CN109047163A - A kind of cleaning equipment for optical polish piece - Google Patents
A kind of cleaning equipment for optical polish piece Download PDFInfo
- Publication number
- CN109047163A CN109047163A CN201810864057.4A CN201810864057A CN109047163A CN 109047163 A CN109047163 A CN 109047163A CN 201810864057 A CN201810864057 A CN 201810864057A CN 109047163 A CN109047163 A CN 109047163A
- Authority
- CN
- China
- Prior art keywords
- shell
- pipeline
- optical polish
- polish piece
- pipe joint
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/045—Cleaning involving contact with liquid using perforated containers, e.g. baskets, or racks immersed and agitated in a liquid bath
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses a kind of cleaning equipments for optical polish piece, including shell and supporting leg, and the supporting leg is symmetrically disposed on the bottom of the shell, the top side of the shell is provided with cleaning solution case, a side connecting pipe one of the cleaning solution case, and valve one is provided on the pipeline one, the pipeline one is provided with pipe joint far from a side of the cleaning solution case, the pipe joint is connected with pipeline two far from a side of the pipeline one, and valve two is provided on the pipeline two, the pipeline two is provided with filtered water tank far from a side of the pipe joint, the bottom end of the pipe joint is connected with pipeline three, and the bottom end of the pipeline three through the shell top and extend to the enclosure interior, the bottom of the pipeline three is provided with current divider, the bottom of the current divider is set Several spray heads are equipped with, the inner tip of the shell is provided with pressurizer, and the pressurizer is located on the pipeline three.
Description
Technical field
The present invention relates to polished silicon wafer technical fields, it particularly relates to a kind of cleaning equipment for optical polish piece.
Background technique
Polished silicon wafer is after mixing nanosized silica particles with high-efficiency binder, to be homogeneously applied to polyester film
Surface is reacted through drying and curing, due to polishing the wavelength that primary granule is subtle, size is less than visible light, so
Appearance transparent is formed after being evenly distributed or translucent polished film, optical polish piece belong to one kind of polished silicon wafer, is specially to use
Polish a kind of tool to optical mirror slip, optical polish piece requires to start the cleaning processing in production and processing, but existing
Optical polish piece cleaning equipment can all occur the uneven problem of cleaning when cleaning to optical polish piece, this is seriously affected
The quality of production of optical polish piece, while also reducing the production efficiency of optical polish piece.
For the problems in the relevant technologies, currently no effective solution has been proposed.
Summary of the invention
For the problems in the relevant technologies, the present invention proposes a kind of cleaning equipment for optical polish piece, existing to overcome
There is above-mentioned technical problem present in the relevant technologies.
The technical scheme of the present invention is realized as follows:
A kind of cleaning equipment for optical polish piece, including shell and supporting leg, and the supporting leg be symmetrically disposed on it is described
The bottom of shell, the top side of the shell are provided with cleaning solution case, a side connecting pipe of the cleaning solution case
One, and valve one is provided on the pipeline one, the pipeline one is provided with pipeline far from a side of the cleaning solution case
Connector, the pipe joint is connected with pipeline two far from a side of the pipeline one, and is provided with valve on the pipeline two
Two, the pipeline two is provided with filtered water tank far from a side of the pipe joint, and the bottom end of the pipe joint is connected with pipe
Road three, and the bottom end of the pipeline three through the shell top and extend to the enclosure interior, the pipeline three
Bottom is provided with current divider, and the bottom of the current divider is provided with several spray heads, and the inner tip of the shell is provided with pressurization
Device, and the pressurizer is located on the pipeline three, the inner tip of the shell is symmetrically arranged with fixed link, and the fixation
The bottom of bar is connect with the top of the current divider, and the two sides of the shell are symmetrically arranged with support base, the support base
Top be provided with motor, the motor is provided with shaft coupling close to a side of the shell, and the shaft coupling is separate
A side of the motor is provided with shaft, and the one end of the shaft far from the shaft coupling is through the shell
Side and the inside for extending to the shell, the shaft are provided with connecting plate, the company far from one end of the shaft coupling
Clamping plate one is provided at the top of fishplate bar, the middle part of the clamping plate one, which extends vertically through, is provided with fixing bolt, the fixing bolt
Top is provided with adjusting nut, and the bottom of the connecting plate is provided with clamping plate two, and the top of the clamping plate two is provided with link block,
The top of the link block and the bottom of the fixing bolt are provided with fixture block, and the inside two sides of the shell are symmetrical arranged
There is support rod, fixed block is provided at the top of the support rod, and the fixed block is sheathed on the outside of the shaft.
