CN109029603A - Sensor - Google Patents
Sensor Download PDFInfo
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- CN109029603A CN109029603A CN201710436926.9A CN201710436926A CN109029603A CN 109029603 A CN109029603 A CN 109029603A CN 201710436926 A CN201710436926 A CN 201710436926A CN 109029603 A CN109029603 A CN 109029603A
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- Prior art keywords
- sensing
- flow
- face
- flow path
- pressure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
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- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Abstract
A kind of sensor includes a diversion shell and a sensing device.Diversion shell has defined a gas flow, and gas flow is flowed to guide air-flow along one first flow direction.Sensing device is set to diversion shell and including a sensing module, sensing module includes a sensing circuit plate, one flow sensor chip, and a plurality of first diversion member, sensing circuit plate has first face towards gas flow, sensing flux chip is set to the first face to sense the air flow rate for flowing through gas flow, sensing flux chip has a sensing face, sensing face has a first side, first diversion member be convexly equipped in the first face and with first side separately, each first diversion member is in long strip and long to along the extension of the first flow direction, each first diversion member to air-flow rectification to make to flow through sensing face after its is rectified.
Description
Technical field
The present invention relates to a kind of sensors, more particularly to a kind of sensor to sense air flow rate.
Background technique
Refering to fig. 1 and Fig. 2, existing caloic formula flow sensor include that a circuit board 11 and one is set on circuit board 11
Sensing flux chip 12.Circuit board 11 and sensing flux chip 12 are all located in gas flow paths.Sensing flux chip 12
Be arranged and be fixed on the surface 111 of circuit board 11, sensing flux chip 12 to before gas heating and sense gasses heating,
Temperature afterwards by the temperature difference sensed and then calculates gas flow.
Since the surface 111 of circuit board 11 is convexly equipped with made by metal copper foil and sweeping conducting wire 112, and it is preceding
The extending direction for stating conducting wire 112 is different from the flow direction of air-flow 13, and therefore, air-flow 13 flows through aforesaid conductive route 112
When can be affected by it and generate sinuous flow.Further, since sensing flux chip 12 is convexly equipped in the surface 111 of circuit board 11, therefore, gas
Stream 13 will receive the blocking of sensing flux chip 12 and generate sinuous flow again.Based on both aforementioned influence, so that air-flow 13 flows
It is dynamic to have some setbacks and unstable, and then influence the accuracy that sensing flux chip 12 senses.
On the other hand, existing caloic formula flow sensor is also employed in the transfer mechanism that article is sucked by vacuum slot
On, it is connected between the vacuum slot and negative pressure source of transfer mechanism by appendix, flow sensor is set to appendix with for making
User judges whether vacuum slot has and article is certainly sucked.However, only whether judging vacuum chuck by flow sensor
There is the mode that article is sucked that can generate the situation of erroneous judgement, be described as follows:
When the negative pressure source of transfer mechanism can normal operation make vacuum slot that article certainly be sucked when, flow sensor sense
The flowing of airless in appendix is surveyed, the switch output of flow sensor can show the state of ON, at this point, user passes through viewing
Article is sucked in the display state of the flow sensor vacuum slot that can correctly judge really.
When the negative pressure source failure of transfer mechanism and can not normal operation when, article just can not be sucked in vacuum slot.At this point, by
In the flowing of airless in flow sensor sensing appendix, therefore, the switch output of flow sensor can still show the shape of ON
State causes user that can have the situation that article is sucked to generate by erroneous judgement vacuum slot due to the display state of flow sensor.
Summary of the invention
The purpose of the present invention is to provide a kind of sensor of at least one disadvantage that can overcome background technique.
A purpose of the invention is to provide a kind of sensor, and rectification can be carried out to input air-flow keep its smooth and stablize
Ground flows through sensing flux chip, to promote the accuracy of sensing flux chip senses.
It is another object of the present invention to provide a kind of sensors, can sense the flow and pressure of air-flow simultaneously, whereby,
The accuracy using upper elasticity and switch output judgement can be promoted.
It the purpose of the present invention and solves the problems, such as that background technique is used in lower technical solution to realize, mentions according to the present invention
Sensor out includes a diversion shell and a sensing device, which has defined a gas flow, which uses
It is flowed with guiding air-flow along one first flow direction, which is set to the diversion shell and including a sensing module, should
Sensing module includes a sensing circuit plate, a flow sensor chip and a plurality of first diversion member, which has one
The first face towards the gas flow, the sensing flux chip are set to first face to sense the gas for flowing through the gas flow
Flow is flowed, which has a sensing face, which has a first side, the first diversion member projection
In first face and with the first side separately, respectively first diversion member is in long strip and long to along first flow direction
Extend, respectively first diversion member to air-flow rectification to make to flow through the sensing face after its is rectified.
