CN108907906A - A kind of non-Newtonian power-law fluid floats polishing method as the liquid of polishing medium - Google Patents
A kind of non-Newtonian power-law fluid floats polishing method as the liquid of polishing medium Download PDFInfo
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- CN108907906A CN108907906A CN201810907288.9A CN201810907288A CN108907906A CN 108907906 A CN108907906 A CN 108907906A CN 201810907288 A CN201810907288 A CN 201810907288A CN 108907906 A CN108907906 A CN 108907906A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The present invention relates to optical element Ultra-Smooth Surface Polishing Techniques fields, and in particular to a kind of non-Newtonian power-law fluid floats polishing method as the liquid of polishing medium.The processing of high efficiency, high quality and low cost is realized to optical glass.Technical solution of the present invention equipment therefor includes pipeline, the bistrique and workbench of intermediate feed flow, polishing fluid is transported to grinding head center by the pipeline, polishing fluid is imported into inside bistrique by polishing fluid through pressure pump, flow through the polishing area on grinding head polishing face and workbench between work piece, bistrique is held up in the liquid film that polishing area fluid is formed, bistrique reaches self-balancing state under the action of liquid, fluid is flowed in polishing area with certain speed, there is shear thickening phenomenon in fluid under shearing force, solid particles wraps up abrasive grain wherein, form flexible fixed abrasive material, form class solid forms, convex peak on work piece is sheared, realize the removal of workpiece surface.
Description
Technical field：
The present invention relates to optical element Ultra-Smooth Surface Polishing Techniques fields, and in particular to a kind of non-Newtonian power-law fluid work
Polishing method is floated for the liquid of polishing medium.
Background technique：
With the development of global economy high speed, the progress and breakthrough of science and technology, processing and the manufacture of optical element are also achieved
Good achievement, particularly with fields such as present Aerospace manufacturing, defence and military, astrosurveillance, civil corporations to optics member
The indices of part are proposed increasingly higher demands.How to realize that efficient optical element, high quality, low cost processing are mesh
The target that preceding Ultra-precision Turning field is pursued.
Currently based on traditional processing basis, more mature Ultraprecision Machining is had already appeared, such as magnetorheological throwing
The polishing technologies such as light, abradant jet polishing, ion beam polishing.But for present processing, there are still certain defects.
For Magnetorheological Polishing, magnetic field is controlled by computer to control processing.It is mainly used in the development of optical element,
Many advantages are had both, for example its polishing efficiency is more much higher than conventional method, and can obtain good face type quality and small sub- table
The optical element etc. of surface damage.But Magnetorheological Polishing is related to the face type of material, i.e., has during the polishing process " from plasticity ", example
Such as when workpiece surface has pit, magnetic fluid can fill pit, and the surface around pit will appear " comet phenomenon ".
Abradant jet polishing to processed workpiece without tool wear, without heat affecting, reaction force is small, processing flexibility is high,
Boundless edge effect can remove grinding skin and substantially without sub-surface damage, be very suitable to big glass polishing.But for jet stream
It impacts after workpiece surface and sputters that serious, energy loss is serious abrasive grain, and it is point polishing that it, which polishes feature, and polishing efficiency is low.
Ion beam polishing is penetrated in vacuum environment by ion gun using the energetic atom of charging or ion as polishing medium
To work piece, workpiece surface material sputters under the bombardment of ion beam, which is detached from workpiece surface, is realized in atom magnitude
The removal of material, thus the removal efficiency of material is lower, but equipment investment needed for ion beam grinding is larger, operating cost compared with
It is high.
Summary of the invention：
The present invention proposes that a kind of non-Newtonian power-law fluid floats polishing method as the liquid of polishing medium, realizes to optical glass
The processing of high efficiency, high quality and low cost.
In order to solve the problems existing in the prior art, the technical scheme is that：A kind of non-Newtonian power-law fluid conduct throwing
The liquid of optical medium floats polishing method, and equipment therefor includes the bistrique and workbench of pipeline, intermediate feed flow, and the pipeline is by polishing fluid
It is transported to grinding head center, polishing fluid is imported into inside bistrique by polishing fluid through pressure pump, is flowed through on grinding head polishing face and workbench
Polishing area between work piece holds up bistrique in the liquid film that polishing area fluid is formed, and bistrique is under the action of liquid
Reach self-balancing state, fluid is flowed in polishing area with certain speed, and it is existing shear thickening occur for fluid under shearing force
As solid particles wraps up abrasive grain wherein, forms flexible fixed abrasive material, class solid forms is formed, to the convex peak on work piece
It is sheared, realizes the removal of workpiece surface；The polishing fluid is non-Newtonian power-law fluid shear thickening polishing fluid, by following matter
The raw material for measuring number is constituted：100 parts are amounted to, average grain diameter d214~18 parts of the cerium oxide of=5um, average grain diameter d1=12nm's
9 parts of silica, it the rest is dispersing agent polyethylene glycol.
