CN108896239A - Pressure gauge component and vacuum Drycorrosion apparatus - Google Patents
Pressure gauge component and vacuum Drycorrosion apparatus Download PDFInfo
- Publication number
- CN108896239A CN108896239A CN201810373943.7A CN201810373943A CN108896239A CN 108896239 A CN108896239 A CN 108896239A CN 201810373943 A CN201810373943 A CN 201810373943A CN 108896239 A CN108896239 A CN 108896239A
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- China
- Prior art keywords
- operated valve
- pneumatic operated
- pressure
- transmission pipeline
- connect
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0015—Fluidic connecting means using switching means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
- H01J37/3056—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching for microworking, e.g. etching of gratings, trimming of electrical components
Abstract
This application discloses a kind of pressure gauge component and vacuum Drycorrosion apparatus, the pressure gauge component of the application includes transmission pipeline；One end of first pneumatic operated valve, the first pneumatic operated valve is connect with transmission pipeline；First pressure meter, first pressure meter are connect with the other end of the first pneumatic operated valve, and first pressure meter is connected to when the first pneumatic operated valve is opened with transmission pipeline.By the way that one end of the first pneumatic operated valve to be connect with transmission pipeline, the other end is connect with first pressure meter, can reduce the corner quantity for the pipeline connecting with pressure gauge, to reduce chocking-up degree, and then the quality of product that the precision of adherence pressure meter and etching obtain.
Description
Technical field
This application involves Dry etching techniques fields, more particularly to a kind of pressure gauge component and vacuum Drycorrosion apparatus.
Background technique
Dry etching is the technology performed etching by plasma to metallic film, and cardinal principle is to utilize electromagnetic field equity
Gas ions guide and accelerate, thus the metallic film for keeping plasma bombardment to be etched.In etching, pressure is to etching
To the line width of metal wire have larger impact, the general pressure intracavitary to vacuum dry etching by pressure gauge realization detects.
Pressure gauge is mounted on vacuum dry etching chamber by transmission pipeline, in the prior art, because what is connect with pressure gauge
The corner quantity of pipeline is attached to the product in dry etching process on pressure gauge more, results in blockage, influences pressure gauge
Precision makes pressure gauge frequently occur offset, pressure transient.And zero meeting labor intensive work periodically is corrected to pressure gauge
When, and frequent progress correction zero can reduce the service life of pressure gauge.
Therefore, it is necessary to propose a kind of pressure gauge component and vacuum Drycorrosion apparatus, to solve the above technical problems.
Summary of the invention
The application passes through pressure mainly solving the technical problems that provide a kind of pressure gauge component and vacuum Drycorrosion apparatus
Meter component can be reduced the corner quantity for the pipeline connecting with pressure gauge, to reduce chocking-up degree, and then the essence of adherence pressure meter
The quality for the product that degree and etching obtain.
In order to solve the above-mentioned technical problem, first technical solution that the application uses is to provide a kind of pressure gauge component,
The pressure gauge component includes：Transmission pipeline；One end of first pneumatic operated valve, the first pneumatic operated valve is connect with transmission pipeline；First pressure
Meter, first pressure meter connect with the other end of the first pneumatic operated valve, and first pressure meter is when the first pneumatic operated valve is opened and transmission pipeline
Connection.
In order to solve the above-mentioned technical problem, second technical solution that the application uses is to provide a kind of vacuum dry etching dress
It sets, which includes pressure gauge component, and pressure gauge component includes：Transmission pipeline；First pneumatic operated valve, first is pneumatic
One end of valve is connect with transmission pipeline；First pressure meter, first pressure meter are connect with the other end of the first pneumatic operated valve, first pressure
Meter is connected to when the first pneumatic operated valve is opened with transmission pipeline.
