CN109023304A - A kind of admission gear - Google Patents
A kind of admission gear Download PDFInfo
- Publication number
- CN109023304A CN109023304A CN201710439057.5A CN201710439057A CN109023304A CN 109023304 A CN109023304 A CN 109023304A CN 201710439057 A CN201710439057 A CN 201710439057A CN 109023304 A CN109023304 A CN 109023304A
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- China
- Prior art keywords
- wedge block
- air inlet
- block
- upper cover
- chamber
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Separation By Low-Temperature Treatments (AREA)
Abstract
The invention discloses a kind of admission gears, for being passed through reaction gas into chamber, admission gear includes source air inlet block, air inlet block in source is set in the groove in chamber sidewall, the upper surface of source air inlet block and chamber sidewall is at least partly covered with upper cover, source air inlet block includes the upper wedge block matched by lozenges and lower wedge block, by driving lower wedge block translation disengaging groove, make wedge block by lower wedge block, the collective effect of interaction force moves up and down between chamber sidewall and upper cover, to adjust source air inlet block and upper cover, relative position between chamber sidewall, realization source air inlet block and upper cover, it is sealed while upper cover is with chamber sidewall, therefore it can compensate because of source air inlet block, upper cover, the design and manufacture error of chamber cause sealing failure and caused by waste, increase the reliability of sealing, and increase the fault-tolerant of design and manufacture Ability.
Description
Technical field
The present invention relates to atomic layer deposition apparatus, more particularly, to one kind for into atomic layer deposition apparatus chamber
It is passed through the admission gear of reaction gas.
Background technique
Atomic layer deposition (Atomic layer deposition) is a kind of special chemical vapour deposition technique, is logical
It crosses and one or more kinds of vaporous precursors (source) is alternately passed through reaction chamber and are chemically reacted on depositing base surface
And the method for forming film.With trimethyl aluminium (Al (CH3)3, TMA) and H2O is precursor preparation AL2O3For film, typically
The schematic illustration of atomic layer deposition system is as shown in Figure 1.
Please refer to Fig. 1.The first vaporous precursors TMA, second of vaporous precursors H2Two kinds of presomas of O are respectively in carrier gas
Under carrying, pipeline, source air inlet block, Lid (upper cover), spray head successively are flowed through from respective source bottle, eventually arrives at chamber.Conversion gas phase front
When driving body, chamber and pipeline are cleaned using purgative gas.Atomic layer deposition necessarily be in space that one strictly seals it
In, extraneous air, steam, particle etc. may be will lead to by, which slightly revealing, enters chamber, and it is bad so as to cause film-formation result, more
It is also possible to lead to safety accident when serious.
O-ring has good leakproofness, and structure is simple, reliable performance, therefore between source air inlet block and upper cover, upper cover
O-ring seal is all made of between chamber to be sealed.Enter chamber after flowing through source air inlet block, upper cover because of two kinds of presomas,
It need to guarantee effective sealing between source air inlet block and upper cover, between upper cover and chamber simultaneously；It is also required to combine three when actual design
The size of a components carries out comprehensive design calculating.However, each part machinery processing, installation can also have certain deviation, then
It finally very likely will lead to overall structure seal failure.
Fig. 2-Fig. 4 is please referred to, shows existing provenance air inlet block and its assembly sealing structure；Wherein, Fig. 2 is existing
The packaged distribution structure partial sectional view of a provenance air inlet, Fig. 3 is the packaged distribution structure partial top view of existing provenance air inlet, figure
4 be existing provenance air inlet block structure top view.As shown in figs 2-4, source air inlet block 5 is located at the square groove in chamber sidewall 2
It is interior, it is positioned using the positioning pin 3 in insertion chamber sidewall 2, and be fixed in chamber sidewall 2 with holding screw 4.First
There is close design at the upper surface of kind vaporous precursors gas outlet 11, second of vaporous precursors gas outlet 10 and chamber sidewall 2
Sealing groove, after the sealing ring 7 between two sealing rings 6, chamber sidewall and upper covers being respectively put between source air inlet block and upper cover,
Upper cover 1 is covered, each sealing ring 6,7 is bonded with the sealing surface of 1 lower surface of upper cover simultaneously.It (is taken out when being in negative pressure state in chamber
Vacuum) when, biggish pressure is generated in 1 upper surface of upper cover, which can make two sealing rings between source air inlet block and upper cover
6, the sealing ring 7 between chamber and upper cover generates deformation simultaneously, thus realize source air inlet block 5 and upper cover 1, upper cover 1 and chamber it
Between while seal.And latter two reaction source (the first, second of vaporous precursors) respectively through the first vaporous precursors into
Port 8, second of vaporous precursors air inlet 9 enter source air inlet block 5, from the first vaporous precursors gas outlet 11, second
Vaporous precursors gas outlet 10 eventually enters into chamber after entering upper cover 1, and carries out ALD related process.
