CN109037118A - A kind of pick-and-place method and apparatus that permanent magnet is used for more crystal grain - Google Patents

A kind of pick-and-place method and apparatus that permanent magnet is used for more crystal grain Download PDF

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Publication number
CN109037118A
CN109037118A CN201811045952.XA CN201811045952A CN109037118A CN 109037118 A CN109037118 A CN 109037118A CN 201811045952 A CN201811045952 A CN 201811045952A CN 109037118 A CN109037118 A CN 109037118A
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China
Prior art keywords
chip
fetching device
cylinder
permanent magnets
magnetic force
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Granted
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CN201811045952.XA
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Chinese (zh)
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CN109037118B (en
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韦丁山
郑凯元
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Taizhou Power Supply Co of State Grid Zhejiang Electric Power Co Ltd
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Anhui Hongshi Automation Equipment Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention discloses a kind of pick-and-place method and apparatus that permanent magnet is used for more crystal grain, use ndfeb magnet, it can guarantee to attract the permanent stabilization of magnetic force, guarantee stability, cooperate partition to use, separated chip and permanent magnets by partition, does not have the effect of barrier magnetic force, it avoids chip from directly contacting with permanent magnets to be sucked and cause not separating, facilitates taking and unloading for chip.The problem of pushing permanent magnets mobile using cylinder, permanent magnets can be made slowly to move, magnetic force can be made slowly to weaken, avoided during upward attract with being detached from downwards, cause the violent shaking of magnetic force material.Can be taken multiple chips simultaneously, and push multiple mandrils by a cylinder, and multiple chips is made to be completed at the same time the operation taken and unloaded, and sync rates are high, improve work efficiency.The size of magnetic force suffered by chip can be changed by adjusting the elongation of cylinder, and then adapt to the chip of different weight, it is applied widely.

