CN108994543B

CN108994543B - Processing technology of IC equipment structural member

Info

Publication number: CN108994543B
Application number: CN201810973131.6A
Authority: CN
Inventors: 褚依辉
Original assignee: Shenyang Fortune Precision Equipment Co Ltd
Current assignee: Shenyang Fortune Precision Equipment Co Ltd
Priority date: 2018-08-24
Filing date: 2018-08-24
Publication date: 2020-06-26
Anticipated expiration: 2038-08-24
Also published as: CN108994543A

Abstract

The invention relates to a processing technology of an IC equipment structural member. The part is a lifting part of an IC equipment part, has a special structure and is a special-shaped part. The material is 304 stainless steel, the main body is a special-shaped steel ring, the front end is small, the rear end is large, the bottom is provided with an inclined plane, and the center is provided with a fine hole. The other end of the inclined plane TIG welds 4 steel claws, requires the steel claw has strict position degree requirement relative to the centre bore, and this part is used for holding up the frame, is a spare part that uses extensively in the wafer process equipment. The invention also discloses a novel process scheme for welding the special-shaped piece.

Description

Processing technology of IC equipment structural member

Technical Field

The invention belongs to the technical field of mechanical manufacturing industry, and discloses a process for manufacturing silicon into wafers by IC equipment through different processes. This component is the key component to achieve wafer transfer in different reaction chambers.

Background

With the rapid development and popularization of electronic integrated circuits, smart manufacturing, the demand for IC equipment is increasing. Countries have also relegated integrated circuit manufacturing to 02 of the 9 major specials for customs and research and development. The parts have the functions of transmission and transmission in wafer manufacturing, and along with the continuous development of the IC equipment industry, the demand for equipment is increased greatly, and the parts also have great market demands

Disclosure of Invention

The invention aims to solve the technical scheme of IC equipment for meeting the requirements of dimensional accuracy and form and position tolerance of welded special-shaped parts.

In order to achieve the purpose, the invention adopts the technical scheme that:

a technology for machining the part of IC equipment includes such steps as linear cutting to obtain the shape of main body and ensuring its internal shape

The size of the hole is the final size, the appearance is the final size, the thickness is left with the allowance of 1mm, and the deformation of the main body is ensured

The amount is minimal;

secondly, processing the shape of the steel claw in a linear cutting mode, processing the welding part of the steel claw and the main body to the position, and reserving 1.5mm allowance for the rest sizes;

thirdly, welding the steel claw on the main body to ensure that the steel claw has 3mm allowance in the linear direction;

fourthly, welding four steel claws on the main body by adopting TIG (tungsten inert gas welding);

fifthly, the steel claws and the whole main body are milled in a numerical control mode, and the bottom inclined plane of the main body is not milled; repairing the inner hole and the shape, and ensuring the position precision requirement in a correction mode;

and a sixth step: linearly cutting a bottom inclined plane;

the seventh step: the bench worker corrects the model, and the requirement of the machining state before finish turning is ensured;

eighth step: the finish machining steel claw of the vertical lathe guarantees the requirements of final size precision and position degree and the requirements of roughness.

The invention has the beneficial effects that:

1. and allowance is reserved before welding, so that deformation after welding is ensured to be within a controllable range.

2. The main body and the steel claw are processed by linear cutting before welding, so that the stress deformation of the 304 steel is minimum, and the reliability of subsequent processing is ensured.

3. And during finish machining of the relative sizes of the main body and the steel claw, the appearance and the inner hole of the main body are finished in a correction mode, so that the requirement on the size and position precision of relevant characteristics in one-time clamping is met.

4. The final inclined plane of the wire cutting can ensure that the deformation of finish machining after welding is minimum.

5. The special lathing tool guarantees the requirement of the final steel claw on dimensional tolerance, and a sizing sequence is reserved before finish lathing, so that the state before lathing can be better guaranteed.

Drawings

Fig. 1 is a top view of an IC component.

Fig. 2 is a cross-sectional view of fig. 1A-a.

Fig. 3 is a schematic view of a turning tool.

Fig. 4 is a perspective view of an IC component.

Detailed Description

The present invention will be described in detail with reference to the accompanying reference numerals.

Referring to fig. 1 to 4, a process for manufacturing an IC device component according to the present invention,

the first step is as follows: the shape of the wire-electrode cutting main body 1 ensures that the size of an inner hole is the final size, the shape is the final size, and the thickness is kept for 1 mm. The deformation of the body 1 is ensured to be minimized.