In some state sample implementations, which has one to lead to guide air-flow along what first flow direction was flowed
Road is drained, which corresponds to the guiding flow path position to sense the air flow rate for flowing through the guiding flow path, be somebody's turn to do
First side along one substantially perpendicular to first flow direction extending direction extend, first diversion member is along this
Extending direction arrangement spaced apart.
In some state sample implementations, which selectively flows along one in contrast to the second of first flow direction
The flowing of direction guiding air-flow, the sensing face also have a second side in contrast to the first side, which also includes
A plurality of to be convexly equipped in first face and the second diversion member with the second side separately, respectively second diversion member is in long strip
And it is long to along second flow direction extension, respectively second diversion member to air-flow rectification to make to flow through the sense after its is rectified
Survey face.
In some state sample implementations, which extends along the extending direction, and second diversion member is along this
Extending direction arrangement spaced apart.
In some state sample implementations, which has a surface element and one is recessed the concave part formed by the surface element,
The sensing flux chip is set in the concave part, the sensing face and the surface element it is coplanar or be located at the concave part in.
In some state sample implementations, which has one and the deflector hole of guiding flow path separately, sensing electricity
Road plate also has second face in contrast to first face, which defines one and run through first face and second face simultaneously
The perforation being connected with the deflector hole, the sensing module also include one to be set to second face and close the pressure-sensing of the perforation
Chip, the pressure-sensing chip flow into the stream pressure of the perforation to sense via the deflector hole.
In some state sample implementations, which has one first conducting being respectively communicated in the guiding flow path opposite end
Flow path and one second conducting flow path, the sensing circuit plate also have second face in contrast to first face, the sensing circuit plate
A perforation for running through first face and second face is defined, which is connected with the first conducting flow path or the second conducting flow path
Logical, which also includes one to be set to second face and close the pressure-sensing chip of the perforation, the pressure-sensing chip
To sense the stream pressure for flowing into the perforation via the first conducting flow path or the second conducting flow path.
In some state sample implementations, which has one first conducting being respectively communicated in the guiding flow path opposite end
Flow path and one second conducting flow path, which also includes a pressure-sensing chip for being set to first face, the feeling of stress
Survey chip be located at this first conducting flow path in or this second be connected flow path in, the pressure-sensing chip to sense flow through this first
The stream pressure of flow path or the second conducting flow path is connected.
In some state sample implementations, which also includes a shell engaged with the diversion shell and a setting
Conducting element in the shell, the shell have defined an air inlet, the conducting element defined one be connected with the air inlet and with
The deflector hole of guiding flow path separately, the sensing circuit plate also have second face in contrast to first face, sensing electricity
Road plate defines one through first face and second face and the perforation that is connected with the deflector hole, which also includes one to set
It is placed in first face and closes the pressure-sensing chip of the perforation, which flows into sense via the deflector hole
The stream pressure of the perforation.
In some state sample implementations, which also includes a pressure-sensing chip for being set to the sensing circuit plate,
The pressure-sensing chip is to sense the stream pressure for flowing through the gas flow.
In some state sample implementations, which also has second face in contrast to first face, the feeling of stress
It surveys chip and is set to second face to sense the stream pressure for flowing into the sensing circuit plate via the gas flow.
In some state sample implementations, which is set to first face and flows through the gas flow to sense
Stream pressure.
In some state sample implementations, which also includes a shell engaged with the diversion shell and a setting
Conducting element in the shell, the shell have defined an air inlet, which defines one and lead with what the air inlet was connected
Discharge orifice, the sensing circuit plate also have second face in contrast to first face, the sensing circuit plate define one through this first
Face and second face and the perforation being connected with the deflector hole, the pressure-sensing chip are set to first face and close this and wear
Hole, to sense the stream pressure for flowing into the perforation via the deflector hole.
In some state sample implementations, which further includes a control module, which also includes an electrical connection
Flow signal transmission line between the sensing circuit plate and the control module, one are electrically connected to the sensing circuit plate and the control mould
Pressure signal transmission line and two power transmission lines being electrically connected between the sensing circuit plate and the control module between block.
The beneficial effects of the present invention are: can carry out rectification to input air-flow keeps its smooth and steadily flows through sensing flux
Chip, to promote the accuracy of sensing flux chip senses.In addition, sensor can sense the flow and pressure of air-flow simultaneously, borrow
This, can promote the accuracy using upper elasticity and switch output judgement.
