CN107378687B - Large caliber reflecting mirror iteration based on abrasion of grinding wheel prediction pre-compensates for method for grinding - Google Patents
Large caliber reflecting mirror iteration based on abrasion of grinding wheel prediction pre-compensates for method for grinding Download PDFInfo
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- CN107378687B CN107378687B CN201710677052.6A CN201710677052A CN107378687B CN 107378687 B CN107378687 B CN 107378687B CN 201710677052 A CN201710677052 A CN 201710677052A CN 107378687 B CN107378687 B CN 107378687B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
Abstract
A kind of large caliber reflecting mirror iteration precompensation method for grinding based on abrasion of grinding wheel prediction, the present invention relates to large caliber reflecting mirror iteration to pre-compensate for method for grinding.The present invention is to reach target surface figure accuracy by repeatedly replacing grinding wheel and be ground repeatedly in the case where fixed nominal grinding depth to solve the prior art, leads to that grinding wheel loss is serious, surface figure accuracy poor low and low grinding efficiency problem.The present invention includes: one: establishing prediction model of the wheel grinding ratio G about grinding parameter；Two: establishing radial dimension Abrasion prediction model at grinding process medium plain emery wheel grinding points；Three: establishing aspheric surface error prediction model；Four: method being pre-compensated for by iteration and calculates each point grinding surface shape error amount on aspherical bus, until meeting the requirements；Step 5: the final predicted value of name grinding depth at each contact point in record iterative process carries out numerical control grinding machining prgraming and following process.The present invention is used for optical aspherical surface reflecting mirror Grinding Technology field.
Description
Technical field
The present invention relates to optical aspherical surface reflecting mirror Grinding Technology field, in particular to large caliber reflecting mirror iteration is pre-
Compensate method for grinding.
Background technique
With the rapid development of aerospace technology, the mankind are more and more frequent to the far-reaching exploration of universe and space, to sky
Between optical system have the demand of higher precision, optical mirror is space optics equipment (such as space telescope) key portion
Part, the requirement to the precision, stability and service life of basal body of reflector etc. is even more higher and higher, more severe to material performance requirement
It carves, current spatial lens material mainly uses silicon, optical glass, SiC ceramic etc., and SiC ceramic has specific strength, Gao Bigang
Degree, highly corrosion resistant and the advantages that high-dimensional stability, in aerospace optical system mirror using more and more extensive,
It is also increasing that SiC ceramic reflects aperture of mirror, and due to their higher hard crisp characteristics, works as so that ultraprecise abrasive machining becomes
These preceding main manufacturing process of spatial lens material, high-precision grinding are formed in removal effect with higher during abrasive machining
Rate, becomes the big mirror processing efficiency of raising and machining accuracy plays very crucial effect.
It is general in large caliber reflecting mirror process since there is the high brittle material property of high rigidity due to SiC ceramic
Logical ceramic base wear of diamond wheel is very serious, and the radial wear of skive is high during a grinding forming
Up to some tens of pm, and grinding wheel is needed to frequently replace, so that Aspheric grinding face shape error is big, grinding efficiency is low.Therefore, it is necessary to set
Meter exploitation has the grinding wheel of long service life and meets the new process of heavy caliber SiC ceramic reflecting mirror grinding, new method.
Make in heavy caliber SiC ceramic grinding process can to avoid frequent replacement grinding wheel, reach a piece of grinding wheel be once ground can be completed it is non-
Spherical surface forming and the purpose with higher surface figure accuracy.
Traditional Aspheric grinding is generally ground using ceramic base diamond grinding wheel, since vitrified bond is with non-
Often high brittleness, matrix quick abrasion in grinding process, grinding wheel size and shape precision serious wear, and metal bonded wheel because
It has the characteristics that abrasive grain holding power is strong, bond strength is high, wearability is good, can bear biggish grinding force, has longer
Service life can be used for heavy caliber SiC ceramic reflecting mirror grinding process.And metal anchoring agent diamond wheel can be used
ELID electrolytic in-process dressing technology can make grinding wheel keep higher sharp degree in grinding process, well stable to obtain
Processing quality.
