CN108896654A - Energy consumption fact measurement method based on piezoelectric sound wave resonant transducer - Google Patents
Energy consumption fact measurement method based on piezoelectric sound wave resonant transducer Download PDFInfo
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- CN108896654A CN108896654A CN201810449456.4A CN201810449456A CN108896654A CN 108896654 A CN108896654 A CN 108896654A CN 201810449456 A CN201810449456 A CN 201810449456A CN 108896654 A CN108896654 A CN 108896654A
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
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Abstract
The invention discloses a kind of Energy consumption fact measurement methods based on piezoelectric sound wave resonant transducer, by measuring twice to the effective power of piezoelectric sound wave resonant transducer before and after load test substance, the Energy consumption fact due to caused by the test substance of the certain volume of load is obtained.Compared with the existing Energy consumption fact measurement method based on qcm sensor, the present invention passes through the power meter reading before and after measurement adsorbent, the relationship of application quality factor and Energy consumption fact solves Energy consumption fact, and test process is simple, and measurement accuracy is high.
Description
Technical field
The invention belongs to electronic measuring technology fields, more specifically, are related to a kind of based on piezoelectric sound wave resonant mode
The Energy consumption fact measurement method of sensor, can be applied to the fields such as chemistry, material, biology and physics.
Background technique
Currently, (including piezoelectric quartz crystal, piezoelectric ceramics, piezoelectric membrane, carbon based on piezoelectric sound wave resonant transducer
Sour lithium etc.) Energy consumption fact measurement relevant report it is seldom, document only few in number describes micro- based on quartz crystal
The Energy consumption fact measurement method of balance.
Quartz crystal microbalance (QCM, Quartz Crystal Microbalance) sensor is that one kind works in thickness
Shear mode, the perception device made of piezoelectric quartz crystalline material belong to piezoelectric sound wave resonant transducer, it confronts
Amount variation is very sensitive, and commonly used to detect small mass change, the quality testing of nanogram magnitude may be implemented.
Sauerbrey G is in the frequency variation of nineteen fifty-nine discovery qcm sensor and the mass change of its adsorption at line
Property variation relationship (see paper G.Sanerbrey, Verwendung yon Schwingquartzcn zur Wiigung
dilnncr Schichten und zur Mikrowiigung,Z.Phys.,155(1959)206-222.)：
Wherein, f0It is fundamental resonance frequency, ρqIt is the density of quartz crystal, μqIt is the elastic properties of materials coefficient of quartz, AsIt is heavy
The surface area of integrated membrane, Δ m are surface deposition qualities, and n is overtone number, n=1,3,5 ....This discovery is so that qcm sensor exists
It is used widely in micro- quality perception field.
But Sauerbrey equation, that is, formula (1) has stringent application conditions, i.e. adsorbent under gas phase condition,
Film is with rigid manner, is uniformly adsorbed on sensor electrode surface, while requiring the film rigidly adsorbed in sensor electricity
Sideslipping motion does not occur for pole surface.
And in liquid phase Newtonian liquid in application, due to liquid viscosity effect presence, the frequency of qcm sensor output signal
Can change, while its output power can also change, Kanasawa model demonstrate the frequency variation of sensor with
The square root of the density and viscosity product of Newtonian liquid is directly proportional, (see paper " Kanazawa, K.Keiji, and
J.G.G.Ii."Frequency of a quartz microbalance in contact with liquid."
Analytical Chemistry 57.8(1985):1770-1771.”)。
When qcm sensor adsorption visco-elastic material, since there are more complicated loss modulus for visco-elastic material
And storage modulus, so that the resonance frequency of qcm sensor may increase, it is also possible to reduce, which results in ring from frequency merely
The angle answered is inaccurate come the characteristic for analyzing viscoplasticity thin film dielectrics, so needing to establish new model.
In short, due to hydration effect and imprison effect or polymer and biology point between water and adsorbent
Friction effect of non-rigid characteristic and deposition film between son etc. all can oscillation to qcm sensor it is lossy.When this
When being lost very big, the linear ratio relation between qcm sensor frequency shift (FS) and surface quality variation is with regard to no longer valid.
