent flexible humidity sensor according to claim 7, which is characterized in that the humidity sensitive is flexible
The dielectric constant of film (4) and loss can realize regulation by addition different proportion polyvinylpyrrolidone.
9. a kind of preparation method of transparent flexible humidity sensor, which comprises the following steps:
Step 1: tin indium oxide (ITO) conductive film (2) is sputtered on the PET sheet of transparent flexible by magnetically controlled sputter method；
Step 2: co-planar waveguide resonance circuit (3) passes through on laser ablation to ITO conductive film；
Step 3: in one layer of humidity sensitive fexible film (4) of ITO conductive film (2) surface spin coating, and the film passes through spin coating PVA
It is prepared with the drying of PVP mixed solution；
Step 4: the socket of coaxial line is mounted on the back side of earth plate, outer conductor directly connects in earth plate by connection microwave circuit
On, inner conductor, that is, coaxial probe of coaxial line passes through earth plate and transparent flexible substrate (1) connects on conductive film (2), thus
Transparent flexible humidity sensor is made.
10. a kind of preparation method of transparent flexible humidity sensor according to claim 9, which is characterized in that described wet
It is 10:1~10:4 progress that sensitive fexible film (4) preparation of degree, which includes: by the mass ratio of polyvinyl alcohol and polyvinylpyrrolidone,
Mixing, then add 1.0wt.% glycerine as plasticizer and carry out deaeration processing, then take mixing gained glue drop to lead in flexibility
Wet film in homogeneous thickness is formed by sol evenning machine on conductive film (2), humidity sensitive fexible film (4) are made through drying and forming-film.
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