Heavy caliber SiC ceramic reflecting mirror grinding process medium plain emery wheel abrasion is inevitable, and Aspheric grinding grinding wheel from
Material removal amount is gradually increased when aspherical center is moved along generatrix direction to edge, causes abrasion of grinding wheel uneven, and face shape is missed
For difference there is also larger difference, tradition grinding is to be ground repeatedly in the case where fixed nominal grinding depth by repeatedly replacement grinding wheel
Reach target surface figure accuracy, grinding wheel loss is serious, surface figure accuracy is poor, and grinding efficiency is low, therefore, needs to aperture aspherical
Grinding processing method and technique are optimized and are improved.
Summary of the invention
It the purpose of the present invention is to solve the prior art is passed through repeatedly more in the case where fixed nominal grinding depth
It changes grinding wheel to be ground repeatedly to reach target surface figure accuracy, causing grinding wheel to be lost, serious, the poor low and grinding efficiency of surface figure accuracy is low
The problem of, and propose a kind of large caliber reflecting mirror iteration based on abrasion of grinding wheel prediction and pre-compensate for method for grinding.
It is a kind of based on abrasion of grinding wheel prediction large caliber reflecting mirror iteration precompensation method for grinding the following steps are included:
The method of the present invention is on the basis of only considering to have with Aspheric grinding face shape error caused by grinding wheel dimension wears
Implement.The method of the present invention establishes abrasive wheel grinding wheel arc overall size Wear prediction mould by the experiment of skive basis grinding abrasion
Type, and then according to aspherical in Principle of Grinding and Cutting and grinding process medium plain emery wheel-grinding process of workpiece geometrical contact model foundation
The face shape error prediction model of each point on bus；The name grinding for predicting that face shape error changes corresponding point position by transformation is deep
Degree, and Aspheric grinding face shape error is predicted again according to revised nominal grinding depth, it is ground by this method to corresponding
Nominal grinding depth at point carries out successive ignition amendment, until prediction Aspheric grinding face shape error maximum value is missed less than face shape
Poor permissible value.The method of the present invention is using long service life metal anchoring agent diamond wheel as grinding tool, without heavy caliber
Aspheric grinding is to be proposed that the wheel grinding track for meeting face shape error requirement, avoids repetition replacement grinding wheel operation, improves
Aspheric grinding precision and grinding efficiency.
Step 1: grinding experiment is carried out using metallic bond arc surface skive, is established using regression analysis
Prediction model of the wheel grinding ratio G about grinding parameter；
Wherein αpFor grinding depth, vsFor grinding speed, vwFor grinding wheel feed speed, k, a, b, c are constant, grinding ginseng
Number refers to αp、vsAnd vw；
Step 2: it according to aspherical bus expression formula, is worn in conjunction with aspherical material removal removal volume and grinding wheel volume
The relationship of amount establishes radial dimension Abrasion prediction model at grinding process medium plain emery wheel grinding points；
Δrx=f (αp,vs,vw,R,r,Vw)
Wherein R is grinding wheel base radius, and r is abrasive wheel grinding wheel arc radius surface, VwVolume is removed for Aspheric grinding；
Step 3: the grinding wheel radial dimension Abrasion prediction model established using step 2, above aspherical bus
Shape error and grinding wheel radial dimension abrasion loss geometrical relationship, establish aspheric surface error prediction model；
Step 4: using the face shape error prediction model established in step 3, the grinding of each point on aspherical bus is calculated
Face shape error value, establishes cartesian coordinate system on aspherical, is x along bus horizontal direction using the aspherical centre of gyration as z-axis
Axis is ground the name of x coordinate point if the grinding surface shape error amount of x coordinate point (contact point) is greater than target face shape error amount
Depth is iterated precompensation processing, and calculates the face shape error value of the point after iteration precompensation, until this face shape error meter
Calculation value is less than target face shape error amount, carries out the processing of x+1 coordinate points；If the grinding surface shape error amount of x coordinate point is less than or equal to
Target face shape error amount, then carry out the processing of x+1 coordinate points, until the grinding surface shape error amount of all the points is equal on aspherical bus
Until target face shape error amount；
Step 5: the final predicted value of name grinding depth at each contact point in record iterative process carries out numerical control grinding and adds
Work programming and following process.
