CN108941942B - Use method of small workpiece fixture of photoetching machine - Google Patents
Use method of small workpiece fixture of photoetching machine Download PDFInfo
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- CN108941942B CN108941942B CN201811039602.2A CN201811039602A CN108941942B CN 108941942 B CN108941942 B CN 108941942B CN 201811039602 A CN201811039602 A CN 201811039602A CN 108941942 B CN108941942 B CN 108941942B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
- B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
- B23K37/0408—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work for planar work
Abstract
The invention provides a use method of a small workpiece fixture of a photoetching machine, which is characterized by comprising the following steps of: the operation steps comprise the following steps, firstly, placing a clamp; secondly, selecting the specification of a light source generator; thirdly, aligning and fixing the workpiece; fourth, adjusting the photoetching position; fifthly, processing; sixth, processing and resetting; and seventhly, disassembling and resetting. The novel photoetching machine clamp has the beneficial effects that the novel photoetching machine clamp can be quickly placed for use or quickly removed, and is flexible and convenient to use; the invention solves the problems that many small-sized workpieces cannot be machined or are inconvenient to machine, reduces the difficulty degree of machining, and has the advantages of strong practicability, convenient use and simple operation.
Description
Technical Field
The invention relates to a use method of a photoetching machine fixture, in particular to a use method of a photoetching machine small workpiece fixture which is mainly applied to fixing, supporting, positioning and the like of a workpiece when the photoetching machine processes the workpiece and is convenient for the photoetching machine to process the workpiece.
Technical Field
At present, many laboratories do not have a photoetching machine equipped with a special photoetching chip because of the diversity of experiments, but use a photoetching machine of a general type, so that chips can be processed and other small workpieces can be processed. However, since the general-purpose type photolithography machine does not have a practical photolithography machine fixture, there is a certain difficulty in fine machining and fixing of such small-sized workpieces as chips; meanwhile, small workpiece machining is accurate machining requiring rotation and quick resetting, and when no special fixture is used for accurately positioning the small workpiece, the small workpiece is easy to move in the workpiece machining process, so that the precision of the small workpiece fine machining is affected.
Therefore, there is a need for a small workpiece fixture for a lithographic machine that provides rapid positioning, fixing and supporting of small workpieces and a method of use thereof.
Disclosure of Invention
In order to solve the problems, the invention aims to provide a use method of a photoetching machine clamp which can be rapidly positioned, rotated and adjusted in height, which is convenient and effective in fixing, supporting and positioning a processed workpiece, so that the processing is more accurate and the operation is simpler and more convenient.
The technical scheme of the invention is that the small workpiece fixture of the photoetching machine is used, and the fixture used is composed of a lifting rotation function device, a light spot positioning function device and a fixing function device. The whole structure of the fixture is respectively a bottommost base table, an outer hollow column and an inner hollow column from bottom to top, and the topmost is a transparent workpiece table.
The lifting and rotating functional device consists of an inner hollow column and an outer hollow column. The inner hollow column and the outer hollow column are matched and sleeved together, and the inner hollow column can move up and down and rotate in the outer hollow column under control. The top of the inner hollow column and the middle part of the lower bottom of the workpiece table can be fixedly connected or disconnected. The inner hollow column and the workpiece table are in a connection state, and the inner hollow column can drive the workpiece table to rotate together and lift up and down. The annular end face of the bottom of the outer hollow column is processed with a smooth and friction-resistant material. The lifting and rotating function device is placed on the photosensitive coordinate screen, and can drive the machined workpiece fixed on the workpiece table to freely slide on the photosensitive coordinate screen.
