CN109029310A - A kind of high-performance Microfocus X-ray X-ray thickness gauge - Google Patents
A kind of high-performance Microfocus X-ray X-ray thickness gauge Download PDFInfo
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- CN109029310A CN109029310A CN201810907582.XA CN201810907582A CN109029310A CN 109029310 A CN109029310 A CN 109029310A CN 201810907582 A CN201810907582 A CN 201810907582A CN 109029310 A CN109029310 A CN 109029310A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
- G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
Abstract
The present invention relates to high-performance Microfocus X-ray X-ray thickness gauges, go out the mounting bracket that X-ray mouth assembles including emitting the X-ray tube of x-ray, the capillary module for focusing X-ray tube, and by capillary module and X-ray tube；Capillary module includes optical fiber tube, multiple capillary light-conductive holes that vertical leading unthreaded hole is provided in optical fiber tube and is arranged around it；Capillary light-conductive hole includes the parallel-segment parallel with leading unthreaded hole, and the bending section to leading unthreaded hole bending being connected to parallel-segment；The X-ray mouth that goes out of capillary module and X-ray tube is assembled by mounting bracket, the mixed and disorderly X-ray that X-ray tube issues enters in leading unthreaded hole and multiple capillary light-conductive holes, X-ray into capillary light-conductive hole is converged in leading for bending section downwardly toward leading unthreaded hole direction after parallel-segment, it realizes and focuses, so that luminous flux gain greatly increases, when analyzing small sample spot, analysis time is greatly reduced while guaranteeing analysis precision, and structure is very succinct, and it is easy to assembly, it is small in size.
Description
Technical field
The present invention relates to X-ray thickness gauge electron microscopy fields, penetrate more specifically to a kind of high-performance Microfocus X-ray X
Line calibrator.
Background technique
X-ray thickness gauge is when penetrating measured material using X-ray, and the Strength Changes of X-ray and the thickness of material are related
Characteristic detect a kind of contactless metrical instrument of material thickness；
X-ray thickness gauge when analyzing small sample spot, need the X-ray line projected to wherein X-ray tube to be focused with
Lesser hot spot and higher brightness are obtained, effect is undesirable in this case for conventional optical focus mirror application at present.
Summary of the invention
The technical problem to be solved in the present invention is that in view of the above drawbacks of the prior art, providing a kind of micro- coke of high-performance
Point X-ray thickness gauge.
The technical solution adopted by the present invention to solve the technical problems is:
Construct a kind of high-performance Microfocus X-ray X-ray thickness gauge, wherein including emitting the X-ray tube of x-ray, by the X-ray
The capillary module that pipe focuses, and the capillary module and the X-ray tube are gone out into the mounting bracket that X-ray mouth assembles；Institute
Stating capillary module includes optical fiber tube, multiple capillarys that vertical leading unthreaded hole is provided in the optical fiber tube and is arranged around it
Light-conductive hole；The capillary light-conductive hole includes the parallel-segment parallel with the leading unthreaded hole, and be connected to the parallel-segment to institute
State the bending section of leading unthreaded hole bending.
High-performance Microfocus X-ray X-ray thickness gauge of the present invention, wherein the high-performance Microfocus X-ray X-ray thickness gauge
Further include sample material carrier platform, the placement plate for placing sample is provided on the sample material carrier platform and adjusts the placement plate movement
XYZ mobile platform.
High-performance Microfocus X-ray X-ray thickness gauge of the present invention, wherein the high-performance Microfocus X-ray X-ray thickness gauge
Further include master control borad, the high voltage power supply of voltage and the motor driving group of the control XYZ mobile platform are provided for the X-ray tube
Part；The high voltage power supply and the motor driving assembly are electrically connected and are controlled by it with the master control borad.
High-performance Microfocus X-ray X-ray thickness gauge of the present invention, wherein the mounting bracket includes installing the capillary
The mounting post of tube assembly, and by the mounting post and it is described go out the adjusting set assembled of X-ray mouth；It is provided in the mounting post
With the first through hole of the capillary module form fit, outer surface upper end is provided with annular flange；It is set in the adjusting set
Be equipped with it is described go out X-ray mouth cooperation the first groove, first groove inner wall and it is described go out X mouthfuls there are gaps；Described first
Bottom portion of groove is provided with the second groove with annular flange cooperation, and second bottom portion of groove is provided with and the mounting post
Matched second through-hole；The regulating part for adjusting the mounting post horizontal displacement is provided in the adjusting set.
High-performance Microfocus X-ray X-ray thickness gauge of the present invention, wherein the regulating part includes four centers away from adjusting
Bolt；There are four the first groove inner wall settings with the center away from the adjusting one-to-one screw hole of bolt, the screw
Hole is connected to the adjusting set outer surface；Four screw holes are in cross distribution.
