CN109029725A - Deep ultraviolet, visible, near infrared radiometric calibration source device - Google Patents
Deep ultraviolet, visible, near infrared radiometric calibration source device Download PDFInfo
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- CN109029725A CN109029725A CN201810928974.4A CN201810928974A CN109029725A CN 109029725 A CN109029725 A CN 109029725A CN 201810928974 A CN201810928974 A CN 201810928974A CN 109029725 A CN109029725 A CN 109029725A
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- integrating sphere
- lamp
- xenon
- visible
- light source
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- 229910052724 xenon Inorganic materials 0.000 claims abstract description 61
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims abstract description 61
- 229910052736 halogen Inorganic materials 0.000 claims abstract description 42
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 42
- 239000010937 tungsten Substances 0.000 claims abstract description 42
- 230000005855 radiation Effects 0.000 claims abstract description 29
- -1 tungsten halogen Chemical class 0.000 claims abstract description 28
- 150000002367 halogens Chemical class 0.000 claims abstract description 16
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract description 16
- 230000008676 import Effects 0.000 claims abstract description 7
- 239000011248 coating agent Substances 0.000 claims description 13
- 238000000576 coating method Methods 0.000 claims description 13
- 238000001816 cooling Methods 0.000 claims description 12
- 238000012544 monitoring process Methods 0.000 claims description 12
- 230000003287 optical effect Effects 0.000 claims description 8
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 claims description 6
- 238000001228 spectrum Methods 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 238000007747 plating Methods 0.000 claims description 4
- 238000012545 processing Methods 0.000 claims description 3
- 238000005086 pumping Methods 0.000 claims description 3
- 238000005245 sintering Methods 0.000 claims description 3
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 8
- 230000003595 spectral effect Effects 0.000 abstract description 8
- 238000004088 simulation Methods 0.000 abstract description 2
- 230000004907 flux Effects 0.000 description 4
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 4
- 239000004810 polytetrafluoroethylene Substances 0.000 description 4
- 238000002310 reflectometry Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000005457 Black-body radiation Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
Abstract
The present invention relates to aviations, the deep ultraviolet of star loaded camera, visible, near infrared radiometric calibration technical field, specifically, it is related to a kind of deep ultraviolet, visible, near infrared radiometric calibration source device, further includes light source assembly, for provides the camera radiation calibration of spoke brightness input stable known to one;The light source assembly includes xenon source, halogen tungsten lamp light source, the xenon source is arranged in integrating sphere side, and the light that the xenon light source issues enters in integrating sphere via import, for being calibrated in deep ultraviolet band camera, so, method simulation deep ultraviolet, the visible, near-infrared that the xenon short-act lamp and tungsten halogen lamp that the application is closer to using colour temperature with sun colour temperature the combine spectral radiance stable compared with wide spectral range export, 0.8 meter of camera ultraviolet band radiation calibration of exit portal is efficiently solved, current domestic camera ultraviolet band calibration blank has been filled up.
Description
Technical field:
The present invention relates to aviation, the deep ultraviolet of star loaded camera, visible, near infrared radiometric calibration technical fields specifically to relate to
And a kind of deep ultraviolet, visible, near infrared radiometric calibration source device.
Background technique:
Integrating sphere radiation source is a kind of very excellent scaling light source, and the spoke brightness surface uniformity and stability of output are
Ordinary light source is incomparable.The field using area source is being needed, the Laboratory Calibration of optical detector is widely used in, it is empty
Between optical remote sensing instrument transmitting before terrestrial surface radiation calibration.Therefore the stability of radiation source, accuracy for radiation calibration very
Key directly influences scaled instrument detection result.In the prior art, there are no 0.8 meter of camera ultraviolet waves of exit portal occur
Section radiation calibration, the purpose of the application are to solve that deep ultraviolet, that visible, near infrared radiometric calibration source device adapts to quantification is distant
The requirement of sense, method simulation deep ultraviolet that the xenon short-act lamp and tungsten halogen lamp being closer to using colour temperature with sun colour temperature are combined, can
See, the spectral radiance output that near-infrared is stable compared with wide spectral range, has filled up current domestic camera ultraviolet band calibration blank.
