CN109837527B - Air inlet mechanism - Google Patents
Air inlet mechanism Download PDFInfo
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- CN109837527B CN109837527B CN201711187822.5A CN201711187822A CN109837527B CN 109837527 B CN109837527 B CN 109837527B CN 201711187822 A CN201711187822 A CN 201711187822A CN 109837527 B CN109837527 B CN 109837527B
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- air inlet
- inlet block
- source
- upper cover
- source air
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Abstract
The invention discloses an air inlet mechanism for introducing reaction gas into a cavity, which comprises a source air inlet block, wherein the source air inlet block is arranged in a groove above the side wall of the cavity, at least one part of the upper surfaces of the source air inlet block and the side wall of the cavity is covered with an upper cover, sealing rings are respectively adopted between the source air inlet block and the upper cover and between the upper cover and the side wall of the cavity, an elastic component is arranged between the lower surface of the source air inlet block and the bottom surface of the groove, and the elastic component is used for adjusting the compression amount of the elastic component, the pressure on the surface of the sealing ring between the source air inlet block and the upper cover can be adjusted to realize the sealing between the source air inlet block and the upper cover as well as between the upper cover and the side wall of the chamber, therefore, errors in design, processing and installation among the source air inlet block, the upper cover and the cavity can be corrected within a certain range, cost is saved, and meanwhile, the mechanism has the capacity of online adjustment, and debugging and leakage detection time can be effectively saved.
Description
Technical Field
The invention relates to an atomic layer deposition device, in particular to a gas inlet mechanism for introducing reaction gas into a chamber of the atomic layer deposition device.
Background
Atomic layer deposition (Atomic layer deposition) is a special chemical vapor deposition technique, which is a method of forming a thin film by alternately introducing one or more vapor phase precursors (sources) into a reaction chamber and causing a chemical reaction on the surface of a deposition substrate. With trimethylaluminum (Al (CH)3)3TMA) and H2Preparation of AL with O as precursor2O3For example, a schematic diagram of a typical atomic layer deposition system is shown in fig. 1.
Please refer to fig. 1. First gas phase precursor TMA and second gas phase precursor H2The two precursors are carried by carrier gas respectively, and flow from respective source bottles to the pipeline, the source gas inlet block, the Lid and the nozzle in sequence, and finally reach the chamber. And when the gas-phase precursor is changed, cleaning the chamber and the pipeline by using cleaning gas. Atomic layer deposition must be in a strictly sealed space, and slight leakage may cause external air, water vapor, particles and the like to enter the chamber, so that the film forming effect is poor, and in more serious cases, safety accidents may also be caused.
The O-shaped ring has good sealing performance, simple structure and reliable performance, and therefore O-shaped sealing rings are adopted between the source air inlet block and the upper cover and between the upper cover and the cavity for sealing. Because the two precursors both flow through the source gas inlet block and the upper cover and then enter the chamber, the effective sealing between the source gas inlet block and the upper cover and between the upper cover and the chamber is required to be ensured; in actual design, the sizes of the three parts are combined for comprehensive design calculation. However, there is a certain deviation in the machining and installation of the individual parts, which will most likely eventually lead to the failure of the overall structural seal.
Referring to fig. 2-4, a conventional source air inlet block and its assembled sealing structure are shown; fig. 2 is a partial sectional view of a conventional source air inlet block assembly structure, fig. 3 is a partial plan view of a conventional source air inlet block assembly structure, and fig. 4 is a plan view of a conventional source air inlet block structure. As shown in fig. 2to 4, the source air inlet block 5 is located in a square groove on the chamber sidewall 2, is positioned by a positioning pin 3 embedded in the chamber sidewall 2, and is fixed to the chamber sidewall 2 by a set screw 4. Sealing grooves are designed at the upper surfaces of the first gas-phase precursor gas outlet 11, the second gas-phase precursor gas outlet 10 and the chamber side wall 2, after two sealing rings 6 between the source gas inlet block and the upper cover and two sealing rings 7 between the chamber side wall and the upper cover are respectively placed, the upper cover 1 is well covered, and the sealing rings 6 and 7 are simultaneously attached to the sealing surface of the lower surface of the upper cover 1. When the chamber is in a negative pressure state (vacuumized), a larger pressure is generated on the upper surface of the upper cover 1, and the pressure can simultaneously deform the two sealing rings 6 between the source air inlet block and the upper cover and the sealing ring 7 between the chamber and the upper cover, so that simultaneous sealing between the source air inlet block 5 and the upper cover 1 and between the upper cover 1 and the chamber is realized. Then two reaction sources (a first gas-phase precursor and a second gas-phase precursor) respectively enter the source gas inlet block 5 through a first gas-phase precursor gas inlet 8 and a second gas-phase precursor gas inlet 9, enter the upper cover 1 from a first gas-phase precursor gas outlet 11 and a second gas-phase precursor gas outlet 10, and finally enter the chamber, and related ALD processes are carried out.