The invention has the benefit that
Using metal anchoring agent diamond wheel, grinding wheel service life is effectively increased, meanwhile, it is the On-line electrolytic dissolution of grinding wheel
Finishing provides may；It tests to obtain arc diamond wheel overall size wear model by plain grinding, is used for Aspheric grinding face shape
Error prediction, the theoretical model that the method for the present invention can provide according to the present invention before aperture aspherical is ground determine grinding wheel reality
When grinding points nominal grinding depth and motion profile, use metal anchoring agent diamond wheel realize aspheric surface it is primary
Grinding forming, the process for avoiding grinding wheel replacement and being ground repeatedly, improves grinding surface figure accuracy and grinding efficiency.This hair
Bright be put forward for the first time in an iterative manner pre-compensates for (i.e. using aspheric different grinding wheels-workpiece contact point name grinding depth
Each point becomes nominal grinding depth on the bus of face), it proposes to become nominal grinding depth method for grinding, avoids previous frequently replacement grinding wheel
And multiple grinding process, Aspheric grinding technical process is simplified, large caliber reflecting mirror grinding efficiency can be improved 3 to 5 times.
Detailed description of the invention
Fig. 1 is metal anchoring agent diamond wheel profile and dimension wears schematic diagram used in the present invention.Wherein, r is
Abrasive wheel grinding wheel arc radius, R are grinding wheel base radius, and Δ r is abrasive wheel grinding wheel arc radius abrasion loss, O (x0,z0) it is the grinding wheel centre of gyration.
Fig. 2 is flow chart of the present invention.
Specific embodiment
Specific embodiment 1: as shown in Fig. 2, a kind of large caliber reflecting mirror iteration precompensation based on abrasion of grinding wheel prediction
Method for grinding the following steps are included:
Metal anchoring agent diamond wheel dimension wears prediction model is initially set up, according to non-spherical reflector mirror body material
Material-SiC ceramic material characteristic selects metallic bond arc surface skive, and bonding agent bond strength is high, can be effective
Grinding wheel service life is improved, determines grinding wheel organization parameter and form parameter on this basis；Using grinding ratio principle, metal is used
Anchoring agent diamond grinding wheel carries out grinding experiment, determines that grinding wheel dimension wears amount and grinding removal material volume and grinding process are joined
Several relational model, for predicting different grinding parameters and material removal amount condition lower grinding wheel dimension wears amount.Heavy caliber is general
Refer to 1.5m or more.
Step 1: grinding experiment is carried out using metallic bond arc surface skive, is established using regression analysis
Prediction model of the wheel grinding ratio G about grinding parameter；
Wherein αpFor grinding depth, vsFor grinding speed, vwFor grinding wheel feed speed, k, a, b, c are constant, pass through mill
It cuts experiment and regression analysis determines.
Design metallic bond Arc Diamond Wheel, grinding wheel organization parameter and profile parameters, grinding wheel shape such as Fig. 1 institute
Show.