High-performance Microfocus X-ray X-ray thickness gauge of the present invention, wherein the X-ray tube lower surface be rotatably connected to
Few three surround the equally distributed adjusting rod of the adjusting set；The adjusting rod includes connecting rod and adjusting cam；The connection
Bar one end is fixedly connected with the adjusting cam, and the other end and X-ray tube lower surface rotation connection and end are provided with longitudinal direction
Loose slot, the loose slot both ends are connected to the connecting rod side surface；It is provided in the adjusting rod and the loose slot
The third through-hole of connection；The fourth hole being connected to the third through-hole is provided on the adjusting cam；Further include screw rod and
With the nut of screw rod cooperation；The screw rod protrudes into the third through-hole and the fourth hole, and end be provided with
The cross bar of the loose slot cooperation；The adjusting set outer surface is provided with annular shoulder, be provided on the flank with it is described
The corresponding adjustment hole of connecting rod, the adjustment hole aperture are less than the minimum widith for adjusting cam, are greater than outside the connecting rod
Diameter；The regulating part include with it is described adjust cam engagement controllable register, the controllable register be located at the adjusting cam with
Between the adjusting set；The controllable register is provided with arc engaged therewith towards one side surface of adjusting cam and adjusts
Slot.
High-performance Microfocus X-ray X-ray thickness gauge of the present invention, wherein cross bar both ends lower surface is provided with
One silica gel pad, first silica gel pad lower surface are provided with one or more cambered surface type grooves.
High-performance Microfocus X-ray X-ray thickness gauge of the present invention, wherein the flank upper surface is provided with and described
Corresponding second silica gel pad of one silica gel pad.
High-performance Microfocus X-ray X-ray thickness gauge of the present invention, wherein be provided in the regulating tank and the adjusting
The third silica gel piece of cam damping cooperation.
High-performance Microfocus X-ray X-ray thickness gauge of the present invention, wherein the leading unthreaded hole and/or the capillary are led
Plated film is provided with by gel technique in unthreaded hole.
The beneficial effects of the present invention are: the X-ray mouth that goes out of capillary module and X-ray tube is filled by mounting bracket
Match, the mixed and disorderly X-ray that X-ray tube issues enters in leading unthreaded hole and multiple capillary light-conductive holes, into capillary light-conductive hole X-ray by flat
It is converged in leading for bending section downwardly toward leading unthreaded hole direction after row section, realizes and focus, so that luminous flux gain greatly increases, divided
When analysing small sample spot, analysis time is greatly reduced while guaranteeing analysis precision, and structure is very succinct, assembly side
Just, small in size.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below in conjunction with attached drawing and reality
Applying example, the invention will be further described, and the accompanying drawings in the following description is only section Example of the invention, for this field
For those of ordinary skill, without creative efforts, it can also be obtained according to these attached drawings other accompanying drawings:
Fig. 1 is the high-performance Microfocus X-ray X-ray thickness gauge structural schematic diagram of present pre-ferred embodiments；
Fig. 2 is the high-performance Microfocus X-ray X-ray thickness gauge functional block diagram of present pre-ferred embodiments；
Fig. 3 is the high-performance Microfocus X-ray X-ray thickness gauge capillary module assembling schematic diagram of present pre-ferred embodiments；
Fig. 4 is the high-performance Microfocus X-ray X-ray thickness gauge capillary module upper surface enlarged drawing of present pre-ferred embodiments；
Fig. 5 is the high-performance Microfocus X-ray X-ray thickness gauge capillary module index path of present pre-ferred embodiments；
Fig. 6 is the high-performance Microfocus X-ray X-ray thickness gauge capillary module assembly signal of another preferred embodiment of the present invention
Figure；
Fig. 7 is the high-performance Microfocus X-ray X-ray thickness gauge adjusting rod side view of another preferred embodiment of the present invention；
Fig. 8 is that the high-performance Microfocus X-ray X-ray thickness gauge of another preferred embodiment of the present invention adjusts cam and controllable register
Structural schematic diagram；
Fig. 9 is that high-performance Microfocus X-ray X-ray thickness gauge the first silica gel pad structure of another preferred embodiment of the present invention is shown
It is intended to.
Specific embodiment
In order to keep the purposes, technical schemes and advantages of the embodiment of the present invention clearer, implement below in conjunction with the present invention
Technical solution in example carries out clear, complete description, it is clear that and described embodiment is section Example of the invention, and
It is not all of embodiment.Based on the embodiment of the present invention, those of ordinary skill in the art are not before making the creative labor
Every other embodiment obtained is put, protection scope of the present invention is belonged to.