Summary of the invention:
The present invention overcomes the deficiencies of existing technologies, and provides a kind of deep ultraviolet, visible, near infrared radiometric calibration source device.
Technical problems to be solved in this application are implemented with the following technical solutions: a kind of deep ultraviolet, visible, near-infrared spoke
Calibration source device, including integrating sphere are penetrated, it further includes light source assembly that the integrating sphere, which is equipped with outlet and import, for providing one
The camera radiation calibration of a known stable spoke brightness input;
The light source assembly includes xenon source, halogen tungsten lamp light source, and the xenon source is arranged in integrating sphere side, and institute
The light for stating xenon light source sending enters in integrating sphere via import, for being calibrated in deep ultraviolet band camera;
The halogen tungsten lamp light source is arranged in integrating sphere, for being calibrated in visible, near infrared band camera.
Preferably, the integrating sphere includes bladders in integrating sphere spherical shell and integrating sphere, in the integrating sphere bladders via
Interior bladders mounting bracket and the integrating sphere spherical shell arranged for interval, bladders inner surface is coated with uniform diffuse reflection in the integrating sphere
The pure barium sulfate of white coating, bladders is spliced to form using sintering polytetrafluoroethylfilm through numerical control processing in the integrating sphere.
Preferably, the xenon source includes 2 7KW xenon short-act lamps, and each xenon short-act lamp is arranged on bracket,
The light that xenon short-act lamp is launched is transferred in integrating sphere via channel, the centre of sphere symmetrical cloth of each xenon short-act lamp along integrating sphere
It sets.
Preferably, it is saturating that the difference adjusted for realizing fixed colour temperature energy level variations is additionally provided in the optical path of the xenon source
Cross the decaying screen of rate;
The grade of the xenon source can be 7.
Preferably, the halogen tungsten lamp light source includes 42 250W tungsten halogen lamps, and each tungsten halogen lamp is enclosed halogen tungsten lamp array
Column, and each tungsten halogen lamp is divided into 14 grade energy with 3 one group.
Preferably, the lower end of the integrating sphere spherical shell is equipped with air inlet, and cooling clean air is pumped into via air inlet
Chamber in integrating sphere spherical shell and integrating sphere between bladders, integrating sphere spherical shell upper end are additionally provided with air outlet, the air outlet
It is connected with the exhaust fan for pumping out thermal current in chamber.
Preferably, the indoor air of the chamber is positive pressure.
Preferably, each xenon short-act lamp via 14~16m/s natural wind forced heat radiation;
The deep ellipse reflector of the plating deielectric-coating for absorbing wave band after 700nm is additionally provided on the channel;
The lamp base of each tungsten halogen lamp is connected with the copper tube for water-cooling.
It preferably, further include light source control unit, for controlling the grade energy of xenon source, halogen tungsten lamp light source;
It further include photostability monitoring unit, the photostability monitoring unit includes bright for detecting the spoke in integrating sphere
The spectrum instrument meter of stability is spent, the spectrum instrument meter is arranged in integrating sphere;
It further include system safety monitoring unit, the system safety monitoring unit includes for detecting fan and short arc xenon
The galvanometer of current stability on lamp.