In above-mentioned existing source air inlet block and its sealing structure, source air inlet block, chamber sidewall, the opposite position between upper cover
Setting cannot be adjusted, and must guarantee the validity sealed by accurately designing, accurately processing.Moreover, because upper cover needs
Sealing is realized simultaneously with source air inlet block, chamber, if deviation occur in some Element Design, processing, may result in entirety
The failure of sealing.Due to being related to many places sealing, a possibility that this nonadjustable structure undoubtedly increases seal failure simultaneously.
Because source air inlet block size is smaller, structure is simple, therefore a kind of adjustable source air inlet block is designed, to improve equipment entirety
The sealing effect of structure, it appears particularly important.
Summary of the invention
It is an object of the invention to overcome drawbacks described above of the existing technology, a kind of admission gear is provided, can compensate for source
Air inlet block, upper cover, chamber because caused by design, manufacture, installation error the problem of poor sealing performance, source air inlet block and upper cover it
Between, realize between upper cover and chamber sidewall it is adjustable under while seal.
To achieve the above object, technical scheme is as follows:
A kind of admission gear, for being passed through reaction gas into chamber, the admission gear includes source air inlet block, the source
Air inlet block is set in the groove in the chamber sidewall, and the upper surface of the source air inlet block and the chamber sidewall is at least partly
It is covered with upper cover, which is characterized in that the source air inlet block includes the upper wedge block matched by lozenges and lower wedge block, is led to
Lower wedge block translation of overdriving passes in and out groove, makes wedge block by interaction force between lower wedge block, chamber sidewall and upper cover
Collective effect move up and down, to adjust the relative position between source air inlet block and upper cover, chamber sidewall, realize source air inlet block with
It is sealed while upper cover, upper cover and chamber sidewall.
Preferably, the upper wedge block is flexibly connected by stop screw with the groove floor of chamber sidewall.
Preferably, the stop screw limits the lifting height of upper wedge block.
Preferably, the upper wedge block is equipped with vertically-guided mechanism.
Preferably, the vertically-guided mechanism includes set on the guide pin hole of upper wedge block bottom and in groove floor
And pass through the guide pin that lower wedge block is matched with guide pin hole.
Preferably, guide pin bushing is embedded in the guide pin hole.
Preferably, the lower wedge block is equipped with the position-limit mechanism for limiting its translation disengaging.
Preferably, the position-limit mechanism include set on lower wedge block bottom limiting slot and be set to groove floor on and with limit
The spacer pin that position slot matches.
Preferably, the lower wedge block extends to the outside of chamber sidewall, and exposed division on the outside is with the side of being threadedly engaged
Formula connects the end of a push-pull screw, and the tail portion of the push-pull screw is equipped with axle sleeve and relative position is fixed, and the axle sleeve is set
In in fixing seat, the fixing seat connects chamber side wall side wall.
Preferably, the lower wedge block extends to the outside of chamber sidewall, and exposed division on the outside is with pin shaft cooperation side
Formula connects the end of a push-pull screw, and the tailing screw flight of the push-pull screw is socketed with axle sleeve, and the axle sleeve is set in fixing seat,
The fixing seat connects chamber side wall side wall.