At this time, to guarantee the accuracy of sensor data analysis, there are two types of approach：First is that establishing suitable theoretical model to above-mentioned
The information that situation introduces is interpreted；Second is that using suitable technological means, for example the frequency shift (FS) of qcm sensor is acquired simultaneously
Information and Energy consumption fact, establish solving equations, this just needs to measure Energy consumption fact；
Currently, there are mainly two types of the Energy consumption fact measurement methods based on piezoelectric sound wave resonant transducer：
First is that using the Kasemo of Sweden professor team as representative, by measurement frequency shifted by delta f simultaneously and energy dissipation because
Sub- Δ D solves the problems, such as this, and referred to as QCM-D response model is (see paper " Rodahl, Michael, and B.Kasemo. "
Frequency and dissipation-factor responses to localized liquid deposits on a
QCM electrode."Sensors&Actuators B Chemical 37.1(1996):111-116.”)。
As shown in Figure 1, deactivating qcm sensor with a pulse first, makes its oscillation, be then turned off driving signal, make
Exponentially form decays the oscillation amplitude of its qcm sensor, measures the time τ of its decayingm, to obtain Energy consumption fact Δ
D=1/ π f τm。
When Sweden Kasemo teaches team measurement Energy consumption fact Δ D, using transient response method, hold to a certain extent
Vulnerable to external influence.When extraneous subtle disruption is likely to cause test data inaccurate；Meanwhile in addition transient response
In method, the acquisition of Energy consumption fact Δ D is to use the method for average, and continuous on-off (passes through driving circuit in a short time
Computer control signal generator constantly exports pulse to qcm sensor), qcm sensor is repeatedly then measured by oscillograph
The decline time of output signal is simultaneously averaged, in this way since charge accumulation effects make test result inaccurate；In addition, because of oscillation
The die-away time of device is generally 10-6Second (microsecond) magnitude, therefore the resolution ratio of test equipment and required precision are very high.
Second is that the propositions such as Germany D.Johannsmann are based on steady-state response method measurement Energy consumption fact (see paper
" Johannsmann D.Modeling of QCM Data [J] .Unpublished Manuscript, 2006. "), such as Fig. 2 institute
Show, after powering on, using frequency spectrum (converting interaction circuit by signal, frequency spectrum captures circuit) capture qcm sensor output signal
Steady-state amplitude peak value, bandwidth (half of half-band width) Γ at series resonance frequency and half power points, obtain energy dissipation because
Sub- Δ D=2 Γ/f.But the mode of fitting has been used for the determination of half of half-band width point, do linearization process, test result
It is not accurate enough.
Obviously, the measurement of existing Energy consumption fact, either Transient Method or steady state method, measurement process are more multiple
Miscellaneous, measurement data accuracy is to be improved.
Summary of the invention
It is an object of the invention to overcome deficiency in the prior art, provide a kind of based on piezoelectric sound wave resonant mode sensing
The Energy consumption fact measurement method of device improves the accuracy of measurement data to simplify measurement process.
For achieving the above object, the present invention is based on the measurements of the Energy consumption fact of piezoelectric sound wave resonant transducer
Method, which is characterized in that include the following steps：
(1), piezoelectric sound wave resonant transducer is connected to driving circuit, driving circuit is connected to D.C. regulated power supply (electricity
Pressure, electric current are readable), the output of driving circuit is then connected to power meter again；
(2), after powering on, piezoelectric sound wave resonant transducer is started to work, and records the output work of D.C. regulated power supply
Rate, that is, system total power P0(read D.C. regulated power supply voltage and electric current, and be multiplied obtain), subsequent recording power meter it is defeated
Out as the effective power P of piezoelectric sound wave resonant transducer1；
(3), in the case where keeping D.C. regulated power supply output constant, the test substance of certain volume is loaded to piezoelectrics sound
Wave resonance formula sensor upper surface, the output of recording power meter, and passed as piezoelectric sound wave resonant mode after load test substance
The effective power P of sensor2；
(4), calculating Energy consumption fact Δ D is：
The object of the present invention is achieved like this：
The present invention is based on the Energy consumption fact measurement methods of piezoelectric sound wave resonant transducer, by loading determinand
The effective power of piezoelectric sound wave resonant transducer is measured twice before and after matter, is obtained due to the certain volume of load
Energy consumption fact caused by test substance.Compared with the existing Energy consumption fact measurement method based on qcm sensor, this
Invention is read by the power meter before and after measurement adsorbent, and the relationship of application quality factor and Energy consumption fact solves energy
Dissipation factor is measured, test process is simple, and measurement accuracy is high.
