CN108941067A - A kind of high-rate laser cleaning method and the laser cleaning head using this method - Google Patents
A kind of high-rate laser cleaning method and the laser cleaning head using this method Download PDFInfo
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- CN108941067A CN108941067A CN201811035283.8A CN201811035283A CN108941067A CN 108941067 A CN108941067 A CN 108941067A CN 201811035283 A CN201811035283 A CN 201811035283A CN 108941067 A CN108941067 A CN 108941067A
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- laser
- mirror
- scanning
- laser cleaning
- scanning mirror
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- 238000004140 cleaning Methods 0.000 title claims abstract description 43
- 238000000034 method Methods 0.000 title claims abstract description 28
- 238000009434 installation Methods 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 239000000243 solution Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
- B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
Abstract
The invention discloses a kind of high-rate laser cleaning method and the laser cleaning heads of application this method, the laser beam that laser collimation system projects passes through reflecting mirror, it is reflected on the scanning mirror being able to rotate, enter constraint reflecting mirror after scanning mirror reflects, the surface of workpiece to be cleaned is focused on using focus lamp.The present invention can carry out quick, uniform laser cleaning to the substantially surface of workpiece.
Description
Technical field
The present invention relates to a kind of laser cleaning technique, specifically a kind of high-rate laser cleaning method and apply this method
Laser cleaning head.
Background technique
Laser cleaning is as a kind of environmental protection, efficient, high-precision, high quality cleaning technique, in aerospace, accurate machine
The fields such as tool, semiconductor electronic have a extensive future.Present laser cleaning head generally uses scanning galvanometer, and scanning speed is generally low
In 10m/s, and in cleaning beginning and end area since galvanometer deflecting acceleration/deceleration has burning, quality uniformity, which exists, is asked
Topic.With further increasing for laser power, the further promotion that large format workpiece requires cleaning efficiency, traditional galvanometer
Scan-type technology is faced with technical bottleneck in cleaning efficiency and cleaning quality, it is difficult to meet the requirements wanting for high efficiency high quality
It asks.
Summary of the invention
The purpose of the present invention is overcoming defect of the existing technology, a kind of high-rate laser cleaning method is provided and application should
The laser cleaning head of method can carry out quick, uniform laser cleaning to the substantially surface of workpiece.
In order to achieve the above technical purposes, technical solution provided by the invention are as follows: a kind of high-rate laser cleaning method, laser
The laser beam that colimated light system projects passes through reflecting mirror, is reflected on the scanning mirror being able to rotate, enters after scanning mirror reflects
About beam steering mirror focuses on the surface of workpiece to be cleaned using focus lamp.
As optimal technical scheme, above-mentioned scanning mirror passes through the control rotation speed of high-speed motor, and the range of speeds exists
100 between 20000rpm.
As optimal technical scheme, above-mentioned scanning mirror circumferentially has multiple scanning reflection faces, anti-by scanning
The quantity and structure for penetrating face determine corresponding sweep length.
As optimal technical scheme, above-mentioned scanning mirror circumferentially has multiple scanning reflections parallel with rotary shaft
Face.
As optimal technical scheme, above-mentioned scanning mirror has the multiple and scanning reflection of rotary shaft at an angle
Face.
As optimal technical scheme, the axially distributed scanning reflection face for having multiple groups different radii of above-mentioned scanning mirror.
As optimal technical scheme, above-mentioned about beam steering mirror has a curved reflecting surface, the radian of curved reflecting surface
Determine that the radian is between 10-90 degree according to sweep length with diameter.
As optimal technical scheme, above-mentioned focus lamp is used for the focusing of laser beam, and the focal length of focus lamp selects as needed
It is fixed, generally between 50mm-200mm.
The present invention also provides a kind of laser cleaning heads using the above method, including inject end and laser injection with laser
The main structure at end.Laser, which injects end, has installation inclined-plane, and reflecting mirror is fixed on installation inclined-plane, laser collimation system and main body
Structure injects end right angle setting, and laser beam enters main structure after reflecting mirror reflects.High speed is fixed in main structure side wall
Motor, the scanning mirror are located inside main structure, and the rotation axis connection with high-speed motor.About beam steering mirror is fixed on
Inside main structure, focus lamp is installed in laser ejecting end.