Detailed description of the invention
Fig. 1 is the imperfect perspective view of existing caloic formula flow sensor circuit board；
Fig. 2 is the side view of Fig. 1；
Fig. 3 is the perspective view of the first embodiment of inventive sensor；
Fig. 4 is the cross-sectional view that the S1-S1 line in Fig. 3 is intercepted, and illustrates that the assembling between diversion shell and sensing device is closed
The different sides of sensing circuit plate are arranged in system and sensing flux chip and pressure-sensing chip；
Fig. 5 is the stereogram exploded view of the first embodiment, illustrates the assembled relation between diversion shell and sensing device；
Fig. 6 is the perspective view of the sensing module of the first embodiment, illustrates air-flow in the mode flowed on sensing circuit plate；
Fig. 7 is the cross-sectional view that the S2-S2 line in Fig. 6 is intercepted, and illustrates that sensing flux chip is set in concave part,
And sensing face and surface element are coplanar；
Fig. 8 is the block diagram of the first embodiment, illustrates sensing circuit plate, control circuit board, power supply circuit plate, and
Connection relationship between display screen；
Fig. 9 is the partial enlarged view of Fig. 4, illustrates the flow direction of air-flow；
Figure 10 is that the first embodiment applies schematic diagram in transfer mechanism, illustrates that vacuum slot draws article；
Figure 11 is that the first embodiment applies schematic diagram in transfer mechanism, illustrates negative pressure source failure, and vacuum slot is not
Draw article；
Figure 12 is the cross-sectional view of the second embodiment of inventive sensor, illustrates that perforation is connected with the second conducting flow path；
Figure 13 is the cross-sectional view of the 3rd embodiment of inventive sensor, illustrates that perforation is connected with the first conducting flow path；
Figure 14 is the cross-sectional view of the fourth embodiment of inventive sensor, illustrates sensing flux chip and pressure-sensing chip
The same face of sensing circuit plate is set, and pressure-sensing chip is located in the second conducting flow path and is located at sensing flux chip downstream
Side；
Figure 15 is the cross-sectional view of the 5th embodiment of inventive sensor, illustrates sensing flux chip and pressure-sensing chip
The same face of sensing circuit plate is set, and pressure-sensing chip is located in the first conducting flow path and is located at sensing flux chip upstream
Side；And
Figure 16 is the cross-sectional view of the sixth embodiment of inventive sensor, illustrates sensing flux chip and pressure-sensing chip
The same face of sensing circuit plate is set.
Specific embodiment
The following describes the present invention in detail with reference to the accompanying drawings and embodiments.
Before the present invention is described in detail, it shall be noted that in the following description content, similar element is with identical
Number indicate.
It is the first embodiment of inventive sensor refering to Fig. 3, sensor 200 is to be with a flow and pressure sensor
Example has the function of sensing air flow rate and pressure.Sensor 200 includes a diversion shell 2 and a sensing device 3.
Refering to Fig. 3, Fig. 4 and Fig. 5, diversion shell 2 includes that a front end face 21 and two is located at 21 left and right sides of front end face
Side 22,23.Diversion shell 2 has defined a gas flow 24, and gas flow 24 has a first flow path 241, a second flow path
242, a guiding flow path 243, one first is connected flow path 244, one second and the shunting flow path 246 of flow path 245, one and a water conservancy diversion is connected
Hole 247.First flow path 241 is formed in side 22 with for air inlet pipe (not shown) plant, and whereby, air inlet pipe can pass through first
In flow path 241 delivery air to gas flow 24.Second flow path 242 is formed in side 23 with so that an escape pipe (not shown) is inserted
It sets, whereby, the air-flow in gas flow 24 can be expelled in escape pipe by second flow path 242.Guiding flow path 243 is in open shape
And there are the open sides 248 for being formed in front end face 21, guiding flow path 243 is located at interval at first flow path 241 and second flow path 242
Front side.What first flow path 241, second flow path 242 and guiding flow path 243 extended to guide air-flow along a left and right directions respectively
First flow direction F1 flowing (as shown in Figure 6).
First conducting flow path 244 is connected between first flow path 241 and the one end for guiding flow path 243, the first conducting flow path 244
To be guided to the fraction in first flow path 241 forward in guiding flow path 243, whereby, sensing device 3 is being led
Drain the flow of sensing air-flow in road 243.Second conducting flow path 245 is connected to second flow path 242 and guides the another of flow path 243
Between end, the second conducting flow path 245 is the air-flow guided in flow path 243 is guided to backwards in second flow path 242.Shunt flow path
246 are connected between first flow path 241 and second flow path 242, to by another part air flow guiding in first flow path 241 to
In two flow paths 242, whereby, so that be not necessary to can be straight by the sensing of sensing device 3 for another part air-flow in first flow path 241
Shunting flow path 246 was connected to be circulated in second flow path 242.Deflector hole 247 extend along the longitudinal direction and with guiding flow path 243 and
Separately, the preceding open end of deflector hole 247 is formed in front end face 21 to second conducting flow path 245 and rear end and second flow path 242 connect
It is logical, whereby, sensing device 3 is enabled to sense the pressure of air-flow in deflector hole 247.
