CN108914055B - Mask plate and evaporation equipment - Google Patents
Mask plate and evaporation equipment Download PDFInfo
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- CN108914055B CN108914055B CN201810729446.6A CN201810729446A CN108914055B CN 108914055 B CN108914055 B CN 108914055B CN 201810729446 A CN201810729446 A CN 201810729446A CN 108914055 B CN108914055 B CN 108914055B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Abstract
The invention provides a mask plate and vapor deposition equipment, wherein the mask plate comprises: the first mask plate is provided with a plurality of pixel openings and comprises a first preset area and a second preset area; the second mask plate is stacked on one side of the first mask plate and comprises a first projection area and a second projection area; the pixel openings are divided into at least one first sub-area in a first preset area, the second mask plate is provided with a first opening part in a first projection area, the first sub-area is opposite to the at least one first opening part, and the orthographic projection of the first opening part on the first mask plate falls into the corresponding first sub-area; the pixel openings are divided into a plurality of second sub-areas at a second preset area, the second mask plate is provided with a plurality of second opening parts in a second projection area, each second sub-area is opposite to one second opening part, and the orthographic projection of each second sub-area on the second mask plate falls into the corresponding second opening part. The mask plate and the vapor deposition equipment can reduce poor color mixing during vapor deposition.
Description
Technical Field
The invention relates to the technical field of display, in particular to a mask plate and evaporation equipment.
Background
In the O L ED (Organic L light Emission Display, Organic light emitting diode) manufacturing technology, a Mask plate for vacuum evaporation is a vital component, the quality of the Mask plate directly influences the production cost and the product quality, in the Mask plate for the O L ED evaporation process, a Fine Metal Mask (FMM) is one of the most critical devices.
With the rapid development of an AMO L ED (Active-matrix organic light emitting diode) display screen, the display screen has been applied to various fields in people's life, and particularly, recently, the demand in the intelligent wearable field has increased rapidly, and the display screen has been shaped into an irregular shape such as a circular shape rather than a traditional square screen.
The requirement of the O L ED product with the irregular shape such as a circle on an evaporation mask plate is higher, and at present, the evaporation mask plate adopted by the O L ED product with the irregular shape such as a circle mainly comprises the following two types:
firstly, a Cover Open Mask (Cover Open Mask) and a Fine Metal Mask (FMM) are combined to form an evaporation Mask plate, wherein the evaporation Mask plate is formed by stacking a Cover Open Mask below the FMM, and the Cover Open Mask is subjected to irregular shape patterning design of a display area, namely, an opening pattern with an irregular shape is formed on the Cover Open Mask to limit the shape of the display area, and patterning design is not performed on the FMM, namely, the FMM is not required to limit the irregular shape of the display area, and only a plurality of pixel openings distributed in an array are formed;
the second type, the screening strip and the support bar (Cover & Howling stick) and the meticulous metal mask plate (FMM) combination formula coating by vaporization mask plate, this kind of coating by vaporization mask plate sets up crisscross screening strip and the support bar of violently indulging in FMM below, wherein, need carry out the patterning design on FMM, that is to say, be equipped with a plurality of pixel openings on FMM, and a plurality of pixel openings's distribution shape is used for injecing the display area for dysmorphism shape such as circular.
In the vapor deposition mask plates having these two structures, vapor deposition defects such as color mixing occur in different regions of the display substrate during vapor deposition.
Disclosure of Invention
The invention aims to provide a mask plate and a vapor deposition device, which can solve the problem of poor vapor deposition such as color mixing of the vapor deposition mask plate in the prior art.
