CN108942636A - It is a kind of for producing the autogenous mill of GaAs - Google Patents
It is a kind of for producing the autogenous mill of GaAs Download PDFInfo
- Publication number
- CN108942636A CN108942636A CN201810697062.0A CN201810697062A CN108942636A CN 108942636 A CN108942636 A CN 108942636A CN 201810697062 A CN201810697062 A CN 201810697062A CN 108942636 A CN108942636 A CN 108942636A
- Authority
- CN
- China
- Prior art keywords
- cylinder
- guide rod
- pedestal
- piston
- guide rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/02—Frames; Beds; Carriages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/02—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables
- B24B47/04—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables by mechanical gearing only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/02—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables
- B24B47/06—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables by liquid or gas pressure only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/14—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by liquid or gas pressure
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
The invention discloses a kind of for producing the autogenous mill of GaAs, main contents are as follows: the electric cylinders are mounted on the base, bottom plate is mounted in electric cylinders and mounting blocks, first guide rod cylinder is mounted on bottom plate, third guide rod cylinder is mounted on the piston-rod end of the first guide rod cylinder by the second connecting plate, grinding head mounting base is mounted on the piston-rod end of third guide rod cylinder by the first connecting plate, rotary cylinder is installed on the base, clamping jaw is mounted on rotary cylinder, lifting cylinder is mounted on the back side of track base, slide is mounted on the second sliding block and slide is mounted on the piston-rod end of lifting cylinder by floating clamp, left telescopic cylinder is mounted on left mounting plate, right telescopic cylinder is mounted on right mounting plate.The configuration of the present invention is simple, high degree of automation, grinding quality is reliable and stable and grinding efficiency is high, meanwhile, greatly reduce the labor intensity of operator.
Description
Technical field
The invention belongs to a kind of grinder technical fields, and in particular to a kind of for producing the autogenous mill of GaAs.
Background technique
Grinding is to carry out micro processing, available very high dimensional accuracy and shape to workpiece using lap tool and free abrasive
Position precision.In existing grinder, most of to use manual operation, the degree of automation is low, and grinding quality is of poor quality and reliability
Difference has greatly reinforced the labor intensity of operator, greatly reduces working efficiency, while also reducing the processing essence of workpiece
Degree.
Summary of the invention
It is a kind of for producing arsenic the technical problem to be solved by the present invention is to provide in view of the above shortcomings of the prior art
The autogenous mill of gallium, structure is simple, high degree of automation, and grinding quality is reliable and stable and grinding efficiency is high, meanwhile, significantly
Reduce the labor intensity of operator.
To realize the above-mentioned technical purpose, the technical scheme adopted by the invention is as follows:
It is a kind of for producing the autogenous mill of GaAs, in which: including electric cylinders, pedestal, first straight line guide rail, support,
First guide rod cylinder, grinding head, clamping jaw, left collet, left telescopic cylinder, mounting base, left mounting plate, slide, link block, second
Guide rod cylinder, the second sliding block, right mounting plate, right telescopic cylinder, right collet, pedestal, second straight line guide rail, track base, rotation
Cylinder, the first connecting plate, the second connecting plate, third guide rod cylinder, floating clamp, lifting cylinder, grinding head mounting base, bottom
Plate, the first sliding block and mounting blocks, the first straight line guide rail are fixedly mounted on pedestal, and first sliding block is mounted on
In one linear guide, the mounting blocks are fixedly mounted on the first sliding block, and the electric cylinders are mounted on the base, the bottom
Plate is mounted in electric cylinders and mounting blocks, and the first guide rod cylinder is fixedly mounted on bottom plate, the third guide rod
Cylinder is mounted on the piston-rod end of the first guide rod cylinder by the second connecting plate, and the grinding head mounting base passes through first
Connecting plate is mounted on the piston-rod end of third guide rod cylinder, and the grinding head is mounted in grinding head mounting base, described
Pedestal be fixedly mounted on the top surface of pedestal, on the base, the clamping jaw is mounted on rotation for the described rotary cylinder installation
On cylinder, the support is mounted on the top surface of pedestal, and the lifting cylinder is fixedly mounted on the back side of track base, institute
The second straight line guide rail stated is mounted on the front of track base, and second sliding block is mounted on second straight line guide rail, described
Slide be mounted on the second sliding block and slide is mounted on the piston-rod end of lifting cylinder by floating clamp, described second
Guide rod cylinder is mounted on slide, and the link block is mounted on the second guide rod cylinder, and the mounting base is mounted on
The piston-rod end of second guide rod cylinder, the left mounting plate and right mounting plate are fixedly arranged in mounting base, described
Left telescopic cylinder be mounted on left mounting plate, the left collet is mounted on the piston-rod end of left telescopic cylinder, described
Right telescopic cylinder is mounted on right mounting plate, and the right collet is mounted on the piston-rod end of right telescopic cylinder.