Refering to Fig. 4, Fig. 5, Fig. 6, Fig. 7 and Fig. 8, sensing device 3 includes a shell 31, a sensing module 32, one control mould
Block 340 and a display screen 36.Shell 31 is engaged in 2 front side of diversion shell.Sensing module 32 include a sensing circuit plate 320,
One flow sensor chip 321, a plurality of first diversion member 322, a plurality of second diversion member 323 and a pressure-sensing chip
324.Sensing circuit plate 320 have one towards first face 325 at rear and one in contrast to the first face 325 and towards the of front
Two faces 326.Front end face 21 of first face 325 towards diversion shell 2, guiding flow path 243, first are connected flow path 244 and second lead
Through-flow road 245, and the first face 325 fits in front end face 21 and closes the open sides 248 on directed stream road 243.Sensing circuit plate
It is convexly equipped with that a plurality of metal copper foil is made and sweeping conducting wire 327 on 320 the first face 325, each conducting wire 327
To transmit electric signal.Wherein, a part of conducting wire 327 is located in the first conducting flow path 244, and the conduction of another part
Route 327 is then located in the second conducting flow path 245.The sensing flux chip 321 of the present embodiment be one be set to the first face 325 and
Corresponding to the caloic formula sensing flux chip of guiding 243 position of flow path, sensing flux chip 321 has one to lead to sense to flow through
The sensing face 328 of the air flow rate on road 243 is drained, sensing face 328 is in rectangle and has positioned at a first side 329 of opposite side
With a second side 330, first side 329 and second side 330 are respectively the long side for feeling side 328, first side 329 with
The length of second side 330 to respectively along one substantially perpendicular to the first flow direction F1 extending direction D extend.
A plurality of first diversion member 322 is convexly equipped in the first face 325 of sensing circuit plate 320, and the first diversion member 322 is located at
Between partially electronically conductive route 327 and sensing flux chip 321 and with the first side of sensing flux chip 321 329 separately.Each
One diversion member 322 is in long strip and it is grown to along the first flow direction F1 and extends.Each first diversion member 322 is to air-flow
Rectification can be smooth after keeping its rectified and steadily flows through sensing flux chip 321, whereby, to promote sensing flux chip 321
Sense the accuracy of flow.In the present embodiment, first diversion member 322 is along extending direction D arrangement spaced apart,
Whereby, it can ensure that the air-flow for flowing to sensing face 328 via any place on first side 329 is all able to maintain smooth and stable shape
State.
Air inlet pipe and escape pipe when in use, can also be inserted in respectively second flow path 242 by the sensor 200 of the present embodiment
And first flow path 241, whereby, enable first flow path 241, second flow path 242 and guiding flow path 243 guide respectively air-flow along
One the second flow direction F2 flowing in contrast to the first flow direction F1.In order to make the energy under aforementioned use state of sensor 200
Therefore the accuracy for promoting the sensing flow of sensing flux chip 321 is convexly equipped with a plurality of in the first face 325 of sensing circuit plate 320
Second diversion member 323.Second diversion member 323 is located between the conducting wire 327 and sensing flux chip 321 of another part simultaneously
Separately with the second side 330 of sensing flux chip 321.Each second diversion member 323 is in long strip and it is grown to along second
Flow direction F2 extends.Each second diversion member 323 is smooth to energy after keeping its rectified air-flow rectification and steadily flows through
Sensing flux chip 321, whereby, to promote the accuracy that sensing flux chip 321 senses flow.In the present embodiment, described
Second diversion member 323 is along extending direction D arrangement spaced apart, whereby, can ensure that via any on second side 330
The air-flow that place flows to sensing face 328 is all able to maintain smooth and stable state.
Shadow is caused in order to avoid the thickness of sensing flux chip 321 itself hinders air-flow to flow and flow smoothness to it
It rings, in the present embodiment, the first face 325 has a surface element 331 and one that is flat and fitting in front end face 21 by table
The concave part 332 that face 331 is recessed towards 326 direction of the second face.Aforesaid conductive route 327, the first diversion member 322 and second are led
Fluid element 323 is all convexly equipped in the surface element 331 in the first face 325.Sensing flux chip 321 is fixed on recessed for example, by welding manner
It is electrically connected in groove portion 332 and with sensing circuit plate 320.The sensing face 328 and surface element 331 of sensing flux chip 321 are coplanar,
Whereby, so that sensing flux chip 321 will not protrude out surface element 331 and then hinder the flowing of air-flow.By previous designs side
Formula can further promote the smoothness and stability of air-flow flowing, so that sensing flux chip 321 senses the accurate of flow
Performance is more promoted.It should be noted that in other implementations, sensing face 328 be also possible to be located in concave part 332 and
It is spaced a small distance with surface element 331, keeps sensing face 328 not coplanar with surface element 331, whereby, is equally avoided that flow
Sensor chip 321 protrudes out surface element 331 and then hinders the flowing of air-flow.
