JPS6161933B2 - - Google Patents
Info
- Publication number
- JPS6161933B2 JPS6161933B2 JP17937883A JP17937883A JPS6161933B2 JP S6161933 B2 JPS6161933 B2 JP S6161933B2 JP 17937883 A JP17937883 A JP 17937883A JP 17937883 A JP17937883 A JP 17937883A JP S6161933 B2 JPS6161933 B2 JP S6161933B2
- Authority
- JP
- Japan
- Prior art keywords
- blade
- wafer
- air
- cooled
- stacked
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 17
- 238000009792 diffusion process Methods 0.000 claims description 10
- 238000001816 cooling Methods 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 238000003754 machining Methods 0.000 claims description 4
- 238000003672 processing method Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 14
- 238000005266 casting Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000000227 grinding Methods 0.000 description 3
- 238000009760 electrical discharge machining Methods 0.000 description 2
- 239000002648 laminated material Substances 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000009763 wire-cut EDM Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
- B23P15/04—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass turbine or like blades from several pieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
Description
【発明の詳細な説明】
本発明は、作業性の良好なウエハ積層型空冷翼
の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a wafer stacked air-cooled blade with good workability.
従来、ガスタービン用等の空冷翼は、鋳造によ
る一体成型にて製造されていたが、鋳型造型、鋳
造作業のみならず、鋳造後の表面平滑化仕上が必
要で、作業性の向上を図ることが困難であつた。 Conventionally, air-cooled blades for gas turbines and the like have been manufactured by integral casting, but in addition to molding and casting work, it is necessary to smoothen the surface after casting, which improves workability. was difficult.
そこで、作業性向上のために第１図に示すよう
なウエハ積層による空冷翼の製造法が考えられる
ようになつた。 Therefore, in order to improve workability, a method of manufacturing air-cooled blades by stacking wafers as shown in FIG. 1 has been considered.
第１図において、Ａはフオトケミカル加工工程
で、ａでウエハ素材１の脱脂、洗浄等の前処理を
行つた後、ｂで該ウエハ素材へのレジスト塗布、
乾燥を行い、ｃで該レジスト層２へ露光し、ｄで
現象、乾燥を行い、ｅでエツチング処理し、ｆで
レジストの除去と、エツチングされたウエハの検
査をすれば、ｇのウエハ１′が形成される。な
お、ｇ中４は冷却空気の噴出孔、６は内部空間を
示している。 In FIG. 1, A is a photochemical processing step, in which the wafer material 1 is pretreated such as degreasing and cleaning in step a, and then resist is applied to the wafer material in step b.
Drying is performed, the resist layer 2 is exposed to light in c, d is exposed and dried, etching is performed in e, the resist is removed in f, and the etched wafer is inspected. is formed. In addition, 4 in g indicates an ejection hole for cooling air, and 6 indicates an internal space.
また、Ｂは上記のフオトケミカル加工工程Ａに
て得られたウエハ１′の拡散接合工程で、ａでウ
エハ１′を積層整合した後、ｂで真空炉での加圧
加熱により拡散接合する。なお、ｂ中の矢印は加
圧方向を、５はシユラウド部材を示している。 Further, B is a diffusion bonding step for the wafer 1' obtained in the photochemical processing step A, in which the wafers 1' are laminated and aligned in a, and then diffusion bonded by pressure heating in a vacuum furnace in b. Note that the arrow in b indicates the pressurizing direction, and 5 indicates the shroud member.
更に、ｃは上記の拡散接合工程Ｂで得られた拡
散接合体の翼形状加工工程後の状態を示してい
る。 Furthermore, c shows the state of the diffusion bonded body obtained in the above-mentioned diffusion bonding process B after the blade shape processing process.
この翼形状加工は、第１図Ｂ，ｂに示す拡散接
合後の積層材をならいフライス盤にて、外周より
削り出すことにより行なわれる。しかし、この加
工方法によると除去加工部分が多く、加工工数が
大となる欠点がある。また、翼の外表面仕上でも
上記フライス加工後、ならい研削加工を行なう
が、冷却空気の噴出孔４が切削・研削バリの発生
により目づまりを生じる欠点がある。 This blade shape processing is performed by cutting out the outer periphery of the laminated material after diffusion bonding shown in FIGS. 1B and 1B using a milling machine. However, this processing method has the disadvantage that many parts are removed and the number of processing steps is large. Furthermore, profile grinding is performed to finish the outer surface of the blade after the above-mentioned milling process, but there is a drawback that the cooling air jet holes 4 become clogged due to the generation of cutting/grinding burrs.