Compared with prior art, the application have the beneficial effect that the application using colour temperature be closer to sun colour temperature it is short
It is defeated that the method that arc xenon lamp and tungsten halogen lamp combine simulates the spectral radiance stable compared with wide spectral range of deep ultraviolet, visible, near-infrared
Out, 0.8 meter of bore uniform area light source is realized as even light unit by polytetrafluoroethylene (PTFE) integrating sphere, according to xenon short-act lamp and halogen tungsten
Lamp incident photon-to-electron conversion efficiency, optical system light collection efficiency and the even light-decay characteristic of integrating sphere integrate deep ultraviolet, visible, near-infrared
The light-emitting window emergent radiation brightness of spherical radiation source, surface uniformity and angle uniformity carry out radiation calibration, wherein xenon source is used for
Generate deep ultraviolet light radiation, integrating sphere entered by deielectric-coating depth ellipse reflector, integrated ball inner wall highly-reflective coating it is more
Secondary reflection forms lambert's area source in integrating sphere exit, provides guarantee for the radiation calibration of camera ultraviolet band, effectively solve
It has determined 0.8 meter of camera ultraviolet band radiation calibration of exit portal, has filled up current domestic camera ultraviolet band calibration blank.
Detailed description of the invention:
Fig. 1 is schematic structural view of the invention;
Fig. 2 is that surface uniformity and angle uniformity correspond to integrating sphere inner wall area;
Fig. 3 is xenon short-act lamp light source black body radiation flux pattern of the present invention;
Fig. 4 is that tungsten halogen lamp integrating sphere of the present invention exports spoke brightness schematic diagram;
Fig. 5 is that xenon short-act lamp of the present invention+tungsten halogen lamp integrating sphere exports spoke intensity map;
Fig. 6 is spoke luminance non-uniformity of the present invention with angle change range schematic diagram;
In figure: 10~integrating sphere;11~integrating sphere spherical shell;Bladders in 12~integrating sphere;21~xenon short-act lamp;22~logical
Road;31~tungsten halogen lamp;40~air inlet;50~air outlet.
Specific embodiment:
In order to be easy to understand the technical means, the creative features, the aims and the efficiencies achieved by the present invention, tie below
Specific embodiment is closed, the present invention is furture elucidated.
Embodiment 1:
As shown in Figure 1, a kind of deep ultraviolet, visible, near infrared radiometric calibration source device, including integrating sphere 10, integrating sphere 10
It is equipped with outlet and import, further includes light source assembly, the camera radiation for providing spoke brightness input stable known to one is fixed
Mark;Light source assembly includes xenon source, halogen tungsten lamp light source, xenon source is arranged in 10 side of integrating sphere, and xenon light source issues
Light enters in integrating sphere 10 via import, for being calibrated in deep ultraviolet band camera;Halogen tungsten lamp light source is arranged in integral
In ball 10, for being calibrated in visible, near infrared band camera.
The method that the xenon short-act lamp 21 and tungsten halogen lamp 31 that the application is closer to using colour temperature with sun colour temperature combine is simulated
Deep ultraviolet, visible, near-infrared the spectral radiance output stable compared with wide spectral range, by polytetrafluoroethylene (PTFE) integrating sphere as even light
Unit realizes 0.8 meter of bore uniform area light source, according to 31 incident photon-to-electron conversion efficiency of xenon short-act lamp 21 and tungsten halogen lamp, optical system light
Collection efficiency and the even light-decay characteristic of integrating sphere to deep ultraviolet, visible, near-infrared integrating sphere radiation source light-emitting window emergent radiation is bright
Degree, surface uniformity and angle uniformity carry out radiation calibration.
As shown in Figure 1, integrating sphere 10 includes bladders 12 in integrating sphere spherical shell 11 and integrating sphere, bladders 12 is passed through in integrating sphere
By interior bladders mounting bracket and 11 arranged for interval of integrating sphere spherical shell, 12 inner surface of bladders is coated with uniform diffuse reflection in integrating sphere
The pure barium sulfate of white coating, bladders 12 is spliced to form using sintering polytetrafluoroethylfilm through numerical control processing in integrating sphere.