The light spot positioning function device consists of a light source generator which is arranged and fixed on the inner hollow column, a positioning light spot generator which is connected with the lower part of the light source generator, a photosensitive coordinate screen which is arranged on the upper surface of the base table and a display screen which displays positioning coordinates. The positioning light spot generator can automatically focus the parallel light generated by the light source generator onto the photosensitive coordinate screen to generate tiny and bright positioning light spots. The light intensity or wavelength of the positioning light spot generated by each positioning light spot generator is different, and the positioning light spots are marked with distinguishing marks and are stored in the photosensitive coordinate screen and the display screen main board; each positioning light spot generator is provided with a workpiece positioning light spot transmission rod which is connected with a workpiece table; the glass optical fiber for vertical conduction at the upper and lower positions is arranged in the workpiece positioning light spot transmission rod, so that the tiny and bright positioning light spots generated by focusing of the positioning light spot generator can be vertically transmitted to the workpiece table. The invention ensures that the positioning light spot of the positioning light spot generator on the photosensitive coordinate screen is vertical to the positioning light spot of the workpiece table, and the positions of the positioning light spots are consistent. The transparent workpiece table is provided with corresponding workpiece positioning light spot identifiers at the corresponding positions of each workpiece positioning light spot transmission rod; that is, each workpiece positioning spot identifier can be provided with a positioning spot generator corresponding thereto. The light path of the downward light-emitting opening of the positioning light spot generator is perpendicular to the hollow bottom end face of the outer hollow column, and can be emitted without shielding. The outer hollow column is placed on the upper surface of the photosensitive coordinate screen and can slide freely and horizontally on the upper surface of the photosensitive coordinate screen. The photosensitive coordinates with the coordinate system built inside are installed on the upper surface of the base table. The front elevation of the base table is an inclined plane with the bottom edge protruding forwards, and a display screen for displaying positioning coordinates is arranged on the inclined plane. The display screen can display all the position coordinates on the coordinate system of the photosensitive coordinate screen with different positioning light spots generated by different positioning light spot generators sensed by the photosensitive coordinate screen. According to the technical scheme, the inner hollow column and the outer hollow column can be matched to lift and rotate; the light source generator inside the inner hollow column can provide several locating light spot generator light sources to produce several monochromatic locating light spots of different light intensities or different wavelengths on the photosensitive coordinate screen. The outer hollow column moves along with the generated positioning light spots in the moving process, the photosensitive coordinate screen can sense the different positioning light spots, the positions of the different positioning light spots can be read out, and the positions of the different positioning light spots are displayed through the display screen on the base table. These functions facilitate accurate positioning by the user during processing. If the position moves due to other reasons during processing, the position can be quickly restored to the original position by the position data recorded before.
The fixing function device comprises 4 or more workpiece fixing devices symmetrically and fixedly arranged on the upper surface of the workpiece table and a locking bracket on the base table. The workpiece fixing device is provided with an elastic telescopic arm; the workpiece is fixed on the workpiece table through the elasticity generated by the elastic telescopic arm. The structure aims to enable a workpiece to be fixed on a workpiece table through the elastic telescopic arm of the workpiece fixing device, ensure that the workpiece cannot move in the machining process, and ensure machining accuracy. The middle of the locking bracket is provided with a round hole with the diameter consistent with the outer diameter of the outer hollow column in a matching way, the diameter of the locking bracket passing through the center round hole is divided into two halves, and when the two halves are combined together, the center round hole can tightly hold the outer hollow column. The size of the locking bracket is larger than that of the workpiece table; the height dimension is lower than the position height of the part processed on the outer wall of the outer hollow column. The parts processed on the outer wall of the outer hollow column are fastening devices or electric switches which are described later. The two halves of the locking support are connected through the buckle or are attracted and attached through strong magnetism, the locking support can be conveniently connected, fixed and cohesive or detached, the locking support is used for locking the outer hollow column, the well found position is fixed, the workpiece table is stably supported, and the workpiece table is prevented from displacement during processing. The method of use is characterized by comprising the following steps.
(a) First, a clamp is placed. The base table is placed on a workbench under the photoetching machine illuminator, and is fixed after being found to be horizontal.
(b) And secondly, selecting the specification of the light source generator. Firstly, selecting the specification of the light source generators with proper numbers of positioning light spot generators according to the size and processing requirements of a workpiece, installing the light source generators with the selected specification in an inner hollow column, and then connecting and fixing the inner hollow column and a workpiece table.
(c) Thirdly, aligning and fixing the workpiece. The workpiece to be processed is placed on a workpiece table, a special position on the workpiece or a position of a mark before processing is selected according to a workpiece positioning light spot mark on the upper surface of the workpiece table made of transparent materials, the workpiece is moved to be aligned with the workpiece positioning light spot mark, and then the workpiece is fixed on the workpiece table through a workpiece fixing device.