In the above-described conventional source inlet block and its sealing structure, the relative positions of the source inlet block, the chamber sidewall, and the upper cover are not adjustable, and it is necessary to ensure the effectiveness of the sealing by means of precise design and precise machining. Moreover, since the upper cover needs to be sealed with the source air inlet block and the chamber at the same time, if a deviation occurs in design and processing of a certain part, the overall sealing may fail. This non-adjustable configuration undoubtedly increases the likelihood of seal failure due to the simultaneous involvement of multiple seals.
Because the size of the source air inlet block is small and the structure is simple, the adjustable source air inlet block is designed to improve the sealing effect of the whole structure of the equipment, and the adjustable source air inlet block is particularly important.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, and provides an air inlet mechanism which can compensate the problem of poor sealing performance among a source air inlet block, an upper cover and a chamber caused by design, manufacturing and installation errors, and can realize adjustable simultaneous sealing between the source air inlet block and the upper cover and between the upper cover and the side wall of the chamber.
In order to achieve the purpose, the technical scheme of the invention is as follows:
the utility model provides an air inlet mechanism for let in reactant gas in to the cavity, air inlet mechanism is including the source piece of admitting air, the source piece of admitting air is located in the recess of cavity lateral wall top, the source piece of admitting air with at least some covers of the upper surface of cavity lateral wall has the upper cover, all adopt the sealing washer to seal between source piece of admitting air and the upper cover, between upper cover and the cavity lateral wall, the lower surface of source piece of admitting air with be equipped with elastic component between the grooved underside, through the adjustment elastic component's compressive capacity, in order to adjust the pressure on sealing washer surface between source piece of admitting air and the upper cover realizes the source and admit air the piece and upper cover, upper cover and cavity lateral wall between sealed.
Preferably, the elastic assembly comprises an elastic element and a pressure lever, the pressure lever is movably arranged in the source air inlet block, the lower surface of the pressure lever is in contact with the upper end of the elastic element, the lower end of the elastic element is in contact with the bottom surface of the groove, and the pressure lever moves up and down in the source air inlet block to adjust the compression amount of the elastic element.
Preferably, the pressure rod and the source air inlet block are in threaded fit.
Preferably, the lower surface of the pressure lever and the bottom surface of the groove are respectively provided with an elastic element limiting groove to prevent the elastic element from moving laterally.
Preferably, the elastic element is a compression spring.
Preferably, the distance of the up-and-down movement of the pressure lever relative to the source air inlet block is greater than 2 mm.
Preferably, a vertical guide mechanism is arranged between the source air inlet block and the groove.
Preferably, the vertical guide mechanism comprises a pin shaft and a pin hole which are matched, a guide rail and a sliding table which are matched, or a linear bearing and a shaft which are matched.
Preferably, an equal-height limiting mechanism is arranged between the source air inlet block and the groove.
Preferably, the equal-height limiting mechanism comprises an equal-height limiting screw penetrating through the source air inlet block and a screw hole arranged on the bottom surface of the groove and matched with the equal-height limiting screw.
According to the technical scheme, the elastic assembly is arranged between the lower surface of the source air inlet block and the bottom surface of the groove of the side wall of the chamber to form an adjustable elastic sealing structure, the relative position of the source air inlet block relative to the upper cover and the side wall of the chamber is changed by adjusting the compression amount of the elastic assembly, and therefore the pressure on the surface of the sealing ring between the source air inlet block and the upper cover can be adjusted, the sealing effect between the source air inlet block and the upper cover and between the upper cover and the side wall of the chamber can be improved, errors in design, processing and installation among the source air inlet block, the upper cover and the chamber can be corrected within a certain range, the cost is saved, meanwhile, the mechanism has the online adjustment capacity, and the debugging and leakage detection time can be effectively saved.