The beneficial effect of the application is：It is in contrast to the prior art, the pressure gauge component of the application includes transfer tube
Road；One end of first pneumatic operated valve, the first pneumatic operated valve is connect with transmission pipeline；First pressure meter, first pressure meter and first is pneumatically
The other end of valve connects, and first pressure meter is connected to when the first pneumatic operated valve is opened with transmission pipeline.By by the first pneumatic operated valve
One end is connect with transmission pipeline, and the other end is connect with first pressure meter, can reduce the corner number for the pipeline connecting with pressure gauge
Amount, to reduce chocking-up degree, and then the quality of product that the precision of adherence pressure meter and etching obtain.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of pressure gauge component in the prior art；
Fig. 2 is the structural schematic diagram of pressure gauge component first embodiment provided by the present application；
Fig. 3 is the structural schematic diagram of pressure gauge component second embodiment provided by the present application；
Fig. 4 is the structural schematic diagram of pressure gauge component third embodiment provided by the present application；
Fig. 5 is the structural schematic diagram of one embodiment of vacuum Drycorrosion apparatus provided by the present application.
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present application, technical solutions in the embodiments of the present application carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of embodiments of the present application, instead of all the embodiments.It is based on
Embodiment in the application, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment belongs to the range of the application protection.
In the prior art, there are three the corner quantity for the pipeline connecting with first pressure meter, and more corner quantity makes
Product in dry etching process is easily attached on first pressure meter, is resulted in blockage, and is influenced the precision of first pressure meter, is made first
Pressure gauge frequently occurs offset, pressure transient.The application is in order to reduce corner quantity and by one end of the first pneumatic operated valve and biography
Defeated pipeline connection, the other end is connect with first pressure meter, so that the corner quantity for the pipeline connecting with first pressure meter be made to be reduced to
Two, and then promote the precision of first pressure meter and the quality of product that etching obtains.
Referring to Fig. 1, Fig. 1 is the structural schematic diagram of pressure gauge component in the prior art.As shown in Figure 1, pressure gauge component
10 include transmission pipeline 101, the first transmission branch pipe 106 and the second transmission branch pipe 105 for connecting and being connected with transmission pipeline 101,
One end of first pneumatic operated valve 104 is connect with first pressure meter 103, the other end of the first pneumatic operated valve 104 and the first transmission branch pipe 106
Connection.Transfer tube road junction 102 connect (not shown in figure 1), first pressure meter 103 to transfer tube road junction with vacuum dry etching chamber
102 altogether there are three corner, wherein there is a corner between first pressure meter 103 and the first pneumatic operated valve 104, the first pneumatic operated valve 104 with
There is a corner between first transmission branch pipe 106, has a corner between the first transmission branch pipe 106 and transmission pipeline 101.Vacuum dry etching
Intracavitary product is lost to enter in pressure gauge component 10 by transfer tube road junction 102, the corner quantity the more more be easy to cause blocking,
Excessive product is attached on the elastic slice of first pressure meter 103, influences the precision of first pressure meter 103, makes first pressure meter
103 frequently occur the situation of offset, pressure transient.Wherein, the greatest measurement of first pressure meter 103 is 0.1 support.
One end of second pneumatic operated valve 108 is connect with the second transmission branch pipe 105, the other end and second of the second pneumatic operated valve 108
Pressure gauge 107 connects, and the greatest measurement of second pressure meter 107 is 2 supports.Second pressure meter 107 similarly can be obtained to transfer tube
There are three corners altogether at road junction 102.The greatest measurement of second pressure meter 107 is greater than the greatest measurement of first pressure meter 103, i.e.,
Second pressure meter 107 uses in the lower situation of vacuum degree, and first pressure meter 103 makes in the higher situation of vacuum degree
With influence of the product being attached in pressure gauge component 10 to first pressure meter 103 is greater than the shadow to second pressure meter 107
It rings.
Pressure gauge component 10 further includes atmospheric vacuum detection meter 111 and base pressure leakage rate measurement meter 109, atmospheric vacuum detection meter
111 connect with the first transmission branch pipe 106, and base pressure leakage rate measurement meter 109 is connect with one end of third pneumatic operated valve 110, and third is pneumatic
The other end of valve 110 is connect with the first transmission branch pipe 106.