As optimal technical scheme, the second condenser lens is equipped in optical path between reflecting mirror and scanning mirror.
Compared with prior art, the invention has the following beneficial effects: have multiple scanning reflection faces by revolvable
Scanning mirror, be scanned the control of width, realize the laser cleaning of large format.Using the laser cleaning head of this method, lead to
The rotation for crossing Serve Motor Control scanning mirror has the advantages that compact-sized, assembly is easy, is easy to control.
Detailed description of the invention
Fig. 1 is the schematic perspective view of embodiment 1；
Fig. 2 is the schematic diagram of the section structure of embodiment 1；
Fig. 3 is the assembling decomposition diagram of embodiment 1；
Fig. 4 is the scanning mirror structural schematic diagram of embodiment 2；
Fig. 5 is the scanning mirror structural schematic diagram of embodiment 3；
Fig. 6 is the light path principle figure of embodiment 3；
Fig. 7 is the schematic diagram of the section structure of embodiment 4；
Fig. 8 is the light path principle figure of embodiment 4.
Label in attached drawing 1-8: laser collimation system 1, reflecting mirror 2, scanning mirror 3, reflecting surface 3a, about beam steering mirror 4,
Focus lamp 5, high-speed motor 6, main structure 7, laser inject end 71, laser ejecting end 72, installation inclined-plane 73, reflecting mirror installation tune
Whole frame 74, adapter 75, fastener 76, side-blown air knife 77, the second condenser lens 8.
Specific embodiment
Below in conjunction with attached drawing, present invention is further described in detail with embodiment, it should be pointed out that following embodiment
It is intended to convenient for the understanding of the present invention, and does not play any restriction effect to it.
Embodiment 1
A kind of high-rate laser cleaning method of the present embodiment, the laser beam that laser collimation system 1 projects pass through reflecting mirror 2,
It is reflected on the scanning mirror 3 being able to rotate, constraint reflecting mirror 4 is entered after the reflection of scanning mirror 3, is focused using focus lamp 5
On the surface of workpiece to be cleaned.
Scanning mirror 3 passes through the control rotation speed of high-speed motor 6, and the range of speeds is 100 between 20000rpm.
Scanning mirror 3 circumferentially has multiple scanning reflection face 3a, is determined by the quantity and structure of scanning reflection face 3a
Fixed corresponding sweep length.
The scanning reflection face 3a of scanning mirror 3 can have a variety of structures, along 3 circumference of scanning mirror with more in the present embodiment
A scanning reflection face 3a parallel with rotary shaft.
About beam steering mirror 4 has a curved reflecting surface, and the radian and diameter of curved reflecting surface are determined according to sweep length,
Radian is between 10-90 degree.
Focus lamp 5 is used for the focusing of laser beam, and focus lamp 5 can be focus lens group.The focal length of focus lamp 5 is as needed
It is selected, generally between 50mm-200mm.
As shown in Figure 1 to Figure 3, the laser cleaning head of the present embodiment, including end 71 and laser ejecting end are injected with laser
72 main structure 7.
Laser, which injects end 71, has installation inclined-plane 73, and reflecting mirror 2 is fixed on installation inclined-plane 73, installs in main structure 7
There is the reflecting mirror mounting and adjusting frame 74 for stationary mirror 2.
Laser collimation system 1 and main structure 7 inject end right angle setting, and laser beam enters main body after the reflection of reflecting mirror 2
Structure 7.Laser injects end 71 and is fixed with adapter 75, and laser collimation system 1 is mounted in adapter 75, and passes through fastener 76
It is fixed.
It is fixed with high-speed motor 6 in 7 side wall of main structure, scanning mirror 3 is located inside main structure 7, and electric with high speed
The rotation axis connection of machine 6.About beam steering mirror 4 is fixed on inside main structure 7, is equipped with focus lamp 5 in laser ejecting end 72.?
The outside of laser ejecting end 72 is equipped with side-blown air knife 77.