Drawings
FIG. 1 is a schematic diagram of a typical atomic layer deposition system;
FIGS. 2-4 are schematic views of a prior art source air block and its assembled sealing structure;
FIGS. 5-6 are assembled cross-sectional views of an air intake mechanism in various orientations in accordance with a preferred embodiment of the present invention;
FIG. 7 is an assembled top view of an air intake mechanism in accordance with a preferred embodiment of the present invention;
in the figure, 1, an upper cover, 2, a chamber side wall, 3, a positioning pin, 4, a set screw, 5, a source gas inlet block (existing), 6, a sealing ring between the source gas inlet block and the upper cover, 7, a sealing ring between the chamber side wall and the upper cover, 8, a first gas-phase precursor gas inlet, 9, a second gas-phase precursor gas inlet, 10, a second gas-phase precursor gas outlet, 11, a first gas-phase precursor gas outlet, 12, a chamber side wall (modified), 13, a source gas inlet block (modified), 14, a pressure rod, 15, a spring, 16, a guide pin shaft, 17, a guide bushing and 18 are equal-height limiting screws.
Detailed Description
The following describes embodiments of the present invention in further detail with reference to the accompanying drawings.
In the following detailed description of the embodiments of the present invention, in order to clearly illustrate the structure of the present invention and to facilitate explanation, the structure shown in the drawings is not drawn to a general scale and is partially enlarged, deformed and simplified, so that the present invention should not be construed as limited thereto.
In the following description of the present invention, please refer to fig. 5-7, fig. 5-6 are assembled cross-sectional views of an air intake mechanism in different directions according to a preferred embodiment of the present invention; FIG. 7 is an assembled top view of an air intake mechanism in accordance with a preferred embodiment of the present invention. As shown in fig. 5 to 7, an air inlet mechanism of the present invention is used for introducing a reaction gas into a chamber. The air intake mechanism comprises a modified source air intake block 13; the mounting position of the source air inlet block on the side wall of the chamber after the improvement of the invention is the same as that of the existing source air inlet block in the figure 2, namely, the source air inlet block 13 of the invention is also mounted in a groove above the side wall 12 of the chamber after the improvement. The recess may have an opening on a side surface of the chamber sidewall, so that the source gas inlet block may be exposed from the side surface of the chamber sidewall, i.e., the opening of the recess, after being installed in the recess. The upper surface of the source air inlet block and the upper surface of the chamber side wall are covered by an upper cover 1, and the upper cover at least partially covers the source air inlet block and the chamber side wall. Sealing rings (only the sealing ring 6 is shown in the figure) can be arranged between the upper surface of the source air inlet block and the lower surface of the upper cover and between the lower surface of the upper cover and the upper surface of the side wall of the chamber, for example, the existing sealing mode in the figure 2 can be adopted. Of course, other sealing means may be used as required by the design. The contents of the source inlet block of the present invention, which are the same as those of the prior art, can be understood with reference to the description of the background section.
Compared with the prior art, the invention is characterized in that an elastic component is arranged between the lower surface of the source air inlet block and the bottom surface of the groove; therefore, the pressure of the surface of the sealing ring between the source air inlet block and the upper cover can be adjusted by adjusting the compression amount of the elastic component, so that the source air inlet block and the upper cover, and the upper cover and the side wall of the chamber can be sealed.
Please refer to fig. 5-7. The elastic component comprises an elastic element and a pressure lever 14, and the pressure lever is vertically penetrated and movably arranged in the source air inlet block 13. The lower surface of the pressure lever is contacted with the upper end of the elastic element; and the lower end of the elastic element is in contact with the bottom surface of the groove. By moving the pressure bar up and down in the source inlet block, the pressure applied to the elastic element can be adjusted, and thus the compression amount of the elastic element can be adjusted.
As an alternative embodiment, the pressure rod 14 and the source air inlet block 13 may be in threaded engagement. The elastic element can adopt a spring 15; for example, a compression spring 15 may be employed. The present invention is not limited thereto.
An elastic element limiting groove (spring limiting groove) capable of being matched with the spring 15 can be respectively processed on the lower surface of the pressure rod 14 and the bottom surface of the groove of the chamber side wall 12 so as to prevent the elastic element from moving laterally. Wherein, the depth of the spring limiting groove can be 3-5 mm. The upper end and the lower end of the spring are respectively sleeved in the spring limiting grooves, so that the spring can be effectively limited to move laterally.