Referring to Fig. 2, Fig. 2 is the structural schematic diagram of pressure gauge component first embodiment provided by the present application.Such as Fig. 2 institute
Show, pressure gauge component 20 includes transmission pipeline 201, the first pneumatic operated valve 203, one end of the first pneumatic operated valve 203 and transmission pipeline 201
Connection, first pressure meter 204, first pressure meter 204 is connect with the other end of the first pneumatic operated valve 203, and first pressure meter 204 exists
First pneumatic operated valve 203 is connected to when opening with transmission pipeline 201.
In the present embodiment, the corner quantity of first pressure meter 204 to transfer tube road junction 202 is two, wherein first pressure
There is a corner between meter 204 and the first pneumatic operated valve 203, there is a corner between the first pneumatic operated valve 203 and transfer tube road junction 202.Phase
For the prior art, the corner quantity of first pressure meter 204 to transfer tube road junction 202 reduces one.
Referring to Fig. 3, Fig. 3 is the structural schematic diagram of pressure gauge component second embodiment provided by the present application.Such as Fig. 3 institute
Show, pressure gauge component 30 includes transmission pipeline 301, the first pneumatic operated valve 304, one end of the first pneumatic operated valve 304 and transmission pipeline 301
Connection, first pressure meter 303, first pressure meter 303 is connect with the other end of the first pneumatic operated valve 304, and first pressure meter 303 exists
First pneumatic operated valve 304 is connected to when opening with transmission pipeline 301.
In the present embodiment, the greatest measurement of first pressure meter 303 is 0.1 support.First pressure meter 303 is to transfer tube road junction
302 altogether there are two corner, wherein there is a corner between first pressure meter 303 and the first pneumatic operated valve 304, the first pneumatic operated valve 304 with
There is a corner between transmission pipeline 301.In terms of existing technologies, the first pressure meter 303 of the application is to transfer tube road junction
302 corner quantity reduces one, to reduce chocking-up degree, and then promotes the precision and etching of first pressure meter 303
The quality of obtained product.
Further, pressure gauge component 30 further includes the second pneumatic operated valve 306 and second pressure meter 305, the second pneumatic operated valve 306
One end connect with transmission pipeline 301, the other end is connect with second pressure meter 305, and second pressure meter 305 is in the second pneumatic operated valve
306 are connected to when opening with transmission pipeline 301.In the present embodiment, the greatest measurement of second pressure meter 305 is 2 supports.Transmission pipeline
Mouth 302 is connect with vacuum dry etching chamber (being not shown in Fig. 3), is detected by first pressure meter 303 and second pressure meter 305 true
The intracavitary pressure size of empty dry etching, first pressure meter 303 use in the case of vacuum degree height, and second pressure meter 305 is true
It is used in the case of reciprocal of duty cycle is low, is attached to influence of the product to first pressure meter 303 in pressure gauge component 30 and is greater than to the
The influence of two pressure gauges 305.It similarly can be obtained, the corner quantity of second pressure meter 305 to transfer tube road junction 302 is two, phase
For the prior art, the corner quantity of second pressure meter 305 to transfer tube road junction 302 decreases one.
In the present embodiment, pressure gauge component 30 further include atmospheric vacuum detection meter 309, atmospheric vacuum detection meter 309 with
Transmission pipeline 301 connects.When repairing maintenance to vacuum Drycorrosion apparatus, atmospheric vacuum detection meter 309 is sentenced for detecting
The intracavitary air pressure of disconnected vacuum dry etching is the situation of an atmospheric pressure, or the situation for vacuum state.
In the present embodiment, pressure gauge component 30 further includes third pneumatic operated valve 308 and is mounted on third pneumatic operated valve 308
On base pressure leakage rate measurement meter 307, third pneumatic operated valve 308 is connect with transmission pipeline 301.It is tieed up to vacuum Drycorrosion apparatus
When repairing maintenance, base pressure leakage rate measurement meter 307 for detect judge vacuum dry etching chamber whether gas leakage.
In this embodiment, the shape of transmission pipeline 301 is cylindric, and the diameter of transmission pipeline 301 is 40
Millimeter, in other embodiments, transmission pipeline 301 or other situations, such as can be rectangular shape, truncated cone-shaped
Shape, the application are not specifically limited herein.