Further, the center bottom of the shell offers discharge outlet, and the bottom end of the discharge outlet is provided with drainpipe,
And valve three is provided on the drainpipe.
Further, the inner bottom of the shell is symmetrically arranged with baffle.
Further, the pipe joint is three-way connection.
Further, threaded hole compatible with the fixing bolt is offered on the clamping plate one.
Further, the inside two sides of the shell are symmetrically arranged with sealing ring, and the sealing ring is sheathed on institute
It states in shaft.
Further, the bottom of the supporting leg is provided with universal wheel.
Beneficial effects of the present invention: the shaft is driven to be rotated by the motor, due to the top of the shaft
It is respectively arranged with clamping plate one and clamping plate two with bottom, the middle part of the clamping plate one, which extends vertically through, is provided with fixing bolt, described solid
Determine to be provided with adjusting nut at the top of bolt, the top of the clamping plate two is provided with link block, the top of the link block and institute
The bottom for stating fixing bolt is provided with fixture block, the fixing bolt is adjusted by the adjusting nut, in the folder
Fixation is clamped to optical polish piece under the action of block, by under the drive of motor so that optical polish piece is rotated, by
The top side of the shell is provided with cleaning solution case, a side connecting pipe one of the cleaning solution case, and it is described
Valve one is provided on pipeline one, the pipeline one is provided with pipe joint far from a side of the cleaning solution case, described
Pipe joint is connected with pipeline two far from a side of the pipeline one, and valve two is provided on the pipeline two, the pipe
Road two is provided with filtered water tank far from a side of the pipe joint, and the bottom end of the pipe joint is connected with pipeline three, and institute
The bottom end of pipeline three is stated through the top of the shell and extends to the enclosure interior, the bottom of the pipeline three is provided with
Current divider, the bottom of the current divider are provided with several spray heads, and the inner tip of the shell is provided with pressurizer, and it is described plus
Depressor is located on the pipeline three, by the valve one and the valve two, can control the flowing of cleaning solution and clear water,
Then it is pressurizeed by the pressurizer to cleaning liquid, is then sprayed by the spray head, optical polish piece carried out clear
It washes, in general, the existing optical polish piece cleaning equipment of very good solution of the present invention is when cleaning optical polish piece
The uneven problem of the cleaning occurred, it is ensured that the quality of production of optical polish piece, while also improving the life of optical polish piece
Produce efficiency.
Detailed description of the invention
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the invention
Example, for those of ordinary skill in the art, without creative efforts, can also obtain according to these attached drawings
Obtain other attached drawings.
Fig. 1 is a kind of cleaning equipment structural schematic diagram for optical polish piece according to an embodiment of the present invention.
In figure:
1, shell;2, supporting leg;3, cleaning solution case;4, pipeline one;5, valve one;6, pipe joint;7, pipeline two;8, valve
Two;9, filtered water tank;10, pipeline three;11, current divider;12, spray head;13, pressurizer;14, fixed link;15, support base;16, electric
Machine;17, shaft coupling;18, shaft;19, connecting plate;20, clamping plate one;21, fixing bolt;22, adjusting nut;23, clamping plate two;
24, link block;25, fixture block;26, support rod;27, fixed block;28, discharge outlet;29, drainpipe;30, valve three;31, water conservancy diversion
Block;32, sealing ring;33, universal wheel.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art's every other embodiment obtained belong to what the present invention protected
Range.
According to an embodiment of the invention, providing a kind of cleaning equipment for optical polish piece.