Refering to Fig. 9, sensing circuit plate 320 defines one through the surface element 331 in the first face 325 and the perforation in the second face 326
333, perforation 333 is connected with the deflector hole 247 of diversion shell 2.Pressure-sensing chip 324 is set to sensing circuit plate 320
Second face 326 is simultaneously electrically connected with sensing circuit plate 320, and the closing perforation 333 of pressure-sensing chip 324 is to sense via deflector hole
247 flow into the stream pressure of perforation 333.
It is arranged on sensing circuit plate 320 simultaneously by by sensing flux chip 321 and pressure-sensing chip 324, so that
Sensor 200 has the function of measuring gas flow and pressure simultaneously.User just can be measured simultaneously by using sensor 200
The gas flow and pressure of determinand, without being respectively mounted on two independent products of flow sensor and pressure sensor
The operation measured on determinand.Whereby, it can be reduced the sensor bulk of installation on the test object.Furthermore due to sensor
Distance between 200 sensing flux chip 321 and pressure-sensing chip 324 is passed with two independently installed flows on the test object
Distance between sensor and pressure sensor is closer to therefore, user can learn more conveniently shown by sensor 200
Flow and pressure value.
Refering to Fig. 4 and Fig. 8, control module 340 includes a control circuit board 34 and a power supply circuit plate 35, control electricity
Road plate 34, power supply circuit plate 35 and display screen 36 are all set in shell 31, and control circuit board 34 is electrically connected to power supply
Between supply circuit plate 35 and display screen 36.One electric connector 351 of power supply circuit plate 35 is with for an external power cord
(not shown) grafting.Display screen 36 is revealed in 31 front end of shell, to show relevant measurement information.Sensing module 32 is also wrapped
Sensing electricity is electrically connected to containing the flow signal transmission line 334, one that one is electrically connected between sensing circuit plate 320 and control circuit board 34
Pressure signal transmission line 335 between road plate 320 and control circuit board 34 and two are electrically connected to sensing circuit plate 320 and power supply
Power transmission line 336 between supply circuit plate 35.Power supply of the power transmission line 336 power supply circuit plate 35 will be input to
It is transmitted to sensing circuit plate 320, whereby, to provide electric power required when sensing module 32 operates.
Since sensing flux chip 321 and pressure-sensing chip 324 are arranged on sensing circuit plate 320 simultaneously, lead to
The design for crossing two power transmission lines 336 just can provide electric power required when sensing module 32 operates.Whereby, sensor 200 with
Two independent flow sensors and pressure sensor in comparison, can be reduced the usage quantity of power transmission line to reduce manufacture
Cost.
It should be noted that although the control module 340 of the present embodiment is with two pieces of individual control circuit boards 34 and power supply
It is explained for supply circuit plate 35, however, in other implementations, control circuit board 34 and power supply circuit plate 35
Single piece of circuit board can also be integrated into.
Refering to Fig. 4, Fig. 6, Fig. 7 and Fig. 9, there are two types of use pattern, the first use patterns for the sensor 200 of the present embodiment
It is that air inlet pipe and escape pipe are inserted in first flow path 241 and second flow path 242 respectively, second of use pattern is by air inlet pipe
And escape pipe is inserted in second flow path 242 and first flow path 241 respectively.Since the actuation principle of two kinds of use patterns is identical, only
The direction for having air-flow to flow is different, therefore, is only illustrated below with the first use pattern:
Firstly, the air-flow that air inlet pipe is conveyed can be along 241 inflow gas runner 24 of first flow path, air-flow can be along first-class
Dynamic direction F1 flowing.Then, the fraction in first flow path 241 can be connected 244 flow forward of flow path and flow into and lead along first
It drains in road 243, and another part air-flow then can directly be flow in second flow path 242 by shunting flow path 246.Wherein, part
Air-flow can flow through the conducting wire 327 of part during flowing in the first conducting flow path 244.Due to conducting wire 327
Extending direction is different from the first flow direction F1, therefore, can be affected by it when air-flow flows through conducting wire 327 and generate sinuous flow.