The laser beam that laser collimation system 1 projects passes through reflecting mirror 2, is reflected on the scanning mirror 3 being able to rotate, through scanning
Tilting mirror 3 enters constraint reflecting mirror 4 after reflecting, the surface of workpiece to be cleaned is focused on using focus lamp 5, treats cleaning workpiece
Substantially surface is uniformly cleaned.
Embodiment 2
High-rate laser cleaning method and laser cleaning head in the present embodiment use scanning mirror 3 as shown in Figure 4.Scanning
Tilting mirror 3 has the multiple and scanning reflection face 3a of rotary shaft at an angle.It is opposite with laser beam by adjusting scanning mirror 3
The continuous adjustment of sweep length may be implemented in position.
Embodiment 3
High-rate laser cleaning method and laser cleaning head in the present embodiment use scanning mirror as shown in Figure 5 and Figure 6
3。
The axially distributed scanning reflection face 3a for having multiple groups different radii of scanning mirror 3.By adjusting the position of scanning mirror 3
It sets, is irradiated to laser beam on the scanning reflection face 3a of different radii, realize the adjustment and control of specific sweep length.
Embodiment 4
As shown in Figure 7 and Figure 8, the laser cleaning head of the present embodiment, including end 71 and laser ejecting end are injected with laser
72 main structure 7.
Laser, which injects end 71, has installation inclined-plane 73, and reflecting mirror 2 is fixed on installation inclined-plane 73, installs in main structure 7
There is the reflecting mirror mounting and adjusting frame 74 for stationary mirror 2.
Laser collimation system 1 and main structure 7 inject end right angle setting, and laser beam enters main body after the reflection of reflecting mirror 2
Structure 7.Laser injects end 71 and is fixed with adapter 75, and laser collimation system 1 is mounted in adapter 75, and passes through fastener 76
It is fixed.
It is fixed with high-speed motor 6 in 7 side wall of main structure, scanning mirror 3 is located inside main structure 7, and electric with high speed
The rotation axis connection of machine 6.About beam steering mirror 4 is fixed on inside main structure 7, is equipped with focus lamp 5 in laser ejecting end 72.
The second condenser lens 8 is equipped in optical path between reflecting mirror 2 and scanning mirror 3.
The laser beam that laser collimation system 1 projects passes through reflecting mirror 2, is reflected on the scanning mirror 3 being able to rotate, through scanning
Tilting mirror 3 enters constraint reflecting mirror 4 after reflecting, the surface of workpiece to be cleaned is focused on using focus lamp 5, treats cleaning workpiece
Substantially surface is uniformly cleaned.
Technical solution of the present invention is described in detail in above embodiments, it should be understood that the above is only of the invention
Specific embodiment is not intended to restrict the invention, all any modifications made in spirit of the invention, supplement or similar
Mode substitutes, and should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of high-rate laser cleaning method, it is characterized in that: the laser beam that laser collimation system (1) projects passes through reflecting mirror (2),
It is reflected on the scanning mirror (3) being able to rotate, enters constraint reflecting mirror (4) after scanning mirror (3) reflection, using focus lamp
(5) surface of workpiece to be cleaned is focused on.
2. high-rate laser cleaning method as described in claim 1, it is characterized in that: the scanning mirror (3) passes through high speed electricity
The control rotation speed of machine (6), the range of speeds is 100 between 20000rpm.
3. high-rate laser cleaning method as claimed in claim 2, it is characterized in that: the scanning mirror (3) is circumferentially
There are multiple scanning reflection faces (3a), corresponding sweep length is determined by the quantity and structure of scanning reflection face (3a).
4. high-rate laser cleaning method as claimed in claim 3, it is characterized in that: the scanning mirror (3) circumferentially has
Multiple scanning reflection faces (3a) parallel with rotary shaft.
5. high-rate laser cleaning method as claimed in claim 3, it is characterized in that: the scanning mirror (3) have it is multiple with
The scanning reflection face (3a) of rotary shaft at an angle.
6. high-rate laser cleaning method as described in claim 4 or 5, it is characterized in that: the scanning mirror (3) is along axial point
It is furnished with the scanning reflection face (3a) of multiple groups different radii.
7. high-rate laser cleaning method as described in claim 1, it is characterized in that: the about beam steering mirror (4) has one
Curved reflecting surface, the radian and diameter of curved reflecting surface determine that the radian is between 10-90 degree according to sweep length.