As shown in Figure 1, a kind of cleaning equipment for optical polish piece according to an embodiment of the present invention, including 1 He of shell
Supporting leg 2, and the supporting leg 2 is symmetrically disposed on the bottom of the shell 1, the top side of the shell 1 is provided with cleaning
Liquor box 3, a side connecting pipe 1 of the cleaning solution case 3, and valve 1 is provided on the pipeline 1, it is described
Pipeline 1 is provided with pipe joint 6 far from a side of the cleaning solution case 3, and the pipe joint 6 is far from the pipeline one
4 a side is connected with pipeline 27, and valve 28 is provided on the pipeline 27, and the pipeline 27 connects far from the pipeline
First 6 a side is provided with filtered water tank 9, and the bottom end of the pipe joint 6 is connected with pipeline 3 10, and the bottom of the pipeline 3 10
It holds the top through the shell 1 and extends to inside the shell 1, the bottom of the pipeline 3 10 is provided with current divider
11, the bottom of the current divider 11 is provided with several spray heads 12, and the inner tip of the shell 1 is provided with pressurizer 13, and institute
It states pressurizer 13 to be located on the pipeline 3 10, the inner tip of the shell 1 is symmetrically arranged with fixed link 14, and the fixation
The bottom of bar 14 is connect with the top of the current divider 11, and the two sides of the shell 1 are symmetrically arranged with support base 15, described
The top of support base 15 is provided with motor 16, and the motor 16 is provided with shaft coupling 17 close to a side of the shell 1,
The shaft coupling 17 is provided with shaft 18 far from a side of the motor 16, and the shaft 18 is far from the shaft coupling 17
One end through the side of the shell 1 and extend to the inside of the shell 1, the shaft 18 is far from the shaft coupling
17 one end is provided with connecting plate 19, and the top of the connecting plate 19 is provided with clamping plate 1, the middle part of the clamping plate 1
It extends vertically through and is provided with fixing bolt 21, the top of the fixing bolt 21 is provided with adjusting nut 22, the connecting plate 19
Bottom is provided with clamping plate 2 23, and the top of the clamping plate 2 23 is provided with link block 24, the top of the link block 24 with it is described
The bottom of fixing bolt 21 is provided with fixture block 25, and the inside two sides of the shell 1 are symmetrically arranged with support rod 26, the branch
The top of strut 26 is provided with fixed block 27, and the fixed block 27 is sheathed on 18 outside of shaft.
With the aid of the technical scheme, the shaft 18 is driven to be rotated by the motor 16, due to the shaft
18 top and bottom is respectively arranged with clamping plate 1 and clamping plate 2 23, and the middle part of the clamping plate 1, which extends vertically through, to be provided with admittedly
Determine bolt 21, the top of the fixing bolt 21 is provided with adjusting nut 22, and the top of the clamping plate 2 23 is provided with link block
24, the top of the link block 24 and the bottom of the fixing bolt 21 are provided with fixture block 25, pass through the adjusting nut 22
The fixing bolt 21 is adjusted, fixation is clamped to optical polish piece under the action of fixture block 25, passes through electricity
So that optical polish piece is rotated under the drive of machine 16, since the top side of the shell 1 is provided with cleaning solution case 3,
A side connecting pipe 1 of the cleaning solution case 3, and valve 1 is provided on the pipeline 1, the pipeline 1 is remote
A side from the cleaning solution case 3 is provided with pipe joint 6, a side of the pipe joint 6 far from the pipeline 1
It is connected with pipeline 27, and is provided with valve 28 on the pipeline 27, side of the pipeline 27 far from the pipe joint 6
While be provided with filtered water tank 9, the bottom end of the pipe joint 6 is connected with pipeline 3 10, and the bottom end of the pipeline 3 10 through
The top of the shell 1 simultaneously extends to inside the shell 1, and the bottom of the pipeline 3 10 is provided with current divider 11, and described point
The bottom of stream device 11 is provided with several spray heads 12, and the inner tip of the shell 1 is provided with pressurizer 13, and the pressurizer 13
On the pipeline 3 10, by the valve 1 and the valve 28, the flowing of cleaning solution and clear water can control,
Then pressurizeed by the pressurizer 13 to cleaning liquid, then by the spray head 12 spray, to optical polish piece into
Row cleaning, in general, the existing optical polish piece cleaning equipment of very good solution of the present invention optical polish piece is carried out it is clear
The uneven problem of the cleaning occurred when washing, it is ensured that the quality of production of optical polish piece, while also improving optical polish piece
Production efficiency.
In addition, the center bottom of the shell 1 offers discharge outlet 28, the bottom end of the discharge outlet 28 is provided with drainpipe
29, and valve 3 30 is provided on the drainpipe 29, the inner bottom of the shell 1 is symmetrically arranged with baffle 31 convenient for clear
The sewage discharge of generation is washed, the pipe joint 6 is three-way connection, convenient for the connection of pipeline 1, pipeline 27 and pipeline 3 10,
Threaded hole compatible with the fixing bolt 21 is offered on the clamping plate 1, it is described convenient for the adjusting of fixing bolt 21
The inside two sides of shell 1 are symmetrically arranged with sealing ring 32, and the sealing ring 32 is sheathed in the shaft 18, prevent clear
There is liquid to splash out when washing from the side wall of shell 1, the bottom of the supporting leg 2 is provided with universal wheel 33, convenient for the movement of equipment
Save manpower.