(d) Fourth, adjusting the photoetching position. Placing the prepared workpiece table and the inner and outer hollow columns on a photosensitive coordinate screen of a base table, and turning on a power supply of a photoetching machine, the photosensitive coordinate screen and a light source generator. The outer hollow column is horizontally moved to the position below the indicator lamp of the photoetching machine illuminator, and the locking support is arranged to lock the horizontal position. Adjusting the telescopic rotating device: the inner hollow column is lifted in the outer hollow column along the height positioning groove by manual operation, the optimal height is determined, and then the fastening device on the outer hollow column is locked to fix the height. Or the electric switch on the outer hollow column is turned on, the inner hollow column is lifted to the optimal height required by use in an electric mode, and the locking height of the electric switch is turned off.
(e) And fifthly, processing. Firstly, storing horizontal coordinate data and height data of each workpiece positioning light spot mark of a photosensitive coordinate screen displayed on a display screen on a base table, or directly reading the recorded height data, and then, opening an automatic photoetching mode of a photoetching machine to finish photoetching work. After the one-step photoetching processing procedure is completed, when the second photoetching processing procedure is needed, the position of the processed workpiece is adjusted or not according to the requirements of the processing procedure. And if the adjustment is needed, repeating the fourth step and the fifth step.
(f) And sixthly, processing and resetting. If the workpiece is required to be horizontally rotated in the processing procedure, the locking support is firstly released, the workpiece table is manually rotated, and meanwhile, coordinate data displayed by the display screen are observed, so that the coordinate change reaches the rotating angle. The locking bracket is then placed in the locked position. Note that the position coordinates of the centrally located spot of the light source generator cannot be changed during rotation. After the processing is finished, the locking support is loosened, the workpiece table is rotated according to the stored initial coordinate position, and meanwhile, the coordinate data displayed by the display screen are observed to be reset to the initial coordinate data. If a horizontal movement of the workpiece is required during the machining process, the operation is similar to a rotational reset.
(g) And seventhly, disassembling and resetting. After the machining is finished, all power supplies are sequentially turned off according to the turn-on sequence, the machined workpiece is taken down, the locking support is loosened, the workpiece table, the inner hollow column and the light source generator are disassembled. Finally, the above components and the base table, locking bracket are placed into a special fixture box.
In the technical scheme, the inside of the inner hollow column can be convenient for installing and replacing the light source generators with 1 or more positioning light spot generators and different specifications. If the positioning is rotated, at least a light source generator with 2 positioning light spot generators capable of emitting 2 positioning light spots is selected, wherein the light source generator with at least 1 positioning light spot generator is positioned at the center of the light source generator, and the center of the light source generator coincides with the axis of the inner hollow column.
In the technical scheme, one side of the inner hollow column is provided with a height positioning groove of the inner hollow column; correspondingly, the upper part of the outer hollow column is provided with a height adjusting and fastening device corresponding to the height positioning groove, so that the height position of the inner hollow column can be locked. Or one side of the inner hollow column is provided with an inner hollow column scale; correspondingly, a compression air passage and a top block or a top ring which can rise and fall along with the air pressure are embedded and processed on the inner wall of the outer hollow column; the top block or the top ring is fixed on the annular bottom of the inner hollow column to drive the inner hollow column to lift. An adherence miniature motor is arranged on the inner wall or the outer side wall of the outer hollow column. The height of the wall-attached miniature motor arranged on the outer side wall of the outer hollow column is higher than that of the locking bracket. The miniature motor can provide the pressure of compression gas circuit pressure, and the electric switch of miniature motor installs in outer hollow post upper end.
In the technical scheme, the photosensitive sensor and the coordinate system of the photosensitive coordinate screen plane are arranged in the photosensitive coordinate screen. In the technical scheme of the invention, a photosensitive sensor is arranged in a photosensitive coordinate screen, and the position of a positioning light spot generated by a positioning light spot generator is obtained in real time; and according to the position information of the positioning light spot, obtaining the coordinate information of the positioning light spot through a coordinate system which is established in the photosensitive coordinate screen in advance, and finally displaying the digital coordinate on the display screen through digital-to-analog conversion.
Compared with the prior art, the invention has the following beneficial effects: the novel photoetching machine clamp using method can be rapidly placed for use or rapidly removed, and is flexible and convenient to use; the invention solves the problems that many small-sized workpieces cannot be machined or are inconvenient to machine, reduces the difficulty degree of machining, and has the advantages of strong practicability, convenient use and simple operation.