本発明は、上記の欠点を排除するためになされ
たもので、効率的に翼形状の加工及びバリの出な
い仕上げを行うことのできるウエハ積層型空冷翼
の製造方法を提供するものである。 The present invention has been made in order to eliminate the above-mentioned drawbacks, and provides a method for manufacturing a wafer-stacked air-cooled blade that can efficiently process the blade shape and finish it without producing burrs.
すなわち本発明は、ウエハ積層型空冷翼の製造
方法において、ウエハ素材をフオトケミカル加工
法により空冷翼の内部空間部となる部分及び冷却
空気噴出孔となる部分を加工し、該加工後のウエ
ハ素材を積層し、かつ両端にシユラウドを積層整
合させたものを拡散接合してウエハ積層型空冷翼
素材とし、次いでワイヤカツト放電加工法により
該ウエハ積層型空冷翼素材から翼の内縁および外
縁を加工して翼本体を形成後、該加工の残材の１
部または別の材料より翼端部のシユラウドを別途
形成して、前記翼本体と嵌合させて溶融溶接する
ことを特徴とするウエハ積層型空冷翼の製造方法
に関するものである。 That is, the present invention provides a method for manufacturing a wafer stacked air-cooled blade, in which a portion of a wafer material that will become the internal space of the air-cooled blade and a portion that will become the cooling air jet hole is processed by a photochemical processing method, and the wafer material after the processing is processed. A wafer-stacked air-cooled blade material is obtained by diffusion bonding the shrouds laminated and aligned at both ends, and then the inner and outer edges of the blade are machined from the wafer-stacked air-cooled blade material using a wire cut electrical discharge machining method. After forming the wing body, 1 of the remaining material from the processing
The present invention relates to a method for manufacturing a wafer-stacked air-cooled blade, characterized in that a shroud for a blade tip is separately formed from a wafer or another material, and is fitted to the blade body and melt-welded.
第２〜４図は本発明方法の一実施態様例を工程
順に示す図である。 2 to 4 are diagrams showing an embodiment of the method of the present invention in the order of steps.
第２図は、第１図Ａと同様の方法でフオトケミ
カル加工後、第１図Ｂと同様の方法で拡散接合し
た後の積層材形状を示している。すなわち、積層
したウエハ２１の両端にシユラウド２５を積層整
合させ、拡散接合してなる空冷翼素材１００を示
している。シユラウド２５には位置決め穴２３が
貫通加工されている。 FIG. 2 shows the shape of the laminated material after photochemical processing in the same manner as in FIG. 1A and diffusion bonding in the same manner as in FIG. 1B. That is, an air-cooled blade material 100 is shown in which shrouds 25 are stacked and aligned on both ends of stacked wafers 21 and diffusion bonded. A positioning hole 23 is formed through the shroud 25.
第２図に示した空冷翼素材１００を、翼の内縁
は位置決め穴２３よりワイヤカツト放電加工（以
下、ワイヤカツトEDMと称す）用の電極を通し
て、翼の外縁は空冷翼素材１００の外周より、ワ
イヤカツトEDMにより翼のプロフイール加工を
行なつたものを第３図に示す。冷却空気の噴出孔
２４は、前記した従来の加工法（切削・研削）と
は異なつて目づまりのないものが得られる。な
お、第３図中、２６は内部空間を示している。 The air-cooled blade material 100 shown in FIG. Figure 3 shows the blade profile processed using the above method. Unlike the conventional processing methods (cutting and grinding) described above, the cooling air jet holes 24 can be formed without clogging. In addition, in FIG. 3, 26 indicates an internal space.
第４図はワイヤカツトEDMによつて得られた
翼本体に別途機械加工により得られるシユラウド
２５′を嵌合し、溶融溶接等の方法により溶接２
７されて一体型に製造されたウエハ積層型空冷翼
１０１を示している。 Figure 4 shows that a shroud 25' obtained by separate machining is fitted to the blade body obtained by wire cut EDM, and the shroud 25' is welded by a method such as fusion welding.
Wafer stacked air cooling blade manufactured in one piece
101 is shown.
