CN109005492B - MEMS secondary acoustic impedance matching matrix microphone structure and method for monitoring noise of travel environment - Google Patents

MEMS secondary acoustic impedance matching matrix microphone structure and method for monitoring noise of travel environment Download PDF

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Publication number
CN109005492B
CN109005492B CN201810720175.8A CN201810720175A CN109005492B CN 109005492 B CN109005492 B CN 109005492B CN 201810720175 A CN201810720175 A CN 201810720175A CN 109005492 B CN109005492 B CN 109005492B
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liquid
sound
impedance matching
vibration
acoustic impedance
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CN109005492A (en
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戴学军
张玉静
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Shenzhen Xindiedai Technology Co ltd
Huizhou University
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Shenzhen Xindiedai Technology Co ltd
Huizhou University
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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T90/00—Enabling technologies or technologies with a potential or indirect contribution to GHG emissions mitigation

Abstract

The invention provides a traveling environment noise monitoring MEMS secondary acoustic impedance matching matrix microphone structure, which comprises a main cavity body and a liquid cavity which is positioned in the main cavity body and is used for filling liquid, wherein a sound vibrating membrane for sensing sound waves and a vent hole for keeping the balance of the internal and external side pressure of the sound vibrating membrane are arranged on the main cavity body; the liquid chamber is provided with a vibrating diaphragm which is connected with the other end of the connecting rod and is driven to vibrate by the connecting rod when the connecting rod is driven to vibrate by the sound vibrating diaphragm, so that liquid in the liquid chamber vibrates, and a telescopic film which is used for stretching when the liquid vibrates, and the liquid chamber is internally provided with a flexible framework which is used for sensing the liquid vibration in the liquid chamber to generate travelling wave vibration. Compared with the prior art, the microphone structure converts sound waves into vibration of the vibration film, the vibration film vibrates to drive liquid to vibrate, and finally the vibration film is converted into traveling wave vibration of the flexible framework, so that the function of matching acoustic impedance twice is achieved, the frequency response is good, and the distortion is low.