Drawings
Fig. 1 is a schematic diagram of a front view structure of the present invention.
Fig. 2 is a schematic view of a partially sectioned front view of the present invention.
FIG. 3 is an assembled schematic view of a photosensitive coordinate screen of the present invention.
Fig. 4 is a schematic top and left view of a base station of the present invention.
Fig. 5 is an enlarged schematic view of the interior of an inner hollow column of three positioning spots according to the present invention.
Fig. 6 is an enlarged schematic view of the interior of an inner hollow column with a locating spot according to the present invention.
Fig. 7 is an assembled schematic view of the light source generator of the present invention.
Fig. 8 is a schematic top view of a workpiece table according to the present invention.
Fig. 9 is a schematic perspective view showing a structure in which a locking bracket is installed according to the present invention.
Fig. 10 is a schematic top view of a locking bracket of the present invention.
Fig. 11 is a schematic view showing a structure of lifting a compressed air path according to the present invention.
Fig. 12 is a schematic top view of a workpiece positioning spot identification of a workpiece stage according to the present invention.
In the figure: 1. a base table; 2. an inner hollow column; 3. a work table; 4. a light source generator; 5. a fastening device; 6. an outer hollow column; 7. a photosensitive coordinate screen; 8. a display screen; 9. positioning a light spot generator; 10. a photosensitive sensor; 11. a coordinate system; 12. an inner hollow column positioning groove; 13. a workpiece positioning light spot transmission rod; 14. a workpiece fixing device; 15. a workpiece; 16. a locking bracket; 17. an inner hollow column ruler; 18. a top block or top ring; 19. an electric switch; 20. a compression gas circuit; 21. a miniature motor; 22. workpiece positioning light spot identification.
DETAILED DESCRIPTION OF EMBODIMENT (S) OF INVENTION
Referring to the shape structure of fig. 1 to 12, a method for using a small workpiece fixture of a lithography machine is provided, wherein the fixture is composed of a lifting rotation function device, a light spot positioning function device and a fixing function device. The whole structure of the device is respectively a bottommost base table 1, an outer hollow column 6 and an inner hollow column 2 from bottom to top, and a workpiece table 3 made of transparent materials is arranged at the uppermost part.
The lifting and rotating function device consists of an inner hollow column 2 and an outer hollow column 6, wherein the inner hollow column 2 and the outer hollow column 6 are matched and sleeved together, and the inner hollow column 2 can move up and down and rotate in the outer hollow column 6 under control. The top of the inner hollow column 2 and the middle part of the lower bottom of the workpiece table 3 can be fixedly connected or disconnected; the inner hollow column 2 and the workpiece table 3 are in a connection state, and the inner hollow column 2 can drive the workpiece table 3 to rotate together and lift up and down. The annular end face of the bottom of the outer hollow column is processed with a smooth and friction-resistant material. The lifting and rotating function device is placed on the photosensitive coordinate screen 7, and can drive the processed workpiece 15 fixed on the workpiece table 3 to freely slide on the photosensitive coordinate screen 7, and the aim of the structure is to realize the mobility of the processed workpiece, so that the processing process is more flexible and convenient.