8. high-rate laser cleaning method as described in claim 1, it is characterized in that: the focus lamp (5) is for laser beam
It focuses, the focal length of focus lamp (5) is selected as needed, generally between 50mm-200mm.
9. a kind of laser cleaning head using claim 1 to 8 any claim the method, including end is injected with laser
(71) and the main structure (7) of laser ejecting end (72), it is characterized in that: the laser, which injects end (71), has installation inclined-plane
(73), the reflecting mirror (2) is fixed in installation inclined-plane (73), and the laser collimation system (1) is penetrated with main structure (7)
Enter and hold right angle setting, laser beam enters main structure (7) after reflecting mirror (2) are reflected；In main structure (7), side wall is fixed with height
Speed motor (6), the scanning mirror (3) are located at main structure (7) inside, and the rotation axis connection with high-speed motor (6)；Institute
The about beam steering mirror (4) stated is fixed on main structure (7) inside, is equipped with focus lamp (5) in laser ejecting end (72).
10. laser cleaning head as claimed in claim 9, it is characterized in that: the optical path between reflecting mirror (2) and scanning mirror (3)
It is equipped with the second condenser lens (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811035283.8A CN108941067A (en) | 2018-09-06 | 2018-09-06 | A kind of high-rate laser cleaning method and the laser cleaning head using this method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811035283.8A CN108941067A (en) | 2018-09-06 | 2018-09-06 | A kind of high-rate laser cleaning method and the laser cleaning head using this method |
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| CN108941067A true CN108941067A (en) | 2018-12-07 |
Family
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| CN201811035283.8A Pending CN108941067A (en) | 2018-09-06 | 2018-09-06 | A kind of high-rate laser cleaning method and the laser cleaning head using this method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020169579A1 (en) * | 2019-02-19 | 2020-08-27 | 4Jet Technologies Gmbh | Laser high-speed tyre cleaning device |
| CN112817147A (en) * | 2021-01-04 | 2021-05-18 | 上海镭天激光设备有限公司 | Octahedral prism device for high-speed one-dimensional high-power laser scanning |
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| CN1760713A (en) * | 2004-10-15 | 2006-04-19 | 杨东佐 | Projection system for displaying video image, and optical working method |
| CN103157904A (en) * | 2013-03-01 | 2013-06-19 | 张立国 | Laser processing device based on dynamic focusing |
| CN204470793U (en) * | 2015-03-24 | 2015-07-15 | 张立国 | A kind of complex foci space-time synchronous hole-drilling system |
| CN105116553A (en) * | 2015-09-08 | 2015-12-02 | 上海嘉强自动化技术有限公司 | Single-galvanometer uniform-speed scanning-based uniform linear light spot optical path system |
| CN206966237U (en) * | 2017-07-07 | 2018-02-06 | 武汉市凯瑞迪激光技术有限公司 | A kind of laser cleaning head |
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| CN108453097A (en) * | 2018-03-13 | 2018-08-28 | 武汉翔明激光科技有限公司 | A kind of laser cleaning mechanism for inner wall of the pipe |
| CN208772055U (en) * | 2018-09-06 | 2019-04-23 | 中国科学院宁波材料技术与工程研究所 | A kind of laser cleaning head |
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2018
- 2018-09-06 CN CN201811035283.8A patent/CN108941067A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1760713A (en) * | 2004-10-15 | 2006-04-19 | 杨东佐 | Projection system for displaying video image, and optical working method |
| CN103157904A (en) * | 2013-03-01 | 2013-06-19 | 张立国 | Laser processing device based on dynamic focusing |
| CN204470793U (en) * | 2015-03-24 | 2015-07-15 | 张立国 | A kind of complex foci space-time synchronous hole-drilling system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020169579A1 (en) * | 2019-02-19 | 2020-08-27 | 4Jet Technologies Gmbh | Laser high-speed tyre cleaning device |
| CN112817147A (en) * | 2021-01-04 | 2021-05-18 | 上海镭天激光设备有限公司 | Octahedral prism device for high-speed one-dimensional high-power laser scanning |
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