It can be seen from the above technical proposal that existing monoblock type source air inlet block is improved to match with lozenges by the present invention
The split type structure of the upper wedge block and lower wedge block that close, by the translation of lower wedge block, wedge block moves vertically in drive, with
The upper and lower position of change source air inlet block, to change relative position of the air inlet block in source relative to upper cover, chamber sidewall, therefore can be with
Compensation due to source air inlet block, upper cover, the design and manufacture error of chamber lead to sealing failure caused by waste, increase sealing can
By property, and increase the fault-tolerant ability of design and manufacture.
Detailed description of the invention
Fig. 1 is a kind of schematic illustration of typical atomic layer deposition system；
Fig. 2-Fig. 4 is existing provenance air inlet block and its assembly sealed structural schematic diagram；
Fig. 5 is a kind of admission gear's sectional arrangement drawing of a preferred embodiment of the present invention；
Fig. 6 is the assembling plan view concealed after upper cover, upper wedge block in Fig. 5；
Fig. 7 is the adjustment status diagram of air inlet block in source of the present invention；
1. upper cover in figure, 2. chamber sidewalls, 3. positioning pins, 4. holding screws, 5. source air inlet blocks (existing), 6. source air inlet blocks
Sealing ring between upper cover, the sealing ring between 7. chambers and upper cover, 8. the first vaporous precursors air inlet, 9. second
Vaporous precursors air inlet, 10. second of vaporous precursors gas outlet, 11. the first vaporous precursors gas outlet, 12. limits
Screw, 13. descend wedge blocks, wedge block on 14., 15. guide pin bushings, 16. guide pins, 17. upper fixed seats, 18. push-and-pulls
Screw rod, 19. axle sleeves, 20. lower fixed seats, 21. spacer pins, 22. limiting slots；A. design position.
Specific embodiment
With reference to the accompanying drawing, specific embodiments of the present invention will be described in further detail.
It should be noted that in following specific embodiments, when describing embodiments of the invention in detail, in order to clear
Ground indicates structure of the invention in order to illustrate, spy does not draw to the structure in attached drawing according to general proportion, and has carried out part
Amplification, deformation and simplified processing, therefore, should be avoided in this, as limitation of the invention to understand.
In specific embodiment of the invention below, referring to Fig. 5, Fig. 5 is one kind of a preferred embodiment of the present invention
Admission gear's sectional arrangement drawing.As shown in figure 5, a kind of admission gear of the invention, for being passed through reaction gas into chamber.Institute
Stating admission gear includes source air inlet block, and the source air inlet block of the invention is existing in installation site and Fig. 2 in chamber sidewall
The installation site of source air inlet block is identical, i.e., source air inlet block of the invention is similarly installed in the groove in chamber sidewall 2.It is described recessed
Slot has opening in the side of chamber sidewall, therefore air inlet block in source is after being packed into groove, can be from the side of chamber sidewall, i.e. recessed
Expose the opening portion of slot.On the upper surface of the source air inlet block and upper surface of chamber sidewall is covered with upper cover 1, and upper cover is at least partly
Covering source air inlet block and chamber sidewall.Between the upper surface of source air inlet block and the lower surface of upper cover, the lower surface of upper cover and chamber
Can it be equipped with sealing ring (only showing sealing ring 7 in figure) between the upper surface of side wall, such as the existing side in Fig. 2 can be used
Formula.Certainly, other sealing means that design needs can also be used.About source air inlet block part same as the prior art of the present invention
Content, the introduction that can refer to background technology part are understood.
Difference from prior art is that the present invention improves the monoblock type source air inlet block structure of existing such as Fig. 2
For the split type structure of the upper wedge block and lower wedge block that are matched with lozenges；Air inlet block in source i.e. of the invention includes passing through edge
The upper wedge block 14 and lower wedge block 13 that the lozenges that horizontal direction is obliquely installed matches.Such as diagram right low left high can be used
Lozenges angle of wedge form, form air inlet block structure in wedge-type source of the invention.
