CN108899293B - Solar cell crystalline silicon cleaning device capable of preventing dead angles from being cleaned - Google Patents
Solar cell crystalline silicon cleaning device capable of preventing dead angles from being cleaned Download PDFInfo
- Publication number
- CN108899293B CN108899293B CN201810737315.2A CN201810737315A CN108899293B CN 108899293 B CN108899293 B CN 108899293B CN 201810737315 A CN201810737315 A CN 201810737315A CN 108899293 B CN108899293 B CN 108899293B
- Authority
- CN
- China
- Prior art keywords
- tray
- bottom plate
- solar cell
- clamping
- crystalline silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 32
- 229910021419 crystalline silicon Inorganic materials 0.000 title claims abstract description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 21
- 230000000694 effects Effects 0.000 abstract description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 230000003670 easy-to-clean Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning In General (AREA)
Abstract
The invention discloses a solar cell crystalline silicon cleaning device for preventing dead angles from cleaning, which comprises: a water tank, a tray set, and a high-pressure air flow supply mechanism for providing a high-pressure air flow, wherein: the inner side wall of the water tank is provided with a first chute and a second chute which are oppositely arranged; the tray group comprises at least one tray, and one side of the tray is provided with a first sliding block and a second sliding block far away from one side of the first sliding block; the tray comprises a bottom plate and a plurality of side plates, the bottom plate is of a hollow structure, a limit column is arranged below the bottom plate, each side plate is fixed above the bottom plate, and a space is reserved between any two adjacent side plates to form a clamping groove; the inner parts of the side plates are respectively provided with a clamping cavity, and the clamping cavities on the side plates are communicated with each other through pipelines; the side wall of one side of any adjacent two side plates, which is close to each other, is provided with an air hole communicated with the clamping cavity; the high-pressure air flow supply mechanism is detachably connected with the pipeline. The invention can effectively improve the cleaning effect of the workpiece and has no cleaning dead angle.
Description
Technical Field
The invention relates to the technical field of monocrystalline silicon piece production and manufacturing, in particular to a solar cell crystalline silicon cleaning device capable of preventing dead angles from being cleaned.
Background
The surface of the monocrystalline silicon wafer needs to be cleaned after the monocrystalline silicon wafer is produced and polished, and the existing cleaning equipment is more traditional, namely the monocrystalline silicon wafer is put into a water tank to be washed. The method is not clean, and because the monocrystalline silicon wafers are thinner, many monocrystalline silicon wafers are overlapped together, and the dead angle is easy to clean.
Disclosure of Invention
Based on the technical problems in the background technology, the invention provides a solar cell crystalline silicon cleaning device capable of preventing dead angles from being cleaned.
The invention provides a solar cell crystalline silicon cleaning device for preventing dead angles from cleaning, which comprises: a water tank, a tray set, and a high-pressure air flow supply mechanism for providing a high-pressure air flow, wherein:
the inner side wall of the water tank is provided with a first chute which extends vertically and a second chute which is arranged opposite to the first chute;
the tray set comprises at least one tray, a first sliding block used for being clamped into the first sliding groove is arranged on one side of the tray, and a second sliding block used for being clamped into the second sliding groove is arranged on one side of the tray, which is far away from the first sliding block;
the tray comprises a bottom plate and a plurality of side plates, the bottom plate is of a hollow structure, a limit column which is vertically arranged and fixed with the bottom plate is arranged below the bottom plate, and each side plate is fixed above the bottom plate, and a space is reserved between any two adjacent side plates to form a clamping groove for placing a workpiece; the inner parts of the side plates are respectively provided with a clamping cavity, and the clamping cavities on the side plates are communicated with each other through pipelines; the side wall of one side of any adjacent two side plates, which is close to each other, is provided with an air hole communicated with the clamping cavity;
the high-pressure air flow supply mechanism is detachably connected with the pipeline.
Preferably, the pipeline comprises a plurality of branch pipes which are communicated with the main pipe, and each branch pipe corresponds to the clamping cavity of each side plate one by one and is respectively communicated with the corresponding clamping cavity.