Further, since the first conducting flow path 244 is the flowing for frontward guiding air-flow after, and guiding flow path 243 is along right and left
Flowing to the first flow direction F1 of extension guiding air-flow, therefore, the direction of both aforementioned guiding air-flow flowing are different, and the
The sectional area of one conducting flow path 244 is gradually reduced towards guiding 243 direction of flow path, and therefore, air-flow is via the first conducting flow path 244
It is that unstable flow regime is presented when flowing into guiding flow path 243.It can be along the first flowing after air-flow flows into guiding flow path 243
Direction F1 flowing, then, air-flow can flow through first diversion member 322, since the length of each first diversion member 322 is to along the
One flow direction F1 extends, and therefore, each first diversion member 322 can rectify air-flow, can present after keeping air-flow rectified smooth
And steadily flow regime.Later, the state that air-flow can keep smooth and stable flows through sensing face 328 via first side 329.
Since sensing flux chip 321 is set in concave part 332 and sensing face 328 and surface element 331 are coplanar, flow sense
Surveying chip 321 will not hinder the flowing of air-flow to enable sensing face 328 accurately to sense the flow of air-flow whereby.Later, gas
Stream can flow to backward in second flow path 242 along the second conducting flow path 245.Air-flow is along the first flow direction F1 in second flow path
In 242 during flowing, fraction can enable pressure-sensing chip 324 along flowing into along deflector hole 247 and perforation 333
Sense the pressure of air-flow.Finally, air-flow can be expelled in escape pipe via second flow path 242.
It should be noted that although the sensing circuit plate 320 of the present embodiment is to be convexly equipped with conducting wire on the first face 325
It is explained for 327 mode, but in other implementations, sensing circuit plate 320 also can be omitted 327 knot of conducting wire
Structure.
Corresponding measurement signal can be generated after the flow of the sensing air-flow of sensing flux chip 321, which can pass through
Sensing circuit plate 320 and flow signal transmission line 334 are transmitted to control circuit board 34, are interrogated by control circuit board 34 to the measurement
It number is handled, display screen 36 is enabled to show flow measuring numerical value representated by the measurement signal.Pressure-sensing chip
Corresponding measurement signal can be generated after the pressure of 324 sensing air-flows, which can be interrogated by sensing circuit plate 320 and pressure
Number transmission line 335 is transmitted to control circuit board 34, is handled by control circuit board 34 the measurement signal, so that display is glimmering
Curtain 36 can show pressure measurement numerical value representated by the measurement signal.
Refering to fig. 10, when sensor 200 is applied in transfer mechanism 5,51 one end of air inlet pipe of transfer mechanism 5 is connected to one
Vacuum slot 52,51 other end of air inlet pipe are inserted in first flow path 241.53 one end of escape pipe of transfer mechanism 5 is connected to one
Negative pressure source 54,53 other end of escape pipe are inserted in second flow path 242.
When negative pressure source 54 can normal operation make vacuum slot 52 that article 55 certainly be sucked when, sensing flux chip 321
The flowing of airless is sensed, display screen 36 can show that flow value is 0mL/min；Meanwhile pressure-sensing chip 324 senses air-flow
Pressure be negative pressure, display screen 36 can show negative pressure value be, for example, -72kPa.At this point, the switch output of sensor 200 can be shown
Show the state of ON, user is sucked really by the display state of viewing sensor 200 vacuum slot 52 that can correctly judge
Article 55.
Refering to fig. 11, when 54 failure of negative pressure source and can not normal operation when, sensing flux chip 321 senses the stream of airless
Dynamic, display screen 36 can show that flow value is 0mL/min；Meanwhile pressure-sensing chip 324 senses air-flow without negative pressure, shows glimmering
Curtain 36 can show that negative pressure value is 0kPa.At this point, sensor 200 judges 54 failure of negative pressure source of transfer mechanism 5, so, sensor
200 switch output can show the state of OFF.User can be correctly judged very by the display state of viewing sensor 200
Article 55 is not sucked for suction mouth 52.Sensor 200 is by sensing flux chip 321 and the dual sensing machine of pressure-sensing chip 324
The design of system can ensure that the switch output energy correct judgment of sensor 200 to prevent the situation of erroneous judgement from generating.
Refering to fig. 12, it is the second embodiment of inventive sensor, the overall structure and sensing principle of sensor 200 are substantially
It is identical with the first embodiment, is different in the setting position of perforation 333 and pressure-sensing chip 324.
In the present embodiment, perforation 333 is connected with the second conducting flow path 245 of diversion shell 2, pressure-sensing chip
324 333 aligned in position and close perforation 333 with perforation.Whereby, pressure-sensing chip 324 can be sensed via the second conducting stream
Road 245 flows into the stream pressure of perforation 333.
Refering to fig. 13, it is the 3rd embodiment of inventive sensor, the overall structure and sensing principle of sensor 200 are substantially
It is identical with the first embodiment, is different in the setting position of perforation 333 and pressure-sensing chip 324.
In the present embodiment, perforation 333 is connected with the first conducting flow path 244 of diversion shell 2, pressure-sensing chip
324 333 aligned in position and close perforation 333 with perforation.Whereby, pressure-sensing chip 324 can be sensed via the first conducting stream
Road 244 flows into the stream pressure of perforation 333.
