CN108769882B - MEMS frequency partition matrix microphone sensor for environmental noise monitoring - Google Patents
MEMS frequency partition matrix microphone sensor for environmental noise monitoring Download PDFInfo
- Publication number
- CN108769882B CN108769882B CN201810716735.2A CN201810716735A CN108769882B CN 108769882 B CN108769882 B CN 108769882B CN 201810716735 A CN201810716735 A CN 201810716735A CN 108769882 B CN108769882 B CN 108769882B
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- flexible substrate
- sound
- sensor
- substrate
- resonance
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- 238000005192 partition Methods 0.000 title claims abstract description 24
- 239000011159 matrix material Substances 0.000 title claims abstract description 19
- 230000007613 environmental effect Effects 0.000 title claims abstract description 13
- 238000012544 monitoring process Methods 0.000 title claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 57
- 239000007788 liquid Substances 0.000 claims abstract description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 14
- 229910052710 silicon Inorganic materials 0.000 claims description 14
- 239000010703 silicon Substances 0.000 claims description 14
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 238000001228 spectrum Methods 0.000 abstract description 8
- 230000009286 beneficial effect Effects 0.000 abstract description 4
- 238000013528 artificial neural network Methods 0.000 abstract description 3
- 230000005236 sound signal Effects 0.000 abstract description 3
- 238000000638 solvent extraction Methods 0.000 abstract 1
- 239000003990 capacitor Substances 0.000 description 2
- 239000002775 capsule Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000026683 transduction Effects 0.000 description 2
- 238000010361 transduction Methods 0.000 description 2
- 230000001680 brushing effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- General Physics & Mathematics (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
- Pressure Sensors (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The invention provides an MEMS frequency partition matrix microphone sensor for monitoring environmental noise, which comprises an end substrate and a flexible substrate, wherein one end of the flexible substrate is connected with the end substrate, sensor envelopes for contacting sound traveling waves in liquid are respectively arranged on two sides of the flexible substrate, and more than two resonance units for converting vibration of the sound traveling waves into electric charges are respectively arranged between two sides of the flexible substrate and the corresponding sensor envelopes. Compared with the prior art, the sensor structure converts sound traveling wave vibration into electric charge by using the resonance unit to the flexible substrate, and the frequency of each sound is reinforced in a partitioning way through the resonance cavities with different characteristic values, so that different sound frequencies are separated in the numbered partition, the sound is subjected to detail spectrum processing, and different characteristic values of the sound frequency are obtained; in addition, the flexible substrate can acquire various sound spectrum characteristic values of sound, and output sound signals with numbers are more beneficial to signal requirements of subsequent neural network algorithm processing.
Description
Technical Field
The invention relates to the field of sensors, in particular to an MEMS frequency partition matrix microphone sensor for monitoring environmental noise.
Background
The existing microphone acoustic-electric transduction technology of the MEMS silicon capacitor has the defects that when sound is transmitted to a vibrating diaphragm, a connecting rod is directly driven to drive the silicon capacitor to directly conduct acoustic-electric transduction, different resonant cavities do not conduct sound frequency brushing and selecting, frequency partition cannot be conducted, and signal distortion is caused.
Disclosure of Invention
In view of the above problems, the present invention provides an MEMS frequency division matrix microphone sensor for environmental noise monitoring, which performs division reinforcement on each frequency in sound, so that different sound frequencies can be separated in numbered divisions, and the sound can be subjected to detailed spectrum processing.
The invention adopts the technical scheme that:
the MEMS frequency partition matrix microphone sensor for monitoring environmental noise comprises an end substrate and a flexible substrate, wherein one end of the flexible substrate is connected with the end substrate, sensor envelopes for contacting sound traveling waves in liquid are respectively arranged on two sides of the flexible substrate, and more than two resonance units for converting vibration of the sound traveling waves into electric charges for the flexible substrate are respectively arranged between two sides of the flexible substrate and the corresponding sensor envelopes.
Preferably, each resonance unit comprises a resonance cavity arranged on the flexible substrate and a connecting rod with one end connected with the sensor envelope and used for transmitting travelling wave vibration, wherein the cavity of the resonance cavity is formed by two partition plates arranged on the flexible substrate, a micro-capacitance silicon back electrode attached to the side face of the flexible substrate and connected with the other end of the connecting rod and used for being driven by the connecting rod to do reciprocating vibration in the resonance cavity so that the micro-capacitance silicon back electrode generates different charges to the micro-capacitance silicon vibrating diaphragm of the flexible substrate.