The light spot positioning function device consists of a light source generator 4 arranged and fixed on the inner hollow column 2, a positioning light spot generator 9 connected with the lower part of the light source generator 4, a photosensitive coordinate screen 7 arranged on the surface of the base table 1 and a display screen 8 for displaying positioning coordinates. The positioning light spot generator 9 can automatically focus the parallel light generated by the light source generator 4 onto the photosensitive coordinate screen 7 to generate tiny and bright positioning light spots. The light intensity or wavelength of the positioning light spot generated by each positioning light spot generator 9 is different, and the positioning light spots are marked with distinguishing marks and stored in the main boards of the photosensitive coordinate screen 7 and the display screen 8. Each positioning light spot generator 9 is provided with a workpiece positioning light spot transmission rod 13 which is connected with the workpiece table 3; the workpiece positioning light spot transmission rod 13 is internally provided with a glass optical fiber for vertical transmission at the upper and lower positions, and can vertically transmit the tiny and bright positioning light spots generated by focusing of the positioning light spot generator 9 to the workpiece table 3. The invention ensures that the positioning light spot of the positioning light spot generator 9 on the photosensitive coordinate screen 7 is vertical to the positioning light spot of the workpiece table 3, and the positions are consistent. The transparent workpiece stage 3 is machined with a corresponding workpiece positioning spot identification 22 at the corresponding position of each workpiece positioning spot transfer bar 13. That is, each workpiece positioning spot identification 22 can be provided with a positioning spot generator 9 corresponding thereto. The light path of the downward light-emitting opening of the positioning light spot generator 9 is perpendicular to the hollow bottom end face of the outer hollow column 6, and can be emitted without shielding. The outer hollow column 6 is placed on the upper surface of the photosensitive coordinate screen 7, and can freely slide horizontally on the upper surface of the photosensitive coordinate screen 7. The coordinate system 11 is built in the photosensitive coordinate screen 7, and the photosensitive coordinate screen 7 is arranged on the upper surface of the base table 1. The front elevation of the base table 1 is an inclined plane with the bottom edge protruding forwards, and a display screen 8 for displaying positioning coordinates is arranged on the inclined plane. The different positioning light spots generated by the different positioning light spot generators 9 correspond to a specific position coordinate on the coordinate system 11 in the photosensitive coordinate screen 7, and the display screen 8 can display all the position coordinates of the different positioning light spots sensed by the photosensitive coordinate screen 7. According to the technical scheme, the inner hollow column 2 and the outer hollow column 6 are matched to be capable of lifting and rotating, the light source generator 4 is arranged in the inner hollow column 2 and can provide light sources of the positioning light spot generators 9, and a plurality of monochromatic positioning light spots with different light intensities or different wavelengths are generated on the photosensitive coordinate screen 7. The outer hollow column 6 moves along with the generated positioning light spots in the moving process, the photosensitive coordinate screen 7 can sense the different positioning light spots, the positions of the different positioning light spots can be read out, and the positions of the different positioning light spots are displayed through the display screen 8 on the base table 1. The accurate positioning during processing is realized by a user. If the position of the workpiece 15 moves due to other reasons during processing, the workpiece can be quickly restored to the original position by the position data recorded previously.
The fixing function device comprises 4 or more than 4 workpiece fixing devices 14 symmetrically and fixedly arranged on the upper surface of the workpiece table 3 and a locking bracket 16 on the base table 1. The workpiece fixing device 14 is provided with an elastic telescopic arm; the workpiece 15 is fixed to the workpiece table 3 by elastic force generated by the elastic telescopic arm. The purpose of this construction is to enable the work piece 15 to be fixed on the work piece table 3 by means of the elastic telescopic arm of the work piece fixing device 14, ensuring that the work piece 15 does not move during processing and ensuring the accuracy of processing. The middle of the locking bracket 16 is provided with a round hole with the diameter consistent with the outer diameter of the outer hollow column 6, the diameter of the central round hole of the locking bracket 16 is divided into two halves, and when the two halves are combined together, the central round hole can tightly hold the outer hollow column 6. The locking bracket 16 is larger than the workpiece table 3 in size; the height dimension is lower than the parts machined on the outer wall of the outer hollow column 6. The two half parts of the locking bracket 16 can be conveniently connected, fixed and cohesive or detached by buckling connection or strong magnetic attraction. The outer hollow column 6 is locked, the found position is fixed, the workpiece table 3 is stably supported, and the workpiece table 3 is prevented from displacement during processing. The method of use is characterized by comprising the following steps.
(a) First, a clamp is placed. The base table 1 is placed on a workbench under a photoetching machine illuminator, and is fixed after being found horizontally.
(b) And secondly, selecting the specification of the light source generator 4. Firstly, selecting the specification of the light source generators 4 with proper number of positioning light spot generators 9 according to the size and processing requirements of a workpiece 15, installing the light source generators 4 with the selected specification in the inner hollow column 2, and then connecting and fixing the inner hollow column 2 and the workpiece table 3.
(c) Third, the workpiece 15 is aligned and fixed. The workpiece 15 to be processed is placed on the workpiece table 3, a special position on the workpiece 15 or a position marked before processing is selected according to the workpiece positioning light spot mark 22 on the upper surface of the workpiece table 3 made of transparent materials, the workpiece 15 is moved to be aligned with the workpiece positioning light spot mark 22, and then the workpiece is fixed on the workpiece table 3 through the workpiece fixing device 14.