The working principle of the invention is, drives lower wedge block translation disengaging recessed by exposing direction by chamber sidewall side
Slot (i.e. along slot opening direction to move back and forth inside chamber sidewall), using the cooperation between upper and lower wedge block lozenges, makes
Upper wedge block is moved up and down by the collective effect of interaction force between lower wedge block, chamber sidewall and upper cover.I.e. when under driving
Wedge block to when moving inside chamber sidewall, make by the vertical stress component of upper wedge block active force between upper and lower wedge block lozenges
Under, rising is generated, and utilize the level point of active force between the upper and lower wedge block lozenges of counterforce counteraction of chamber sidewall
Power, the lateral displacement of wedge block in restriction；Conversely, when driving lower wedge block, to when moving outside chamber sidewall, upper wedge block exists
Under the action of upper cover pressure and self gravity, decline is generated, and restricts the lateral displacement of upper wedge block using chamber sidewall.In this way
The relative position between source air inlet block and upper cover, chamber sidewall can be adjusted, thus realize source air inlet block and upper cover, upper cover with
It is sealed while between chamber sidewall.
In order to guarantee the motion transmission ratio and self-locking property of air inlet block in wedge-type source of the invention, thereon, lower wedge block wedge shape
The angle of wedge range in face is generally 5-15 °.
Please refer to Fig. 5.The upper wedge block 14 can be connected by the groove floor activity of stop screw 12 and chamber sidewall 2
It connects.In specific assembly, through-hole can be processed downwards from upper 14 upper surface of wedge block, process one section in the upper part of through-hole and sink
Hole, and optical axis will be processed at the cooperation of 12 side of stop screw and upper wedge block 14.Wherein, stop screw 12 side optical axis
Diameter should be more smaller than the through-hole of upper wedge block 14, avoids the up and down motion for influencing wedge block 14；The bottom of stop screw 12 is
Helicitic texture, when its screw head boss and the fastening of chamber sidewall 2, i.e. expression stop screw 12 has rotated into position, this time limit
The lower surface of position 12 top nut of screw and the counterbore upper surface of upper wedge block 14 should have certain distance, optimum distance 0.6-
1mm then can effectively limit change in location of the wedge block 14 under non-process state.Therefore the stop screw can also limit
The lifting height of wedge block.The continuous adjustment of source air inlet block in a certain range can be realized using stop screw.
Please refer to Fig. 6.The stop screw is settable multiple (being illustrated as 5).When the position of its setting needs under
When wedge block, it can be corresponded on lower wedge block and open up evacuation slot.
Please refer to Fig. 5, Fig. 6.The upper wedge block can also be equipped with vertically-guided mechanism.The vertically-guided mechanism may include
It is led set on the guide pin hole of upper wedge block bottom and in groove floor and across what lower wedge block was matched with guide pin hole
To pin shaft 16.In specific assembly, a through slot can be opened in the bottom of upper wedge block 14, process two in through slot bottom appropriate location
Unthreaded hole can be interference fitted as guide pin hole, unthreaded hole with guide pin bushing 15.Then, guide pin bushing 15 is embedded in and is oriented to
In pin hole；The corresponding installation guide pin 16 in the groove floor of chamber sidewall.Correspondence offers guide pin on lower wedge block
The evacuation slot of axis.Lower wedge block, upper wedge block are fitted into groove, fall into guide pin in guide pin bushing.
Guide pin bushing 15 can guarantee flexibility when upper wedge block 14 moves up and down along guide pin 16.
Please refer to Fig. 6.The lower wedge block is equipped with the position-limit mechanism for limiting its translation disengaging.The position-limit mechanism includes setting
In the limiting slot 22 of lower wedge block bottom and the spacer pin 21 matched in groove floor and with limiting slot.Limiting slot 22 can
Lower wedge block 13 is penetrated through to process.To guarantee that upper wedge block 14 realizes the stroke of up and down motion ± 0.5mm, can according to angle of wedge size,
The limiting slot 22 of corresponding length is processed on lower wedge block 13, and utilizes the spacer pin 21 installed in groove floor corresponding position,
The move distance and direction of lower wedge block are defined.The company of source air inlet block in a certain range can be realized using position-limit mechanism
Continuous adjustment.
Please refer to Fig. 5, Fig. 6.The lower wedge block 13 extends to the outside of chamber sidewall, and lower wedge block is in side-wall outer side
Exposed division connects the end of a push-pull screw 18.By the draw of push-pull screw 18, realize lower wedge block in a groove
It moves forward and backward.