Preferably, adjacent resonant cells share a single partition.
Preferably, the sensor capsule is fixedly positioned on the end substrate by the capsule.
Preferably, one end of the flexible substrate is vertically disposed on the end substrate.
More preferably, both sensor envelopes are disposed obliquely toward the other end of the flexible substrate.
Compared with the prior art, the invention has the beneficial effects that: the invention provides an MEMS frequency partition matrix microphone sensor for monitoring environmental noise, which converts vibration of sound traveling waves into electric charges by using a resonance unit to be supplied to a flexible substrate, and partition strengthening is carried out on each frequency in sound through resonance cavities with different characteristic values, so that different sound frequencies can be separated in numbered partitions, and the sound is subjected to detail spectrum processing in the sensor to obtain a matrix sensor with different characteristic values of the sound frequency; in addition, the flexible substrate can acquire various sound spectrum characteristic values of sound, and output sound signals with numbers are more beneficial to signal requirements of subsequent neural network algorithm processing.
Drawings
FIG. 1 is a schematic diagram of an MEMS frequency division matrix microphone sensor for environmental noise monitoring;
fig. 2 is a partial enlarged view of a MEMS frequency division matrix microphone sensor for environmental noise monitoring according to the present invention.
Detailed Description
The preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
Fig. 1 to 2 are schematic views showing a preferred embodiment of a MEMS frequency division matrix microphone sensor for complex environmental noise monitoring according to the present invention. As shown in fig. 1 to 2, the MEMS frequency division matrix microphone sensor for environmental noise monitoring includes an end substrate 10 and a flexible substrate 20 with one end connected to the end substrate, two sides of the flexible substrate 20 are respectively provided with a sensor envelope 30 for contacting a sound traveling wave in a liquid, two sides of the flexible substrate 20 are respectively provided with two or more resonance units 40 between the two sides of the flexible substrate 20 and the corresponding sensor envelopes 30 for converting vibration of the sound traveling wave into electric charges and giving the flexible substrate 20, the flexible substrate 20 can acquire various acoustic spectrum characteristic values of sound, and output numbered sound signals, which is more beneficial to signal requirements of subsequent neural network algorithm processing.
As shown in fig. 2, each resonant unit 40 includes a resonant cavity 41 disposed on the flexible substrate 20 and a connecting rod 42 with one end connected to the sensor envelope 30 for transmitting travelling wave vibration, where the cavity of the resonant cavity 41 is formed by two partition plates 411 disposed on the flexible substrate 20, a micro-capacitance silicon back electrode 412 attached to the side surface of the flexible substrate 20, and a micro-capacitance silicon diaphragm 413 connected to the other end of the connecting rod 42 for being driven by the connecting rod 42 to reciprocate in the resonant cavity so that the micro-capacitance silicon back electrode 412 generates different charges to the flexible substrate 20, so that when the sound travelling wave in the liquid is transmitted to the sensor envelope 30, the sensor envelope 30 transmits the travelling wave vibration to the micro-capacitance silicon diaphragm 413 through the connecting rod 42 of each vibration unit 40, thereby causing the micro-capacitance silicon diaphragm 413 to reciprocate in the resonant cavity 41, and the micro-capacitance silicon back electrode 412 generates different charges to the flexible substrate 20 for "sound-energy" conversion. A plurality of partition plates 411 are respectively arranged on two sides of the flexible substrate 20, and the adjacent resonance units 40 on the same side of the flexible substrate 20 share one partition plate 411.
One end of the flexible substrate 20 is vertically disposed on the base substrate 10, and both sensor envelopes 30 are obliquely disposed toward the other end of the flexible substrate 20, so that the resonant cavities 41 of each of the resonant cells 40 are different resonant frequency cavities having different depths and different sizes. It is noted that when the sound traveling wave passes through the sensor envelope 30 and is transmitted, the sound traveling wave sequentially passes through the resonant cavities 41, and the resonant cavities 41 of different frequency bands carry out resonance enhancement on the sound of each specific frequency, so that different sound frequencies can be separated in numbered subareas, the sound can be subjected to detail spectrum processing, and different characteristic values of the sound can be obtained.
Compared with the prior art, the MEMS frequency partition matrix microphone sensor for monitoring the environmental noise provided by the invention has the advantages that the frequency spectrum response of the matrix microphone is enhanced, the frequency partition response is carried out on sound, and partial signal distortion caused by the performance of microphone equipment is avoided.