Above-mentioned wheelhead pressure is 30~40kg.
Compared with prior art, it is an advantage of the invention that：
(1) the characteristics of present invention makes full use of fluid to flow has the good goodness of fit, relative to Jet Polishing with workpiece
Point polishing, the disposable large area removal effect of workpiece may be implemented.
(2) it the invention belongs to flexible polishing technology scope, both can use the flow behavior of fluid, workpiece will not have been generated
Sub-surface damage, and can use the shear thickening behavior of shear thickening fluid, fixed grinding tool is formed to workpiece rough surface
Convex peak realizes removal very well, high relative to Newtonian fluid removal efficiency.
(3) present invention plays self-balancing effect to system by fluid, compared to the mode precision of mechanical control balance
It is much higher.The present invention is not high to the control accuracy requirement of equipment, and grinding wheel head structure is simple, casts aside external auxiliary field-effect
(such as electric field, magnetic field) is effectively reduced processing cost, that is, improves the high efficiency of processing, while improving the high quality of processing.
Detailed description of the invention：
Fig. 1 schematic structural diagram of the device of the invention；
Fig. 2 is microcosmic removal schematic diagram；
Fig. 3 is the roughness situation of change of workpiece surface certain point,
Wherein Fig. 3 (a) figure is initial roughness, and Fig. 3 (b) is 1h surface of polished roughness,
Fig. 3 (c) figure is roughness after 2h polishing, and Fig. 3 (d) figure is roughness after 3h polishing；
The situation of change of the difference Fig. 4 roughness；
The reference numerals are as follows：
1-collector；2-polishing areas；3-bistriques；4-workbench；5-workpiece；6-pressure pumps；7- liquid storage cylinder；
8-shearings；9-flow velocitys；10-Particle Clusters；11-solid particles；12-abrasive grains；13-convex peaks；14- workpiece
Specific embodiment：
The present invention is described in detail below in conjunction with drawings and examples.
The method of the present invention equipment therefor is the grinding head polishing device (referring to Fig. 1) of common center feed flow, including collector
1, bistrique 3, workbench 4, work piece 5, pressure pump 6 and 7. work piece 5 of liquid storage cylinder are placed on workbench 4, in liquid storage cylinder 7
Polishing fluid is sent with certain pressure to bistrique 3 by pipeline, and polishing fluid passes through between 3 lower end burnishing surface of bistrique and work piece 5,
Along the collector 1 that workbench 4 flows into lower section, the polishing fluid of collector 1 is sent into liquid storage cylinder 7, and the polishing fluid in liquid storage cylinder 7 is through pressing
Power pump 6 is sent into bistrique 3 by pipeline, is moved in circles.
Method of the invention is：The polishing fluid is non-Newtonian power-law fluid shear thickening polishing fluid, by following mass parts
Several raw materials is constituted：100 parts are amounted to, average grain diameter d214~18 parts of the cerium oxide of=5um, average grain diameter d1The dioxy of=12nm
9 parts of SiClx, it the rest is dispersing agent polyethylene glycol.Polishing fluid is imported into inside bistrique by polishing fluid through pressure pump, flows through bistrique throwing
Polishing area in smooth surface and workbench between work piece holds up bistrique in the liquid film that polishing area fluid is formed, bistrique
Reach self-balancing state under the action of liquid, fluid is flowed in polishing area with certain speed, the fluid under shearing force
There is shear thickening phenomenon, solid particles wraps up abrasive grain wherein, forms flexible fixed abrasive material, class solid forms is formed, to quilt
Convex peak on workpiece is sheared, and realizes the removal of workpiece surface.The wheelhead pressure is 30~40kg.
Referring to fig. 2, microcosmic cutting mechanisms of the invention：With the flowing 9 of fluid, 13 opposite grinding of convex peak of workpiece rough surface
Grain 12 generates certain resistance, when resistance reaches a certain size, starts to generate shear thickening effect, the solid particles 11 in fluid
It can assemble rapidly, form " particle race " 10, abrasive grain is held, is wrapped up wherein, the hydrodynamic shear 8 of laminar flow is generated, biggish
It under Fluid pressure, enhances solid particles and the holding of abrasive grain is acted on, a kind of similar " flexible fixation grinding tool " is formed, thus to work
The part of part 14 rough surface protrusion removes.