To optimize above-mentioned technical proposal, the concrete measure taken further include:
Limited block is fitted with close to top and bottom end on the front of above-mentioned track base.
Above-mentioned electric cylinders are parallel with first straight line guide rail.
Above-mentioned left telescopic cylinder and right telescopic cylinder all use guide rod cylinder.
For the present invention by workpiece one end clamping on clamping jaw, the workpiece other end installs drive of the grinding head in electric cylinders on the support
It can be moved left and right under dynamic along first straight line guide rail, grinding head may be implemented on front-rear direction by the driving of the first guide rod cylinder
Feed motion, feed motion in up and down direction may be implemented under the driving of third guide rod cylinder in simultaneous grinding head；Workpiece
Rotary motion is realized by rotary cylinder, while workpiece is realized by clamping jaw and clamps and unclamp；Workpiece feeding by left collet and
Right collet is fixed, left collet by left telescopic cylinder realize clamp and unclamp, right collet by right telescopic cylinder realize clamp and
It unclamps, moving forward and backward through the second guide rod cylinder for workpiece feeding realizes that in addition the up and down motion of workpiece passes through lifting air
Cylinder drives slide to realize along second straight line guide rail and moves up and down.
The advantage of the invention is that the following: structure is simple, high degree of automation, and grinding quality is reliable and stable and grinds
It is high-efficient, meanwhile, greatly reduce the labor intensity of operator.
Detailed description of the invention
Fig. 1 is structure top view of the invention；
Fig. 2 is the structure left view of the invention；
Fig. 3 is structure right view of the invention.
Appended drawing reference therein are as follows: electric cylinders 1, pedestal 2, first straight line guide rail 3, support 4, the first guide rod cylinder 5, grinding
First 6, clamping jaw 7, left collet 8, left telescopic cylinder 9, mounting base 10, left mounting plate 11, slide 12, link block 13, the second guide rod
Cylinder 14, the second sliding block 15, right mounting plate 16, right telescopic cylinder 17, right collet 18, pedestal 19, second straight line guide rail 20, guide rail
Seat 21, rotary cylinder 22, the first connecting plate 23, the second connecting plate 24, third guide rod cylinder 25, floating clamp 26, lifting air
Cylinder 27, grinding head mounting base 28, bottom plate 29, the first sliding block 30, mounting blocks 31.