In summary, the technical solution of the present invention can fully and effectively achieve the above-mentioned objects, and the structural and functional principles of the present invention have been fully verified in the embodiments, so as to achieve the intended effects and purposes, and various changes or modifications may be made to the embodiments of the present invention without departing from the principles and spirit of the present invention. Accordingly, this invention includes all modifications encompassed within the scope of the invention as described in the claims and any equivalent thereof as would be within the scope of the invention as expressed in the claims.
Claims (5)
1. The MEMS frequency partition matrix microphone sensor for monitoring environmental noise is characterized by comprising an end substrate and a flexible substrate, wherein one end of the flexible substrate is connected with the end substrate, sensor envelopes for contacting sound traveling waves in liquid are respectively arranged on two sides of the flexible substrate, and more than two resonance units for converting vibration of the sound traveling waves into electric charges are respectively arranged between two sides of the flexible substrate and the corresponding sensor envelopes;
each resonance unit comprises a resonance cavity arranged on the flexible substrate and a connecting rod, one end of the connecting rod is connected with the sensor envelope and used for transmitting travelling wave vibration, and the cavity of the resonance cavity is formed by two partition plates arranged on the flexible substrate, a micro-capacitance silicon back electrode attached to the side face of the flexible substrate and connected with the other end of the connecting rod and used for being driven by the connecting rod to do reciprocating vibration in the resonance cavity, so that the micro-capacitance silicon back electrode generates different charges to the micro-capacitance silicon vibrating diaphragm of the flexible substrate.
2. The ambient noise monitored MEMS frequency partition matrix microphone sensor of claim 1, wherein: adjacent resonant cells share a single partition.
3. The ambient noise monitored MEMS frequency partition matrix microphone sensor of claim 1, wherein: the sensor coating is fixedly arranged on the end substrate through the coating.
4. The ambient noise monitored MEMS frequency partition matrix microphone sensor of claim 1, wherein: one end of the flexible substrate is vertically arranged on the end substrate.
5. The ambient noise monitored MEMS frequency partition matrix microphone sensor of claim 4, wherein: both sensor envelopes are obliquely arranged towards the other end direction of the flexible substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810716735.2A CN108769882B (en) | 2018-07-03 | 2018-07-03 | MEMS frequency partition matrix microphone sensor for environmental noise monitoring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810716735.2A CN108769882B (en) | 2018-07-03 | 2018-07-03 | MEMS frequency partition matrix microphone sensor for environmental noise monitoring |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108769882A CN108769882A (en) | 2018-11-06 |
| CN108769882B true CN108769882B (en) | 2024-04-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810716735.2A Active CN108769882B (en) | 2018-07-03 | 2018-07-03 | MEMS frequency partition matrix microphone sensor for environmental noise monitoring |
Country Status (1)
| Country | Link |
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| CN (1) | CN108769882B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109831731B (en) * | 2019-02-15 | 2020-08-04 | 杭州嘉楠耘智信息科技有限公司 | Sound source orientation method and device and computer readable storage medium |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1056679A (en) * | 1996-08-08 | 1998-02-24 | Sony Corp | Sound wave detector and sound wave processor |
| US5856722A (en) * | 1996-01-02 | 1999-01-05 | Cornell Research Foundation, Inc. | Microelectromechanics-based frequency signature sensor |
| US9789311B1 (en) * | 2014-11-06 | 2017-10-17 | The United States Of America As Represented By The Secretary Of The Navy | Bionic cochlea with fluid filled tube |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0003556D0 (en) * | 2000-02-16 | 2000-04-05 | Inst Of Nanotechnology | Cochlear implant |
| US8130986B2 (en) * | 2006-01-23 | 2012-03-06 | The Regents Of The University Of Michigan | Trapped fluid microsystems for acoustic sensing |
-
2018
- 2018-07-03 CN CN201810716735.2A patent/CN108769882B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5856722A (en) * | 1996-01-02 | 1999-01-05 | Cornell Research Foundation, Inc. | Microelectromechanics-based frequency signature sensor |
| JPH1056679A (en) * | 1996-08-08 | 1998-02-24 | Sony Corp | Sound wave detector and sound wave processor |
| US9789311B1 (en) * | 2014-11-06 | 2017-10-17 | The United States Of America As Represented By The Secretary Of The Navy | Bionic cochlea with fluid filled tube |
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| CN108769882A (en) | 2018-11-06 |
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