As an optional embodiment, the end of push-pull screw 18 can be connected with thread fiting mode and lower wedge block 13
It connects.At this point, the tail portion of the push-pull screw is equipped with axle sleeve 19, and axle sleeve 19 can be fastened on push-pull screw 18, form phase
The activity cooperation fixed to position, the axle sleeve 19 are set in fixing seat 17 and 20.The fixing seat can be by 17 He of upper fixed seat
The splicing of lower fixed seat 20 is surrounded；And it is installed and is fixed by lower fixed seat 20 and the side wall of chamber sidewall 2.
Since push-pull screw 18 and the relative position of axle sleeve 19 are fixed, pass through the rotation of push-pull screw 18, push-pull screw 18
Front-rear position is motionless, by its being threadedly engaged between lower wedge block 13, lower wedge block 13 is driven to move forward and backward；Due to hyposphene
Shape block 13 is identical as the angle of wedge of upper wedge block 14, therefore, under the pressure effect of the thrust or upper cover 1 of lower wedge block 13, upper wedge
Shape block 14 can move up and down along guide pin 16, the variation of 14 position of wedge block in realization, thus compensate source air inlet block, upper cover 1,
The design of chamber sidewall 2, manufacture, installation error realize sealing function.Have between upper and lower wedge block simultaneously good self-locking
Function, it is ensured that the stability that air inlet block in source seals after adjusting.
As another optional embodiment, the end of push-pull screw can also be connected with pin shaft fit system and lower wedge block
It connects, i.e., when push-pull screw rotates, lower wedge block is motionless；When push-pull screw moves forward and backward, lower wedge block is servo-actuated.Meanwhile pushing and pulling spiral shell
Threads turn cooperation is formed between bar and axle sleeve, when push-pull screw rotation, relative to axle sleeve, i.e. relative to the position of fixing seat
It sets and changes.
Please refer to Fig. 7.When 2 actual height of chamber sidewall is higher than design position A, (or air inlet block actual processing size in source is lower than
Design size) when, as shown in fig. 7, wherein the double dot dash line of design position A meaning is design size, this will lead to source air inlet block
Upper wedge block 14 and upper cover 1 between spacing become larger, cause poor sealing even can not seal.At this point, inverse using spanner
The cap mouth of 18 tail portion of hour hands rotating sliding screw rod moves the lower direction into chamber sidewall of wedge block 13, in lower wedge block 13
Under thrust, upper wedge block 14 gradually becomes smaller along 16 upward vertical movement of guide pin, the distance between upper cover 1, source into
Sealing ring 6 between air parcel and upper cover is further compressed；Meanwhile when being in negative pressure state (vacuumizing) in chamber, upper
1 upper surface of lid will generate biggish pressure；Because the pressure between chamber sidewall 2 and upper cover 1 is larger, and air inlet block in source of the present invention
Regulated quantity belong to millimetre-sized fine tuning state, therefore may be implemented in and do not destroy between chamber sidewall 2 and upper cover 1 while seal, it is real
The now sealing between upper wedge block 14 and upper cover 1.
Similarly, when 2 thickness of chamber sidewall is too small or air inlet block thickness in source is bigger than normal, then push-pull screw can be rotated clockwise
18, lower wedge block 13 is then moved towards the direction in the chamber sidewall, and upper wedge block 14 is in 2 pressure of upper cover and self gravity
It, can be real while guaranteeing to seal between upper wedge block 14 and upper cover 1 along 16 vertical downward movement of guide pin under effect
Sealing between existing chamber and upper cover 1.
In conclusion the present invention by existing monoblock type source air inlet block be improved to the upper wedge block matched with lozenges and
The split type structure of lower wedge block, by the translation of lower wedge block, wedge block moves vertically in drive, to change source air inlet block
Upper and lower position, i.e. change source air inlet block, upper cover, the mutual spacing relationship between chamber sidewall, so that it is opposite to change source air inlet block
In the relative position of upper cover, chamber sidewall, therefore can compensate because the design and manufacture error of source air inlet block, upper cover, chamber causes
It is wasted caused by sealing unsuccessfully, increases the reliability of sealing, and increase the fault-tolerant ability of design and manufacture, while saved
Cost avoids bigger waste.