As shown in Figure 1, xenon source includes 2 7KW xenon short-act lamps 21, each xenon short-act lamp 21 is arranged on bracket,
The light that xenon short-act lamp 21 is launched is transferred in integrating sphere 10 via channel 22, ball of each xenon short-act lamp (21) along integrating sphere 10
The heart is arranged symmetrically, and declining for the different transmitances adjusted for realizing fixed colour temperature energy level variations is additionally provided in the optical path of xenon source
Subtract screen;The grade of xenon source can be 7, and xenon source passes through deielectric-coating depth ellipse reflector for generating deep ultraviolet light radiation
Into integrating sphere, the multiple reflections of integrated ball inner wall highly-reflective coating form lambert's area source in integrating sphere exit, are phase
The radiation calibration of machine ultraviolet band provides guarantee, and effect solves 0.8 meter of camera ultraviolet band radiation calibration of exit portal, fills up
Country's camera ultraviolet band calibrates blank at present.
As shown in Figure 1, halogen tungsten lamp light source includes 42 250W tungsten halogen lamps 31, each tungsten halogen lamp 31 is enclosed halogen tungsten lamp array
Column, and each tungsten halogen lamp 31 is with 3 one group, are divided into 14 grade energy, and in the application, energy level variations tungsten halogen lamp is by quantity of turning on light
Difference realizes the output variations of different energy levels, short for xenon short-act lamp light source in view of color temperature change caused by current regulation
The energy level of arc xenon lamp part adjusts the method that different transmitance decaying screen incision optical paths can be used and realizes that fixed colour temperature energy level becomes
Change and adjusts.
As shown in Figure 1, the lower end of integrating sphere spherical shell 11 is equipped with air inlet 40, cooling clean air is pumped via air inlet 40
Enter the chamber into integrating sphere spherical shell 11 and integrating sphere between bladders 12,11 upper end of integrating sphere spherical shell is additionally provided with air outlet 50, out
Air port 50 is connected with the exhaust fan for pumping out thermal current in chamber, and the indoor air of chamber is positive pressure, the electric work of system entirety
Rate is higher, needs to consider from safety point of view of practicability the heat dissipation problem of its system, real by the way of designing cold air convection
It is existing, clean cooling space will be done in integrating sphere envisaged underneath air intake vent and be sent into ball, the upper design air outlet of integrating sphere will be hot
Air extraction, the effect of realizing the air positive pressure inside and outside ball by the design of inlet and outlet wind pressure, play cooling, dust preventing.
As shown in Figure 1, natural wind forced heat radiation of each xenon short-act lamp 21 via 14~16m/s;Use is additionally provided on channel 22
The deep ellipse reflector of the plating deielectric-coating of wave band after absorbing 700nm;The lamp base of each tungsten halogen lamp is connected with for water-cooling
Copper tube, in the application, xenon short-act lamp light bulb calorific value is bigger, and technology difficulty of water cooling is larger at this, and pressure can be used
Air-cooled mode is realized, can be realized using the natural wind of 15m/s wind speed to the strong of light bulb according to R&D experience 7KW xenon lamp early period
System heat dissipation, meanwhile, using the deep ellipse reflector of plating deielectric-coating, will include after 700nm more heat radiation and radiant output not
Steady wave band is directed through, and is only collected 200nm-700nm wave band UV-visible radiation, can be further decreased inside integrating sphere
Heat history, secondly, the lamp base mainly concentrated of heat of tungsten halogen lamp 31, the radiating surface of lamp base is smaller, and air cooling effect is bad, can be used
The method of copper tube water cooling heat transfer takes heat out of, realizes the cooling to lamp base.
It specifically, further include light source control unit, for controlling the grade energy of xenon source, halogen tungsten lamp light source;It further include light
STABILITY MONITORING unit, the photostability monitoring unit include the spectrum for detecting the spoke brightness constancy in integrating sphere 10
Instrument meter, spectrum instrument meter are arranged in integrating sphere 10;It further include system safety monitoring unit, system safety monitoring unit includes being used for
Detect the galvanometer of current stability on fan and xenon short-act lamp 21.