The high-performance Microfocus X-ray X-ray thickness gauges of present pre-ferred embodiments as shown in Figure 1, simultaneously refering to Fig. 2-9, including
The X-ray tube 1 for emitting x-ray, the capillary module 2 for focusing X-ray tube 1, and capillary module 2 and X-ray tube 1 are gone out into X-ray mouth
10 mounting brackets 3 assembled；Capillary module 2 includes optical fiber tube 20, is provided with vertical leading unthreaded hole in optical fiber tube 20
21 and around its setting multiple capillary light-conductive holes 22；Capillary light-conductive hole 22 includes the parallel-segment 220 parallel with leading unthreaded hole 21,
The bending section 221 to leading 21 bending of unthreaded hole being connected to with parallel-segment 220；By mounting bracket 3 by capillary module 2 and X
The X-ray mouth 10 that goes out of light pipe 1 is assembled, and the mixed and disorderly X-ray that X-ray tube 1 issues enters leading unthreaded hole 21 and multiple capillary light-conductive holes 22
Interior, the X-ray into capillary light-conductive hole 22 converges in leading for bending section 221 downwardly toward leading 21 direction of unthreaded hole after parallel-segment 220
It is poly-, it realizes and focuses, so that luminous flux gain greatly increases, when analyzing small sample spot, while guaranteeing analysis precision
Analysis time is greatly reduced, and structure is very succinct, it is easy to assembly, it is small in size.
As depicted in figs. 1 and 2, high-performance Microfocus X-ray X-ray thickness gauge further includes sample material carrier platform 4, on sample material carrier platform 4
It is provided with the placement plate 40 for placing sample 5 and adjusts the mobile XYZ mobile platform 41 of placement plate 40；Convenient for adjust sample position with
The thickness for detecting difference on same sample is also convenient for carrying out adaptability adjusting to different-thickness sample, easy to adjust.
As depicted in figs. 1 and 2, high-performance Microfocus X-ray X-ray thickness gauge further includes master control borad 6, is that X-ray tube 1 provides voltage
High voltage power supply 7 and control XYZ mobile platform 41 motor driving assembly 8；High voltage power supply 7 and motor driving assembly 8 with master
Control plate 6 is electrically connected and is controlled by it；Convenient for carrying out comprehensive adjustment control to X-ray tube 1 and XYZ mobile platform.
As shown in figures 1 and 3, mounting bracket 3 include installation capillary module 2 mounting post 30, and by mounting post 30 with
The adjusting set 31 that X-ray mouth 10 is assembled out；The first through hole with 2 form fit of capillary module is provided in mounting post 30
300, outer surface upper end is provided with annular flange 301；The first groove cooperated with X-ray mouth 10 out is provided in adjusting set 31
310,310 inner wall of the first groove with there are gaps for X mouth 10 out；First groove, 310 bottom is provided with and the cooperation of annular flange 301
Second groove 311,311 bottom of the second groove are provided with and matched second through-hole 312 of mounting post 30；It is provided in adjusting set 31
Adjust the regulating part of 30 horizontal displacement of mounting post；When assembly, first capillary module is assembled to and is led to its shape matched first
In hole 300, then in the horizontal position by regulating part adjustment and installation column 30 to proper output location and fixation, that is, dress is completed
To match, simple for structure and stability is good, and it is easy to assembly, it is at low cost；
It should be noted that capillary module 2 and the preferred top of 300 shape of first through hole are cylinder, lower part is
Cone.
As shown in figures 1 and 3, regulating part includes four centers away from adjusting bolt 313；First groove, 310 inner wall is provided with
Four and center are connected to away from the one-to-one screw hole 314 of bolt 313, screw hole 314 is adjusted with 31 outer surface of adjusting set；Four
A screw hole 314 is in cross distribution；By adjust four direction center away from adjust bolt 313, can to mounting post 30 into
The adjusting of row planar 360 degree angle, and then capillary module 2 is adjusted, easy to adjust, structure is simple.