以上詳述したように本発明方法によれば、ワイ
ヤカツトEDMとTIG等の溶接の組合せにより、
従来一体型の削り出し加工法の不具合であつた翼
表面の冷却空気噴出孔の目づまりを防止し、加工
精度の向上を得ることができる。 As detailed above, according to the method of the present invention, by combining wire cut EDM and welding such as TIG,
It is possible to prevent clogging of the cooling air jet holes on the blade surface, which was a problem with conventional integrated machining methods, and improve machining accuracy.
また、省資源的見地から第２図の空冷翼素材１
００から第３図の翼本体１０１を加工した残りの
抜け型の両端部の板材を利用して、第４図に示す
シユラウド２５′を形成することもできる。さら
に、抜け型の残部より、拡散接合の品質を調査す
る為の各種試験片を採取し、性能評価することが
できる等、種々の効果を奏することができる。 In addition, from the viewpoint of resource saving, air cooling blade material 1 shown in Figure 2
It is also possible to form the shroud 25' shown in FIG. 4 by using the plate materials at both ends of the remaining die after processing the blade body 101 shown in FIG. 3 from 00. Furthermore, various effects can be achieved, such as being able to collect various test pieces for investigating the quality of diffusion bonding from the remaining part of the mold and evaluating the performance.
第１図Ａ〜Ｃは従来考えられていたウエハ積層
型空冷翼の製造方法を説明するための図、第２〜
４図は本発明方法の一実施態様例を示す図であ
る。
Figures 1A to 1C are diagrams for explaining the conventional method of manufacturing wafer stacked air-cooled blades, and Figures 2 to
FIG. 4 is a diagram showing an embodiment of the method of the present invention.
Claims (1)
エハ素材をフオトケミカル加工法により空冷翼の
内部空間部となる部分及び冷却空気噴出孔となる
部分を加工し、該加工後のウエハ素材を積層し、
かつ両端にシユラウドを積層整合させたものを拡
散接合してウエハ積層型空冷翼素材とし、次いで
ワイヤカツト放電加工法により該ウエハ積層型空
冷翼素材から翼の内縁および外縁を加工して翼本
体を形成後、該加工の残材の１部または別の材料
により翼端部のシユラウドを別途形成して、前記
翼本体と嵌合させて溶融溶接することを特徴とす
るウエハ積層型空冷翼の製造方法。1. In a method for manufacturing a wafer stacked air-cooled blade, a portion of the wafer material that will become the internal space of the air-cooled blade and a portion that will become the cooling air jet hole are processed using a photochemical processing method, and the processed wafer materials are stacked,
Then, shrouds are laminated and matched at both ends, which are then diffusion bonded to form a wafer laminated air-cooled blade material, and then the inner and outer edges of the blade are processed from the wafer laminated air-cooled blade material using a wire cut electric discharge machining method to form a blade body. A method for manufacturing a wafer-stacked air-cooled blade, characterized in that: after that, a shroud for the blade tip is separately formed from a part of the leftover material from the processing or another material, and the shroud is fitted to the blade body and melt-welded. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17937883A JPS6071128A (en) | 1983-09-29 | 1983-09-29 | Manufacturing method of wafer laminated type air- cooled wing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17937883A JPS6071128A (en) | 1983-09-29 | 1983-09-29 | Manufacturing method of wafer laminated type air- cooled wing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6071128A JPS6071128A (en) | 1985-04-23 |
| JPS6161933B2 true JPS6161933B2 (en) | 1986-12-27 |
Family
ID=16064808
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17937883A Granted JPS6071128A (en) | 1983-09-29 | 1983-09-29 | Manufacturing method of wafer laminated type air- cooled wing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6071128A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007032114A1 (en) * | 2005-09-15 | 2007-03-22 | Mitsubishi Denki Kabushiki Kaisha | Wire electric discharge machining apparatus and wire electric discharge machining method |
| CN103801912B (en) * | 2014-02-26 | 2016-06-22 | 上海电气电站设备有限公司 | The processing method of stator ring of air compressor of gas steam turine |
| CN108788648B (en) * | 2018-06-25 | 2020-01-14 | 歌尔股份有限公司 | Processing method of jig, jig and lathe |
| CN108994543B (en) * | 2018-08-24 | 2020-06-26 | 沈阳富创精密设备有限公司 | Processing technology of IC equipment structural member |
-
1983
- 1983-09-29 JP JP17937883A patent/JPS6071128A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6071128A (en) | 1985-04-23 |
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