Step 2: it according to aspherical bus expression formula, is worn in conjunction with aspherical material removal removal volume and grinding wheel volume
The relationship of amount establishes radial dimension Abrasion prediction model at grinding process medium plain emery wheel grinding points；
Δrx=f (αp,vs,vw,R,r,Vw)
Wherein R is grinding wheel base radius, and r is abrasive wheel grinding wheel arc radius surface, VwVolume is removed for Aspheric grinding；
Step 3: the grinding wheel radial dimension Abrasion prediction model established using step 2, above aspherical bus
Shape error and grinding wheel radial dimension abrasion loss geometrical relationship, establish aspheric surface error prediction model；
Step 4: using the face shape error prediction model established in step 3, the grinding of each point on aspherical bus is calculated
Face shape error value, establishes cartesian coordinate system on aspherical, is x along bus horizontal direction using the aspherical centre of gyration as z-axis
Axis is ground the name of x coordinate point if the grinding surface shape error amount of x coordinate point (contact point) is greater than target face shape error amount
Depth is iterated precompensation processing, and calculates the face shape error value of the point after iteration precompensation, until this face shape error meter
Calculation value is less than target face shape error amount, carries out the processing of x+1 coordinate points；If the grinding surface shape error amount of x coordinate point is less than or equal to
Target face shape error amount, then carry out the processing of x+1 coordinate points, until the grinding surface shape error amount of all the points is equal on aspherical bus
Until target face shape error amount；
Step 5: the final predicted value of name grinding depth at each contact point in record iterative process carries out numerical control grinding and adds
Work programming and following process.
The present invention provides a kind of heavy caliber superhard material reflecting mirror abrasive grinding wheel Motion trajectory and real-time grinding points
Nominal grinding depth iteration prediction technique.The method of the present invention is only considering grinding wheel dimension wears to non-spherical reflector grinding surface shape
On the basis of the influence of error, Arc Diamond Wheel shape under identical grinding condition is established by theoretical and experimental study first
And prediction model of the dimension wears amount about grinding parameter, pass through grinding wheel at the aspherical generatrix direction difference grinding points of theory analysis
The relationship of dimension wears amount and face shape error is established at real-time grinding wheel-workpiece Grinding Contact point as caused by grinding wheel dimension wears
Face shape error prediction model will predict that face shape error is superimposed to by certain transformation model using target face shape error as standard
On nominal grinding depth at real-time grinding points, finally it is respectively less than in the Aspheric grinding face shape error met at aspherical each point
Stop iteration when target face shape error, determines different grinding points name grinding depths in practical grinding process and based on this
Plan grinding wheel centre of gyration motion profile.The method of the present invention can determine sand on the basis of not implementing aperture aspherical grinding
The nominal grinding depth and motion profile for taking turns real-time grinding points, select metal anchoring agent diamond wheel as grinding tool with reality
Now face shape is once-forming, improves grinding surface figure accuracy and grinding efficiency.
Specific embodiment 2: the present embodiment is different from the first embodiment in that: mill is established in the step 3
Cut the face shape error prediction model of grinding wheel and workpiece contact point on aspherical bus in the process specifically:
Wherein ExFor the Aspheric grinding face shape error on aspherical bus at centre of gyration x coordinate point, aspheric is used
Face is detected vector height and the high difference of aspherical ideal vector and is indicated, βxFor on aspherical bus at centre of gyration x point
Tangential tilt angle.
On the basis of skive dimension wears prediction model, revolution non-spherical reflector bus expression formula is provided,
Initial cut parameter process parameter, foundation Principle of Grinding and Cutting, aspherical profile model and grinding wheel-workpiece Contact Geometric model,
Analyze material removal removal volume, grinding process parameters and grinding wheel dimension wears amount at grinding process medium plain emery wheel-workpiece contact point
Relationship, establish in grinding process grinding wheel-workpiece contact point face shape error prediction model on aspherical bus.
Other steps and parameter are same as the specific embodiment one.
Specific embodiment 3: the present embodiment is different from the first and the second embodiment in that: if x in the step 4
The grinding surface shape error amount of coordinate points is greater than target face shape error amount, then is iterated to the nominal grinding depth of x coordinate point pre-
The detailed process of compensation deals are as follows:
Nominal grinding depth by increasing grinding points compensates the aspheric surface error due to caused by abrasion of grinding wheel, by x
The grinding surface shape error amount of coordinate points is superimposed on nominal grinding depth after conversion, and with the new name grinding after superposition
Depth is ground, the face shape error value after calculating iteration precompensation；By successive ignition precompensation until the grinding of x coordinate point
When face shape error predicted value is less than target face shape error amount, x coordinate point name grinding depth superposition terminates, and record is at this time at x point
Nominal grinding depth αpx(n)And the number of iterations n, carry out the Iterative calculation method of x+1 coordinate points name grinding depth；
Nominal grinding depth expression formula after superposition is as follows:
αpx(n)=αpx(n-1)+εx(n-1)(n≥2)
Wherein εx(n-1)For the grinding surface shape error calculation value obtained after (n-1)th iteration of x coordinate point, αpx(1)=αp,
Other steps and parameter are the same as one or two specific embodiments.