Description

MEMS secondary acoustic impedance matching matrix microphone structure and method for monitoring noise of travel environment
Technical Field
The invention relates to the field of microphones, in particular to a MEMS secondary acoustic impedance matching matrix microphone structure and method for monitoring noise in a travelling environment.
Background
The acoustic-electric transduction of current microphones has the following drawbacks: when sound is transmitted to the sound vibrating membrane, the connecting rod is directly driven to drive the capacitor, the coil or the piezoelectric film, and the sound-electricity transduction is directly carried out, so that the frequency domain response is incomplete, the frequency response depends on a single characteristic material, the change of the sound phase can occur when the MEMS matrix is integrated, and the impedance matching is needed to be carried out later.
MEMS, micro-electromechanical systems (Microelectro Mechanical Systems), are new types of sensors that have been fabricated using microelectronics and micromachining techniques. Compared with the traditional sensor, the sensor has the characteristics of small volume, light weight, low cost, low power consumption, high reliability, suitability for mass production, easy integration and realization of intelligence.
Disclosure of Invention
Aiming at the problems, the invention provides the MEMS secondary acoustic impedance matching matrix microphone structure for monitoring the noise of the travelling environment, which converts sound waves into liquid wave vibration of liquid by using 'gas-liquid' transduction to drive a flexible framework to generate traveling wave vibration, so that a sensor on the flexible framework obtains sound signals, the function of matching the secondary acoustic impedance is completed, the frequency response of the matrix microphone is ensured, and the distortion is less.
The invention adopts the technical scheme that:
a travel environment noise monitoring MEMS secondary acoustic impedance matching matrix microphone structure comprises a main cavity body and a liquid cavity which is arranged in the main cavity body and is used for filling liquid, wherein a sound vibrating membrane for sensing sound waves and a vent hole for keeping the internal and external pressure balance of the sound vibrating membrane are arranged on the main cavity body, and a connecting rod with one end connected with the sound vibrating membrane and used for transmitting sound vibration is also arranged in the main cavity body; the liquid chamber is provided with a vibrating diaphragm which is connected with the other end of the connecting rod and is driven to vibrate by the connecting rod when the connecting rod is driven to vibrate by the sound vibrating diaphragm, so that liquid in the liquid chamber vibrates, and a telescopic film which is used for stretching when the liquid vibrates, the liquid chamber is internally provided with a flexible framework, one end of which is fixed and is used for sensing the liquid in the liquid chamber to vibrate so as to generate travelling wave vibration, and the flexible framework is provided with a matrix sensor for obtaining sound signals.
Preferably, the flexible skeleton divides the liquid chamber into a front chamber and a rear chamber, a liquid passing hole for liquid flowing between the front chamber and the rear chamber is formed between the other end of the flexible skeleton and the side wall of the liquid chamber, the vibrating diaphragm is arranged on the side wall of the front chamber, and the telescopic diaphragm is arranged on the side wall of the rear chamber.
Preferably, the diaphragm, the flexible membrane and one end of the flexible skeleton are all disposed on the same side wall of the liquid chamber.
Preferably, the matrix sensor is a MEMS matrix sensor.
The invention also provides a method for monitoring the noise of the travel environment by utilizing the MEMS secondary acoustic impedance matching matrix microphone structure, which comprises the following steps:
1) The sound wave of the sound is transmitted to a sound vibrating membrane on the main cavity, and the sound vibrating membrane vibrates;
2) The sound vibrating diaphragm transmits the vibration of sound waves to the vibrating diaphragm through the connecting rod, and the vibrating diaphragm vibrates to complete the first sound impedance matching function;
3) The vibrating diaphragm vibrates to drive liquid in the liquid cavity to vibrate, so that the flexible framework generates traveling wave vibration, the matrix sensor on the flexible framework obtains sound signals, and the second sound impedance matching function is completed.
Preferably, in step 3), when the diaphragm is pushed inward, the liquid in the front chamber flows to the rear chamber through the liquid passing hole, and the telescopic film arranged on the rear chamber protrudes outwards; when the vibrating diaphragm is pushed outwards, liquid in the rear chamber flows to the front chamber through the liquid through hole, and the telescopic diaphragm is pushed inwards.
Preferably, the main cavity is provided with a vent hole for keeping the internal and external pressure balance of the sound vibration film.
Compared with the prior art, the invention has the beneficial effects that: the invention provides a travel environment noise monitoring MEMS secondary acoustic impedance matching matrix microphone structure and a method thereof, which are used for converting sound waves into vibrating membranes to vibrate, the vibrating membranes vibrate to drive liquid to vibrate, and finally converting the vibrating membranes into traveling wave vibration of a flexible framework, so that the function of secondary acoustic impedance matching is completed, the frequency response of the matrix microphone is good, the distortion is less, and the existing applications such as voice recognition and background noise distinction can be more operable.
Drawings
Fig. 1 is a schematic diagram of a structure of a travel environment noise monitoring MEMS secondary acoustic impedance matching matrix microphone according to the present invention.
Detailed Description
The preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