The present invention utilizes the burnishing surface with shear thickening effect, in conjunction with the structure of bistrique, disposably realizes to workpiece big
The removal effect of area, for shear thickening fluid, when the flow velocity very little of fluid, the convex peak 13 of workpiece rough surface produces it
Raw resistance is insufficient to allow its generation shear thickening phenomenon or this phenomenon unobvious, and solid particles wraps up abrasive grain 12
Loosely, micro removal is realized to convex peak 13, when fluid flows at a certain velocity, as shown in Fig. 2, convex peak 13 produces fluid
Raw resistance wraps up solid particles tightly wherein abrasive grain 12, forms Particle Cluster, forms class solid, cuts to the realization of convex peak 13
It cuts, to achieve the effect that remove workpiece surface.After fluid, which realizes convex peak 13, to be removed, workpiece reduces its resistance,
Fluid is restored to flow regime again, similar to the flowing of Newtonian fluid.The phenomenon that being not in line clogging.
Embodiment 1：
A certain amount of non-Newtonian power-law fluid shear thickening polishing fluid is configured, setting wheelhead pressure is M=40kg, polishing fluid
Mass fraction wt% (the CeO of middle cerium oxide2)=14%, the mass fraction wt% (SiO of silica2)=9% the rest is poly-
Ethylene glycol；The SiO2Average grain diameter is about d1=12nm, CeO2Average Particle Diameters are d2=5um, inlet pressure are set as
0.5MPa.Workpiece selects K9 glass, workpiece size diameter DWorkpiece=150mm, the burnishing surface diameter of bistrique are DBistrique=
150mm, workpiece polishing time are set as 3h (time interval of measurement workpiece surface is 1h).It is polished using this method, it is right
The newview8000 type white light interferometer of workpiece application ZYGO company after the processing of initial and different time is to workpiece surface
Roughness detected.
Referring to Fig. 3, Fig. 3 (a) figure is initial roughness, and Fig. 3 (b) is 1h surface of polished roughness, and Fig. 3 (c) figure is 2h
Roughness after polishing, Fig. 3 (d) figure are roughness after 3h polishing.As can be seen from the figure roughness changes significantly.
Embodiment 2：
A certain amount of non-Newtonian power-law fluid shear thickening polishing fluid is configured, setting wheelhead pressure is M=40kg, polishing fluid
Mass fraction wt% (the CeO of middle cerium oxide2)=18%, the mass fraction wt% (SiO of silica2)=9% the rest is poly-
Ethylene glycol.Using this method to size diameter size DWorkpiece=150mm K9 glass is polished.
Embodiment 3：
As setting dispersed phase silica quality score wt% (SiO2)=9%, abrasive grain cerium oxide mass fraction wt%
(CeO2)=18%, the rest is polyethylene glycol.Inlet pressure is set as PEnter=0.3MPa, wheelhead pressure M=34.3kg, workpiece are thrown
It is set as 90min between light time (time interval of measurement workpiece surface is 30min).After the processing of initial and different time
The newview8000 type white light interferometer of workpiece application ZYGO company detects the roughness of workpiece surface.
Here it chooses 9 points different on workpiece to be detected, test results are shown in figure 4, and initial roughness has bright
Aobvious decline has reached saturation to the later period.
Claims (2)
1. a kind of non-Newtonian power-law fluid floats polishing method as the liquid of polishing medium, it is characterised in that：Equipment therefor includes pipe
Polishing fluid is transported to grinding head center by the bistrique and workbench in road, intermediate feed flow, the pipeline, and polishing fluid will be polished through pressure pump
Liquid is imported into inside bistrique, flows through the polishing area on grinding head polishing face and workbench between work piece, in polishing area stream
The liquid film that body is formed holds up bistrique, and bistrique reaches self-balancing state under the action of liquid, and fluid is in polishing area with certain
Speed flowing, there is shear thickening phenomenon in fluid under shearing force, and solid particles wraps up abrasive grain wherein, is formed flexible solid
Abrasive material, formed class solid forms, the convex peak on work piece is sheared, realizes the removal of workpiece surface；The polishing
Liquid is non-Newtonian power-law fluid shear thickening polishing fluid, is made of the raw material of following mass fractions：100 parts are amounted to, average grain diameter
d214~18 parts of the cerium oxide of=5um, average grain diameter d19 parts of the silica of=12nm, the rest is dispersing agent polyethylene glycol.