Refering to fig. 14, it is the fourth embodiment of inventive sensor, the overall structure and sensing principle of sensor 200 are substantially
It is identical with the first embodiment, is different in the setting position of pressure-sensing chip 324.
In the present embodiment, pressure-sensing chip 324 is set to the surface element in the first face 325 of sensing circuit plate 320
331, pressure-sensing chip 324 is located in the second conducting flow path 245 and is located at 321 downstream side of sensing flux chip.Whereby, air-flow
Sensing flux chip 321 and pressure-sensing chip 324 can be sequentially flowed through, sensing flux chip 321 is made first to sense the flow of air-flow
The pressure of air-flow is then sensed by pressure-sensing chip 324 again.
Refering to fig. 15, it is the 5th embodiment of inventive sensor, the overall structure and sensing principle of sensor 200 are substantially
It is identical with the first embodiment, is different in the setting position of pressure-sensing chip 324.
In the present embodiment, pressure-sensing chip 324 is set to the surface element in the first face 325 of sensing circuit plate 320
331, pressure-sensing chip 324 is located in the first conducting flow path 244 and is located at 321 upstream side of sensing flux chip.Whereby, air-flow
Pressure-sensing chip 324 and sensing flux chip 321 can be sequentially flowed through, pressure-sensing chip 324 is made first to sense the pressure of air-flow
The flow of air-flow is then sensed by sensing flux chip 321 again.
Refering to fig. 16, it is the sixth embodiment of inventive sensor, the overall structure and sensing principle of sensor 200 are substantially
It is identical with the first embodiment, is different in the setting position of pressure-sensing chip 324.
In the present embodiment, pressure-sensing chip 324 is set to the surface element in the first face 325 of sensing circuit plate 320
331, and the closing of pressure-sensing chip 324 perforation 333.Shell 31 has defined an air inlet 311, air inlet 311 and diversion shell 2
Second flow path 242 it is ipsilateral.Sensing device 3 also includes a conducting element 37 being set in shell 31, and conducting element 37 is connected to sense
On second face 326 of slowdown monitoring circuit plate 320.Conducting element 37 defines a deflector hole being connected between air inlet 311 and perforation 333
371。
The sensor 200 of the present embodiment when in use, be two air inlet pipe are inserted in second flow path 242 respectively, and
In air inlet 311 and deflector hole 371, and escape pipe is inserted in first flow path 241.Whereby, wherein an air inlet pipe can be defeated by air-flow
It send to gas flow 24, sensing flux chip 321 is made to sense the flow of air-flow；Another air inlet pipe air-flow can be then delivered into
In stomata 311 and deflector hole 371, pressure-sensing chip 324 is made to sense the pressure of air-flow.
It concludes above-mentioned, the sensor 200 of each embodiment, is set by the first diversion member 322, the second diversion member 323
Meter, rectification can be carried out to input air-flow to be kept its smooth and steadily flows through sensing flux chip 321.Furthermore by sensing flux
Chip 321 is set in concave part 332 and sensing face 328 and surface element 331 be coplanar or setting in concave part 332
Meter mode avoids the thickness of sensing flux chip 321 itself that air-flow is hindered to flow and flow smoothness to it and impacts, borrows
This, can further promote the smoothness and stability of air-flow flowing, so that sensing flux chip 321 senses the accurate of flow
Performance is more promoted.In addition, being arranged simultaneously in sensing circuit plate by by sensing flux chip 321 and pressure-sensing chip 324
On 320, so that sensor 200 has the function of measuring gas flow and pressure simultaneously, whereby, the use of sensor 200 can be promoted
On elasticity and switch output judgement accuracy, can achieve the purpose that institute's demand of the present invention really.
Claims (14)
1. a kind of sensor；It is characterized by:
The sensor includes a diversion shell and a sensing device, which has defined a gas flow, the gas flow
It is flowed to guide air-flow along one first flow direction, which is set to the diversion shell and including a sensing module,
The sensing module includes a sensing circuit plate, a flow sensor chip and a plurality of first diversion member, which has
One the first face towards the gas flow, the sensing flux chip are set to first face and flow through the gas flow to sense
Air flow rate, the sensing flux chip have a sensing face, which has a first side, and first diversion member is convex
Separately set on first face and with the first side, respectively first diversion member is in long strip and long to along the first flowing side
To extension, respectively first diversion member to air-flow rectification to make to flow through the sensing face after its is rectified.
2. sensor according to claim 1, it is characterised in that: the gas flow have one to guide air-flow along this
The guiding flow path of one flow direction flowing, the sensing flux chip correspond to the guiding flow path position and flow through the guiding to sense
The air flow rate of flow path, the first side along one substantially perpendicular to first flow direction extending direction extend, it is described
First diversion member is along extending direction arrangement spaced apart.