Please continue to refer to fig. 5-7. In order to ensure the level of the source air inlet block, a vertical guide mechanism can be arranged between the source air inlet block and the groove. The vertical guide mechanism can adopt the structural forms with the same guide function, such as a pin shaft and a pin hole which are matched with each other, a guide rail and a sliding table which are matched with each other, or a linear bearing and a shaft which are matched with each other. The present invention is not limited thereto. For example, the vertical guide mechanism may include a pair of guide pin holes formed on the bottom surface of the recess and a pair of guide pins 16 correspondingly formed on the lower surface of the source block to be engaged with the guide pin holes. During specific assembly, a guide pin hole can be formed in the bottom surface of the groove; then, a guide bush 17 which can form a sliding fit with the guide pin shaft 16 is inserted into the guide pin hole; and, a guide pin shaft 16 is correspondingly machined or mounted on the lower surface of the source air intake block. And (4) placing the source air inlet block into a groove on the side wall of the cavity, and enabling the guide pin shaft to fall into the guide bush. The guide bush 17 ensures flexibility in moving the guide pin shaft 16 of the source inlet block up and down.
The compression amount of the compression spring 15 can be adjusted by rotating the spring compression rod 14 which is in threaded connection with the source air inlet block 13 by a wrench. And the guide function of a guide pin shaft 16 fixed on the improved source air inlet block 13 and a guide bushing 17 fixed in a pin hole on the bottom surface of the groove of the improved chamber side wall 12 are matched, so that the adjustment of the surface pressure acting on the sealing ring among the source air inlet block 13, the chamber side wall 12 and the upper cover 1 can be realized, and the sealing effect is further changed. During the working process, the length of the guide pin shaft 16 inserted into the guide bush 17 is preferably greater than 1.5 times the diameter of the guide pin shaft.
In addition, an equal-height limiting mechanism can be arranged between the source air inlet block and the groove. For example, the contour limiting mechanism may include a pair of contour limiting screws 18 that are disposed through the source inlet block and a pair of threaded holes that are disposed on the bottom surface of the recess and mate with the contour limiting screws 18. The 2 equal-height limit screws 18 can limit the upper and lower positions of the source air inlet block 13 in a non-working state.
When the air inlet mechanism is used, the spring pressure rod 14 is screwed into the improved source air inlet block 13; at this time, it is necessary to ensure that the spring press rod 14 can move upwards or downwards, and the distance of the up-and-down movement of the press rod relative to the source air inlet block is more than 2 mm. Placing the compression spring 15 into a spring limiting groove located on the bottom surface of the groove of the improved chamber side wall 12; subsequently, the modified source air inlet block 13 is integrally placed in the groove of the modified chamber side wall 12, and it is ensured that 2 guide pin shafts 16 are inserted into the guide bush 17 and the movement is not significantly damped; meanwhile, the upper end of the spring 15 is positioned in the spring limit groove of the spring compression bar 14. Then, 2 of the contour limiting screws 18 are tightened, at which time the upper surface of the source inlet block 13 will be about 2-5mm above the upper surface of the chamber sidewall 12.
When the chamber is in operation (typically below 2Torr), the cover 1 will apply a downward pressure to the source inlet block 13; at this time, the pressure between the two, i.e., the pressure acting on the surface of the seal ring, is generally equal to the elastic force of the spring. When the elastic force is too large, the sealing between the chamber and the upper cover is broken. At this time, the spring pressing rod 14 can be rotated counterclockwise on line by a hexagonal wrench to move upward, so that the compression amount of the compression spring 15 is reduced, and the pressure acting on the surface of the seal ring 6 is reduced. Similarly, when the elastic force is too small, that is, the sealing effect between the source air inlet block and the upper cover is not good, the spring pressure lever 14 can be rotated clockwise, so that the compression amount of the compression spring 15 is increased, the pressure acting on the surface of the sealing ring 6 is increased, and the sealing effect is improved. The compression amount of the spring can be adjusted by utilizing the thread mechanism, and continuous adjustment in a certain range can be realized.