In a specific embodiment, the material of transmission pipeline 301 is alloy.
In this present embodiment, the first pneumatic operated valve 304, the second pneumatic operated valve 306, the setting of the interval of third pneumatic operated valve 308
On the same straight line of transmission pipeline 301.In other specific embodiments, the setting of other modes, this Shen can also be carried out
It please be not specifically limited herein.
Referring to Fig. 4, Fig. 4 is the structural schematic diagram of pressure gauge component third embodiment provided by the present application.Such as Fig. 4 institute
Show, pressure gauge component 40 includes transmission pipeline 401, the first pneumatic operated valve 404, one end of the first pneumatic operated valve 404 and transmission pipeline 401
Connection, first pressure meter 403, first pressure meter 403 is connect with the other end of the first pneumatic operated valve 404, and first pressure meter 403 exists
First pneumatic operated valve 404 is connected to when opening with transmission pipeline 401.In the present embodiment, the greatest measurement of first pressure meter 403 is
0.1 support.First pressure meter 403 to transfer tube road junction 402 altogether there are two corner, wherein first pressure meter 403 and the first pneumatic operated valve
There is a corner between 404, there is a corner between the first pneumatic operated valve 404 and transmission pipeline 401.In terms of existing technologies, originally
The corner quantity at the first pressure meter 403 of application to transfer tube road junction 402 reduces one, to reduce chocking-up degree, in turn
The quality for the product that the precision and etching for promoting first pressure meter 403 obtain.
Present embodiment and a upper embodiment the difference is that, further include a transmission branch pipe in present embodiment
410, one end of the second pneumatic operated valve 406 is connect with transmission branch pipe 410, the other end and second pressure meter 405 of the second pneumatic operated valve 406
Connection, and transmit branch pipe 410 and connect and be connected with transmission pipeline 401, so that the second pneumatic operated valve 406 be made to connect with transmission pipeline 401
It connects.Second pressure meter 405 can similarly be obtained, and to transfer tube road junction 402, there are two corners altogether.
In the present embodiment, pressure gauge component 40 further includes atmospheric vacuum detection meter 407 and base pressure leakage rate measurement meter
408, atmospheric vacuum detection meter 407 is connect with transmission pipeline 401, one end of base pressure leakage rate measurement meter 408 and third pneumatic operated valve 409
Connection, the other end of third pneumatic operated valve 409 are connect with transmission pipeline 401.
In present embodiment, the first pneumatic operated valve 404, third pneumatic operated valve 409, atmospheric vacuum detection meter 407 and transmission
Pipeline 401 connects, and the second pneumatic operated valve 406 is connect with transmission branch pipe 410, and transmits branch pipe 410 and connect and lead with transmission pipeline 401
It is logical.In other specific embodiments, only the first pneumatic operated valve 404 can also be set as connecting with transmission pipeline 401, by third
Pneumatic operated valve 409, atmospheric vacuum detection the 407, second pneumatic operated valve 406 of meter are set as connecting with transmission branch pipe 410, and transmit branch pipe
410 connect and are connected with transmission pipeline 401；Or by the first pneumatic operated valve 404, the second pneumatic operated valve 406 is set as and transmission pipeline
401 connections set third pneumatic operated valve 409, atmospheric vacuum detection meter 407 to connect, and transmit branch pipe with transmission branch pipe 410
410 connect and are connected with transmission pipeline 401；Also or by the first pneumatic operated valve 404, the second pneumatic operated valve 406, third pneumatic operated valve 409
It is set as connecting with transmission pipeline 401, atmospheric vacuum detection meter 407 is set as connecting with transmission branch pipe 410, and transmit branch pipe
410 connect and are connected with transmission pipeline 401；Also or by the first pneumatic operated valve 404, the second pneumatic operated valve 406, atmospheric vacuum detection count
407 are set as connecting with transmission pipeline 401, third pneumatic operated valve 409 are set as connecting with transmission branch pipe 410, and transmit branch pipe
410 connect and are connected with transmission pipeline 401.