Specific embodiment
A specific embodiment of the invention is further illustrated with reference to the accompanying drawing:
It is a kind of for producing the autogenous mill of GaAs, in which: including electric cylinders 1, pedestal 2, first straight line guide rail 3, branch
The 4, first guide rod cylinder 5 of seat, clamping jaw 7, left collet 8, left telescopic cylinder 9, mounting base 10, left mounting plate 11, is slided grinding head 6
Seat 12, link block 13, the second guide rod cylinder 14, the second sliding block 15, right mounting plate 16, right telescopic cylinder 17, right collet 18, base
Seat 19, second straight line guide rail 20, track base 21, rotary cylinder 22, the first connecting plate 23, the second connecting plate 24, third guide rod
Cylinder 25, floating clamp 26, lifting cylinder 27, grinding head mounting base 28, bottom plate 29, the first sliding block 30 and mounting blocks 31, it is described
First straight line guide rail 3 be fixedly mounted on pedestal 2, first sliding block 30 is mounted on first straight line guide rail 3, described
Mounting blocks 31 are fixedly mounted on the first sliding block 30, and the electric cylinders 1 are mounted on pedestal 2, and the bottom plate 29 is mounted on electricity
On cylinder 1 and mounting blocks 31, the first guide rod cylinder 5 is fixedly mounted on bottom plate 29, the third guide rod cylinder
25 are mounted on the piston-rod end of the first guide rod cylinder 5 by the second connecting plate 24, and the grinding head mounting base 28 passes through
First connecting plate 23 is mounted on the piston-rod end of third guide rod cylinder 25, and the grinding head 6 is mounted on grinding head installation
On seat 28, the pedestal 19 is fixedly mounted on the top surface of pedestal 2, and the rotary cylinder 22 is mounted on pedestal 19, institute
The clamping jaw 7 stated is mounted on rotary cylinder 22, and the support 4 is mounted on the top surface of pedestal 2, and the lifting cylinder 27 is solid
On the back side of track base 21, the second straight line guide rail 20 is mounted on the front of track base 21 for Dingan County, and described the
Two sliding blocks 15 are mounted on second straight line guide rail 20, and the slide 12 is mounted on the second sliding block 15 and slide 12 passes through floating
Collet 26 is mounted on the piston-rod end of lifting cylinder 27, and the second guide rod cylinder 14 is mounted on slide 12, described
Link block 13 be mounted on the second guide rod cylinder 14, the mounting base 10 is mounted on the piston of the second guide rod cylinder 14
Bar end, the left mounting plate 11 and right mounting plate 16 are fixedly arranged in mounting base 10, and the left telescopic cylinder 9 is pacified
On left mounting plate 11, the left collet 8 is mounted on the piston-rod end of left telescopic cylinder 9, the right telescopic cylinder
17 are mounted on right mounting plate 16, and the right collet 18 is mounted on the piston-rod end of right telescopic cylinder 17.
In embodiment, limited block is fitted with close to top and bottom end on the front of track base 21.
In embodiment, electric cylinders 1 are parallel with first straight line guide rail 3.
In embodiment, left telescopic cylinder 9 and right telescopic cylinder 17 all use guide rod cylinder.
The above is only the preferred embodiment of the present invention, protection scope of the present invention is not limited merely to above-described embodiment,
All technical solutions belonged under thinking of the present invention all belong to the scope of protection of the present invention.It should be pointed out that for the art
For those of ordinary skill, several improvements and modifications without departing from the principles of the present invention should be regarded as protection of the invention
Range.
Claims (4)
1. a kind of for producing the autogenous mill of GaAs, it is characterised in that: including electric cylinders (1), pedestal (2), first straight line
Guide rail (3), support (4), the first guide rod cylinder (5), grinding head (6), clamping jaw (7), left collet (8), left telescopic cylinder (9),
Mounting base (10), left mounting plate (11), slide (12), link block (13), the second guide rod cylinder (14), the second sliding block (15),
Right mounting plate (16), right telescopic cylinder (17), right collet (18), pedestal (19), second straight line guide rail (20), track base (21),
Rotary cylinder (22), the second connecting plate (24), third guide rod cylinder (25), floating clamp (26), rises the first connecting plate (23)
Sending down abnormally ascending cylinder (27), grinding head mounting base (28), bottom plate (29), the first sliding block (30) and mounting blocks (31), the first straight line
Guide rail (3) is fixedly mounted on pedestal (2), and first sliding block (30) is mounted on first straight line guide rail (3), the peace