In conclusion driving the shaft 18 to carry out by the motor 16 by means of above-mentioned technical proposal of the invention
Rotation, since the top and bottom of the shaft 18 is respectively arranged with clamping plate 1 and clamping plate 2 23, in the clamping plate 1
Portion, which extends vertically through, is provided with fixing bolt 21, and the top of the fixing bolt 21 is provided with adjusting nut 22, the clamping plate 2 23
Top be provided with link block 24, the bottom of the top of the link block 24 and the fixing bolt 21 is provided with fixture block 25,
The fixing bolt 21 is adjusted by the adjusting nut 22, under the action of fixture block 25 to optical polish piece into
Row be fixedly clamped, by under the drive of motor 16 so that optical polish piece is rotated, since the top side of the shell 1 is set
It is equipped with cleaning solution case 3, a side connecting pipe 1 of the cleaning solution case 3, and is provided with valve on the pipeline 1
One 5, the pipeline 1 is provided with pipe joint 6 far from a side of the cleaning solution case 3, and the pipe joint 6 is far from institute
The a side for stating pipeline 1 is connected with pipeline 27, and valve 28 is provided on the pipeline 27, and the pipeline 27 is far from institute
The a side for stating pipe joint 6 is provided with filtered water tank 9, and the bottom end of the pipe joint 6 is connected with pipeline 3 10, and the pipeline
3 10 bottom end through the shell 1 top and extend to inside the shell 1, the bottom of the pipeline 3 10 is provided with
Current divider 11, the bottom of the current divider 11 are provided with several spray heads 12, and the inner tip of the shell 1 is provided with pressurizer
13, and the pressurizer 13 is located on the pipeline 3 10, by the valve 1 and the valve 28, can control cleaning
Then the flowing of solution and clear water pressurizes to cleaning liquid by the pressurizer 13, then sprayed by the spray head 12
Out, optical polish piece is cleaned, in general, the existing optical polish piece cleaning equipment of very good solution of the present invention is right
The uneven problem of the cleaning that optical polish piece occurs when being cleaned, it is ensured that the quality of production of optical polish piece, while
Improve the production efficiency of optical polish piece.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Within mind and principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (7)
1. a kind of cleaning equipment for optical polish piece, which is characterized in that including shell (1) and supporting leg (2), and the branch
Support leg (2) is symmetrically disposed on the bottom of the shell (1), and the top side of the shell (1) is provided with cleaning solution case (3),
A side connecting pipe one (4) of the cleaning solution case (3), and valve one (5) is provided on the pipeline one (4), it is described
Pipeline one (4) is provided with pipe joint (6) far from a side of the cleaning solution case (3), and the pipe joint (6) is far from institute
The a side for stating pipeline one (4) is connected with pipeline two (7), and valve two (8) is provided on the pipeline two (7), the pipeline
Two (7) are provided with filtered water tank (9) far from a side of the pipe joint (6), and the bottom end of the pipe joint (6) is connected with pipe
Road three (10), and the bottom end of the pipeline three (10) through the shell (1) top and extend in the shell (1)
Portion, the bottom of the pipeline three (10) are provided with current divider (11), and the bottom of the current divider (11) is provided with several spray heads
(12), the inner tip of the shell (1) is provided with pressurizer (13), and the pressurizer (13) is located at the pipeline three (10)
On, the inner tip of the shell (1) is symmetrically arranged with fixed link (14), and the bottom of the fixed link (14) with described point
The top connection of device (11) is flowed, the two sides of the shell (1) are symmetrically arranged with support base (15), the top of the support base (15)
Portion is provided with motor (16), and a side of the motor (16) close to the shell (1) is provided with shaft coupling (17), described
Shaft coupling (17) is provided with shaft (18) far from a side of the motor (16), and the shaft (18) is far from the shaft coupling
One end of device (17) through the side of the shell (1) and extends to the inside of the shell (1), and the shaft (18) is remote
One end from the shaft coupling (17) is provided with connecting plate (19), is provided with clamping plate one at the top of the connecting plate (19)
(20), it extends vertically through and is provided with fixing bolt (21) in the middle part of the clamping plate one (20), set at the top of the fixing bolt (21)
It is equipped with adjusting nut (22), the bottom of the connecting plate (19) is provided with clamping plate two (23), sets at the top of the clamping plate two (23)
It being equipped with link block (24), the top of the link block (24) and the bottom of the fixing bolt (21) are provided with fixture block (25),
The inside two sides of the shell (1) are symmetrically arranged with support rod (26), are provided with fixation at the top of the support rod (26)
Block (27), and the fixed block (27) is sheathed on the outside of the shaft (18).
2. a kind of cleaning equipment for optical polish piece according to claim 1, which is characterized in that the shell (1)
Center bottom offer discharge outlet (28), the bottom end of the discharge outlet (28) is provided with drainpipe (29), and the drainpipe
(29) valve three (30) is provided on.