Specific embodiment 4: unlike one of present embodiment and specific embodiment one to three: the name is ground
It cuts in the iterative process of depth, the prediction aspheric surface error after x coordinate point nth iteration is by equation table as follows
Show:
Wherein,For at x coordinate point name grinding depth be αpx(n)When face shape error predicted value, it may be assumed thatIt is obtained for first n-1 times iterative calculation
Face shape error sum.
The nominal grinding depth α at aspherical different Grinding Contact points obtained by the method for the inventionpx(n)With iteration time
Number n is all different.
Other steps and parameter are identical as one of specific embodiment one to three.
Specific embodiment 5: unlike one of present embodiment and specific embodiment one to four: the step 5
Motion track of the grinding wheel centre of gyration of middle determination in grinding process specifically:
Wherein x0For grinding wheel centre of gyration x-axis coordinate value, z0For grinding wheel centre of gyration z-axis coordinate value.
Other steps and parameter are identical as one of specific embodiment one to four.
The present invention can also have other various embodiments, without deviating from the spirit and substance of the present invention, this field
Technical staff makes various corresponding changes and modifications in accordance with the present invention, but these corresponding changes and modifications all should belong to
The protection scope of the appended claims of the present invention.
Claims (5)
1. a kind of large caliber reflecting mirror iteration based on abrasion of grinding wheel prediction pre-compensates for method for grinding, it is characterised in that: the base
In abrasion of grinding wheel prediction large caliber reflecting mirror iteration precompensation method for grinding the following steps are included:
Step 1: grinding experiment is carried out using metallic bond arc surface skive, establishes grinding wheel using regression analysis
Prediction model of the grinding ratio G about grinding parameter；
Wherein αpFor grinding depth, vsFor grinding speed, vwFor grinding wheel feed speed, k, a, b, c are constant；
Step 2: according to aspherical bus expression formula, in conjunction with aspherical material removal removal volume and grinding wheel volume wear
Relationship establishes radial dimension Abrasion prediction model at grinding process medium plain emery wheel grinding points；
Δrx=f (αp,vs,vw,R,r,Vw)
Wherein R is grinding wheel base radius, and r is abrasive wheel grinding wheel arc radius surface, VwVolume is removed for Aspheric grinding；
Step 3: the grinding wheel radial dimension Abrasion prediction model established using step 2 is missed according to shape above aspherical bus
Difference and grinding wheel radial dimension abrasion loss geometrical relationship, establish aspheric surface error prediction model；
Step 4: using the face shape error prediction model established in step 3, the grinding surface shape of each point on aspherical bus is calculated
Error amount establishes cartesian coordinate system on aspherical, is x-axis along bus horizontal direction using the aspherical centre of gyration as z-axis,
If the grinding surface shape error amount of x coordinate point is greater than target face shape error amount, the nominal grinding depth of x coordinate point is iterated
Precompensation processing, and the face shape error value of the point after iteration precompensation is calculated, until this face shape error calculated value is less than target
Face shape error value carries out the processing of x+1 coordinate points；If the grinding surface shape error amount of x coordinate point is less than or equal to target face shape error
Value, then carry out the processing of x+1 coordinate points, until the grinding surface shape error amount of all the points is respectively less than equal to target on aspherical bus
Until face shape error value；
Step 5: the final predicted value of name grinding depth, the determining grinding wheel centre of gyration at each contact point in record iterative process
Motion track in grinding process carries out numerical control grinding machining prgraming and following process.