Embodiment 2:
The present embodiment structure and the structure of embodiment 1 are essentially identical, and something in common repeats no more, the difference is that:
The present embodiment also discloses deep ultraviolet, visible, near infrared radiometric calibration source device application method, specifically include with
Lower step:
(1) brightness of light-emitting window spoke is calculated:
Light source output spoke is carried out according to xenon short-act lamp light source typical color wyntet's sign according to the formula (1) of Planck blackbody radiation
Penetrate flux calculating.
C1, C2 are Planck's constant in formula, and T is xenon short-act lamp light source color temperature 5800K, relatively with sun colour temperature.
The xenon short-act lamp output radiation Flux Distribution being calculated is as seen in figures 3-6.
(2) integrating sphere light-emitting window analysis of Uniformity:
The uniform spatial distribution of integrating sphere light-emitting window spoke brightness is its important parameter in application, spatially uniform packet
Include at a certain distance from light-emitting window the irradiance uniformity of shadow surface and uniform as the spoke angular brightness on vertex using light-emitting window axle center
Property (corresponding integrating sphere inner surface spoke brightness uniformity i.e. in angular range).Integrating sphere light source one primary light source of youth of approximation,
Surface uniformity can regard the uniformity of its corresponding integrating sphere inner surface spoke brightness as, and corresponding region is as shown in Figure 2.
From figure 2 it can be seen that having included surface uniformity institute in index request ± 25 ° range interior angle uniformity corresponding region
Corresponding region, when angle heterogeneity meets index request less than 1%, surface uniformity, which can equally meet angle uniformity index, to be wanted
It asks.
The integrating sphere inside coating of built-in light source can approximation regard lambert's body as, therefore light-emitting window spatial distribution heterogeneity
This is mainly due to the non-lambertian of light source and integrating sphere inner wall seam crossing non-lambertian to cause, and integrating sphere built-in light source is generally
Tungsten halogen lamp, tungsten halogen lamp is commonly considered as point light source, i.e., identical in the radiant exitance of all angles, this results in it not equally having
Irradiation level at bulb separation surface is variant, unequal so as to cause the primary event spoke brightness of each point, and namely space is divided for this
The source of cloth inhomogeneities.
(3) relationship between spatial distribution inhomogeneities and tungsten halogen lamp installation site
The brightness of primary event spoke can be obtained by following formula at tungsten halogen lamp installed position normal counterclockwise angle θ:
Wherein l is integrating sphere interior diameter.
Multiple reflections generate spoke brightness at θ
Point light source radiation scope is hemispherical space on ball wall, therefore exit luminous flux is
φ=F2 π (3)
Spoke luminance non-uniformity is within the scope of point light source θ
It is found that integrating sphere uniform spatial distribution is only with angular range calculated, aperture efficiency, ball wall inner surface reflectivity
Related, in aperture efficiency with one timing of inner-wall material reflectivity, spoke luminance non-uniformity is as shown in Figure 6 with angle change range:
Aperture efficiency is smaller as shown in Figure 6, and inner-wall material reflectivity is higher, and uniformity is better within the scope of light source launch angle,
For 0.8 meter of opening integrating sphere light source, when inside coating reflectivity is 0.97, and aperture efficiency is 0.04, the point light source angle of departure ±
Integrating sphere spoke luminance non-uniformity is corresponded within the scope of 25 ° less than 1%.
Basic principles and main features and the features of the present invention of the invention have been shown and described above.The technology of the industry
Personnel are it should be appreciated that the present invention is not limited to the above embodiments, and the above embodiments and description only describe this
The principle of invention, without departing from the spirit and scope of the present invention, various changes and improvements may be made to the invention, these changes
Change and improvement is both fallen in the range of claimed invention.The scope of protection of present invention is by appended claims
And its equivalent thereof.