The mounting means of the application another kind capillary module, as Figure 6-9,1 lower surface of X-ray tube be rotatably connected to
Few three surround the equally distributed adjusting rod 11 of adjusting set；Adjusting rod 11 includes connecting rod 110 and adjusting cam 111；Connecting rod
110 one end are fixedly connected with cam 111 is adjusted, and the other end and the rotation connection of 1 lower surface of X-ray tube and end are provided with longitudinally-moving
Slot 112,112 both ends of loose slot are connected to 110 side surface of connecting rod；It is provided in adjusting rod 11 and is connected to loose slot 112
Third through-hole 113；It adjusts and is provided with the fourth hole 114 being connected to third through-hole 113 on cam 111；It further include 115 He of screw rod
The nut 116 cooperated with screw rod 115；Screw rod 115 protrudes into third through-hole 113 and fourth hole 114, and end is provided with and lives
The cross bar 117 that dynamic slot 112 cooperates；31 outer surface of adjusting set is provided with annular shoulder 315, is provided with and connects on flank 315
The corresponding adjustment hole 316 of bar 110,316 aperture of adjustment hole are less than the minimum widith for adjusting cam 111, are greater than outside connecting rod 110
Diameter；Regulating part includes the controllable register 317 cooperated with adjusting cam 111, and controllable register 317, which is located at, to be adjusted cam 111 and adjust
Between set 31；Controllable register 317 is provided with arc regulating tank 318 engaged therewith towards 111 1 side surface of cam is adjusted；
The adjusting rod 11 being rotatablely connected by least three with X-ray tube lower surface, connecting rod 110 pass through on flank 315
Adjustment hole 316 adjusts cam 111 and is supported to 315 lower surface of flank, guarantees that adjusting set 31 keeps horizontal when adjusting；It adjusts
When, by moving repeatedly 31 horizontal plane position of adjusting set, examined after debugging to a position by the support for adjusting cam 111
It whether in place to survey, is adjusted to position repeatedly and adjusts in place, then turn adjusts the controllable register on the abutting flank 315 of cam 111
317, limitation adjusting set 31 carries out the movement on horizontal plane, and then, rotating nuts 116 to adjust cam 111 and cross bar 117 presss from both sides
Tight flank 315 is locked, and debugging is very convenient, and is not in 31 vertical shift risk of adjusting set, and debugging is greatly saved
With repetition debug time.
As Figure 6-9,117 both ends lower surface of cross bar is provided with the first silica gel pad 118, the first silica gel pad 118
Lower surface is provided with one or more cambered surface type grooves 119；Convenient for being matched for clamping tightly flank 315 in cross bar 117 and adjusting cam 111
When, the deformation of the first silica gel pad 118 squeezes out all or part of air in cambered surface type groove 119, guarantees reliability when clamping position；
Furthermore vibration-damping function is also acted as.
As shown in fig. 6,315 upper surface of flank is provided with second silica gel pad 319 corresponding with the first silica gel pad 118；
Further decrease vibration.
As shown in fig. 6, being provided with the third silica gel piece 320 with the adjusting damping cooperation of cam 111 in regulating tank 319；It is convenient for
It keeps adjusting cam 111 and regulating tank 319 pushes against locating effect, while playing the vibration for reducing horizontal direction.
As shown in Figure 1, Figure 4, Figure 5, it dominates in unthreaded hole 21 and/or capillary light-conductive hole 22 and plated film is provided with by gel technique
200；Convenient for ensureing whole mechanical strength, and the plated film 200 can be with the X-ray wave hair in leading unthreaded hole and capillary light-conductive hole 22
Raw effect, so that light wave is strapped in hole, is finally completed convergence；
Preferably, optical fiber tube is made of quartz；
Preferably, it dominates in unthreaded hole 21 and is provided with fiber core；Ensure optical transport effect in leading unthreaded hole 21；
Preferably, unthreaded hole 21 is dominated with all 22 overall profiles of capillary light-conductive hole in poroid and diameter dimension and X-ray wavelength
It is close: 0.07-0.025nm；Ensure that X-ray goes on smoothly total reflection movement after entering.
It should be understood that for those of ordinary skills, it can be modified or changed according to the above description,
And all these modifications and variations should all belong to the protection domain of appended claims of the present invention.
Claims (10)
1. a kind of high-performance Microfocus X-ray X-ray thickness gauge, which is characterized in that including emitting the X-ray tube of x-ray, by the X-ray
The capillary module that pipe focuses, and the capillary module and the X-ray tube are gone out into the mounting bracket that X-ray mouth assembles；Institute
Stating capillary module includes optical fiber tube, multiple capillarys that vertical leading unthreaded hole is provided in the optical fiber tube and is arranged around it
Light-conductive hole；The capillary light-conductive hole includes the parallel-segment parallel with the leading unthreaded hole, and be connected to the parallel-segment to institute
State the bending section of leading unthreaded hole bending.
2. high-performance Microfocus X-ray X-ray thickness gauge according to claim 1, which is characterized in that the high-performance Microfocus X-ray X
Gamma thickness gage further includes sample material carrier platform, is provided with described in the placement plate and adjusting for placing sample and puts on the sample material carrier platform
Set the mobile XYZ mobile platform of plate.
