JPS6071128A - Manufacturing method of wafer laminated type air- cooled wing - Google Patents
Manufacturing method of wafer laminated type air- cooled wingInfo
- Publication number
- JPS6071128A JPS6071128A JP17937883A JP17937883A JPS6071128A JP S6071128 A JPS6071128 A JP S6071128A JP 17937883 A JP17937883 A JP 17937883A JP 17937883 A JP17937883 A JP 17937883A JP S6071128 A JPS6071128 A JP S6071128A
- Authority
- JP
- Japan
- Prior art keywords
- wing
- machining
- air
- shroud
- blade
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
- B23P15/04—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass turbine or like blades from several pieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Turbine Rotor Nozzle Sealing (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、作業性の良好なウェハ積層型空冷翼の製造方
法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a wafer-stacked air-cooled blade with good workability.
従来、ガスタービン用等の空冷翼は、鋳造による一体成
型にて製造さｎていたが、鋳型造型・鋳造作業のみなら
ず、鋳造後の表面平滑化仕上が必要で、作業性の向上を
図ることが困難であった。Conventionally, air-cooled blades for gas turbines, etc. have been manufactured by integral casting, but this requires not only molding and casting work, but also surface smoothing after casting, which improves workability. It was difficult.
そこで、作業性向上のために第１図に示すようなウェハ
積層による空冷翼の製造法が考えらｎるようになった。Therefore, in order to improve workability, a method of manufacturing air-cooled blades by laminating wafers as shown in FIG. 1 has been considered.
第１図において、（Ａ）Ｆｉフォトケミカル加工工程で
、（ａ）でウニノ・素材１の脱脂、洗浄等の前処理を行
った後、（ｂ）で該ウニノ・素材へのレジスト塗布、乾
燥を行い、（Ｃ）で該レジスト層２へ露光し、（ｄ）で
現象、乾燥を行い、（ｅ）でエツチング処理し、（ｆ）
でレジストの除去と、エツチングさｎたウェハの検査を
すｎば、（ｇ）のウニノ・１′が形成さｎる。なお、（
ｇ）中４は冷却空気の噴出孔、６は内部空間を示してい
る。In Figure 1, in (A) the Fi photochemical processing process, in (a) pretreatment such as degreasing and cleaning of the unino material 1 is performed, and then in (b) the resist is applied to the unino material 1 and it is dried. The resist layer 2 is exposed to light in (C), exposed and dried in (d), etched in (e), and etched in (f).
By removing the resist and inspecting the etched wafer, the unit 1' shown in (g) is formed. In addition,(
g) 4 in the middle is a blowout hole for cooling air, and 6 is an internal space.
また、（Ｂ）は上記のフォトケミカル加工工程（〜にて
得らｎたウニノ・１′の拡散接合工程で、（ａ）でウェ
ハ１′を積層整合した後、（ｂ）で真空炉での加圧加熱
により拡散接合する・なお、（ｂ）中の矢印は加圧方向
を、５はシュラウド部材を示しているＯ
更に、（０）は上記の拡散接合工程（Ｂ）で得らｎた拡
散接合体の翼形状加工工程後の状態を示している０
この翼形状加工は、第１図（Ｂ） （１）） Ｋ示す拡
散接合後の積層材をならいフライス盤にて、外周より削
り出すことにより行なわ扛る。しかし、この加工方法に
よると除去加工部分が多く、加工工数が大となる欠点が
ある。また、翼の外表面仕上でも上記フライス加工後、
ならい研削加工を行なうが、冷却空気の噴出孔４が切削
・研削パリの発生により目づまＶを生じる欠点がある。In addition, (B) is the diffusion bonding process of the wafer 1' obtained in the above photochemical processing process (~), and after stacking and aligning the wafer 1' in (a), the process is performed in a vacuum furnace in (b). Diffusion bonding is performed by pressurizing and heating.The arrow in (b) indicates the pressure direction, and 5 indicates the shroud member. Figure 1 (B) (1)) K shows the state of the diffusion bonded body after the blade shape machining process. It is carried out by putting out. However, this processing method has the disadvantage that many parts are removed and the number of processing steps is large. In addition, after the above milling process, the outer surface of the wing is finished.
Although profile grinding is performed, there is a drawback that the cooling air jet holes 4 are clogged V due to the occurrence of cutting/grinding burrs.
本発明は、上記の欠点を排除するためになさｎたもので
、効率的に翼形状の加工及びノクリの出ない仕上けを行
うことのできるウニノ・積層型空冷翼の製造方法を提供
するものである。The present invention has been made in order to eliminate the above-mentioned drawbacks, and provides a method for manufacturing a laminated air-cooled blade that can efficiently process the blade shape and finish it without any blemishes. It is.