In summary, the invention forms an adjustable elastic sealing structure by arranging the elastic element between the lower surface of the source air inlet block and the bottom surface of the groove of the chamber side wall, and changes the relative position of the source air inlet block relative to the upper cover and the chamber side wall by adjusting the compression amount of the elastic element, so that the pressure on the surface of the sealing ring between the source air inlet block and the upper cover can be adjusted, thereby improving the sealing effect between the source air inlet block and the upper cover, and between the source air inlet block, the upper cover and the chamber side wall, correcting the errors in design, processing and installation among the source air inlet block, the upper cover and the chamber within a certain range, saving the cost, and meanwhile, the mechanism has the capability of online adjustment, and can effectively save the debugging and leakage detection time.
The above description is only for the preferred embodiment of the present invention, and the embodiment is not intended to limit the scope of the present invention, so that all the equivalent structural changes made by using the contents of the description and the drawings of the present invention should be included in the scope of the present invention.
Claims (9)
1. An air inlet mechanism is used for introducing reaction gas into a cavity, and comprises a source air inlet block, wherein the source air inlet block is arranged in a groove above the side wall of the cavity, an upper cover covers the upper surface of the source air inlet block and the upper surface of the side wall of the cavity, at least part of the upper cover covers the source air inlet block and the side wall of the cavity, and sealing rings are adopted between the source air inlet block and the upper cover and between the upper cover and the side wall of the cavity; the elastic assembly comprises an elastic element and a pressing rod, the pressing rod is movably arranged in the source air inlet block, the lower surface of the pressing rod is in contact with the upper end of the elastic element, the lower end of the elastic element is in contact with the bottom surface of the groove, and the pressing rod moves up and down in the source air inlet block to adjust the compression amount of the elastic element.
2. The intake mechanism as claimed in claim 1, wherein the compression rod is in threaded engagement with the source intake block.
3. The intake mechanism as claimed in claim 2, wherein the lower surface of the strut and the bottom surface of the groove are provided with elastic element retaining grooves to prevent the elastic element from moving laterally.
4. An air inlet arrangement according to any one of claims 1 to 3, characterised in that the resilient element is a compression spring.
5. The intake mechanism of claim 4, wherein the strut moves up and down a distance greater than 2mm relative to the source intake block.
6. The intake mechanism of claim 1, wherein a vertical guide mechanism is provided between the source intake block and the recess.
7. The air intake mechanism of claim 6, wherein the vertical guide mechanism is a cooperating pin and pin hole, a cooperating guide rail and ramp, or a cooperating linear bearing and shaft.
8. The air intake mechanism of claim 1, wherein a contour stop is disposed between the source air intake block and the groove.
9. The air intake mechanism of claim 8, wherein the contour limiting mechanism comprises a contour limiting screw inserted into the source air intake block and a screw hole provided on the bottom surface of the groove and matching with the contour limiting screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711187822.5A CN109837527B (en) | 2017-11-24 | 2017-11-24 | Air inlet mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711187822.5A CN109837527B (en) | 2017-11-24 | 2017-11-24 | Air inlet mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109837527A CN109837527A (en) | 2019-06-04 |
| CN109837527B true CN109837527B (en) | 2021-05-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711187822.5A Active CN109837527B (en) | 2017-11-24 | 2017-11-24 | Air inlet mechanism |
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| CN (1) | CN109837527B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111721110B (en) * | 2020-06-24 | 2022-11-25 | 北京北方华创微电子装备有限公司 | Vertical reaction furnace |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6772827B2 (en) * | 2000-01-20 | 2004-08-10 | Applied Materials, Inc. | Suspended gas distribution manifold for plasma chamber |
| JP4342765B2 (en) * | 2002-04-18 | 2009-10-14 | 株式会社日立国際電気 | Substrate processing equipment |
| CN100521074C (en) * | 2006-09-13 | 2009-07-29 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Gas injection device |
| US7922864B2 (en) * | 2007-11-20 | 2011-04-12 | Optisolar, Inc. | Quick-change precursor manifold for large-area CVD and PECVD |
| CN103789750B (en) * | 2014-02-20 | 2015-11-11 | 厦门大学 | Plasma reinforced chemical vapour deposition apparatus |
| CN105088193B (en) * | 2015-09-28 | 2017-11-07 | 湖南红太阳光电科技有限公司 | A kind of reaction chamber and semiconductor processing equipment |
| CN206157228U (en) * | 2016-11-18 | 2017-05-10 | 北京大学 | Multi -functional jumbo size chemical vapor deposition equipment of air inlet mode and pressure adjustable |
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2017
- 2017-11-24 CN CN201711187822.5A patent/CN109837527B/en active Active
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