Above-described to be merely a preferred embodiment of the present invention, the patent that the embodiment is not intended to limit the invention is protected
Range is protected, therefore all with the variation of equivalent structure made by specification and accompanying drawing content of the invention, similarly should be included in
In protection scope of the present invention.
Claims (10)
1. a kind of admission gear, for being passed through reaction gas into chamber, the admission gear includes source air inlet block, the source into
Air parcel is set in the groove in the chamber sidewall, and the upper surface of the source air inlet block and the chamber sidewall is at least partly covered
It is stamped upper cover, which is characterized in that the source air inlet block includes the upper wedge block matched by lozenges and lower wedge block, is passed through
Lower wedge block translation disengaging groove is driven, makes wedge block by interaction force between lower wedge block, chamber sidewall and upper cover
Collective effect moves up and down, to adjust the relative position between source air inlet block and upper cover, chamber sidewall, realize source air inlet block with it is upper
It is sealed while lid, upper cover and chamber sidewall.
2. admission gear according to claim 1, which is characterized in that the upper wedge block passes through stop screw and chamber side
The groove floor of wall is flexibly connected.
3. admission gear according to claim 2, which is characterized in that the stop screw limits the upper raising of upper wedge block
Degree.
4. admission gear according to claim 1, which is characterized in that the upper wedge block is equipped with vertically-guided mechanism.
5. admission gear according to claim 4, which is characterized in that the vertically-guided mechanism includes being set to upper wedge block
The guide pin hole of bottom and the guide pin matched in groove floor and across lower wedge block with guide pin hole.
6. admission gear according to claim 5, which is characterized in that be embedded with guide pin lining in the guide pin hole
Set.
7. admission gear according to claim 1, which is characterized in that the lower wedge block, which is equipped with, limits its translation disengaging
Position-limit mechanism.
8. admission gear according to claim 7, which is characterized in that the position-limit mechanism includes being set to lower wedge block bottom
Limiting slot and the spacer pin that is matched in groove floor and with limiting slot.
9. admission gear according to claim 1, which is characterized in that the lower wedge block extends to the outer of chamber sidewall
Side, exposed division on the outside connect the end of a push-pull screw with thread fiting mode, and the tail portion of the push-pull screw is worn
There is axle sleeve and relative position is fixed, the axle sleeve is set in fixing seat, and the fixing seat connects chamber side wall side wall.
10. admission gear according to claim 1, which is characterized in that the lower wedge block extends to the outer of chamber sidewall
Side, exposed division on the outside connect the end of a push-pull screw, the tailing screw flight of the push-pull screw with pin shaft fit system
It is socketed with axle sleeve, the axle sleeve is set in fixing seat, and the fixing seat connects chamber side wall side wall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710439057.5A CN109023304B (en) | 2017-06-12 | 2017-06-12 | Air inlet mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710439057.5A CN109023304B (en) | 2017-06-12 | 2017-06-12 | Air inlet mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109023304A true CN109023304A (en) | 2018-12-18 |
| CN109023304B CN109023304B (en) | 2020-11-10 |
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ID=64629286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710439057.5A Active CN109023304B (en) | 2017-06-12 | 2017-06-12 | Air inlet mechanism |
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| Country | Link |
|---|---|
| CN (1) | CN109023304B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101355010A (en) * | 2007-07-26 | 2009-01-28 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Air-intake installation and reaction chamber |
| CN106382170A (en) * | 2016-10-26 | 2017-02-08 | 江苏大学 | Internal gradient valve having automatic sealing position adjusting function |
-
2017
- 2017-06-12 CN CN201710439057.5A patent/CN109023304B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101355010A (en) * | 2007-07-26 | 2009-01-28 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Air-intake installation and reaction chamber |
| CN106382170A (en) * | 2016-10-26 | 2017-02-08 | 江苏大学 | Internal gradient valve having automatic sealing position adjusting function |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109023304B (en) | 2020-11-10 |
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