すなわち本発明は、ウニノ・積層型空冷翼の製造方法に
おいて、ウェハ素材をフォトケミカル加工法により空冷
翼の内部空間部となる部分及び冷却空気噴出孔となる部
分を加工し、該加工後のウェハ素材な積層し、かつ両端
にシュラウドを積層整合させたものを拡散接合してウニ
ノ・積層型空冷翼素材とし、次いでワイヤカット放電加
工法により該ウニノ・積層型空冷翼素材から翼の内縁お
よび外縁を加工して翼本体を形成後、該加工の残材の１
部または別の材料よシ翼端部のシュラウドを別途形成し
て、前記翼本体と嵌合させて溶融溶接することを特徴と
するウェハ積層型空冷翼の製造方法に関するものでおる
。That is, the present invention provides a method for manufacturing a Unino laminated air-cooled blade, in which a wafer material is processed by a photochemical processing method to form a portion that will become the internal space of the air-cooled blade and a portion that will become the cooling air jet hole, and the wafer after the processing is The materials are laminated and the shrouds are laminated and matched at both ends, which are then diffusion bonded to form the UNINO laminated air-cooled blade material.Then, the inner and outer edges of the blade are made from the UNINO laminated air-cooled blade material using the wire-cut electrical discharge machining method. After processing to form the wing body, 1 of the remaining material from the processing
The present invention relates to a method of manufacturing a wafer-stacked air-cooled blade, characterized in that a shroud at the tip of the blade is separately formed using a different material or a different material, and is fitted with the blade main body and melt-welded.
第２〜４図は本発明方法の一実施態様例を工程順に示す
図である。2 to 4 are diagrams showing an embodiment of the method of the present invention in the order of steps.
第２図は、第１図（Ａ）と同様の方法でフォトケミカル
加工後、第１図（Ｂ）と同様の方法で拡散接訃合しｔ後
の積層材形状を示している。すなわち、積層したウェハ
２１の両端にシュラウド２５ｔ″積層整合させ、拡散接
合してなる空冷翼素材１００ｔ−示している。シュラウ
ド２５には位置決め穴２３が貫通加工さｎている。FIG. 2 shows the shape of the laminated material after photochemical processing in the same manner as in FIG. 1(A) and diffusion bonding in the same manner as in FIG. 1(B). That is, an air-cooled blade material 100t is shown in which shrouds 25t'' are laminated and aligned on both ends of stacked wafers 21 and diffusion bonded. Positioning holes 23 are machined through the shroud 25.
第２図に示した空冷翼素材１００を、翼の内縁は位置決
め穴２３よりワイヤカット放電加工（以下、ワイヤカッ
トＥＤＭと称す）用の電極を通して、翼の外縁は空冷翼
素材１００の外周より、ワイヤカットＫＤＭにより翼の
プロフィール加工を行なったものを第３図に示す。冷却
空気の噴出孔２４は、前記した従来の加工法（切削・研
削）とは異なって目づまりのないものが得らｎる。なお
、第３図中、２６は内部空間を示している。The air-cooled blade material 100 shown in FIG. Figure 3 shows a blade profile processed using wire cut KDM. Unlike the conventional processing methods (cutting and grinding) described above, the cooling air jet holes 24 can be formed without clogging. In addition, in FIG. 3, 26 indicates an internal space.
第４図はワイヤカットＫＤＭによって得らｎた翼本体に
別途機械加工により得らｎるシュラウド２５′を嵌合し
、溶融溶接等の方法により溶接２７さｎて一体型に製造
さｎたウニノ・積層型空冷翼１０１を示している。Figure 4 shows a wing body obtained by wire-cutting KDM, fitted with a shroud 25' obtained by machining separately, and then welded 27 by a method such as fusion welding to produce an integral unit. - A stacked air-cooled blade 101 is shown.
以上詳述したように本発明方法によｎば、ワイヤカッ）
ＦｉＤＭとＴＩＧ等の溶接の組合せにより、従来一体型
の削り出し加工法の不具合でおった翼表面の冷却空気噴
出孔の目づまりを防止し、加工精度の向上を得ることが
できる。As detailed above, according to the method of the present invention, wire cutter)
By combining FiDM and welding such as TIG, it is possible to prevent clogging of the cooling air jet holes on the blade surface, which was a problem with conventional integrated machining methods, and improve processing accuracy.
また、省資源的見地から第２図の空冷翼素材１００から
第３図の翼本体１０１を加工した残りの抜は型の両端部
の板材を利用して、第４図に示すシェラウド２５′ヲ形
成することもできる。In addition, from the viewpoint of resource saving, the shroud 25' shown in FIG. 4 was made by using the remaining plate material at both ends of the mold after processing the air-cooled blade material 100 shown in FIG. 2 into the blade body 101 shown in FIG. 3. It can also be formed.