The second step is that: the shape of the steel claw 2 is processed in a linear cutting mode, the welding part of the steel claw 2 and the main body 1 is processed to be in place, and the allowance of 1.5mm is reserved for the rest sizes.

The third step: and the steel claw 2 is welded on the main body 1, so that the steel claw has 3mm allowance in the linear direction. A fourth step of: TIG welding steel claw 2 (4) and main body 1

The fifth part: and (3) milling all the characteristics of the steel claw 2 and the main body 1 by numerical control except the bottom inclined plane of the main body 1. And (5) repairing the inner hole and the shape, and ensuring the requirement of the relevant position degree in a correction mode.

And a sixth step: wire-electrode cutting bottom bevel

The seventh step: the bench worker corrects the shape and ensures the requirements of the processing state before finish turning

The main body is a thin plate steel structure and is a special-shaped piece, and the size precision of a central hole is high; after the steel claws are TIG welded with the main body, the upper ends of the four steel claws are circumferentially distributed relative to the center of the central hole; and the parallelism and the flatness of the step surface relative to the bottom surface of the main body meet the requirements.

Allowance is reserved before welding of the steel claw, and welding deformation is prevented by overlapping to generate deformation influence on the relative position relation of the whole body.

The main body part 1 is made of plate materials made of 304 stainless steel, and as the main body part needs to be processed into the shape shown in the attached drawing 1, the material removal rate is high, and the deformation is also large, so that the part needs to be subjected to solution heat treatment when being processed, the internal organization structure is stabilized, and the deformation is controllable. Then, the wire is processed into an inner hole and an outer shape by wire cutting, the size of the inner hole is ensured to be the difference of the final finish machining size, and repair allowance is provided for the processing deformation after welding.

The steel claw 2 is also subjected to the solution heat treatment of incoming materials and then is subjected to linear cutting machining forming, so that the deformation is minimum after the allowance is removed.

Welding main part 1 and steel claw 2 need control the welding current volume, welds fast and lapped size control range, and the surplus distribution of relative position when using special welding frock could guarantee that steel claw 2 docks to main part 1 is even, could guarantee in the postweld processing that stress release is even, and the deflection is minimum.

The finish machining characteristics after welding need be processed out with the surplus of steel claw 2 and the center hole center and the appearance of main part 1 in a process, just so can guarantee that once clamping eliminates the influence of repetition error to guarantee that the position between each characteristic is accurate.

Because the numerical control milling processing can release the stress of the workpiece to bring larger deformation, the natural aging treatment is needed after the finish machining, and the stress is released.

As the bottom of the part is provided with a larger inclined surface as shown in the attached drawing 1, the inclined surface needs to be machined and formed by a slow-moving wire cutting machine, so that the minimum characteristic deformation of numerical control milling can be ensured.

The machining and shape correcting process is placed after the inclined plane is machined, so that the requirement of the design size and the form and position tolerance can be met when the size of the figure 3 is accurately machined. This process setup is very critical.

The lathe machining needs to use a special lathe tool, and as shown in fig. 2, because the part is in an inclined surface before machining, the part must be clamped in a reverse hanging positioning mode, namely, the part is positioned in a plane, and the design size requirement is met through the conversion of a size chain.

The process method also aims at explaining how to control deformation of the welding special-shaped part, and if allowance is reserved, the process method aims to enable the part to be machined to move on a curved road less and meet machining requirements more quickly.

Claims

1. A processing technology of IC equipment parts is characterized in that:

firstly, cutting the shape of a main body in a linear mode, ensuring that the size of an inner hole is the final size, the shape is the final size, and the thickness is kept 1mm, so that the deformation of the main body is ensured to be minimum;

fifthly, milling all the steel claws and the main body in a numerical control manner, wherein the bottom inclined plane of the main body is not milled; repairing the inner hole and the shape, and ensuring the position precision requirement in a correction mode;

sixthly, linearly cutting the bottom inclined plane;

seventhly, performing bench worker type correction to ensure the machining state requirement before finish turning;

and eighthly, the finish machining of the steel claw by the vertical lathe guarantees the requirements of final size precision and position precision and the requirement of roughness.

2. The process of claim 1, wherein: the main body is a thin plate steel structure and is a special-shaped piece, and the size precision of a central hole is high; after the steel claws are TIG welded with the main body, the upper ends of the four steel claws are circumferentially distributed relative to the center of the central hole; and the parallelism and the flatness of the step surface relative to the bottom surface of the main body meet the requirements.

3. The process of claim 1, wherein: allowance is reserved before welding of the steel claw, and welding deformation is prevented by overlapping to generate deformation influence on the relative position relation of the whole body.