Fig. 1 is a schematic diagram of a preferred embodiment of a MEMS secondary acoustic impedance matching matrix microphone structure for monitoring noise in a travel environment according to the present invention. As shown in fig. 1, in the structure of the travelling environmental noise monitoring MEMS secondary acoustic impedance matching matrix microphone, a main cavity 10 and a liquid cavity 20 in the main cavity 10 for filling liquid, wherein a sound vibration membrane 11 for sensing sound waves and a vent hole 12 for keeping balance of the internal and external side pressure of the sound vibration membrane 11 are arranged on the main cavity 10, and a connecting rod 13 with one end connected with the sound vibration membrane 11 for transmitting sound vibration is also arranged in the main cavity 10; the liquid chamber 20 is provided with the vibrating diaphragm 21 which is connected with the other end of the connecting rod 12 and is driven to vibrate by the connecting rod 12 when the connecting rod 12 is driven to vibrate by the sound vibrating diaphragm 11, so that liquid in the liquid chamber 20 vibrates, and the telescopic diaphragm 22 which is used for stretching and contracting when the liquid vibrates, the liquid chamber 20 is internally provided with the flexible framework 23 which is fixed at one end and is used for sensing the liquid vibration in the liquid chamber 20 to generate traveling wave vibration, the flexible framework 23 is provided with the matrix sensor 24 which is used for obtaining sound signals, the sound vibrating diaphragm 11 senses sound waves of the sound to vibrate, the vibration of the sound waves is transmitted to the vibrating diaphragm 21 through the connecting rod 13, the vibrating diaphragm 21 vibrates to drive the liquid in the liquid chamber 20 to vibrate, the liquid vibration drives the telescopic diaphragm 22 to stretch, the flexible framework 23 in the liquid chamber 20 generates traveling wave vibration when the liquid vibration, the matrix sensor 24 on the flexible framework 23 obtains sound signals, thus the sound waves of the sound are converted into the vibrating diaphragm 21 to vibrate, and finally the traveling wave vibration of the flexible framework 23 is converted into the traveling wave vibration of the two times, the sound impedance matching function is completed, the frequency response of the matrix microphone is good, the distortion is ensured, the existing background noise can be identified more effectively, and the operability is achieved. The matrix sensor is a MEMS matrix sensor.
The flexible skeleton 23 divides the liquid cavity 20 into a front chamber 201 and a rear chamber 202, a liquid passing hole 25 for liquid flowing between the front chamber and the rear chamber is formed between the other end of the flexible skeleton 23 and the side wall of the liquid cavity 20, the vibrating membrane 21 is arranged on the side wall of the front chamber 201, the telescopic membrane 22 is arranged on the side wall of the rear chamber 202, when the vibrating membrane 21 advances inwards, the space of the front chamber 201 is reduced, liquid in the front chamber 201 flows to the rear chamber 202 through the liquid passing hole 25, and the telescopic membrane 22 of the rear chamber 202 protrudes outwards to enlarge the space of the rear chamber 202 and accommodate the liquid flowing into the rear chamber 202 from the front chamber 201; when the diaphragm 21 is pushed outward, the space of the front chamber 201 increases, and the liquid in the rear chamber 202 flows to the front chamber 201 through the liquid passage holes 25, and the stretchable film 22 of the rear chamber 202 is pushed inward. As a preferred embodiment, the diaphragm 21, the flexible membrane 22 and one end of the flexible skeleton 23 are all disposed on the same side wall of the liquid chamber 20. The vibrating membrane 21 and the telescopic membrane 22 are fixed on the side wall of the liquid chamber 20 through membrane fixing positions; the acoustic diaphragm 11 is also fixed to the side wall of the body chamber 10 by a diaphragm fixing position.
The invention also provides a method for monitoring the noise of the travel environment by utilizing the MEMS secondary acoustic impedance matching matrix microphone structure, which comprises the following steps:
1) The sound waves of the sound are transmitted to the sound diaphragm 11 on the main cavity 10, and the sound diaphragm 11 vibrates;
2) The sound diaphragm 11 transmits the vibration of sound waves to the diaphragm 21 through the connecting rod 13, and the diaphragm 21 vibrates to complete the first sound impedance matching function;
3) The vibrating diaphragm 21 vibrates to drive the liquid in the liquid cavity 20 to vibrate, so that the flexible skeleton 23 generates traveling wave vibration, and the matrix sensor 24 on the flexible skeleton 23 obtains sound signals to complete the second sound impedance matching function.
In step 3), when the diaphragm 11 is pushed inward, the liquid in the front chamber 201 flows to the rear chamber 202 through the liquid passing hole 25, and the stretchable film 22 provided on the rear chamber 202 is protruded outward; when diaphragm 11 pushes outward, liquid in rear chamber 202 flows through liquid passage 25 to front chamber 201, and stretchable membrane 22 advances inward. The main chamber 10 is provided with a vent hole 12 for balancing the internal and external pressures of the acoustic diaphragm 11.
It is worth noting that, the matrix microphone structure and the method provided by the invention convert sound wave of sound into vibration of the vibration film, the vibration film vibrates to drive liquid to vibrate, and finally the vibration film is converted into traveling wave vibration of the flexible framework to complete the impedance matching function of two sound, then in the MEMS matrix, the same sound source is compared with other microphone matrixes of sound-electricity schemes with the same size, and because the liquid sound transmission is faster than the air, the phase change of the same sound source is smaller in the scheme. In addition, the matrix microphone structure of the invention can perform frequency partition response with less distortion.
In summary, the technical solution of the present invention can fully and effectively achieve the above-mentioned objects, and the structural and functional principles of the present invention have been fully verified in the embodiments, so as to achieve the intended effects and purposes, and various changes or modifications may be made to the embodiments of the present invention without departing from the principles and spirit of the present invention. Accordingly, this invention includes all modifications encompassed within the scope of the invention as described in the claims and any equivalent thereof as would be within the scope of the invention as expressed in the claims.