Preferably, any branch pipe is communicated with the corresponding clamping cavity through a control valve capable of automatically controlling the opening and closing degree.
Preferably, the side walls of the two sides of any one side plate are respectively provided with a sensor for detecting whether the workpiece in the clamping groove is abutted against the side wall of the side plate, and when any one sensor detects that the workpiece is abutted against the side wall of the side plate, the control valve corresponding to the side plate controls the opening and closing degree of the control valve to be increased.
Preferably, both ends of the clamping groove are provided with baffle plates fixed with the bottom plate, and the baffle plates are hollow structures.
Preferably, a plurality of baffles fixed with the bottom plate are arranged in the clamping groove, each baffle is of a hollow structure, and the baffles are arranged at intervals from one end of each baffle to the other end of each baffle in the clamping groove so as to divide the clamping groove into a plurality of groove cavities.
Preferably, the tray is provided with a plurality of limiting grooves, and the upper tray surface of any tray is provided with limiting columns on the same straight line.
Preferably, the high pressure air flow supply mechanism is fixedly mounted on the outer wall of the water tank.
According to the invention, the first sliding groove and the second sliding groove which are oppositely arranged are arranged on the inner side wall of the water tank, and the first sliding block and the second sliding block are arranged on the tray, so that the tray can slide up and down in the water tank by utilizing the matching of the first sliding block and the second sliding block with the first sliding groove and the second sliding groove respectively, and the feeding and discharging actions of the tray are facilitated; simultaneously, through setting up the structure of tray for have a plurality of draw-in grooves on the tray to be used for placing the work piece that waits to wash, simultaneously, utilize high-pressure air flow feed mechanism and pipeline cooperation to carry the high-pressure air current to each clamp intracavity portion respectively, thereby form two high-pressure air currents that flow in opposite directions in the inside of each draw-in groove, with the work piece that makes that is located the draw-in groove with these two air currents is in erectly form, so that work piece in the cleaning process except bottom and tray contact all are in unsettled state, make it not wash the dead angle, and rivers in the basin constantly form the washing to the work piece under the effect of air current, and then can effectively improve the cleaning performance of work piece.
Drawings
Fig. 1 is a schematic structural diagram of a solar cell crystalline silicon cleaning device capable of preventing dead angles from being cleaned;
fig. 2 is a schematic structural view of the side plate in the solar cell crystalline silicon cleaning device for preventing dead angle cleaning.
Detailed Description
The technical scheme of the invention is described in detail through specific embodiments.
As shown in fig. 1-2, fig. 1 is a schematic structural diagram of a solar cell crystalline silicon cleaning device capable of preventing dead angles from being cleaned; fig. 2 is a schematic structural view of the side plate in the solar cell crystalline silicon cleaning device for preventing dead angle cleaning.
Referring to fig. 1-2, a solar cell crystalline silicon cleaning device capable of preventing dead angles from being cleaned according to an embodiment of the present invention includes: a water tank 1, a tray group, and a high-pressure air flow supply mechanism 2 for supplying a high-pressure air flow, wherein: the inner side wall of the water tank 1 is provided with a first chute which extends vertically and a second chute which is arranged opposite to the first chute. The tray group comprises a plurality of trays 3, and one side of each tray 3 is provided with a first sliding block used for being clamped into the first sliding groove, and one side of the tray group, which is far away from the first sliding block, is provided with a second sliding block used for being clamped into the second sliding groove.
The tray 3 comprises a bottom plate 31 and a plurality of side plates 32, wherein the bottom plate 31 is of a hollow structure, a limit column 4 which is vertically arranged and fixed with the bottom plate 31 is arranged below the bottom plate 31, each side plate 32 is fixed above the bottom plate 31, and a space is reserved between any two adjacent side plates 32 to form a clamping groove for placing a workpiece; the inner parts of the side plates 32 are respectively provided with a clamping cavity a, and the clamping cavities a on the side plates 32 are communicated with each other through a pipeline 5; and air holes b communicated with the clamping cavities a are formed in the side walls of one side, close to each other, of any two adjacent side plates 32. The high-pressure air flow supply mechanism 2 is detachably connected with the pipeline 5.