(d) Fourth, adjusting the photoetching position. The above prepared work table 3, the inner hollow column 2 and the outer hollow column 6 are placed on the photosensitive coordinate screen 7 of the base table 1, and the power supply of the photoetching machine, the photosensitive coordinate screen 7 and the light source generator 4 is turned on. The outer hollow column 6 is horizontally moved to the position below the lithography light indicator lamp, and the locking bracket 16 is placed to lock the horizontal position. Adjusting the telescopic rotating device: the inner hollow column 2 is lifted and lowered in the outer hollow column 6 along the height positioning groove 12 by hand to determine the optimal height, and then the fastening device 5 on the outer hollow column 6 is locked to fix the height. Or the electric switch 19 on the outer hollow column 6 is turned on, the inner hollow column 2 is lifted to the optimal height required by use in an electric mode, and the electric switch 19 is turned off to lock the height.
(e) And fifthly, processing. First, the horizontal coordinate data and the height data of each workpiece positioning light spot mark 22 of the photosensitive coordinate screen 7 displayed on the display screen 8 on the base table 1 are stored, or the recorded height data are directly read, and then, the automatic photoetching mode of the photoetching machine is opened to finish the photoetching work. After the one-step photolithography process is completed, when the second photolithography process is required, the position of the workpiece 15 is adjusted or not according to the requirements of the process. And if the adjustment is needed, repeating the fourth step and the fifth step.
(f) And sixthly, processing and resetting. If the workpiece 15 is required to be horizontally rotated during the machining process, the locking bracket 16 is released, the workpiece table 3 is manually rotated, and the coordinate data displayed on the display screen 8 is observed at the same time, so that the coordinate change reaches the rotation angle. The locking bracket 16 is then placed in the locked position. Note that the position coordinates of the center positioning light spot of the light source generator 4 cannot be changed when rotated; after the processing is completed, the locking bracket 16 is released, the workpiece table 3 is rotated according to the stored initial coordinate position, and the coordinate data displayed by the observation display screen 8 is reset to the initial coordinate data. If during the machining program it is desired to move the workpiece 15 horizontally, the operation is similar to a rotary reset.
(g) Seventh, after finishing the machining, all power supplies are turned off in turn in the turn-on sequence, the machined workpiece 15 is removed, the locking bracket 16 is released, and the workpiece table 3 and the inner hollow column 2, and the light source generator 4 are disassembled. Finally, the above components and the base station 1, locking bracket 16 are placed in a special fixture box.
In the above technical solution, it is preferable that the inside of the inner hollow column 2 can be conveniently installed and replaced with light source generators 4 of different specifications having 1 or more positioning light spot generators 9, wherein at least 1 light source generator 4 of the positioning light spot generators 9 is located at the center of the light source generator 4, and the center of the light source generator 4 coincides with the axis of the inner hollow column 2. If the positioning is rotated, at least a light source generator 4 with 2 positioning spot generators 9 capable of emitting 2 positioning spots is selected.
In the above technical solution, preferably, a height positioning groove 12 of the inner hollow column 2 is machined on one side of the inner hollow column 2; correspondingly, a fastening device 5 with height adjustment is processed at the position corresponding to the height positioning groove 12 at the upper part of the outer hollow column 6, so that the height position of the inner hollow column 2 can be locked. Or one side of the inner hollow column 2 is provided with an inner hollow column scale 17; correspondingly, the inner wall of the outer hollow column 6 is embedded and processed with a compression air passage 20 and a top block or a top ring 18 which can rise and fall along with the air pressure on the air passage; a top block or ring 18 is fixed on the annular bottom of the inner hollow column 2 to drive the inner hollow column 2 to lift. An adherent micromotor 21 is mounted on the inner or outer wall of the outer hollow column 6. The micro motor 21 is capable of providing the pressure of the compressed air pressure 20, and the electric switch 19 of the micro motor 21 is mounted on the upper end of the outer hollow column 6.