Claims (6)

1. The MEMS secondary acoustic impedance matching matrix microphone structure for monitoring the noise of the traveling environment is characterized by comprising a main cavity body and a liquid cavity which is arranged in the main cavity body and is used for filling liquid, wherein the main cavity body is provided with a sound vibrating membrane for sensing sound waves and a vent hole for keeping the internal and external side pressure balance of the sound vibrating membrane, and one end of the connecting rod which is connected with the sound vibrating membrane and is used for transmitting sound vibration is also arranged in the main cavity body; the liquid cavity is provided with a vibrating diaphragm which is connected with the other end of the connecting rod and is driven to vibrate by the connecting rod when the connecting rod is driven to vibrate by the sound vibrating diaphragm, so that liquid in the liquid cavity vibrates, and a telescopic film which is used for stretching when the liquid vibrates;
the liquid cavity is divided into a front chamber and a rear chamber by the flexible framework, a liquid passing hole for liquid flowing in the front chamber and the rear chamber is formed between the other end of the flexible framework and the side wall of the liquid cavity, the vibrating diaphragm is arranged on the side wall of the front chamber, and the telescopic diaphragm is arranged on the side wall of the rear chamber.
2. The travel environmental noise monitoring MEMS secondary acoustic impedance matching matrix microphone structure of claim 1, wherein: one end of the vibrating diaphragm, the telescopic diaphragm and the flexible framework are all arranged on the same side wall of the liquid cavity.
3. The travel environmental noise monitoring MEMS secondary acoustic impedance matching matrix microphone structure of claim 1, wherein: the matrix sensor is a MEMS matrix sensor.
4. A method for implementing a structure of a travelling environmental noise monitoring MEMS secondary acoustic impedance matching matrix microphone according to any one of claims 1 to 3, comprising the steps of:
1) The sound wave of the sound is transmitted to a sound vibrating membrane on the main cavity, and the sound vibrating membrane vibrates;
2) The sound vibrating diaphragm transmits the vibration of sound waves to the vibrating diaphragm through the connecting rod, and the vibrating diaphragm vibrates to complete the first sound impedance matching function;
3) The vibrating diaphragm vibrates to drive liquid in the liquid cavity to vibrate, so that the flexible framework generates traveling wave vibration, the matrix sensor on the flexible framework obtains sound signals, and the second sound impedance matching function is completed.
5. The method for realizing the structure of the travel environment noise monitoring MEMS secondary acoustic impedance matching matrix microphone according to claim 4, wherein the method comprises the following steps: in the step 3), when the vibrating membrane pushes inwards, liquid in the front chamber flows to the rear chamber through the liquid passing hole, and the telescopic membrane arranged on the rear chamber protrudes outwards; when the vibrating diaphragm is pushed outwards, liquid in the rear chamber flows to the front chamber through the liquid through hole, and the telescopic diaphragm is pushed inwards.
6. The method for realizing the structure of the travel environment noise monitoring MEMS secondary acoustic impedance matching matrix microphone according to claim 4, wherein the method comprises the following steps: and the main cavity is provided with a vent hole for keeping the balance of the internal pressure and the external pressure of the sound vibrating membrane.
CN201810720175.8A 2018-07-03 2018-07-03 MEMS secondary acoustic impedance matching matrix microphone structure and method for monitoring noise of travel environment Active CN109005492B (en)

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Citations (2)

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Publication number Priority date Publication date Assignee Title
JP2013172232A (en) * 2012-02-20 2013-09-02 Foster Electric Co Ltd Heat-proof speaker
CN103686499A (en) * 2013-11-29 2014-03-26 上海师范大学 Bionic pickup

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DE19960014B4 (en) * 1999-12-13 2004-02-19 Trinkel, Marian, Dipl.-Ing. Device for the determination and characterization of noises produced by chopping food

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013172232A (en) * 2012-02-20 2013-09-02 Foster Electric Co Ltd Heat-proof speaker
CN103686499A (en) * 2013-11-29 2014-03-26 上海师范大学 Bionic pickup

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