The technical scheme provided by the invention is as follows:
a mask plate is used for vapor plating on a display substrate; the method comprises the following steps:
the pixel structure comprises a first mask plate and a second mask plate, wherein the first mask plate is provided with a plurality of pixel openings and comprises a first preset area and a second preset area;
the second mask plate is stacked on one side of the first mask plate and comprises a first projection area corresponding to the orthographic projection of the first preset area on the second mask plate and a second projection area corresponding to the orthographic projection of the second preset area on the second mask plate;
the pixel openings are divided into at least one first sub-area in the first preset area, the second mask plate is provided with a first opening part in the first projection area, the shape of the first opening part corresponds to the shape of a display area on the display substrate, the first sub-area is opposite to the at least one first opening part, and the orthographic projection of the first opening part on the first mask plate falls into the corresponding first sub-area;
the plurality of pixel openings are divided into a plurality of second sub-areas at the second preset area, the shapes of the second sub-areas correspond to the shapes of the display areas on the display substrate, the second mask plate is provided with a plurality of second opening parts in the second projection area, each second sub-area is opposite to one second opening part, and the orthographic projection of each second sub-area on the second mask plate falls into the corresponding second opening part.
Further, the first preset area is a middle area of the first mask plate, the second preset area is a peripheral area of the first mask plate, and the peripheral area surrounds the middle area.
Furthermore, the second mask plate is provided with a plurality of supporting bars and a plurality of shielding bars at the second projection area, and the supporting bars and the shielding bars are arranged in a criss-cross mode to form a plurality of second opening parts.
Furthermore, the second mask plate is a plate-shaped structure at the first projection area, and the first opening is arranged on the plate-shaped structure.
Furthermore, the second mask plate is arranged at the second projection area, and the supporting bars and the shielding bars are connected into an integral structure.
Furthermore, the supporting bars, the shielding bars and the plate-shaped structure are connected into an integral structure.
Further, the first opening and the second sub-region are both circular or elliptical in shape.
Further, the first sub-region has a rectangular shape, and the second opening has a rectangular shape.
Further, the number of the first sub-regions is the same as the number of the first opening portions, and one first sub-region corresponds to one first opening portion.
An evaporation equipment comprises the mask plate.
The beneficial effects brought by the invention are as follows:
in the above scheme, the first Mask plate is divided into at least one first sub-region at a first preset region, the second Mask plate is provided with a first opening portion in a first projection region, the shape of the first opening portion is used for limiting the shape of a display region on a display substrate, and the orthographic projection of the first opening portion on the first Mask plate falls into the corresponding first sub-region, so that a structure combining a Cover Open Mask (Cover Open Mask) and a Fine Metal Mask (FMM) is adopted, only a pixel opening is arranged on the first Mask plate, the shape patterning design of the display region is not performed, and the shape patterning design of the display region is performed by using the first opening portion arranged on the second Mask plate; the first mask plate is divided into a plurality of second sub-areas at a second preset area, a second opening part is arranged at a second projection area of the second mask plate, the shape of the second sub-area corresponds to the shape of a display area on the display substrate, and the orthographic projection of each second sub-area on the second mask plate falls into the corresponding second opening part, so that a structure combining a shielding bar, a supporting bar (Cover & Howling stick) and a fine metal mask plate (FMM) is adopted, and the first mask plate is provided with a pixel opening and is also designed for the shape patterning of the display area.
In the scheme, as the combined structure of the shielding Open Mask (Cover Open Mask) and the Fine Metal Mask (FMM) and the combined structure of the shielding bars and the supporting bars (Cover & Howling stick) and the Fine Metal Mask (FMM) can generate poor vapor deposition such as color mixing and the like in different areas of the display substrate during vapor deposition, the combined structure of the shielding Open Mask (Cover Open Mask) and the Fine Metal Mask (FMM) and the combined structure of the shielding bars and the supporting bars (Cover & Howling stick) and the Fine Metal Mask (FMM) are respectively adopted in different areas, so that the combined structure of the shielding Open Mask (Cover Open Mask) and the Fine Metal Mask (FMM) can easily generate poor vapor deposition such as color mixing and the like in the areas where the combined structure of the shielding Open Mask (Cover Open Mask) and the Fine Metal Mask (FMM) are combined, and a structure of combining a shielding Open Mask (Cover Open Mask) and a Fine Metal Mask (FMM) is adopted in an area where poor vapor deposition such as color mixing is easily generated due to the combined structure of the shielding strips, the supporting strips (Cover & Howling stick) and the Fine Metal Mask (FMM), so that the purposes of maximizing the bonding and unfolding of the whole Mask and the display substrate during vapor deposition, reducing the area of a wrinkle area and reducing poor color mixing are achieved.