3. a kind of cleaning equipment for optical polish piece according to claims 1 and 2, which is characterized in that the shell
(1) inner bottom is symmetrically arranged with baffle (31).
4. a kind of cleaning equipment for optical polish piece according to claim 1, which is characterized in that the pipe joint
It (6) is three-way connection.
5. a kind of cleaning equipment for optical polish piece according to claim 1, which is characterized in that the clamping plate one
(20) the compatible threaded hole with the fixing bolt (21) is offered on.
6. a kind of cleaning equipment for optical polish piece according to claim 1, which is characterized in that the shell (1)
Inside two sides be symmetrically arranged with sealing ring (32), and the sealing ring (32) is sheathed on the shaft (18).
7. a kind of cleaning equipment for optical polish piece according to claim 1, which is characterized in that the supporting leg
(2) bottom is provided with universal wheel (33).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810864057.4A CN109047163A (en) | 2018-08-01 | 2018-08-01 | A kind of cleaning equipment for optical polish piece |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810864057.4A CN109047163A (en) | 2018-08-01 | 2018-08-01 | A kind of cleaning equipment for optical polish piece |
Publications (1)
Publication Number | Publication Date |
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CN109047163A true CN109047163A (en) | 2018-12-21 |
Family
ID=64832322
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201810864057.4A Pending CN109047163A (en) | 2018-08-01 | 2018-08-01 | A kind of cleaning equipment for optical polish piece |
Country Status (1)
Country | Link |
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CN (1) | CN109047163A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110676197A (en) * | 2019-10-12 | 2020-01-10 | 盐城矽润半导体有限公司 | Accurate semiconductor belt cleaning device |
CN114433515A (en) * | 2020-11-05 | 2022-05-06 | 珠海维视艾康特医药科技有限公司 | Cleaning device for intraocular lens |
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JP2002170798A (en) * | 2000-11-29 | 2002-06-14 | Shin Etsu Handotai Co Ltd | Method and apparatus for washing polishing plate and method for polishing wafer |
CN202290654U (en) * | 2011-10-10 | 2012-07-04 | 北京七星华创电子股份有限公司 | Mega sonic cleaning head and mega sonic cleaning system comprising same |
CN106475344A (en) * | 2016-10-28 | 2017-03-08 | 无锡市富能金属制品有限公司 | A kind of vibration type cleaning equipment |
CN206064903U (en) * | 2016-08-30 | 2017-04-05 | 南京北方慧华光电有限公司 | A kind of circuit board cleans room |
CN106955862A (en) * | 2017-05-21 | 2017-07-18 | 盐城市三川轴承制造有限公司 | A kind of efficient bearing cleaner |
CN107626629A (en) * | 2017-10-10 | 2018-01-26 | 徐美琴 | One kind puies forward efficient cleaning equipment |
CN107716455A (en) * | 2017-11-14 | 2018-02-23 | 江门市得沁板业有限公司 | A kind of dalle production labor makees platform |
-
2018
- 2018-08-01 CN CN201810864057.4A patent/CN109047163A/en active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002170798A (en) * | 2000-11-29 | 2002-06-14 | Shin Etsu Handotai Co Ltd | Method and apparatus for washing polishing plate and method for polishing wafer |
CN202290654U (en) * | 2011-10-10 | 2012-07-04 | 北京七星华创电子股份有限公司 | Mega sonic cleaning head and mega sonic cleaning system comprising same |
CN206064903U (en) * | 2016-08-30 | 2017-04-05 | 南京北方慧华光电有限公司 | A kind of circuit board cleans room |
CN106475344A (en) * | 2016-10-28 | 2017-03-08 | 无锡市富能金属制品有限公司 | A kind of vibration type cleaning equipment |
CN106955862A (en) * | 2017-05-21 | 2017-07-18 | 盐城市三川轴承制造有限公司 | A kind of efficient bearing cleaner |
CN107626629A (en) * | 2017-10-10 | 2018-01-26 | 徐美琴 | One kind puies forward efficient cleaning equipment |
CN107716455A (en) * | 2017-11-14 | 2018-02-23 | 江门市得沁板业有限公司 | A kind of dalle production labor makees platform |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110676197A (en) * | 2019-10-12 | 2020-01-10 | 盐城矽润半导体有限公司 | Accurate semiconductor belt cleaning device |
CN114433515A (en) * | 2020-11-05 | 2022-05-06 | 珠海维视艾康特医药科技有限公司 | Cleaning device for intraocular lens |
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Application publication date: 20181221 |
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