Claims (9)
1. a kind of deep ultraviolet, visible, near infrared radiometric calibration source device, including integrating sphere (10), set on the integrating sphere (10)
There are outlet and import, which is characterized in that further include light source assembly, for providing the camera of spoke brightness input stable known to one
Radiation calibration;
The light source assembly includes xenon source, halogen tungsten lamp light source, and the xenon source is arranged in integrating sphere (10) side, and institute
The light for stating xenon light source sending enters in integrating sphere (10) via import, for being calibrated in deep ultraviolet band camera;
The halogen tungsten lamp light source is arranged in integrating sphere (10), for being calibrated in visible, near infrared band camera.
2. deep ultraviolet according to claim 1, visible, near infrared radiometric calibration source device, which is characterized in that the integral
Ball (10) includes bladders (12) in integrating sphere spherical shell (11) and integrating sphere, and bladders (12) is pacified via interior bladders in the integrating sphere
Bracket and integrating sphere spherical shell (11) arranged for interval are filled, bladders (12) inner surface is coated with uniform diffuse reflection in the integrating sphere
The pure barium sulfate of white coating, bladders (12) is spliced to form using sintering polytetrafluoroethylfilm through numerical control processing in the integrating sphere.
3. deep ultraviolet according to claim 1, visible, near infrared radiometric calibration source device, which is characterized in that the xenon lamp
Light source includes 2 7KW xenon short-act lamps (21), and each xenon short-act lamp (21) is arranged on bracket, xenon short-act lamp (21) hair
The light of injection is transferred in integrating sphere (10) via channel (22), the centre of sphere of each xenon short-act lamp (21) along integrating sphere (10)
It is arranged symmetrically.
4. deep ultraviolet according to claim 2, visible, near infrared radiometric calibration source device, which is characterized in that the xenon lamp
The decaying screen of the different transmitances adjusted for realizing fixed colour temperature energy level variations is additionally provided in the optical path of light source;
The grade of the xenon source can be 7.
5. deep ultraviolet according to claim 1, visible, near infrared radiometric calibration source device, which is characterized in that the halogen tungsten
Lamp source includes 42 250W tungsten halogen lamps (31), and each tungsten halogen lamp (31) is enclosed tungsten halogen lamp array, and each tungsten halogen lamp
(31) with 3 one group, 14 grade energy are divided into.
6. deep ultraviolet according to claim 2, visible, near infrared radiometric calibration source device, which is characterized in that the integral
The lower end of ball spherical shell (11) is equipped with air inlet (40), and cooling clean air is pumped into integrating sphere spherical shell via air inlet (40)
(11) and the chamber in integrating sphere between bladders (12), integrating sphere spherical shell (11) upper end is additionally provided with air outlet (50), described
Air outlet (50) is connected with the exhaust fan for pumping out thermal current in chamber.
7. deep ultraviolet according to claim 6, visible, near infrared radiometric calibration source device, which is characterized in that the chamber
Interior air is positive pressure.
8. deep ultraviolet according to claim 3, visible, near infrared radiometric calibration source device, which is characterized in that each described short
Arc xenon lamp (21) via 14~16m/s natural wind forced heat radiation;
The deep ellipse reflector of the plating deielectric-coating for absorbing wave band after 700nm is additionally provided on the channel (22);
The lamp base of each xenon short-act lamp (21) is connected with the copper tube for water-cooling.
9. deep ultraviolet according to claim 4 or 5, visible, near infrared radiometric calibration source device, which is characterized in that also wrap
Light source control unit is included, for controlling the grade energy of xenon source, halogen tungsten lamp light source;
It further include photostability monitoring unit, the photostability monitoring unit includes bright for detecting the spoke in integrating sphere (10)
The spectrum instrument meter of stability is spent, the spectrum instrument meter setting is in integrating sphere (10);
It further include system safety monitoring unit, the system safety monitoring unit includes for detecting fan and xenon short-act lamp
(21) galvanometer of current stability on.
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