The invention works as follows: firstly, respectively placing workpieces to be cleaned into each clamping groove on the tray 3, respectively matching the first sliding block and the second sliding block with the first sliding groove and the second sliding groove to enable the tray 3 filled with the workpieces to slide into the water tank along the inner side wall of the water tank 1, and enabling a certain height space to be formed between any two adjacent layers of trays by utilizing a limit column 4 at the bottom of the tray 3; then, high-pressure air flow is conveyed to the inside of each clamping cavity a by utilizing the high-pressure air flow supply mechanism 2 so as to form two convection air flows on two sides of each workpiece, and the workpiece is in a vertical state by utilizing the two convection air flows, so that all parts of the workpiece except the contact of the bottom and the tray 3 are in a suspended state in the cleaning process, no cleaning dead angle exists, and water flow in the water tank 1 continuously flushes the workpiece under the action of the air flow, so that the cleaning effect of the workpiece can be effectively improved.
According to the invention, the first sliding groove and the second sliding groove which are oppositely arranged are arranged on the inner side wall of the water tank 1, and the first sliding block and the second sliding block are arranged on the tray 3, so that the tray 3 can slide up and down in the water tank 1 by utilizing the matching of the first sliding block and the second sliding block with the first sliding groove and the second sliding groove respectively, and the feeding and discharging actions of the tray 3 are facilitated; simultaneously, through setting up the structure of tray 3 for have a plurality of draw-in grooves on the tray 3 to be used for placing the work piece that waits to wash, simultaneously, utilize high-pressure air flow feed mechanism 2 and pipeline 5 cooperation to carry the high-pressure air current respectively to each clamp chamber a inside, thereby form two high-pressure air currents that flow in opposite directions in the inside of each draw-in groove, with the work piece that makes in the draw-in groove that utilizes these two air currents is in erectly form, does not have the washing dead angle, and then effectively improve the cleaning performance of work piece.
In addition, in this embodiment, the pipeline 5 includes a plurality of branch pipes that are responsible for a plurality of and are responsible for the intercommunication, and each branch pipe and the clamp chamber a of each curb plate 32 one-to-one and respectively with the clamp chamber a intercommunication that corresponds, the arrangement of this structure not only can effectively carry the clean and tidy aesthetic property of tray 3 outward appearance, can reduce the maintenance degree of difficulty simultaneously.
In this embodiment, any one of the branch pipes is communicated with the corresponding clamping cavity a through a control valve capable of automatically controlling the opening and closing degree, so that the air inflow of the corresponding clamping cavity a is controlled by adjusting the opening and closing degree of the control valve, and the air outflow intensity of the corresponding air hole b is adjusted, so that the workpiece is always in an upright state in the cleaning process.
In this embodiment, the two side walls of any one side plate 32 are respectively provided with a sensor for detecting whether the workpiece in the clamping groove is abutted against the side wall of the side plate 32, and when any one of the sensors detects that the workpiece is abutted against the side wall of the side plate 32, the control valve corresponding to the side plate 32 controls the opening and closing degree to increase so as to increase the air inflow of the clamping cavity a, and further enhance the air outlet strength of the air hole b, so as to push the workpiece to the other side, thereby ensuring that the workpiece is always in an upright state in the cleaning process.
In this embodiment, the two ends of the clamping groove are respectively provided with a baffle plate 6 fixed with the bottom plate 31, and the baffle plates 6 are hollow structures, so that the baffle plates 6 can be used to prevent the workpieces in the clamping groove from sliding out from the two ends of the clamping groove.
In this embodiment, a plurality of baffles 6 fixed to the bottom plate 31 are disposed inside the clamping groove, each baffle 6 is in a hollow structure, and each baffle 6 is disposed at a distance from one end of the baffle to the other end of the baffle inside the clamping groove so as to divide the clamping groove into a plurality of groove cavities, so as to improve the accommodating capacity of the tray 3.