In the above technical solution, preferably, the photosensitive sensor 10 and the coordinate system 11 of the plane of the photosensitive coordinate screen 7 are installed in the photosensitive coordinate screen 7. In the technical scheme of the invention, a photosensitive sensor 10 is arranged in the photosensitive coordinate screen 7, and the position of a positioning light spot generated by the positioning light spot generator 9 is acquired in real time. According to the position information of the positioning light spot, the coordinate information of the positioning light spot is obtained through a coordinate system 11 which is established in the photosensitive coordinate screen 7 in advance, and finally, the digital coordinates are displayed on the display screen 8 through digital-to-analog conversion.
Finally, it is noted that the above embodiments are only for illustrating the technical solution of the present invention and not for limiting the same, and although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications and equivalents may be made thereto without departing from the spirit and scope of the technical solution of the present invention, which is intended to be covered by the scope of the claims of the present invention.
Claims (4)
1. The small workpiece fixture for photoetching machine consists of three parts, including lifting rotation function unit, light spot locating function unit and fixing function unit; the whole structure is respectively a bottommost base table, an outer hollow column and an inner hollow column from bottom to top, and the topmost is a transparent workpiece table;
the lifting and rotating functional device consists of an inner hollow column and an outer hollow column; the inner hollow column and the outer hollow column are matched and sleeved together, and the inner hollow column can move up and down and rotate in the outer hollow column under control; the top of the inner hollow column and the middle part of the lower bottom of the workpiece table can be connected and fixed or detached; the inner hollow column and the workpiece table are in a connection state, and the inner hollow column can drive the workpiece table to rotate together and lift up and down; the annular end face of the bottom of the outer hollow column is processed with a smooth friction-resistant material;
the light spot positioning function device consists of a light source generator which is arranged and fixed on the inner hollow column, a positioning light spot generator which is connected with the lower part of the light source generator, and a photosensitive coordinate screen and a display screen which are arranged on the upper surface of the base table; the positioning light spot generator can automatically focus the parallel light generated by the light source generator onto the photosensitive coordinate screen to generate tiny and bright positioning light spots; the light intensity or wavelength of the positioning light spot generated by each positioning light spot generator is different, and the positioning light spots are marked with distinguishing marks and are stored in the photosensitive coordinate screen and the display screen main board; each positioning light spot generator is provided with a workpiece positioning light spot transmission rod which is connected with a workpiece table; the glass optical fiber is arranged in the workpiece positioning light spot transmission rod, so that tiny and bright positioning light spots generated by focusing of the positioning light spot generator can be vertically transmitted to the workpiece table upwards; the transparent workpiece table is provided with corresponding workpiece positioning light spot identifiers at the corresponding positions of each workpiece positioning light spot transmission rod; the light path of the downward light-emitting port of the positioning light spot generator is vertical to the hollow bottom end surface of the outer hollow column, so that the light can be emitted without shielding; the outer hollow column is arranged on the upper surface of the photosensitive coordinate screen and can slide freely and horizontally on the upper surface of the photosensitive coordinate screen; a coordinate system is built in the photosensitive coordinate screen, and the photosensitive coordinate screen is arranged on the upper surface of the base table; the front elevation of the base table is an inclined plane with the bottom edge protruding forwards, and a display screen is arranged on the inclined plane; the display screen can display all the position coordinates on the coordinate system of the photosensitive coordinate screen of different positioning light spots generated by different positioning light spot generators sensed by the photosensitive coordinate screen;
the fixing function device comprises 4 or more workpiece fixing devices symmetrically and fixedly arranged on the upper surface of the workpiece table and a locking bracket on the base table; the workpiece fixing device is provided with an elastic telescopic arm; the workpiece is fixed on the workpiece table through the elasticity generated by the elastic telescopic arm; a round hole with the diameter matched with the outer diameter of the outer hollow column is processed in the middle of the locking bracket; the diameter of the locking bracket passing through the central round hole is divided into two halves, and when the two halves are combined together, the central round hole can tightly hold the outer hollow column; the size of the locking bracket is larger than that of the workpiece table; the height dimension is lower than the position height of a part processed on the outer wall of the outer hollow column; the two half parts of the locking bracket are connected through a buckle or are stuck by strong magnetic attraction; the method is characterized by comprising the following steps:
(a) Firstly, placing a clamp; placing the base table on a workbench under a photoetching machine illuminator, and fixing after finding the level;
(b) Secondly, selecting the specification of a light source generator; firstly, selecting the specification of a light source generator with a proper number of positioning light spot generators according to the size and processing requirements of a workpiece, installing the light source generator with the selected specification in an inner hollow column, and then connecting and fixing the inner hollow column and a workpiece table;
(c) Thirdly, aligning and fixing the workpiece; placing a workpiece to be processed on a workpiece table, selecting the position of a mark before processing on the workpiece according to a workpiece positioning light spot mark on the upper surface of the workpiece table made of transparent materials, moving the workpiece to be aligned with the workpiece positioning light spot mark, and then fixing the workpiece on the workpiece table through a workpiece fixing device;
(d) Fourth, adjusting the photoetching position; placing the prepared workpiece table and the inner and outer hollow columns on a photosensitive coordinate screen of a base table, and turning on a power supply of a photoetching machine, the photosensitive coordinate screen and a light source generator; horizontally moving the outer hollow column to the position below the indicator lamp of the photoetching machine illuminator, and placing a locking bracket to lock the horizontal position; adjusting the telescopic rotating device: manually lifting the inner hollow column in the outer hollow column along the height positioning groove to determine the optimal height, and then locking a fastening device on the outer hollow column to fix the height; or, opening an electric switch on the outer hollow column, lifting the inner hollow column to the optimal height required by use in an electric mode, and closing the locking height of the electric switch;
(e) Fifthly, processing; firstly, storing horizontal coordinate data and height data of each workpiece positioning light spot mark of a photosensitive coordinate screen displayed on a display screen on a base table, or directly reading the recorded height data, and then, opening an automatic photoetching mode of a photoetching machine to finish photoetching work; after the one-step photoetching processing procedure is completed, when the second-step photoetching processing procedure is needed, the position of the processed workpiece is adjusted or not according to the requirements of the processing procedure; repeating the fourth and fifth steps if adjustment is required;
(f) Sixth, processing and resetting; if the workpiece is required to be horizontally rotated in the processing procedure, firstly loosening the locking bracket, manually rotating the workpiece table, and simultaneously observing coordinate data displayed by the display screen to enable the coordinate change to reach a rotating angle; then placing a locking bracket at a locking position; note that the position coordinates of the centrally located spot of the light source generator cannot be changed when rotated; after the processing is finished, the locking support is loosened, the workpiece table is rotated according to the stored initial coordinate position, and meanwhile, coordinate data displayed by the display screen are observed to be reset to the initial coordinate data; if the workpiece needs to be horizontally moved in the machining program, the operation is similar to rotary reset;
(g) Step seven, after finishing processing, sequentially closing all power supplies according to the opening sequence, taking down the processed workpiece, loosening the locking bracket, and disassembling the workpiece table, the inner hollow column and the light source generator; finally, the above components and the base table, locking bracket are placed into a special fixture box.
2. The method for using the small workpiece fixture of the lithography machine according to claim 1, wherein: the inside of the inner hollow column can be convenient for installing and replacing light source generators with 1 or more positioning light spot generators and different specifications; the light source generator is provided with at least 1 positioning light spot generator, and the positioning light spot generator is positioned in the center of the light source generator, namely the center of the light source generator is coincident with the axis of the inner hollow column.
3. The method for using the small workpiece fixture of the lithography machine according to claim 1, wherein: a height positioning groove of the inner hollow column is formed in one side of the inner hollow column; correspondingly, a fastening device is processed at the position corresponding to the height positioning groove at the upper part of the outer hollow column; or one side of the inner hollow column is provided with an inner hollow column scale; correspondingly, a compression air passage and a top block or a top ring which can rise and fall along with the air pressure are embedded and processed on the inner wall of the outer hollow column; the top block or the top ring is fixed on the annular bottom of the inner hollow column to drive the inner hollow column to lift; an adherence micro motor is arranged on the inner wall or the outer side wall of the outer hollow column; the miniature motor can provide the pressure of compression gas circuit pressure, and the electric switch of miniature motor installs in outer hollow post upper end.
4. The method for using the small workpiece fixture of the lithography machine according to claim 1, wherein: and a coordinate system of the photosensitive sensor and the photosensitive coordinate screen plane is processed and installed in the photosensitive coordinate screen.
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