In present embodiment, it is provided with transmission pipeline 401 and a transmission branch pipe 410, in other embodiments,
Also transmission pipeline 401 and greater number of transmission branch pipe 410, such as setting transmission pipeline 401 and two transmission branch can be set
Pipe, and two transmission branch pipes connect and are connected with transmission pipeline 401, the application is not specifically limited herein.
The beneficial effect of the application is：It is in contrast to the prior art, the pressure gauge component of the application includes transfer tube
Road；One end of first pneumatic operated valve, the first pneumatic operated valve is connect with transmission pipeline；First pressure meter, first pressure meter and first is pneumatically
The other end of valve connects, and first pressure meter is connected to when the first pneumatic operated valve is opened with transmission pipeline.By by the first pneumatic operated valve
One end is connect with transmission pipeline, and the other end is connect with first pressure meter, can reduce the corner number for the pipeline connecting with pressure gauge
Amount, to reduce chocking-up degree, and then the quality of product that the precision of adherence pressure meter and etching obtain.
The application also provides a kind of vacuum Drycorrosion apparatus, which includes pressure gauge component.
Referring to Fig. 5, Fig. 5 is the structural schematic diagram of one embodiment of vacuum Drycorrosion apparatus provided by the present application.Such as Fig. 5
Shown, vacuum Drycorrosion apparatus 50 includes vacuum dry etching chamber 501 and the pressure gauge group being arranged on vacuum dry etching chamber 501
Part 502 and motor-driven valve 503.Wherein, pressure gauge component 502 is arranged on the side wall of vacuum dry etching chamber 501, and motor-driven valve 503 is set
Set the lower bottom part in vacuum dry etching chamber 501.Pressure gauge component 502 includes：Transmission pipeline；First pneumatic operated valve, the first pneumatic operated valve
One end connect with transmission pipeline；First pressure meter, first pressure meter are connect with the other end of the first pneumatic operated valve, first pressure meter
It is connected to when the first pneumatic operated valve is opened with transmission pipeline.Wherein, the transfer tube road junction of transmission pipeline and vacuum dry etching chamber 501
Side wall connection.
In the prior art, the first pressure meter in pressure gauge component to transfer tube road junction shares three corners, corner quantity
More more more be easy to cause blocking, excessive product is attached to the precision that will affect pressure gauge on the elastic slice of first pressure meter, makes
First pressure meter frequently occurs the situation of offset, pressure transient, to keep the opening degree of motor-driven valve 503 unstable, and then makes
Air pressure in vacuum dry etching chamber 501 is unstable, influences the quality of product.When the air pressure in vacuum dry etching chamber 501 is unstable
When keeping intracavitary air pressure bigger than normal, the line width for the metal wire for causing etching to obtain is partially thin, is easy to appear the situation of broken string.
In a specific embodiment, entering the gas in vacuum dry etching chamber 501 by transfer tube road junction includes oxygen
Gas, chlorine；Product in vacuum dry etching chamber 501 can be retracted to outside chamber by motor-driven valve 503 when opening by motor.
The corner quantity at the first pressure meter of the application to transfer tube road junction is reduced to two, can reduce chocking-up degree, from
And the precision of first pressure meter is promoted, the degree of stability of first pressure meter and motor-driven valve opening degree is improved, and then etch and obtain
The metal wire of required line width.
The beneficial effect of the application is：It is in contrast to the prior art, the pressure gauge component of the application includes transfer tube
Road；One end of first pneumatic operated valve, the first pneumatic operated valve is connect with transmission pipeline；First pressure meter, first pressure meter and first is pneumatically
The other end of valve connects, and first pressure meter is connected to when the first pneumatic operated valve is opened with transmission pipeline.By by the first pneumatic operated valve
One end is connect with transmission pipeline, and the other end is connect with first pressure meter, can reduce the corner number for the pipeline connecting with pressure gauge
Amount, to reduce chocking-up degree, and then the quality of product that the precision of adherence pressure meter and etching obtain.