In this embodiment, the upper disc surface of any one tray 3 is provided with a limit groove, and the limit groove and the limit post 4 on the tray 3 are located on the same line, when each tray 3 is placed in the water tank 1 in sequence, the limit post 4 on the tray 3 located on the upper layer can be inserted into the limit groove located on the lower layer, so as to achieve a good positioning effect.
In this embodiment, the high-pressure air flow supply mechanism 2 is fixedly mounted on the outer wall of the water tank 1.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art, who is within the scope of the present invention, should make equivalent substitutions or modifications according to the technical scheme of the present invention and the inventive concept thereof, and should be covered by the scope of the present invention.
Claims (6)
1. Solar cell crystalline silicon belt cleaning device at clean dead angle of preventing, its characterized in that includes: a water tank (1), a tray set, and a high-pressure air flow supply mechanism (2) for supplying a high-pressure air flow, wherein:
the inner side wall of the water tank (1) is provided with a first chute which extends vertically and a second chute which is arranged opposite to the first chute; the tray set comprises at least one tray (3), a first sliding block used for being clamped into the first sliding groove is arranged on one side of the tray (3), and a second sliding block used for being clamped into the second sliding groove is arranged on one side of the tray far away from the first sliding block; the tray (3) comprises a bottom plate (31) and a plurality of side plates (32), wherein the bottom plate (31) is of a hollow structure, a limiting column (4) which is vertically arranged and fixed with the bottom plate (31) is arranged below the bottom plate (31), each side plate (32) is internally fixed above the bottom plate (31), and a space is reserved between any two adjacent side plates (32) to form a clamping groove for placing a workpiece; the side plates (32) are internally provided with clamping cavities (a), and the clamping cavities (a) on the side plates (32) are communicated with each other through a pipeline (5); air holes (b) communicated with the clamping cavities (a) of the two adjacent side plates (32) are arranged on the side wall of one side, which is close to each other;
the high-pressure air flow supply mechanism (2) is detachably connected with the pipeline (5);
the two side walls of any side plate (32) are respectively provided with a sensor for detecting whether a workpiece in the clamping groove is abutted against the side wall of the side plate (32), and when any one sensor detects that the workpiece is abutted against the side wall of the side plate (32), a control valve corresponding to the side plate (32) controls the opening and closing degree of the control valve to be increased; both ends of the clamping groove are provided with baffle plates (6) fixed with the bottom plate (31), and the baffle plates (6) are hollow structures.
2. The solar cell crystalline silicon cleaning device for preventing dead angles according to claim 1, wherein the pipeline (5) comprises a plurality of branch pipes which are communicated with the main pipe, and each branch pipe corresponds to the clamping cavity (a) of each side plate (32) one by one and is respectively communicated with the corresponding clamping cavity (a).
3. The dead-angle-preventing solar cell crystalline silicon cleaning device according to claim 2, wherein any one of the branch pipes is communicated with the corresponding clip cavity (a) through a control valve capable of automatically controlling the opening and closing degree.
4. The solar cell crystalline silicon cleaning device for preventing dead angles according to claim 1, wherein a plurality of baffles (6) fixed with the bottom plate (31) are arranged in the clamping groove, each baffle (6) is of a hollow structure, and each baffle (6) is arranged in the clamping groove from one end to the other end at intervals so as to divide the clamping groove into a plurality of groove cavities.
5. The solar cell crystalline silicon cleaning device for preventing dead angles according to any one of claims 1 to 4, wherein a plurality of trays (3) are provided, limiting grooves are formed in the upper disc surface of any one tray (3), and the limiting grooves and limiting columns (4) on the tray (3) are positioned on the same straight line.