3. sensor according to claim 2, it is characterised in that: the guiding flow path selectively along one in contrast to this first
Second flowing direction guiding air-flow flowing of flow direction, the sensing face also have the second side in contrast to the first side
Side, the sensing module also include it is a plurality of be convexly equipped in first face and the second diversion member with the second side separately, respectively should
Second diversion member is in long strip and long to along second flow direction extension, and respectively second diversion member is to rectify air-flow
Make to flow through the sensing face after its is rectified.
4. sensor according to claim 3, it is characterised in that: the second side extends along the extending direction, described
Second diversion member is along extending direction arrangement spaced apart.
5. according to claim 1 to sensor described in 4 any items, it is characterised in that: first face has a surface element,
And one be recessed the concave part formed by the surface element, which is set in the concave part, the sensing face and the table
Face is coplanar or is located in the concave part.
6. sensor according to claim 2, it is characterised in that: the gas flow have one with the guiding flow path separately
Deflector hole, which also has second face in contrast to first face, which defines one through should
First face and second face and the perforation being connected with the deflector hole, the sensing module also include one to be set to second face and envelope
The pressure-sensing chip of the perforation is closed, which flows into the air-flow pressure of the perforation to sense via the deflector hole
Power.
7. sensor according to claim 2, it is characterised in that: the gas flow, which has, to be respectively communicated in the guiding flow path
One first conducting flow path of opposite end and one second conducting flow path, the sensing circuit plate also have one in contrast to the of first face
Two faces, the sensing circuit plate define one run through first face and second face perforation, the perforation and this first be connected flow path or
The second conducting flow path is connected, which also includes one to be set to second face and close the pressure-sensing core of the perforation
Piece, the pressure-sensing chip flow into the air-flow pressure of the perforation to sense via the first conducting flow path or the second conducting flow path
Power.
8. sensor according to claim 2, it is characterised in that: the gas flow, which has, to be respectively communicated in the guiding flow path
One first conducting flow path of opposite end and one second conducting flow path, which also includes the pressure for being set to first face
Sensor chip, the pressure-sensing chip are located in the first conducting flow path or in the second conducting flow path, the pressure-sensing chip
To sense the stream pressure for flowing through the first conducting flow path or the second conducting flow path.
9. sensor according to claim 2, it is characterised in that: the sensing device also includes one to connect with the diversion shell
The shell of conjunction and one be set to conducting element in the shell, which has defined an air inlet, the conducting element defined one with should
Air inlet be connected and with the deflector hole of guiding flow path separately, which also has one in contrast to first face
Second face, the sensing circuit plate define one through first face and second face and the perforation that is connected with the deflector hole, the sense
Surveying module also includes one to be set to first face and close the pressure-sensing chip of the perforation, and the pressure-sensing chip is to sense
The stream pressure of the perforation is flowed into via the deflector hole.
10. sensor according to claim 1, it is characterised in that: the sensing module also include one be set to the sensing electricity
The pressure-sensing chip of road plate, the pressure-sensing chip is to sense the stream pressure for flowing through the gas flow.
11. sensor according to claim 10, it is characterised in that: the sensing circuit plate also have one in contrast to this first
Second face in face, the pressure-sensing chip are set to second face and flow into the sensing circuit plate via the gas flow to sense
Stream pressure.
12. sensor according to claim 10, it is characterised in that: the pressure-sensing chip be set to first face to
Sensing flows through the stream pressure of the gas flow.
13. sensor according to claim 10, it is characterised in that: the sensing device also includes one and the diversion shell phase
The shell of engagement and one be set to conducting element in the shell, which has defined an air inlet, the conducting element defined one with
The deflector hole that the air inlet is connected, the sensing circuit plate also have second face in contrast to first face, the sensing circuit
Plate defines one through first face and second face and the perforation that is connected with the deflector hole, which is set to this
First face and the perforation is closed, to sense the stream pressure for flowing into the perforation via the deflector hole.
14. sensor described in 0 to 13 any item according to claim 1, it is characterised in that: the sensing device further includes one
Control module, the sensing module also include a flow signal transmission being electrically connected between the sensing circuit plate and the control module
Line, a pressure signal transmission line being electrically connected between the sensing circuit plate and the control module and two are electrically connected to the sensing
Power transmission line between circuit board and the control module.
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| CN201710436926.9A CN109029603B (en) | 2017-06-12 | 2017-06-12 | Sensor with a sensor element |
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| CN201710436926.9A CN109029603B (en) | 2017-06-12 | 2017-06-12 | Sensor with a sensor element |
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| CN109029603B (en) | 2020-10-16 |
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