Detailed description of the invention
Fig. 1 is the existing Energy consumption fact measuring principle block diagram based on Transient Method response；
Fig. 2 is the existing Energy consumption fact measuring principle block diagram based on steady state method response；
Fig. 3 is the Energy consumption fact measuring principle block diagram the present invention is based on piezoelectric sound wave resonant transducer；
Fig. 4 is the Energy consumption fact measurement flow chart the present invention is based on piezoelectric sound wave resonant transducer.
Specific embodiment
A specific embodiment of the invention is described with reference to the accompanying drawing, preferably so as to those skilled in the art
Understand the present invention.Requiring particular attention is that in the following description, when known function and the detailed description of design perhaps
When can desalinate main contents of the invention, these descriptions will be ignored herein.
Fig. 3 is the Energy consumption fact measuring principle block diagram the present invention is based on piezoelectric sound wave resonant transducer.
In the present embodiment, as shown in figure 3, piezoelectric sound wave resonant transducer equally uses qcm sensor.In hardware
In composition, including piezoelectric sound wave resonant transducer 1, D.C. regulated power supply 2, driving circuit 3, power meter 4 and computer
5.Piezoelectric sound wave resonant transducer 1 is connected to driving circuit 3, driving circuit 3 is connected to D.C. regulated power supply 2 (voltage, electric current
It is readable), the output of driving circuit 3 is then connected to power meter 4 again.In the present embodiment, computer 5 directly reads power meter
4 output calculates the Energy consumption fact Δ D of the test substance of the certain volume of load according to formula (2).
In the present embodiment, the present invention is based on the Energy consumption fact measurement method of piezoelectric sound wave resonant transducer tools
Body embodiment can be carried out according to flow chart shown in Fig. 4, and specific implementation step is as follows：
Step S1：Piezoelectric sound wave resonant transducer is connected to driving circuit, driving circuit is connected to D.C. regulated power supply
(voltage, electric current are readable), is then connected to power meter for the output of driving circuit again；
Step S2：After powering on, piezoelectric sound wave resonant transducer is started to work, and records the output of D.C. regulated power supply
Power, that is, system total power P0(read the voltage and electric current of D.C. regulated power supply, and be multiplied and obtain), subsequent recording power meter
Export the effective power P as piezoelectric sound wave resonant transducer1；
At this point, the quality factor of system are：
Energy dissipation is accordingly：
Step S3：In the case where keeping D.C. regulated power supply output constant, the test substance of certain volume is loaded to piezoelectricity
Bulk acoustic resonance formula sensor upper surface, the output of recording power meter, and as piezoelectric sound wave resonance after load test substance
The effective power P of formula sensor2；
At this point, the quality factor of system are：
Energy dissipation is accordingly：
Step S4：Calculating Energy consumption fact Δ D is：
From the above description, it can be seen that essence of the invention is that measured matter is utilized to be adsorbed on piezoelectric sound wave resonant mode biography
When in sensor surfaces, the energy dissipation of test macro can be made very big, to influence the quality factor of system.Therefore absorption quilt is utilized
It surveys before and after substance, the quality factor variation of system, to obtain Energy consumption fact.