Drawings
Fig. 1 is a schematic structural diagram of a first mask plate in a mask plate according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a second mask plate in the mask plate according to the embodiment of the present invention;
FIG. 3 is a schematic diagram showing a poor vapor deposition structure after vapor deposition of a conventional vapor deposition mask plate combining a mask plate with a shielding opening and a fine metal mask plate;
fig. 4 is a schematic diagram showing a poor vapor deposition structure after vapor deposition of a conventional vapor deposition mask plate combining a support bar, a blocking bar and a fine metal mask plate.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention, are within the scope of the invention.
Aiming at the problem of poor evaporation such as color mixing of an evaporation mask plate in the prior art, the embodiment of the invention provides the mask plate and the evaporation equipment, which can improve the problem of poor evaporation such as color mixing.
As shown in fig. 1 and fig. 2, a mask plate provided in an embodiment of the present invention is used for performing vapor deposition on a display substrate; the mask plate comprises:
a first mask 100, wherein the first mask 100 is provided with a plurality of pixel openings 101, and the first mask 100 includes a first preset area a and a second preset area B;
and a second mask plate 200 stacked on one side of the first mask plate 100, wherein the second mask plate 200 includes a first projection area a 'corresponding to the orthographic projection of the first preset area a on the second mask plate 200, and a second projection area B' corresponding to the orthographic projection of the second preset area B on the second mask plate 200;
the plurality of pixel openings 101 are divided into at least one first sub-area 100a in the first preset area a, the second mask 200 is provided with a first opening 201 in the first projection area a', the shape of the first opening 201 corresponds to the shape of the display area on the display substrate, the first sub-area 100a is opposite to the at least one first opening 201, and the orthographic projection of the first opening 201 on the first mask 100 falls into the corresponding first sub-area 100 a;
the plurality of pixel openings 101 are divided into a plurality of second sub-areas 100B at the second preset area B, the shape of the second sub-area 100B corresponds to the shape of the display area on the display substrate, the second mask plate 200 is provided with a plurality of second opening portions 202 at the second projection area B', each second sub-area 100B is directly opposite to one second opening portion 202, and the orthographic projection of each second sub-area 100B on the second mask plate 200 falls into the corresponding second opening portion 202.
In the above solution, the first Mask 100 is divided into at least one first sub-region 100a at the first preset region a, the second Mask 200 is provided with a first opening 201 at the first projection region a', the shape of the first opening 201 is used for defining the shape of the display region on the display substrate, and the orthographic projection of the first opening 201 on the first Mask 100 falls into the corresponding first sub-region 100a, so that a structure combining a Cover Open Mask (Cover Open Mask) and a Fine Metal Mask (FMM) is adopted, the first Mask 100 is provided with only the pixel opening 101 without performing the shape patterning design of the display region, and the first opening 201 provided on the second Mask 200 is used for performing the shape patterning design of the display region;
the first mask plate 100 is divided into a plurality of second sub-regions 100B at a second preset region B, the second mask plate 200 is provided with a second opening 202 at a second projection region B', the shape of the second sub-region 100B corresponds to the shape of the display region on the display substrate, and the orthographic projection of each second sub-region 100B on the second mask plate 200 falls into the corresponding second opening 202, so that a structure combining a shielding bar, a supporting bar (Cover & Howlingstick) and a Fine Metal Mask (FMM) is adopted, and not only the pixel opening 101 but also the shape patterning design of the display region is performed on the first mask plate 100.
Because the combined structure of the shielding type opening mask plate and the fine metal mask plate and the combined structure of the shielding strip and the supporting strip and the fine metal mask plate can generate poor vapor deposition such as color mixing and the like in different areas of the display substrate during vapor deposition, the scheme adopts the combined structure of the shielding type opening mask plate and the fine metal mask plate and the combined structure of the shielding strip and the supporting strip and the fine metal mask plate in different areas respectively, so that the combined structure of the shielding strip, the supporting strip and the fine metal mask plate can easily generate poor vapor deposition such as color mixing and the like in the areas where the combined structure of the shielding type opening mask plate and the fine metal mask plate is easy to generate poor vapor deposition such as color mixing and the like, and adopts the combined structure of the shielding type opening mask plate and the fine metal mask plate in the areas where the combined structure of the shielding strip, the supporting strip and the fine, therefore, the purposes of maximizing the bonding and unfolding of the whole mask plate and the display substrate during evaporation, reducing the area of a wrinkle area and reducing poor color mixing are achieved.
