CN109014785A - A kind of typical case's liner work pieces process technique - Google Patents
A kind of typical case's liner work pieces process technique Download PDFInfo
- Publication number
- CN109014785A CN109014785A CN201810972508.6A CN201810972508A CN109014785A CN 109014785 A CN109014785 A CN 109014785A CN 201810972508 A CN201810972508 A CN 201810972508A CN 109014785 A CN109014785 A CN 109014785A
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- CN
- China
- Prior art keywords
- work pieces
- clamping
- pieces process
- process technique
- boss
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
Abstract
The present invention is a kind of typical liner work pieces process technique, applied to IC equipment manufacturing field and the mechanical manufacturing field of other reaction chamber liner workpiece.The following steps are included: 1) the unilateral surplus 2mm of shape in roughing part；2) false boss is reserved as Auxiliary support, and screw thread and dowel hole are processed on boss；3) frock clamping, precision-machined parts are used；4) vibration knife is avoided using short sword undergauge tool sharpening side wall when finishing.Using zero-point positioning tooling base and side top, shaft tooling, part front and back sides and reserved false boss, technique hole machined are completed, clamping is simple and quick, and position error is small, and it is high in machining efficiency, part processing can be completed in common three axis lathe.Boss, the big face of workpiece and fabrication hole clamping parts are reserved using shaft tooling, increases the supporting surface of part and the clamping rigidity of part, substantially reduces the abnormal risks such as shake knife, the deformation in part processing.
Description
Technical field
This patent belongs to IC equipment and precision parts manufacturing field, more particularly to a kind of typical liner work pieces process work
Skill.Suitable for IC equipment reaction chamber lining parts processing and the processing of other industry thin-walled parts.
Background technique
With electronic integrated circuit, intelligence manufacture fast development and it is universal, for IC equipment demand also increasingly increase
Add.Liner class part in the present invention, because its shape is big, and thin-walled chamber is deep, dimensional accuracy, shape, position precision, rough surface
Degree requirement is high, easily-deformable in processing, it has also become IC equips one of components part more difficult to process.
Summary of the invention
In view of the above problems, the object of the present invention is to provide a kind of processing technologys of lining parts, are suitable for class
High in machining efficiency like the processing of lining parts, part quality is stablized.
The purpose of the present invention is what is be achieved through the following technical solutions:
A kind of typical case's liner work pieces process technique, comprising the following steps:
1) the unilateral surplus 2mm of shape in roughing part；
2) false boss is reserved as Auxiliary support, and screw thread and dowel hole are processed on boss；
3) frock clamping, precision-machined parts are used；
4) vibration knife is avoided using short sword undergauge tool sharpening side wall when finishing.
Part roughing 2mm in step 1) guarantees part wall thickness, prevents allowance for finish insufficient, reinforces part stability.
Because part is housing part in step 2), without clamping position is suitble to, false boss is reserved convenient for finishing clamping, and
As Auxiliary support, increases the supporting surface of part and clamp area, uniform force reduces part deformation.
It in step 3) using 8-M8 bolt shaft workpiece in tooling, and is positioned with 8 pin of 2- Φ, guarantees part positioning accurate
Degree.
Because part wall is thin in step 4), cutter should not use major diameter, and cutting edge roundness wants sharp, reduce cutting force,
And side wall is generally higher, and short sword undergauge cutter is selected to increase cutter rigidity, avoids vibration knife.
The beneficial effects of the present invention are:
1, using zero-point positioning tooling base and side top, shaft tooling, complete part front and back sides and reserved false boss,
Technique hole machined, clamping is simple and quick, and position error is small, high in machining efficiency, and part processing can be completed in common three axis lathe
2, boss, the big face of workpiece and fabrication hole clamping parts are reserved using shaft tooling, increases the supporting surface and zero of part
The clamping rigidity of part substantially reduces the abnormal risks such as shake knife, the deformation in part processing, hence it is evident that improve processing efficiency and processing
Quality, and shaft tool structure is simple, it is easy to operate, it is low to whole locking operating technology requirement, it effectively reduces to behaviour
Make labor claim, can be promoted the use of in like parts.
Detailed description of the invention
Fig. 1 is lining parts structure chart.
Fig. 2 is roughing part front elevation.
Fig. 3 is shaft roughing part reverse side figure.
Fig. 4 is shaft precision-machined parts front schematic view.
Fig. 5 is shaft precision-machined parts schematic rear view.
Specific embodiment
Below with reference to embodiment, the present invention will be described in detail.
Embodiment
1, shown in part as shown in Figure 1, shown by arrow indicates that position wall thickness is 2.67mm, height 105.87, left arc
Diameter 571.5, overall length 854.81
2, tooling, roughing part front single side allowance 2mm (see Fig. 2) are pushed up by zero-point positioning tooling side；Fig. 3 is shaft
Part processes the part back side, and unilateral surplus 2mm prevents allowance for finish insufficient, and reinforces part stability, improves roughing effect
Rate.