The specific following advantages of the present invention：Possess be widely applied, quickly in real time, can quantitatively to provide analysis result etc. many
Advantage.Compared with traditional Energy consumption fact measurement method, method that the present invention describes is by Energy consumption fact and quality
Factor establishes connection, it is only necessary to which the energy consumption of system just can be obtained by calculating for the effective power and dissipated power for measuring system
Dissipate the factor.Compared with the existing Energy consumption fact measurement method based on qcm sensor, the present invention not will receive extraneous do
It disturbs, repeatability is strong；And do not have to seek half of half-band width point by way of fitting, improve the precision of test and accurate
Degree.
Although the illustrative specific embodiment of the present invention is described above, in order to the technology of the art
Personnel understand the present invention, it should be apparent that the present invention is not limited to the range of specific embodiment, to the common skill of the art
For art personnel, if various change the attached claims limit and determine the spirit and scope of the present invention in, these
Variation is it will be apparent that all utilize the innovation and creation of present inventive concept in the column of protection.
Claims (1)
1. a kind of Energy consumption fact measurement method based on piezoelectric sound wave resonant transducer, which is characterized in that including with
Lower step：
(1), piezoelectric sound wave resonant transducer is connected to driving circuit, driving circuit is connected to D.C. regulated power supply (voltage, electricity
Flow readable), the output of driving circuit is then connected to power meter again；
(2), after powering on, piezoelectric sound wave resonant transducer is started to work, and records the output power of D.C. regulated power supply i.e.
System total power P0(read the voltage and electric current of D.C. regulated power supply, and be multiplied and obtain), the output of subsequent recording power meter is made
For the effective power P of piezoelectric sound wave resonant transducer1；
(3), in the case where keeping D.C. regulated power supply output constant, the test substance for loading certain volume is humorous to piezoelectric sound wave
Vibration formula sensor upper surface, the output of recording power meter, and as piezoelectric sound wave resonant transducer after load test substance
Effective power P2；
(4), calculating Energy consumption fact Δ D is：
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111272600A (en) * | 2020-02-25 | 2020-06-12 | 山西大学 | Quartz crystal microbalance sensor and modification method and application of gold electrode thereof |
| CN114778698A (en) * | 2022-06-17 | 2022-07-22 | 电子科技大学 | Material elastic modulus measuring method based on composite piezoelectric film bulk acoustic resonance |
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| CN101477083A (en) * | 2009-01-09 | 2009-07-08 | 重庆大学 | Thin film sonic sensor and method with active acoustic energy loss inhibition function |
| CN103023454A (en) * | 2012-12-13 | 2013-04-03 | 中国科学院半导体研究所 | Array structure micro electromechanical resonator made of piezoelectric materials |
| CN104833610A (en) * | 2015-04-23 | 2015-08-12 | 电子科技大学 | Liquid property measurement method based on piezoelectric bulk acoustic wave resonant sensor |
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| CN101477083A (en) * | 2009-01-09 | 2009-07-08 | 重庆大学 | Thin film sonic sensor and method with active acoustic energy loss inhibition function |
| CN103023454A (en) * | 2012-12-13 | 2013-04-03 | 中国科学院半导体研究所 | Array structure micro electromechanical resonator made of piezoelectric materials |
| CN106133998A (en) * | 2014-02-04 | 2016-11-16 | 阿尔卡特朗讯 | Resonator assembly and wave filter |
| CN104833610A (en) * | 2015-04-23 | 2015-08-12 | 电子科技大学 | Liquid property measurement method based on piezoelectric bulk acoustic wave resonant sensor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111272600A (en) * | 2020-02-25 | 2020-06-12 | 山西大学 | Quartz crystal microbalance sensor and modification method and application of gold electrode thereof |
| CN111272600B (en) * | 2020-02-25 | 2021-05-14 | 山西大学 | Quartz crystal microbalance sensor and modification method and application of gold electrode thereof |
| CN114778698A (en) * | 2022-06-17 | 2022-07-22 | 电子科技大学 | Material elastic modulus measuring method based on composite piezoelectric film bulk acoustic resonance |
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