Description

A kind of pick-and-place method and apparatus that permanent magnet is used for more crystal grain
Technical field
The present invention relates to encapsulation procedure apparatus fields, and in particular to a kind of pick-and-place side that permanent magnet is used for more crystal grain Method and equipment.
Background technique
IC package just refers to the circuit pin on silicon wafer, connect and guided at external lug with conducting wire, so as to other devices Connection.Packing forms refer to the shell of installation semiconductor integrated circuit chip.It not only plays installation, fixation, sealing, protection The effect of chip and enhancing electric heating property etc., but also drawing for package casing is wired to by the contact on chip On foot, these pins are connected further through the conducting wire on printed circuit board with other devices, to realize inside chip and outside The connection of circuit.
IC package uses lead frame etching forming, and mode used at present is that the soft suction nozzle of vacuum pump connection carries out pick-and-place behaviour Make, vacuum pump refers to using machinery, physics, chemically or physically the method for chemistry is evacuated and obtains vacuum to being smoked container Device or equipment.For popular, vacuum pump is to be improved in a certain enclosure space with various methods, generate and maintain the dress of vacuum It sets, under the prior art, the suction nozzle of soft suction nozzle is easily deformed, and is caused stability when loading or unloading operation poor, is influenced working efficiency.
Mechanical arm refer to high-precision, high speed glue dispensing machine hand, mechanical arm be a multiple-input and multiple-output, nonlinearity, The complication system of close coupling.Because of its unique operating flexibility, in industry assembling, the fields such as safety anti-explosive are answered extensively With.
Burr machine is the equipment for handling the thermohardening plastic products flash of compression or ejection formation, self contained projection dress Set, cabinet, annulus conveying device, dust collect plant etc. are combined into one, and are a kind of tailored appearances, do not take up space, efficiency is again high Injection rinsing machine can be used for the etching work procedure of IC package.
Summary of the invention
In order to solve the above technical problems, permanent magnet is used for more crystal grain the purpose of the present invention is to provide a kind of Pick-and-place method and apparatus, by adjust magnetic force size pick and place chip, improve stability, it is time saving and energy saving, improve work effect Rate.
The purpose of the present invention can be achieved through the following technical solutions:
A kind of pick-and-place method that permanent magnet is used for more crystal grain, including IC pallet, mechanical arm, fetching device and etching Device, a kind of pick-and-place method that permanent magnet is used for more crystal grain include:
S1. the taking-up and fixation of chip: mechanical arm is fixedly connected with fetching device, and mechanical arm controls fetching device movement, Make fetching device with place IC pallet on the table and be aligned and close, fetching device contradicts behind the upper surface of IC pallet, Mechanical arm position is fixed, while fetching device starts, chip is sucked out from IC pallet by increasing magnetic force, adsorbs chip In the lower end surface of fetching device, complete to take out fixed process;
S2. the etching of chip: absorption is fixed with the fetching device horizontal transmission of chip to Etaching device by control mechanical arm In, then change chip suffered by magnetic force size, when chip gravity be greater than magnetic force, separate chip with fetching device, etching Device processes chip;
S3. the transfer of chip: after the completion of device to be etched is to chip manufacture, the operation of S1 is repeated, makes the core for completing to process Piece is absorbed and fixed at together again with fetching device, is transported by mechanical arm into next process equipment.
Further, the Etaching device is burr machine.
Further, the chip is QFN IC Package.
Further, the IC pallet is QFN Matrix IC Tray, and the surface of the IC pallet offers 48 A fixing groove in matrix distribution, the fixing groove are cube structure.
This method the utility model has the advantages that attracted using magnetic force, when taking and placing, can guarantee stability under loading, Bu Huiyou In soft suction nozzle suction nozzle deformation and the stability problem that generates, and it is time saving and energy saving, improve work efficiency.
A kind of fetching device that permanent magnet is used for more crystal grain, including cylinder, the cylinder are fixedly connected with connection Threaded post, the connection screw thread column are threadedly coupled with mechanical arm, and the piston rod of the cylinder is fixedly connected with push plate, the push plate Lower end surface be vertically fixedly connected with 48 mandrils of matching fixing groove, the lateral wall of the cylinder passes through fixed bracket and connects It is connected to mounting box, the mounting box is located at the underface of cylinder, and mounting box is arranged in parallel with push plate, the lower end of the mounting box Face offers 48 sliding grooves of matching fixing groove, and the inner roof wall of the sliding groove offers connection mounting box upper surface Jack, the jack, sliding groove and mandril are coaxially disposed, and slidably connect permanent magnets in the sliding groove, the permanent magnets Upper end is connected by the inner roof wall of reset spring and sliding groove, and the reset spring is movably set on mandril, the mandril Lower end passes through jack and inconsistent with the upper surface of permanent magnets, is fixedly connected at four endpoints of the mounting box lower end surface One end of connecting column, the other end of four connecting columns are fixedly connected on the same partition, and the partition is nonmagnetic anti- The material answered.