3, process part front, see Fig. 4: using on false boss screw hole and location hole by part shaft in tooling
On, guarantee the positioning accuracy of part, then inside workpiece false boss supports, and the profile of part is also real with the big face paste of tooling,
The vibration for reducing part at processing upper surface (plate thickness 2.57mm), part, which is crossed, when preventing from processing cuts damage, guarantees the table of part
Face quality, and reduce the influence of cutting force and clamping force to part deformation amount.
4, process part the back side, see Fig. 5: using on false boss screw hole and location hole by part shaft in tooling
On, guarantee the positioning accuracy of part, then processes the inside and outside wall of part, cutter should not use major diameter, and cutting edge roundness is wanted
It is sharp, reduce cutting force.Side wall is generally higher, and short sword undergauge knife is selected to increase cutter rigidity, and shake knife is avoided (to be also avoided that undergauge
Part scratches finished side wall).Cutter path selection: backing chip-outer wall chip-outer wall chip-backing chip ...
Verticality of side wall is effectively ensured in processing method, and cutting-in increase nor affects on processing quality and precision.
Claims (5)
1. a kind of typical case's liner work pieces process technique, it is characterised in that: the following steps are included:
1) the unilateral surplus 2mm of shape in roughing part；
2) false boss is reserved as Auxiliary support, and screw thread and dowel hole are processed on boss；
3) frock clamping, precision-machined parts are used；
4) vibration knife is avoided using short sword undergauge tool sharpening side wall when finishing.
2. a kind of typical liner work pieces process technique as described in claim 1, it is characterised in that: part roughing in step 1)
2mm guarantees part wall thickness, prevents allowance for finish insufficient, reinforces part stability.
3. a kind of typical liner work pieces process technique as described in claim 1, it is characterised in that: because part is shell in step 2)
Part reserves false boss convenient for finishing clamping, and as Auxiliary support, increases the support of part without clamping position is suitble to
Face and cramping area, uniform force reduce part deformation.
4. a kind of typical liner work pieces process technique as described in claim 1, it is characterised in that: use 8-M8 bolt in step 3)
Shaft workpiece positions in tooling, and with 8 pin of 2- Φ, guarantees part positioning accuracy.
5. a kind of typical liner work pieces process technique as described in claim 1, it is characterised in that: because part wall is thin in step 4),
Cutter should not use major diameter, and cutting edge roundness wants sharp, reduce cutting force, and side wall is generally higher, selects short sword undergauge
Cutter increases cutter rigidity, avoids vibration knife.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810972508.6A CN109014785A (en) | 2018-08-24 | 2018-08-24 | A kind of typical case's liner work pieces process technique |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810972508.6A CN109014785A (en) | 2018-08-24 | 2018-08-24 | A kind of typical case's liner work pieces process technique |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109014785A true CN109014785A (en) | 2018-12-18 |
Family
ID=64628350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810972508.6A Pending CN109014785A (en) | 2018-08-24 | 2018-08-24 | A kind of typical case's liner work pieces process technique |
Country Status (1)
| Country | Link |
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| CN (1) | CN109014785A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110315363A (en) * | 2019-07-10 | 2019-10-11 | 广东长盈精密技术有限公司 | The processing method and clamp assembly of workpiece |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BR9603192A (en) * | 1995-07-27 | 1997-09-09 | Luk Lamellen & Kupplungsbau | Process for fixing a friction element |
| CN104972281A (en) * | 2015-07-15 | 2015-10-14 | 江西洪都航空工业集团有限责任公司 | Machining technology of open structure part |
| CN105081682A (en) * | 2014-05-20 | 2015-11-25 | 哈尔滨飞机工业集团有限责任公司 | Machining process method for complex support parts |
| CN108213868A (en) * | 2017-12-29 | 2018-06-29 | 南京熊猫电子股份有限公司 | A kind of technique of Cutter Body Processing with Machining Center metal foil wall pieces |
-
2018
- 2018-08-24 CN CN201810972508.6A patent/CN109014785A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BR9603192A (en) * | 1995-07-27 | 1997-09-09 | Luk Lamellen & Kupplungsbau | Process for fixing a friction element |
| CN105081682A (en) * | 2014-05-20 | 2015-11-25 | 哈尔滨飞机工业集团有限责任公司 | Machining process method for complex support parts |
| CN104972281A (en) * | 2015-07-15 | 2015-10-14 | 江西洪都航空工业集团有限责任公司 | Machining technology of open structure part |
| CN108213868A (en) * | 2017-12-29 | 2018-06-29 | 南京熊猫电子股份有限公司 | A kind of technique of Cutter Body Processing with Machining Center metal foil wall pieces |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110315363A (en) * | 2019-07-10 | 2019-10-11 | 广东长盈精密技术有限公司 | The processing method and clamp assembly of workpiece |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20181218 |