Dress block (31) is fixedly mounted on the first sliding block (30), and the electric cylinders (1) are mounted on pedestal (2), the bottom plate (29)
It is mounted in electric cylinders (1) and mounting blocks (31), the first guide rod cylinder (5) is fixedly mounted on bottom plate (29), described
Third guide rod cylinder (25) be mounted on the piston-rod end of the first guide rod cylinder (5), institute by the second connecting plate (24)
The grinding head mounting base (28) stated is mounted on the piston-rod end of third guide rod cylinder (25), institute by the first connecting plate (23)
The grinding head (6) stated is mounted on grinding head mounting base (28), and the pedestal (19) is fixedly mounted on the top surface of pedestal (2)
On, the rotary cylinder (22) is mounted on pedestal (19), and the clamping jaw (7) is mounted on rotary cylinder (22), described
Support (4) be mounted on the top surface of pedestal (2), the lifting cylinder (27) is fixedly mounted on the back side of track base (21)
On, the second straight line guide rail (20) is mounted on the front of track base (21), and second sliding block (15) is mounted on
In two linear guides (20), the slide (12) is mounted on the second sliding block (15) and slide (12) passes through floating clamp (26)
It is mounted on the piston-rod end of lifting cylinder (27), the second guide rod cylinder (14) is mounted on slide (12), described
Link block (13) be mounted on the second guide rod cylinder (14), the mounting base (10) is mounted on the second guide rod cylinder
(14) piston-rod end, the left mounting plate (11) and right mounting plate (16) are fixedly arranged on mounting base (10), institute
The left telescopic cylinder (9) stated is mounted on left mounting plate (11), and the left collet (8) is mounted on the work of left telescopic cylinder (9)
Stopper rod end, the right telescopic cylinder (17) are mounted on right mounting plate (16), and the right collet (18) is mounted on the right side and stretches
The piston-rod end of contracting cylinder (17).
2. according to claim 1 a kind of for producing the autogenous mill of GaAs, it is characterised in that: the guide rail
Limited block is fitted with close to top and bottom end on the front of seat (21).
3. according to claim 1 a kind of for producing the autogenous mill of GaAs, it is characterised in that: the electric cylinders
(1) parallel with first straight line guide rail (3).
4. according to claim 1 a kind of for producing the autogenous mill of GaAs, it is characterised in that: stretch on the left side
Contracting cylinder (9) and right telescopic cylinder (17) all use guide rod cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810697062.0A CN108942636A (en) | 2018-06-29 | 2018-06-29 | It is a kind of for producing the autogenous mill of GaAs |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810697062.0A CN108942636A (en) | 2018-06-29 | 2018-06-29 | It is a kind of for producing the autogenous mill of GaAs |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108942636A true CN108942636A (en) | 2018-12-07 |
Family
ID=64484177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810697062.0A Pending CN108942636A (en) | 2018-06-29 | 2018-06-29 | It is a kind of for producing the autogenous mill of GaAs |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108942636A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0908271A2 (en) * | 1997-10-09 | 1999-04-14 | CO.ME.S. S.r.l. | Lapping head with oscillating toolholders |
| JP3043324B1 (en) * | 1998-12-15 | 2000-05-22 | 三菱マテリアル株式会社 | Wafer unloading apparatus and wafer manufacturing method |
| US6346038B1 (en) * | 1998-12-15 | 2002-02-12 | Mitsubishi Materials Corporation | Wafer loading/unloading device and method for producing wafers |
| CN105127884A (en) * | 2015-09-01 | 2015-12-09 | 无锡耐博机器人科技有限公司 | Automatic grinding machine structure |
| CN208304748U (en) * | 2018-06-29 | 2019-01-01 | 江苏中科晶元信息材料有限公司 | It is a kind of for producing the autogenous mill of GaAs |
-
2018
- 2018-06-29 CN CN201810697062.0A patent/CN108942636A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0908271A2 (en) * | 1997-10-09 | 1999-04-14 | CO.ME.S. S.r.l. | Lapping head with oscillating toolholders |
| JP3043324B1 (en) * | 1998-12-15 | 2000-05-22 | 三菱マテリアル株式会社 | Wafer unloading apparatus and wafer manufacturing method |
| US6346038B1 (en) * | 1998-12-15 | 2002-02-12 | Mitsubishi Materials Corporation | Wafer loading/unloading device and method for producing wafers |
| CN105127884A (en) * | 2015-09-01 | 2015-12-09 | 无锡耐博机器人科技有限公司 | Automatic grinding machine structure |
| CN208304748U (en) * | 2018-06-29 | 2019-01-01 | 江苏中科晶元信息材料有限公司 | It is a kind of for producing the autogenous mill of GaAs |
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