Further, the permanent magnets are ndfeb magnet, and the permanent magnets are cylindrical structure, and the bottom surface of permanent magnets Area is less than the area of chip.
Further, the cylinder is single-acting cylinder, and the driving velocity of cylinder is no more than 1mm/s.
Further, the block board thickness is no more than 1mm, and the length of sliding groove is not less than 7cm.
When taking chip, by IC pallet fixing groove and permanent magnets correspond, cylinder is started, push push plate to Lower movement, make mandril push permanent magnets moved downward along sliding groove, at this time due to permanent magnets at a distance from chip with the speed of 1mm/s Degree slowly reduces, and guarantees not will cause the violent shaking of magnetic force material, and chip during attracting upwards and being detached from downwards Containing wire metals frame, belonging to magnetic force material, magnetic force increases and is greater than the gravity of chip, chip can be sucked out from IC pallet, It is tightly adsorbed on the lower end surface of partition, magnetic force size will not influence by the partition guarantee of the material of nonmagnetic reaction, and make Permanent magnets are separated with chip, are avoided chip and are directly sucked with permanent magnets and cause the problem of can not separating.
When unloading chip, cylinder need to only be started, push plate is pushed to move upwards, reset spring pulls permanent magnets along sliding Slot moves upwards, while permanent magnets and mandril keep contradicting, and guarantees that permanent magnets slowly rise, magnetic force slowly reduces, chip gravity When greater than magnetic force, chip is separated with partition.
This fetching device the utility model has the advantages that
(1) ndfeb magnet is used, can guarantee to attract the permanent stabilization of magnetic force, guarantees stability, cooperation partition uses, leads to The partition for crossing the nonmagnetic reaction material production of 1mm thickness separates chip and permanent magnets, does not have the effect of barrier magnetic force, keeps away Exempt from chip and directly contact with permanent magnets to be sucked and cause not separating, facilitates taking and unloading for chip.
(2) it pushes permanent magnets mobile using cylinder, permanent magnets can be made slowly to move, magnetic force can be made slowly to weaken, kept away The problem of having exempted from during upward attract with being detached from downwards, having caused the violent shaking of magnetic force material.
(3) can take multiple chips simultaneously, and push multiple mandrils by a cylinder, be completed at the same time multiple chips It takes the operation unloaded, sync rates are high, improve work efficiency.
(4) size of magnetic force suffered by chip can be changed by adjusting the elongation of cylinder, and then adapt to different weight Chip, it is applied widely.
Detailed description of the invention
The present invention will be further described below with reference to the drawings.
Fig. 1 is the structural schematic diagram of fetching device of the invention;
Fig. 2 is the schematic diagram of internal structure of fetching device of the invention;
Fig. 3 is the structural schematic diagram of IC pallet of the invention.
In figure: cylinder 1, push plate 3, mandril 4, fixation bracket 5, mounting box 6, connecting column 7, partition 8, is answered at connection screw thread column 2 Position spring 9, permanent magnets 10, IC pallet 11, fixing groove 12.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts all other Embodiment shall fall within the protection scope of the present invention.
Please refer to shown in Fig. 1-3, present embodiments provide it is a kind of by permanent magnet be used for more crystal grain pick-and-place method and Equipment, including IC pallet 11, mechanical arm, fetching device and Etaching device, it is described a kind of permanent magnet to be used for more crystal grain Pick-and-place method includes:
S1. the taking-up and fixation of chip: mechanical arm is fixedly connected with fetching device, and mechanical arm controls fetching device movement, Make fetching device with place IC pallet 11 on the table and be aligned and close, fetching device is contradicted in the upper surface of IC pallet 11 Afterwards, mechanical arm position is fixed, while fetching device starts, chip is sucked out from IC pallet 11 by increasing magnetic force, makes core Piece is adsorbed on the lower end surface of fetching device, completes to take out fixed process;
S2. the etching of chip: absorption is fixed with the fetching device horizontal transmission of chip to Etaching device by control mechanical arm In, then change chip suffered by magnetic force size, when chip gravity be greater than magnetic force, separate chip with fetching device, etching Device processes chip;
S3. the transfer of chip: after the completion of device to be etched is to chip manufacture, the operation of S1 is repeated, makes the core for completing to process Piece is absorbed and fixed at together again with fetching device, is transported by mechanical arm into next process equipment.
The Etaching device is burr machine.
The chip is QFN IC Package, and internal includes wire metals frame, belongs to magnetic force material.
The IC pallet 11 is QFN Matrix IC Tray, and the surface of the IC pallet 11 offers 48 in square The fixing groove 12 of battle array distribution, the fixing groove 12 are cube structure.