3. high-performance Microfocus X-ray X-ray thickness gauge according to claim 2, which is characterized in that the high-performance Microfocus X-ray X
Gamma thickness gage further includes the horse of master control borad, the high voltage power supply for providing for the X-ray tube voltage and the control XYZ mobile platform
Up to driving assembly；The high voltage power supply and the motor driving assembly are electrically connected and are controlled by it with the master control borad.
4. high-performance Microfocus X-ray X-ray thickness gauge according to claim 1, which is characterized in that the mounting bracket includes
The mounting post of the capillary module is installed, and by the mounting post and it is described go out the adjusting set assembled of X-ray mouth；The peace
The first through hole with the capillary module form fit is provided in dress column, outer surface upper end is provided with annular flange；Institute
The first groove being provided in adjusting set with the cooperation of X-ray mouth out is stated, between first groove inner wall and the X mouthfuls of presence out
Gap；First bottom portion of groove is provided with the second groove with annular flange cooperation, and second bottom portion of groove is provided with
With matched second through-hole of the mounting post；The regulating part for adjusting the mounting post horizontal displacement is provided in the adjusting set.
5. high-performance Microfocus X-ray X-ray thickness gauge according to claim 4, which is characterized in that the regulating part includes four
A center is away from adjusting bolt；There are four the first groove inner wall settings with the center away from the adjusting one-to-one screw of bolt
Hole, the screw hole are connected to the adjusting set outer surface；Four screw holes are in cross distribution.
6. high-performance Microfocus X-ray X-ray thickness gauge according to claim 4, which is characterized in that the X-ray tube lower surface turns
It is dynamic to be connected at least three around the equally distributed adjusting rod of the adjusting set；The adjusting rod includes connecting rod and adjusts convex
Wheel；Described connecting rod one end is fixedly connected with the adjusting cam, and the other end is rotatablely connected with the X-ray tube lower surface and end
It is provided with longitudinally-moving slot, the loose slot both ends are connected to the connecting rod side surface；Be provided in the adjusting rod with
The third through-hole of the loose slot connection；The fourth hole being connected to the third through-hole is provided on the adjusting cam；Also
Nut including screw rod and with screw rod cooperation；The screw rod protrudes into the third through-hole and the fourth hole, and holds
Portion is provided with the cross bar with loose slot cooperation；The adjusting set outer surface is provided with annular shoulder, sets on the flank
It is equipped with adjustment hole corresponding with the connecting rod, the adjustment hole aperture is less than the minimum widith for adjusting cam, is greater than institute
State connecting rod outer diameter；The regulating part includes the controllable register with the adjusting cam engagement, and the controllable register is located at described
It adjusts between cam and the adjusting set；The controllable register is provided with engaged therewith towards one side surface of adjusting cam
Arc regulating tank.
7. high-performance Microfocus X-ray X-ray thickness gauge according to claim 6, which is characterized in that cross bar both ends following table
Face is provided with the first silica gel pad, and first silica gel pad lower surface is provided with one or more cambered surface type grooves.
8. high-performance Microfocus X-ray X-ray thickness gauge according to claim 7, which is characterized in that the flank upper surface is set
It is equipped with the second silica gel pad corresponding with first silica gel pad.
9. high-performance Microfocus X-ray X-ray thickness gauge according to claim 6, which is characterized in that setting in the regulating tank
There is the third silica gel piece with the adjusting cam damping cooperation.
10. -9 any high-performance Microfocus X-ray X-ray thickness gauge according to claim 1, which is characterized in that the leading light
Plated film is provided with by gel technique in hole and/or the capillary light-conductive hole.
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| CN201810907582.XA CN109029310B (en) | 2018-08-10 | 2018-08-10 | High-performance microfocus X-ray thickness gauge |
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| CN109029310A true CN109029310A (en) | 2018-12-18 |
| CN109029310B CN109029310B (en) | 2021-07-30 |
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| CN203704889U (en) * | 2013-12-20 | 2014-07-09 | 上海优特化工有限公司 | Sophisticated X fluorescence thickness gauge |
| CN204023621U (en) * | 2014-07-17 | 2014-12-17 | 欧健 | There is the cellar for storing things well lid of mechanical code lockset and camlock location |
| CN107228872A (en) * | 2017-05-24 | 2017-10-03 | 北京市辐射中心 | A kind of secondary total reflection single capillary X-ray focusing lens, analytical equipment and preparation method thereof |
| CN206861113U (en) * | 2017-07-03 | 2018-01-09 | 福州市恒丰精密机械有限公司 | A kind of cam lock adapter |
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