In the above scheme, the first preset area a is an area in which poor vapor deposition such as color mixing is likely to occur due to a structure in which the shielding strips, the supporting strips and the fine metal mask plate are combined; the second preset area B is an area which is easy to generate poor vapor deposition such as color mixing and the like by adopting a structure of combining a shielding type opening mask plate and a fine metal mask plate.
The first preset area A and the second preset area B can be respectively subjected to vapor deposition by adopting a combined vapor deposition mask plate of a shielding type opening mask plate and a fine metal mask plate and a combined vapor deposition mask plate of a shielding strip, a supporting strip and the fine metal mask plate in the prior art, and are analyzed and determined according to positions where vapor deposition defects such as color mixing and the like are distributed on the display substrate after vapor deposition. For example:
taking a 1.4watch display product as an example, a combined vapor deposition mask plate of a shielding opening mask plate and a fine metal mask plate is adopted for vapor deposition, and after vapor deposition, the analysis result of the defects is that the color mixing type defects of the peripheral area around the vapor deposition mask plate are high, and the color mixing type defects of the middle area of the whole vapor deposition mask plate are less (as shown in fig. 3);
the vapor plating mask plate is combined by the blocking strips, the supporting strips and the fine metal mask plate for vapor plating, the analysis result of the poor vapor plating mask plate is that the poor vapor plating mask plate has high color mixing type poor color in the middle area, and the poor vapor plating mask plate has less color mixing type poor color in the peripheral area (as shown in fig. 4).
Therefore, in the embodiment provided by the present invention, for example, as shown in fig. 1 and fig. 2, the first predetermined area a is a middle area of the second mask 200, and the second predetermined area B is a peripheral area of the second mask 200, the peripheral area surrounding the middle area.
By adopting the scheme, the structure that the shielding type opening mask plate and the fine metal mask plate are combined is adopted in the middle area of the whole mask plate, so that poor color mixing of the whole mask plate in the middle area can be improved; and the peripheral area adopts the structure that the shielding strips, the supporting bars and the fine metal mask plate are combined, so that the poor color mixing of the whole mask plate in the peripheral area can be improved, and therefore, the mask plate is manufactured by combining the two structures, the bonding and the stretching of the mask plate and the display substrate can be maximized during evaporation, the area of a wrinkle area is reduced, and the poor color mixing is reduced.
It is understood that, in practical applications, the positions of the first preset area a and the second preset area B are not limited thereto, and may be distributed in other positions in different models of display products, which is only an example and is not limited thereto.
In addition, in the mask blank provided in the embodiment of the present invention, the mask blank further includes a frame 300, and the peripheral edges of the first mask blank 100 and the second mask blank 200 are fixed on the frame 300.
In addition, in the mask blank according to the embodiment of the present invention, the second mask blank 200 is provided with a plurality of supporting bars 211 and a plurality of shielding bars 212 at the second projection area B', and the plurality of supporting bars 211 and the plurality of shielding bars 212 are arranged in a criss-cross manner to form the plurality of second opening portions 202.
Adopt above-mentioned scheme, second mask slice 200 is in second projection area B ' department forms through setting up vertically and horizontally staggered's support bar 211 and sheltering from the strip 212 second opening 202, and the structure is similar with traditional contrast that is used for analysis coating by vaporization maldistribution position is with sheltering from the strip and support bar and meticulous metal mask slice combination formula coating by vaporization mask slice structure like this, can avoid because the second projection area B ' structure of second mask slice 200 with carry out the analysis and compare with the bad production that leads to with other factors such as coating by vaporization mask slice structure difference.
It should be understood that, in practical applications, the second mask plate 200 may also be provided as a plate in the second projection area B', and a second opening 202 is formed in the plate, so as to ensure that the orthographic projection of each second sub-area 100B on the second mask plate 200 falls into the corresponding second opening 202.