This method the utility model has the advantages that attracted using magnetic force, when taking and placing, can guarantee stability under loading, Bu Huiyou In soft suction nozzle suction nozzle deformation and the stability problem that generates, and it is time saving and energy saving, improve work efficiency.
A kind of fetching device that permanent magnet is used for more crystal grain, including cylinder 1, the cylinder 1 are single-acting cylinder, And the driving velocity of cylinder 1 is no more than 1mm/s, magnetic force meeting is because remote apart from becoming, and cracking decrease, but is not equal proportion Variation;Therefore mobile permanent magnet must very slowly the light and handy separation of ability, the cylinder 1 be fixedly connected with connection screw thread column 2, institute It states connection screw thread column 2 to be threadedly coupled with mechanical arm, the piston rod of the cylinder 1 is fixedly connected with push plate 3, under the push plate 3 End face is vertically fixedly connected with 48 mandrils 4 of matching fixing groove 12, guarantees the sync rates for picking and placing multiple chips, the gas The lateral wall of cylinder 1 passes through fixed bracket 5 and is connected with mounting box 6, and the mounting box 6 is located at the underface of cylinder 1, and mounting box 6 It is arranged in parallel with push plate 3, the lower end surface of the mounting box 6 offers 48 sliding grooves of matching fixing groove 12, and slides The length of slot is not less than 7cm, can be applicable in the chip of different weight, and the inner roof wall of the sliding groove offers connection mounting box 6 The jack of upper surface, the jack, sliding groove and mandril 4 are coaxially disposed, and slidably connect permanent magnets 10, institute in the sliding groove Stating permanent magnets 10 is ndfeb magnet, and the permanent magnets 10 are cylindrical structure, and the base area of permanent magnets 10 is less than chip Area, the upper ends of the permanent magnets 10 connect by reset spring 9 with the inner roof wall of sliding groove, and the reset spring 9 is movable It is set on mandril 4, the lower end of the mandril 4 passes through jack and inconsistent with the upper surface of permanent magnets 10, under the mounting box 6 One end of connecting column 7 is fixedly connected at four endpoints of end face, the other end of four connecting columns 7 is fixedly connected on together On one partition 8, the iron plate for the reaction that is magnetic can most obstruct magnetic force;And the material of nonmagnetic reaction, magnetic will not be stopped instead Power, therefore the partition 8 is the material of nonmagnetic reaction, being detached from key is using partition 8, and future is not inhaled directly by permanent magnets 10 It firmly causes not separating, 8 thickness of partition is no more than 1mm.
This fetching device uses ndfeb magnet, can guarantee to attract the permanent stabilization of magnetic force, guarantee stability, cooperate partition 8 use, and separate chip and permanent magnets 10 by the partition 8 that the nonmagnetic reaction material of 1mm thickness makes, do not have barrier magnetic The effect of power avoids chip from directly contacting with permanent magnets 10 and is sucked and causes not separating, facilitates taking and unloading for chip.Make Push permanent magnets 10 mobile with cylinder 1, permanent magnets 10 can be made slowly to move, magnetic force can be made slowly to weaken, avoid to Upper attraction and during being detached from downwards, the problem of causing the violent shaking of magnetic force material.Can be taken multiple chips simultaneously, and Multiple mandrils 4 are pushed by a cylinder 1, multiple chips is made to be completed at the same time the operation taken and unloaded, sync rates are high, improve work Make efficiency.The size of magnetic force suffered by chip can be changed by adjusting the elongation of cylinder 1, and then adapt to the core of different weight Piece, it is applied widely.
The specific work process of this fetching device is as follows:
1) when taking chip, the fixing groove 12 on IC pallet 11 is corresponded with permanent magnets 10, cylinder 1 is started, It pushes push plate 3 to move downward, makes mandril 4 that permanent magnets 10 be pushed to move downward along sliding groove, at this time due to permanent magnets 10 and chip Distance slowly reduced with the speed of 1mm/s, guarantee it is upward attract and be detached from downwards during, not will cause magnetic force material Violent shaking, and chip contains wire metals frame, belongs to magnetic force material, and magnetic force increases and be greater than the gravity of chip, can will Chip is sucked out from IC pallet 11, is tightly adsorbed on the lower end surface of partition 8, is guaranteed by the partition 8 of the material of nonmagnetic reaction It will not influence magnetic force size, and separate permanent magnets 10 with chip, avoid chip and permanent magnets 10 are directly sucked and cause nothing The problem of method separates;
2) when unloading chip, cylinder 1 need to only be started, push plate 3 is pushed to move upwards, reset spring 9 pulls permanent magnets 10 move upwards along sliding groove, while permanent magnets 10 and mandril 4 keep contradicting, and guarantee that permanent magnets 10 slowly rise, magnetic force is slow Reduce, when chip gravity is greater than magnetic force, chip is separated with partition 8.
Above content is only to structure of the invention example and explanation, affiliated those skilled in the art couple Described specific embodiment does various modifications or additions or is substituted in a similar manner, without departing from invention Structure or beyond the scope defined by this claim, is within the scope of protection of the invention.