Obviously, those skilled in the art can carry out various modification and variations without departing from the essence of the application to the application
Mind and range.In this way, if these modifications and variations of the application belong to the range of the claim of this application and its equivalent technologies
Within, then the application is also intended to include these modifications and variations.
Claims (10)
1. a kind of pressure gauge component, which is characterized in that the pressure gauge component includes：
Transmission pipeline；
One end of first pneumatic operated valve, first pneumatic operated valve is connect with the transmission pipeline；
First pressure meter, the first pressure meter are connect with the other end of first pneumatic operated valve, and the first pressure meter is in institute
It states when the first pneumatic operated valve is opened and is connected to the transmission pipeline.
2. pressure gauge component according to claim 1, which is characterized in that the pressure gauge component further comprises the second gas
Dynamic valve and second pressure meter, one end of second pneumatic operated valve are connect with the transmission pipeline, the second pressure meter with it is described
The other end of second pneumatic operated valve connects, and the second pressure meter connects when second pneumatic operated valve is opened with the transmission pipeline
It is logical.
3. pressure gauge component according to claim 2, which is characterized in that the greatest measurement of the first pressure meter is
0.1 support, the greatest measurement of the second pressure meter are 2 supports.
4. pressure gauge component according to claim 2, which is characterized in that the pressure gauge component further includes atmospheric vacuum inspection
Meter is surveyed, the atmospheric vacuum detection meter is connect with the transmission pipeline.
5. pressure gauge component according to claim 2, which is characterized in that the pressure gauge component further includes third pneumatic operated valve
And it is mounted on the base pressure leakage rate measurement meter on the third pneumatic operated valve, the third pneumatic operated valve is connect with the transmission pipeline.
6. pressure gauge component according to claim 1, which is characterized in that the shape of the transmission pipeline is cylindric, and
The diameter of the transmission pipeline is 40 millimeters.
7. pressure gauge component according to claim 2, which is characterized in that second pneumatic operated valve is connected to a transmission branch pipe
On, the transmission branch pipe connect and is connected with the transmission pipeline, so that second pneumatic operated valve and the transmission pipeline be made to connect
It connects.
8. a kind of vacuum Drycorrosion apparatus, the vacuum Drycorrosion apparatus includes pressure gauge component, which is characterized in that the pressure
Counting component includes：
One end of first pneumatic operated valve, first pneumatic operated valve is connect with the transmission pipeline；
First pressure meter, the first pressure meter are connect with the other end of first pneumatic operated valve, and the first pressure meter is in institute
It states when the first pneumatic operated valve is opened and is connected to the transmission pipeline.
9. vacuum Drycorrosion apparatus according to claim 8, which is characterized in that the vacuum Drycorrosion apparatus further includes true
Empty dry etching chamber, the vacuum dry etching chamber are connect by the transmission pipeline with the pressure gauge component.
10. vacuum Drycorrosion apparatus according to claim 9, which is characterized in that the vacuum Drycorrosion apparatus further includes
Motor-driven valve, the motor-driven valve are connect with the vacuum dry etching chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810373943.7A CN108896239A (en) | 2018-04-24 | 2018-04-24 | Pressure gauge component and vacuum Drycorrosion apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810373943.7A CN108896239A (en) | 2018-04-24 | 2018-04-24 | Pressure gauge component and vacuum Drycorrosion apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108896239A true CN108896239A (en) | 2018-11-27 |
Family
ID=64342354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810373943.7A Pending CN108896239A (en) | 2018-04-24 | 2018-04-24 | Pressure gauge component and vacuum Drycorrosion apparatus |
Country Status (1)
| Country | Link |
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| CN (1) | CN108896239A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113439327A (en) * | 2020-01-23 | 2021-09-24 | 株式会社日立高新技术 | Plasma processing apparatus and method for operating plasma processing apparatus |
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| CN113439327A (en) * | 2020-01-23 | 2021-09-24 | 株式会社日立高新技术 | Plasma processing apparatus and method for operating plasma processing apparatus |
| CN113439327B (en) * | 2020-01-23 | 2023-07-25 | 株式会社日立高新技术 | Plasma processing apparatus and method of operating the same |
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Application publication date: 20181127 |
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