2. a kind of large caliber reflecting mirror iteration based on abrasion of grinding wheel prediction according to claim 1 pre-compensates for grinding side
Method, it is characterised in that: the face shape mistake of grinding wheel and workpiece contact point on aspherical bus in grinding process is established in the step 3
Poor prediction model specifically:
Wherein ExFor the Aspheric grinding face shape error on aspherical bus at centre of gyration x coordinate point, βxFor aspherical mother
Tangential tilt angle on line at centre of gyration x point.
3. a kind of large caliber reflecting mirror iteration based on abrasion of grinding wheel prediction according to claim 2 pre-compensates for grinding side
Method, it is characterised in that: if the grinding surface shape error amount of x coordinate point is greater than target face shape error amount in the step 4, x is sat
The nominal grinding depth of punctuate is iterated the detailed process of precompensation processing are as follows:
Nominal grinding depth by increasing grinding points compensates aspheric surface error caused by abrasion of grinding wheel, by x coordinate point
Grinding surface shape error amount is superimposed on nominal grinding depth, and is ground with the new nominal grinding depth after superposition, is calculated
Face shape error value after iteration precompensation；By iteration precompensation until the grinding surface shape error prediction value of x coordinate point is less than mesh
When marking face shape error value, x coordinate point name grinding depth superposition terminates, and records the nominal grinding depth α at x point at this timepx(n)And
The number of iterations n, n >=2 carry out the Iterative calculation method of x+1 coordinate points name grinding depth；
Nominal grinding depth expression formula after superposition is as follows:
αpx(n)=αpx(n-1)+εx(n-1)
Wherein εx(n-1)For the grinding surface shape error calculation value obtained after (n-1)th iteration of x coordinate point.
4. a kind of large caliber reflecting mirror iteration based on abrasion of grinding wheel prediction according to claim 3 pre-compensates for grinding side
Method, it is characterised in that: in the iterative process of the name grinding depth, the prediction aspheric surface after x coordinate point nth iteration
Error is indicated by equation as follows:
Wherein,For at x coordinate point name grinding depth be αpx(n)When face shape error predicted value, it may be assumed that Preceding n-1 iterative calculation obtains
The sum of face shape error.
5. a kind of large caliber reflecting mirror iteration based on abrasion of grinding wheel prediction according to claim 4 pre-compensates for grinding side
Method, it is characterised in that: motion track of the grinding wheel centre of gyration determined in the step 5 in grinding process specifically:
Wherein x0For grinding wheel centre of gyration x-axis coordinate value, z0For grinding wheel centre of gyration z-axis coordinate value.
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| CN109093454B (en) * | 2018-10-15 | 2020-09-25 | 北京工业大学 | Rapid assessment method for damage depth of thinned sub-surface of silicon wafer |
| CN109483365B (en) * | 2018-12-04 | 2020-09-08 | 天津津航技术物理研究所 | Method for processing calcium fluoride material step rotary aspheric lens |
| CN111638682B (en) * | 2020-05-26 | 2023-04-28 | 四川新迎顺信息技术股份有限公司 | Compensation method for grinding peripheral tooth helical blade back knife surface by using abrasion grinding wheel |
| CN113275977B (en) * | 2021-06-07 | 2022-02-11 | 中国工程物理研究院激光聚变研究中心 | Method for determinacy compensating shape error of guide rail of aspheric optical element processing machine tool |
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| CN102390045A (en) * | 2011-07-01 | 2012-03-28 | 南京航空航天大学 | Grinding tool capable of actively compensating surface shape abrasion errors and compensating method thereof |
| DE102013005714B4 (en) * | 2013-04-02 | 2017-03-23 | Rodenstock Gmbh | Production of microstructured spectacle lenses in the manufacture of prescription glasses |
| CN103862380B (en) * | 2014-03-26 | 2016-06-01 | 上海交通大学 | The few axle grinding of optical mirror plane tilts cambered surface grinding wheel error and analyzes and make-up system |
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