Claims (8)

1. a kind of pick-and-place method that permanent magnet is used for more crystal grain, including IC pallet (11), mechanical arm, fetching device and erosion Engraving device, which is characterized in that a kind of pick-and-place method that permanent magnet is used for more crystal grain includes:
S1. the taking-up and fixation of chip: mechanical arm is fixedly connected with fetching device, and mechanical arm controls fetching device movement, makes to take Put equipment with place IC pallet (11) on the table and be aligned and close, upper surface of the fetching device conflict in IC pallet (11) Afterwards, mechanical arm position is fixed, while fetching device starts, chip is sucked out from IC pallet (11) by increasing magnetic force, is made Chip is adsorbed on the lower end surface of fetching device, completes to take out fixed process;
S2. the etching of chip: control mechanical arm will adsorb the fetching device horizontal transmission for being fixed with chip into Etaching device, with Afterwards change chip suffered by magnetic force size, when chip gravity be greater than magnetic force, separate chip with fetching device, Etaching device pair Chip is processed;
S3. the transfer of chip: after the completion of device to be etched is to chip manufacture, repeat S1 operation, make complete process chip with Fetching device is absorbed and fixed at together again, is transported by mechanical arm into next process equipment.
2. a kind of pick-and-place method that permanent magnet is used for more crystal grain according to claim 1, which is characterized in that described Etaching device is burr machine.
3. a kind of pick-and-place method that permanent magnet is used for more crystal grain according to claim 1, which is characterized in that described Chip is QFN IC Package.
4. a kind of pick-and-place method that permanent magnet is used for more crystal grain according to claim 1, which is characterized in that described IC pallet (11) is QFN Matrix IC Tray, and the surface of the IC pallet (11) offers 48 in matrix distribution Fixing groove (12), the fixing groove (12) are cube structure.
5. a kind of fetching device that permanent magnet is used for more crystal grain according to claim 1, which is characterized in that described Fetching device includes cylinder (1), and the cylinder (1) is fixedly connected with connection screw thread column (2), the connection screw thread column (2) and machine Tool arm is threadedly coupled, and the piston rod of the cylinder (1) is fixedly connected with push plate (3), and the lower end surface of the push plate (3) is vertically fixed 48 mandrils (4) of matching fixing groove (12) are connected with, the lateral wall of the cylinder (1) passes through fixed bracket (5) connection Have mounting box (6), the mounting box (6) is located at the underface of cylinder (1), and mounting box (6) is arranged in parallel with push plate (3), institute The lower end surface for stating mounting box (6) offers 48 sliding grooves of matching fixing groove (12), and the inner roof wall of the sliding groove is opened Jack equipped with connection mounting box (6) upper surface, the jack, sliding groove and mandril (4) are coaxially disposed, sliding in the sliding groove Dynamic to be connected with permanent magnets (10), the upper end of the permanent magnets (10) is connect by reset spring (9) with the inner roof wall of sliding groove, institute It states reset spring (9) to be movably set on mandril (4), the lower end of the mandril (4) passes through jack and upper with permanent magnets (10) End face is inconsistent, and one end of connecting column (7), four institutes are fixedly connected at four endpoints of mounting box (6) lower end surface The other end for stating connecting column (7) is fixedly connected on the same partition (8), and the partition (8) is the material of nonmagnetic reaction.
6. a kind of fetching device that permanent magnet is used for more crystal grain according to claim 5, which is characterized in that described Permanent magnets (10) are ndfeb magnet, and the permanent magnets (10) are cylindrical structure, and the base area of permanent magnets (10) is less than The area of chip.
7. a kind of fetching device that permanent magnet is used for more crystal grain according to claim 5, which is characterized in that described Cylinder (1) is single-acting cylinder, and the driving velocity of cylinder (1) is no more than 1mm/s.
8. a kind of fetching device that permanent magnet is used for more crystal grain according to claim 5, which is characterized in that described Partition (8) thickness is no more than 1mm, and the length of sliding groove is not less than 7cm.
CN201811045952.XA 2018-09-07 2018-09-07 Method and equipment for taking and placing permanent magnet for multiple grains Active CN109037118B (en)

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Publication number Priority date Publication date Assignee Title
CN111780628A (en) * 2020-05-25 2020-10-16 中煤科工集团淮北爆破技术研究院有限公司 Binocular stereo medicine height measuring device

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CN111780628A (en) * 2020-05-25 2020-10-16 中煤科工集团淮北爆破技术研究院有限公司 Binocular stereo medicine height measuring device
CN111780628B (en) * 2020-05-25 2022-05-13 中煤科工集团淮北爆破技术研究院有限公司 Binocular stereo medicine height measuring device

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