2. a kind of non-Newtonian power-law fluid according to claim 1 floats polishing method, feature as the liquid of polishing medium
It is：The wheelhead pressure is 30~40kg.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810907288.9A CN108907906A (en) | 2018-08-08 | 2018-08-08 | A kind of non-Newtonian power-law fluid floats polishing method as the liquid of polishing medium |
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| CN201810907288.9A CN108907906A (en) | 2018-08-08 | 2018-08-08 | A kind of non-Newtonian power-law fluid floats polishing method as the liquid of polishing medium |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110539235A (en) * | 2019-07-31 | 2019-12-06 | 方国亮 | Novel double-sided lathe capable of preventing stones from being scratched in numerical control polishing process |
| CN111702560A (en) * | 2020-06-03 | 2020-09-25 | 大连理工大学 | Polishing head suitable for shear thickening polishing and polishing method |
| CN112518561A (en) * | 2020-10-23 | 2021-03-19 | 湖南科技大学 | Optical rheological polishing method and device for optical-shear combined induced thickening effect |
| CN113352219A (en) * | 2021-06-10 | 2021-09-07 | 浙江工业大学 | Ball screw force rheological polishing method assisted by hairbrush |
| CN114346913A (en) * | 2021-12-31 | 2022-04-15 | 上海交通大学 | Nano cerium oxide liquid auxiliary grinding supply system and method |
| CN114378718A (en) * | 2022-01-27 | 2022-04-22 | 大连理工大学 | non-Newtonian fluid dispersing device and method |
| CN115433523A (en) * | 2022-09-29 | 2022-12-06 | 湘潭大学 | Multiphase shear thickening polishing solution and preparation method thereof |
| CN116082962A (en) * | 2023-01-05 | 2023-05-09 | 中国科学院合肥物质科学研究院 | Pseudoplastic fluid polishing solution and polishing method |
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| CN102717325A (en) * | 2012-06-08 | 2012-10-10 | 浙江工业大学 | Ultra-precise curved surface finishing method based on non-Newtonian fluid shear thickening effect |
| CN103331685A (en) * | 2013-07-01 | 2013-10-02 | 浙江工业大学 | Machining device based on non-Newtonian fluid shear thickening mechanism polishing method |
| CN104191340A (en) * | 2014-08-29 | 2014-12-10 | 浙江工业大学 | Ultra-precision machining device based on non-Newtonian fluid shear thickening and electrolysis composition effect |
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Patent Citations (3)
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| CN102717325A (en) * | 2012-06-08 | 2012-10-10 | 浙江工业大学 | Ultra-precise curved surface finishing method based on non-Newtonian fluid shear thickening effect |
| CN103331685A (en) * | 2013-07-01 | 2013-10-02 | 浙江工业大学 | Machining device based on non-Newtonian fluid shear thickening mechanism polishing method |
| CN104191340A (en) * | 2014-08-29 | 2014-12-10 | 浙江工业大学 | Ultra-precision machining device based on non-Newtonian fluid shear thickening and electrolysis composition effect |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110539235A (en) * | 2019-07-31 | 2019-12-06 | 方国亮 | Novel double-sided lathe capable of preventing stones from being scratched in numerical control polishing process |
| CN110539235B (en) * | 2019-07-31 | 2020-09-01 | 诸暨易联众创企业管理服务有限公司 | Double-sided lathe capable of preventing stones from being scratched in numerical control polishing |
| CN111702560A (en) * | 2020-06-03 | 2020-09-25 | 大连理工大学 | Polishing head suitable for shear thickening polishing and polishing method |
| CN111702560B (en) * | 2020-06-03 | 2021-07-02 | 大连理工大学 | Polishing head suitable for shear thickening polishing and polishing method |
| CN112518561A (en) * | 2020-10-23 | 2021-03-19 | 湖南科技大学 | Optical rheological polishing method and device for optical-shear combined induced thickening effect |
| CN112518561B (en) * | 2020-10-23 | 2022-04-22 | 湖南科技大学 | Optical rheological polishing method and device for optical-shear combined induced thickening effect |
| CN113352219A (en) * | 2021-06-10 | 2021-09-07 | 浙江工业大学 | Ball screw force rheological polishing method assisted by hairbrush |
| CN114346913A (en) * | 2021-12-31 | 2022-04-15 | 上海交通大学 | Nano cerium oxide liquid auxiliary grinding supply system and method |
| CN114378718A (en) * | 2022-01-27 | 2022-04-22 | 大连理工大学 | non-Newtonian fluid dispersing device and method |
| CN114378718B (en) * | 2022-01-27 | 2022-11-11 | 大连理工大学 | non-Newtonian fluid dispersing device and method |
| CN115433523A (en) * | 2022-09-29 | 2022-12-06 | 湘潭大学 | Multiphase shear thickening polishing solution and preparation method thereof |
| CN116082962A (en) * | 2023-01-05 | 2023-05-09 | 中国科学院合肥物质科学研究院 | Pseudoplastic fluid polishing solution and polishing method |
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Application publication date: 20181130 |