6. The dead-angle-preventing solar cell crystalline silicon cleaning apparatus according to any one of claims 1 to 4, wherein the high-pressure air flow supply mechanism (2) is fixedly installed on the outer wall of the water tank (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810737315.2A CN108899293B (en) | 2018-07-06 | 2018-07-06 | Solar cell crystalline silicon cleaning device capable of preventing dead angles from being cleaned |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810737315.2A CN108899293B (en) | 2018-07-06 | 2018-07-06 | Solar cell crystalline silicon cleaning device capable of preventing dead angles from being cleaned |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108899293A CN108899293A (en) | 2018-11-27 |
| CN108899293B true CN108899293B (en) | 2023-11-17 |
Family
ID=64348849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810737315.2A Active CN108899293B (en) | 2018-07-06 | 2018-07-06 | Solar cell crystalline silicon cleaning device capable of preventing dead angles from being cleaned |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108899293B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111933559A (en) * | 2020-08-28 | 2020-11-13 | 江苏润阳悦达光伏科技有限公司 | Wet method flower basket for reducing contact marks of silicon wafers |
Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4332857A1 (en) * | 1992-09-25 | 1994-04-21 | Mitsubishi Electric Corp | Semiconductor wafer cleaning appts. associated with prod. cassette - handles wafers set upright in portable rack for mechanised transport between isopropyl alcohol cleaning and drying stations |
| JPH0864667A (en) * | 1994-08-24 | 1996-03-08 | Kawasaki Steel Corp | Cassette for semiconductor wafer |
| WO1999034420A1 (en) * | 1997-12-26 | 1999-07-08 | Spc Electronics Corporation | Wafer cleaning equipment and tray for use in wafer cleaning equipment |
| JP2000037671A (en) * | 1998-07-24 | 2000-02-08 | Mitsubishi Electric Corp | Method of and apparatus for treating surface of substrate |
| JP2003077882A (en) * | 2001-08-31 | 2003-03-14 | Shimada Phys & Chem Ind Co Ltd | Cleaning and drying equipment |
| JP2003151867A (en) * | 2001-11-12 | 2003-05-23 | Hitachi Kokusai Electric Inc | Substrate treatment apparatus |
| US6911097B1 (en) * | 2000-07-31 | 2005-06-28 | Taiwan Semiconductor Manufacturing Company | Photoresist stripper using nitrogen bubbler |
| KR20100093933A (en) * | 2009-02-17 | 2010-08-26 | 네오세미테크 주식회사 | Equipment for cleaning silicon solar cell wafers |
| JP2011228404A (en) * | 2010-04-16 | 2011-11-10 | Sharp Corp | Washing device, washing method, solar cell manufacturing system and solar cell manufacturing method |
| KR20150056287A (en) * | 2013-11-15 | 2015-05-26 | 김윤수 | Ultrasonic cleansing device for lcd pannel |
| CN204927319U (en) * | 2015-09-09 | 2015-12-30 | 新奥光伏能源有限公司 | Wash basket of flowers and belt cleaning device |
| CN106783702A (en) * | 2017-02-16 | 2017-05-31 | 常州市科沛达超声工程设备有限公司 | Silicon chip flower basket |
| CN206961808U (en) * | 2017-07-14 | 2018-02-02 | 君泰创新（北京）科技有限公司 | Wafer Cleaning frock |
| CN107999465A (en) * | 2017-11-20 | 2018-05-08 | 东丽酒伊织染（南通）有限公司 | A kind of heald ultrasonic wave automatic washing device and method |
| CN208753272U (en) * | 2018-07-06 | 2019-04-16 | 天长市百盛半导体科技有限公司 | A kind of solar battery crystalline silicon cleaning device at anti-cleaning dead angle |
-
2018
- 2018-07-06 CN CN201810737315.2A patent/CN108899293B/en active Active
Patent Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4332857A1 (en) * | 1992-09-25 | 1994-04-21 | Mitsubishi Electric Corp | Semiconductor wafer cleaning appts. associated with prod. cassette - handles wafers set upright in portable rack for mechanised transport between isopropyl alcohol cleaning and drying stations |
| JPH0864667A (en) * | 1994-08-24 | 1996-03-08 | Kawasaki Steel Corp | Cassette for semiconductor wafer |