さらに、抜は型の残部より、拡散接合の品質を調査する
為の各種試験片を採取し、性能評価することができる等
、種々の効果を奏することができる。Furthermore, various effects can be achieved by punching, such as being able to take various test pieces from the remaining part of the mold to investigate the quality of diffusion bonding and evaluate the performance.
第１図（Ａ）〜（０）は従来者えらｎていたウニノ・積
層型空冷翼の製造方法を説明するための図、第２〜４図
は本発明方法の一実施態様例を示す図である。
第１図
（Ａ）
（ａ）−−−−−（１））−−−−−（Ｃ）−血）（８
）
（α）（ｂ）
（Ｃ）Figures 1 (A) to (0) are diagrams for explaining the manufacturing method of the Unino laminated air-cooled blade, which was preferred by the prior art, and Figures 2 to 4 are diagrams showing an example of an embodiment of the method of the present invention. It is. Figure 1 (A) (a)------(1))------(C)-Blood)(8
) (α) (b) (C)
Claims (1)
フォトケミカル加工法により空冷翼の内部空間部となる
部分及び冷却空気噴出孔となる部分を加工し、該加工後
のウニノ・素材を積層し、かつ両端にシュラウドを積層
整合妊せたものを拡散接合してウェハ積層型空冷翼素材
とし、次いでワイヤカット放電加工法により該ウェハ積
層型空冷翼素材から翼の内縁および外縁を加工して具本
体を形成後、該加工の残材の１部または別の材料により
翼端部のシュラウドを別途形成して、前記具本体と嵌合
させて溶融溶接することを特徴とするウェハ積層型空冷
翼の製造方法。In a method for manufacturing a wafer stacked air-cooled blade, a wafer material is processed by a photochemical processing method to form a portion that will become the internal space of the air-cooled blade and a portion that will become a cooling air ejection hole, and the unino material after the processing is laminated, Then, shrouds are laminated and aligned at both ends and diffusion bonded to form a wafer laminated air-cooled blade material.Then, the inner and outer edges of the blade are machined from the wafer laminated air-cooled blade material using wire cut electrical discharge machining to form the main body. After forming, a shroud of the blade tip is separately formed using a part of the leftover material from the processing or another material, and the shroud is fitted with the main body and melt-welded. Production method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17937883A JPS6071128A (en) | 1983-09-29 | 1983-09-29 | Manufacturing method of wafer laminated type air- cooled wing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17937883A JPS6071128A (en) | 1983-09-29 | 1983-09-29 | Manufacturing method of wafer laminated type air- cooled wing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6071128A true JPS6071128A (en) | 1985-04-23 |
| JPS6161933B2 JPS6161933B2 (en) | 1986-12-27 |
Family
ID=16064808
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17937883A Granted JPS6071128A (en) | 1983-09-29 | 1983-09-29 | Manufacturing method of wafer laminated type air- cooled wing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6071128A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2007032114A1 (en) * | 2005-09-15 | 2009-03-19 | 三菱電機株式会社 | Wire electric discharge machining apparatus and wire electric discharge machining method |
| CN103801912A (en) * | 2014-02-26 | 2014-05-21 | 上海电气电站设备有限公司 | Method for machining gas compressor fixed blade ring of gas turbine |
| CN108788648A (en) * | 2018-06-25 | 2018-11-13 | 歌尔股份有限公司 | Processing method, jig and the lathe of jig |
| CN108994543A (en) * | 2018-08-24 | 2018-12-14 | 沈阳富创精密设备有限公司 | A kind of processing technology of IC equipment configuration part |
-
1983
- 1983-09-29 JP JP17937883A patent/JPS6071128A/en active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2007032114A1 (en) * | 2005-09-15 | 2009-03-19 | 三菱電機株式会社 | Wire electric discharge machining apparatus and wire electric discharge machining method |
| JP5037941B2 (en) * | 2005-09-15 | 2012-10-03 | 三菱電機株式会社 | Wire electric discharge machining apparatus and wire electric discharge machining method |
| CN103801912A (en) * | 2014-02-26 | 2014-05-21 | 上海电气电站设备有限公司 | Method for machining gas compressor fixed blade ring of gas turbine |
| CN108788648A (en) * | 2018-06-25 | 2018-11-13 | 歌尔股份有限公司 | Processing method, jig and the lathe of jig |
| CN108994543A (en) * | 2018-08-24 | 2018-12-14 | 沈阳富创精密设备有限公司 | A kind of processing technology of IC equipment configuration part |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6161933B2 (en) | 1986-12-27 |
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