In addition, in the mask blank provided by the embodiment of the present invention, the second mask blank 200 is a plate-shaped structure at the first projection area a', and the first opening 201 is opened on the plate-shaped structure.
By adopting the above scheme, the second mask plate 200 is provided with a plate-shaped structure at the first projection area a ', and the structure of the plate-shaped structure is similar to that of the traditional shielding type opening mask plate for comparison and fine metal mask plate combined type evaporation mask plate for analyzing the position of poor distribution of evaporation, so that the bad generation caused by the different structures of the first projection area a' of the second mask plate 200 and the evaporation mask plate for comparison for analysis and other factors can be avoided.
It should be understood that, in practical applications, the second mask plate 200 may be disposed in other configurations at the first projection area a', and it is only necessary to ensure that the orthographic projection of the first opening 201 on the first mask plate 100 falls into the corresponding first sub-area 100 a.
In addition, in the exemplary embodiment of the present invention, the supporting bars 211 and the shielding bars 212 of the second mask plate 200 at the second projection area B' are connected as an integral structure.
By adopting the above scheme, the supporting bars 211 and the shielding bars 212 on the second mask plate 200 can be manufactured into an integral structure, and it can be understood that the supporting bars 211 and the shielding bars 212 can also be separately arranged in practical application.
Furthermore, it is further preferable that the supporting bars 211 and the shielding bars 212 are connected to the plate-shaped structure as an integral structure.
By adopting the above scheme, the second mask plate 200 can be designed into an integral structure, when the second preset area B is located in the peripheral area, namely, the support bar 211 and the shielding bar 212 are located in the peripheral area, one end of the support bar 211 or the shielding bar 212 can be welded on the frame 300, and the other end is connected with the plate-shaped structure.
In addition, in the embodiment of the present invention, the first opening 201 and the second sub-region 100b are both circular or elliptical; the first sub-region 100a has a rectangular shape, and the second opening 202 has a rectangular shape.
By adopting the scheme, the mask plate can be applied to manufacturing of display screens with irregular shapes such as a circle or an ellipse, and the first opening part 201 and the second sub-area 100b are used for limiting the shape of a display area, so that the first opening part 201 and the second sub-area 100b are designed to be a circle or an ellipse, and in practical application, the mask plate is not limited to be a circle or an ellipse and can be designed according to the shape of the display area of an actual display product;
the second opening portions 202 are all rectangular, because the openings formed by the support bars 211 and the shielding bars 212 in the conventional vapor deposition mask plate combined with the support bars 211, the shielding bars 212 and the FMM in a crossed manner are regular rectangles, and the second opening portions 202 are not limited to the shape of the display area, and are rectangular, when the second mask plate 200 is stretched, the problems of wrinkles and the like caused by uneven stress can not be generated compared with other shapes;
the first sub-region 100a is rectangular, because the second opening 202 is rectangular, and the distribution area is regular rectangular when the pixel units are arranged on the vapor deposition mask plate combined with the conventional mask type opening mask plate and the FMM, the manufacturing process is simpler than that of the first sub-region 100a having other shapes.
In addition, in the embodiment provided by the present invention, as shown in the figure, the number of the first sub-regions 100a is the same as the number of the first opening portions 201, and one first sub-region 100a corresponds to one first opening portion 201.
With the above scheme, in the first preset area a of the first mask 100, the plurality of pixel units may be divided into at least two first sub-areas 100a, and one first sub-area 100a is disposed corresponding to one first opening 201, in practical applications, the plurality of pixel units in the first preset area a of the first mask 100 may not be divided into areas, that is, only one first sub-area 100a is disposed, and the first sub-area 100a may be disposed corresponding to all the first openings 201.
In addition, as shown in fig. 1, in the mask blank provided in the embodiment of the present invention, the first mask blank 100 may be formed by splicing a plurality of mask bars 110, and as shown in fig. 1, only a plurality of pixel openings 101 are disposed on each mask bar 110 corresponding to the first preset area a, at least one first sub-area 100a is distributed in the plurality of pixel openings 101, that is, the shape patterning design of the display area is not performed, and the pixel openings 101 are divided into a plurality of second sub-areas 100B at each mask bar 110 corresponding to the second preset area B.
In addition, the embodiment of the invention also provides evaporation equipment which comprises the mask plate provided by the embodiment of the invention.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and substitutions can be made without departing from the technical principle of the present invention, and these modifications and substitutions should also be regarded as the protection scope of the present invention.
Claims (10)
1. A mask plate is used for vapor plating on a display substrate; it is characterized by comprising:
the pixel structure comprises a first mask plate and a second mask plate, wherein the first mask plate is provided with a plurality of pixel openings and comprises a first preset area and a second preset area;
the second mask plate is stacked on one side of the first mask plate and comprises a first projection area corresponding to the orthographic projection of the first preset area on the second mask plate and a second projection area corresponding to the orthographic projection of the second preset area on the second mask plate;
the pixel openings are divided into at least one first sub-area in the first preset area, the second mask plate is provided with a first opening part in the first projection area, the shape of the first opening part corresponds to the shape of a display area on the display substrate, the first sub-area is opposite to the at least one first opening part, and the orthographic projection of the first opening part on the first mask plate falls into the corresponding first sub-area;
the plurality of pixel openings are divided into a plurality of second sub-areas at the second preset area, the shapes of the second sub-areas correspond to the shapes of the display areas on the display substrate, the second mask plate is provided with a plurality of second opening parts in the second projection area, each second sub-area is opposite to one second opening part, and the orthographic projection of each second sub-area on the second mask plate falls into the corresponding second opening part.
2. The mask blank according to claim 1,
the first preset area is a middle area of the first mask plate, the second preset area is a peripheral area of the first mask plate, and the peripheral area surrounds the periphery of the middle area.
3. The mask blank according to claim 1,
the second mask plate is provided with a plurality of supporting bars and a plurality of shielding bars at the second projection area, and the supporting bars and the shielding bars are arranged in a criss-cross mode to form a plurality of second opening parts.
4. The mask blank according to claim 3,
the second mask plate is of a plate-shaped structure at the first projection area, and the first opening part is arranged on the plate-shaped structure.
5. The mask blank according to claim 4,
the second mask plate is arranged at the second projection area, and the supporting bars and the shielding bars are connected into an integral structure.
6. The mask blank according to claim 4,
the support bar, the shielding bar and the plate-shaped structure are connected into an integral structure.
7. The mask blank according to claim 1,
the first opening and the second sub-region are both circular or elliptical in shape.
8. The mask blank according to claim 1,
the first sub-region has a rectangular shape, and the second opening has a rectangular shape.
9. The mask blank according to claim 8,
the number of the first sub-regions is the same as the number of the first opening portions, and one first sub-region corresponds to one first opening portion.
10. An evaporation apparatus comprising the mask plate according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810729446.6A CN108914055B (en) | 2018-07-05 | 2018-07-05 | Mask plate and evaporation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810729446.6A CN108914055B (en) | 2018-07-05 | 2018-07-05 | Mask plate and evaporation equipment |
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| Publication Number | Publication Date |
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| CN108914055A CN108914055A (en) | 2018-11-30 |
| CN108914055B true CN108914055B (en) | 2020-07-17 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| TWI622662B (en) * | 2012-01-12 | 2018-05-01 | 大日本印刷股份有限公司 | Vapor deposition mask preparation |
| TWI665320B (en) * | 2013-03-26 | 2019-07-11 | 日商大日本印刷股份有限公司 | Vapor deposition mask, method for manufacturing vapor deposition mask, and method for manufacturing organic semiconductor element |
| KR102418817B1 (en) * | 2013-04-12 | 2022-07-08 | 다이니폰 인사츠 가부시키가이샤 | Vapor deposition mask, vapor deposition mask precursor, vapor deposition mask manufacturing method, and organic semiconductor element manufacturing method |
| CN106521412B (en) * | 2016-11-30 | 2019-01-29 | 京东方科技集团股份有限公司 | A kind of Vapor deposition mask plate and evaporation coating method |
| CN107653437B (en) * | 2017-11-08 | 2019-10-25 | 武汉华星光电半导体显示技术有限公司 | The compound mask plate of vapor deposition |
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