| WO1999034420A1 (en) * | 1997-12-26 | 1999-07-08 | Spc Electronics Corporation | Wafer cleaning equipment and tray for use in wafer cleaning equipment |
| JP2000037671A (en) * | 1998-07-24 | 2000-02-08 | Mitsubishi Electric Corp | Method of and apparatus for treating surface of substrate |
| US6911097B1 (en) * | 2000-07-31 | 2005-06-28 | Taiwan Semiconductor Manufacturing Company | Photoresist stripper using nitrogen bubbler |
| JP2003077882A (en) * | 2001-08-31 | 2003-03-14 | Shimada Phys & Chem Ind Co Ltd | Cleaning and drying equipment |
| JP2003151867A (en) * | 2001-11-12 | 2003-05-23 | Hitachi Kokusai Electric Inc | Substrate treatment apparatus |
| KR20100093933A (en) * | 2009-02-17 | 2010-08-26 | 네오세미테크 주식회사 | Equipment for cleaning silicon solar cell wafers |
| JP2011228404A (en) * | 2010-04-16 | 2011-11-10 | Sharp Corp | Washing device, washing method, solar cell manufacturing system and solar cell manufacturing method |
| KR20150056287A (en) * | 2013-11-15 | 2015-05-26 | 김윤수 | Ultrasonic cleansing device for lcd pannel |
| CN204927319U (en) * | 2015-09-09 | 2015-12-30 | 新奥光伏能源有限公司 | Wash basket of flowers and belt cleaning device |
| CN106783702A (en) * | 2017-02-16 | 2017-05-31 | 常州市科沛达超声工程设备有限公司 | Silicon chip flower basket |
| CN206961808U (en) * | 2017-07-14 | 2018-02-02 | 君泰创新（北京）科技有限公司 | Wafer Cleaning frock |
| CN107999465A (en) * | 2017-11-20 | 2018-05-08 | 东丽酒伊织染（南通）有限公司 | A kind of heald ultrasonic wave automatic washing device and method |
| CN208753272U (en) * | 2018-07-06 | 2019-04-16 | 天长市百盛半导体科技有限公司 | A kind of solar battery crystalline silicon cleaning device at anti-cleaning dead angle |
Non-Patent Citations (1)
| Title |
|---|
| 一种优化的太阳能电池清洗装置;门学萍;王俊盈;赵晨;;科技创新导报(14);全文 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108899293A (en) | 2018-11-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207139451U (en) | A kind of seamless pipe process equipment | |
| CN206435531U (en) | A kind of repetend ability of swimming solar silicon wafers prerinse equipment | |
| CN108899293B (en) | Solar cell crystalline silicon cleaning device capable of preventing dead angles from being cleaned | |
| CN105396818B (en) | A kind of rotary-type cylinder cover for diesel engine cleaning device | |
| CN109065472B (en) | Auxiliary device for cleaning crystalline silicon of solar cell | |
| CN206543749U (en) | A kind of spiral Chemical Manufacture bleaching system | |
| CN213738768U (en) | Integrated synchronous pulse aeration device | |
| CN201164749Y (en) | Device for distributing water and gas for filter chamber backwashing | |
| CN201106066Y (en) | Oil field conduit cleaning equipment | |
| CN205074283U (en) | Novel cleaning device | |
| CN107983700B (en) | Automatic cleaning device for thin-wall bushing | |
| CN107792914A (en) | A kind of organic solvent waste water separation control system | |
| CN217455476U (en) | Cooling device for stone carving machine | |
| CN106962448B (en) | Automatic sheep lung of continuous type washs grout production line fast | |
| TWI707714B (en) | Ion exchange device and method of use | |
| TWM626328U (en) | Laser cutting machine | |
| CN206009384U (en) | A kind of solar silicon wafers change groove cleaning device | |
| KR101621956B1 (en) | Ejector improved model gravity type filtering equipment | |
| CN208121247U (en) | A kind of single silicon-chip pipeline system RENA etching device | |
| CN210253325U (en) | Liquid bubble cleaning device for carrier tank of grinding head of semiconductor equipment | |
| CN208753272U (en) | A kind of solar battery crystalline silicon cleaning device at anti-cleaning dead angle | |
| CN102783514A (en) | Aquatic product cleaning bench | |
| CN107226505A (en) | Dissolved air flotation machine | |
| CN202555028U (en) | Vertical type double-cavity backwash medium filter | |
| CN216574464U (en) | Multi-groove common water supply system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |