CN108872268A - Parallel flat waveguide measuring device and method - Google Patents
Parallel flat waveguide measuring device and method Download PDFInfo
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- CN108872268A CN108872268A CN201810737509.2A CN201810737509A CN108872268A CN 108872268 A CN108872268 A CN 108872268A CN 201810737509 A CN201810737509 A CN 201810737509A CN 108872268 A CN108872268 A CN 108872268A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N22/00—Investigating or analysing materials by the use of microwaves or radio waves, i.e. electromagnetic waves with a wavelength of one millimetre or more
Abstract
The invention discloses a kind of parallel flat waveguide measuring device and method, parallel flat waveguide measuring device includes：Detachable upper plate beam wave apparatus, two-dimensional surface mobile system, computer, vector network analyzer, lifting platform, level(l)ing device and near-field measurement probe.Detachable upper plate beam wave apparatus includes the frame of upper plate and support upper plate, and upper plate is equipped with detection mouth；Near-field measurement probe is clamped in detection mouth and fixes；The lifting platform is fixed on two-dimensional plane coordinate mobile system, and level(l)ing device is fixed on lifting platform；The two-dimensional surface mobile system is controlled by computer drives lifting platform mobile in X-axis and Y direction；The upper surface of level(l)ing device and upper plate are metal material and are arranged in parallel.The device of the invention is suitable for measuring the electromagnetic field of parallel flat, suitable for measuring magnetic distribution of the sample vertical electric field, suitable for carrying out quick and high quality imaging to the electromagnetic field electromagnetism constraint space.
Description
Background technique
The invention belongs to microwave near-field field of measuring technique, and in particular to a kind of parallel flat waveguide measuring device and side
Method.
Background technique
Microwave near-field measuring technique is low to environmental requirement, does not need the dark room conditions to involve great expense, does not also need to radio frequency
System has very high requirement, and the requirement to equipment is lower, and near field measurement does scanning motion by the surface to sample, acquires sample
Then the data of near-field region radiation field release far field data by computer Near-field Data by near field Far-Zone Field Transformation algorithm.
As long as guaranteeing that measurement accuracy can obtain accurate far-field characteristic.
However the prior art can not also obtain point of the electromagnetic field of parallel flat inner space to parallel flat waveguide measurement
Cloth, the measurement for parallel flat are usually to be replaced with rectangular waveguide.The measurement prior art for rectangular waveguide is to pass through
The data for measuring rectangular waveguide opening both ends, obtain the S parameter of intracavitary electromagnetic wave, but can not obtain built-in field data.
Lack suitable method for the electromagnetic field in electromagnetism constraint space (such as waveguide or resonator (chamber)) to carry out fastly
Prompt and high quality imaging, current technical approach are on the wide wall of rectangular waveguide or resonator (chamber) along guide wave
Open the measured hole of equidistant interval in direction；Microwave probe is allowed to protrude into the distribution of the field of rectangular waveguide internal measurement electromagnetic field, but this
The field distribution resolution ratio for the electromagnetic field that kind mode obtains is lower, and resolution ratio cannot be changed arbitrarily；The measurement of each point of probe
It requires to lift-move-decline, wastes time to cause conventional efficient low.
The prior art goes out electromagnetic field for what some samples (photonic crystal, negative refractive index material etc.) excited in vertical electric field
The electromagnetic field magnitude that obtains of measurement and phase data resolution ratio is lower, accuracy is not high, and resolution ratio cannot be changed arbitrarily,
Multiple same specification samples are just needed to open the exploration hole of different spacing specifications if necessary to different resolution ratio, experimental cost is high, imitates
Rate is low.
Summary of the invention
The purpose of the present invention is overcoming the defect of prior art, a kind of parallel flat waveguide measuring device and side are proposed
Method.
Parallel flat waveguide measuring device of the invention includes：The mobile system of detachable upper plate beam wave apparatus, two-dimensional surface
System, computer, vector network analyzer, lifting platform, level(l)ing device and near-field measurement probe；
The computer is connected with vector network analyzer, the input terminal of vector network analyzer by RF connection with
Near-field measurement probe is connected, and the output end of vector network analyzer is connected by RF connection with sample or excitation probe, can
Detachable upper plate beam wave apparatus includes the frame of upper plate and support upper plate, and upper plate is equipped with detection mouth；Near-field measurement probe is being visited
It surveys to be clamped in mouth and fix；The lifting platform is fixed on two-dimensional plane coordinate mobile system, and level(l)ing device is fixed on liter
It drops on platform；The two-dimensional surface mobile system controls the movement for driving lifting platform in X-axis and Y direction by computer；Water
The upper surface of Heibei provincial opera regulating device and upper plate are metal material and are arranged in parallel.
As a preferred solution of the present invention, if the level(l)ing device includes lower plate, support limit plate and solid carbon dioxide
Flat regulating part；The support limit plate upper surface is equipped with recessed portion identical with lower writing board shape, and the recessed portion is used for
Lower plate is installed；Level tune part is fixed on support limit plate, and lower flat plate bottom is carried out by several Level tune parts
Support.
As a preferred solution of the present invention, the Level tune part is evenly distributed on the lower section of the lower plate edge.
The Level tune part is to adjust bolt.
As a preferred solution of the present invention, the two-dimensional surface mobile system includes the first single armed linear robot, the
Two single armed linear robots, equipment base, linear guides；The first single armed linear robot and the second single armed straight line machine
It per capita include servo controller, sliding rail and sliding block；Servo controller control sliding block moves along a straight line on the slide rail；Linear guides
It is arranged on the equipment base with the first single armed linear robot, the sliding rail of linear guides and the first single armed linear robot
It is set in parallel, and the two height is equal, one end of the second single armed linear robot is fixed on the first single armed straight line machine
On the sliding block of people, the other end is slidably mounted on linear guides, the sliding rail of the second single armed linear robot and linear
The perpendicular installation of guide rail；Lifting platform is fixed on the sliding block of the second single armed linear robot.
The invention discloses a kind of guide measuring methods of parallel flat waveguide measuring device, measure parallel flat
When, the output of vector network analyzer is connected by RF connection with excitation probe；Excitation probe, which is located on lower plate, to be used for
Excitation electromagnetic field；The feed motion for adjusting the Level tune part on support limit plate, which can support, removes plate, passes through Level tune
It is relatively parallel with upper plate that the fine tuning of part is adjusted to lower plate；
The gap under level(l)ing device between plate and upper plate is adjusted by lifting platform, that is, adjusting parallel flat
Spacing；Near-field measurement probe is fixed on above probe fixing card, and probe syringe needle is parallel with upper plate parallel surfaces；All mechanical tune
The size and scanning dot density for determining scanning area after the completion of examination by computer installation scanning step and step number, are provided with
Two-dimensional surface scanning system and vector network analyzer are transferred in host computer publication instruction afterwards, in the station acquisition number of each point
According to being automatically performed the scanning work of whole region.
The invention discloses the measurement methods of another parallel flat waveguide measuring device：Sample is placed on horizontal tune
Under regulating device on plate, when sample has access interface, the output of vector network analyzer passes through RF connection and sample
Access interface be connected；When sample does not have access interface or needs to measure scattering of the sample to electromagnetic field, vector network point
The output of analyzer is connected by RF connection with excitation probe；Excitation probe is located on lower plate for excitation electromagnetic field；
The feed motion for adjusting the Level tune part on support limit plate, which can support, removes plate, passes through Level tune part
It is relatively parallel with upper plate to be adjusted to lower plate；Between under lifting platform adjusting level(l)ing device between plate and upper plate
Gap；Near-field measurement probe is fixed on above probe fixing card, and probe syringe needle is parallel with upper plate parallel surfaces；All machinery have been debugged
Determined at rear any two by computer installation scanning step, step number and scanning total length the size of scanning area with
Dot density is scanned, rear host computer publication instruction is provided with and transfers two-dimensional surface scanning system and vector network analyzer, every
The station acquisition data of one point, are automatically performed the scanning work of whole region.
The invention also discloses the electromagnetism of the parallel flat waveguide measuring device to fetter spatial measuring method：
The sample that milling removes a plane is placed and secured in Level tune dress except a surface in electromagnetism constraint space by milling
Lower washer is set, mills and removes face-up parallel with upper plate, keep sample and upper plate as far as possible by the lift adjustment of lifting platform
It is generated when small spacing (0.1-0.2mm or following), sample and upper plate relative motion without friction；Then it is swept by computer installation
Step-length is retouched with step number to determine the size (all or part of comprising rectangular waveguide or intra resonant cavity) of scanning area and sweep
Described point density is provided with rear computer publication instruction and transfers two-dimensional surface scanning system and vector network analyzer, each
The station acquisition electromagnetic wave data of a point, are automatically performed the data scanning collecting work of sample interior electromagnetic field magnitude and phase.
The electromagnetism constraint space is rectangular waveguide or resonant cavity.
The device is provided with the region for needing to scan and resolution ratio；The instruction of two-dimensional surface mobile system reception host computer
Lifting platform, level(l)ing device and the sample (or excitation antenna) being fixed on above level(l)ing device is driven to do flat scanning afterwards
Movement, during the motion the lower plate (metal material) on level(l)ing device with it is upper on detachable upper plate beam wave apparatus
Plate remains in parallel, is bound between two metal plates by the electromagnetic wave that sample (or excitation antenna) inspires, and electric field
Direction is always perpendicular to metal plate.
The present invention very can accurately measure the electromagnetic field inside parallel flat waveguide；Composition parallel flat in device
The lower plate of waveguide can do scanning motion under the drive of two-dimensional motion system, and upper plate is fixed with measuring probe, equipment
The amplitude of the electromagnetic wave in parallel flat waveguide can be completed in the electromagnetic wave data of the point acquisition that each is moveable at this time
And the measurement of phase.
The present invention can measure the electromagnetic field inside waveguide or resonant cavity；Can measure sample (photonic crystal,
Negative refractive index material etc.) electromagnetic field that is excited in the vertical electric field of parallel flat waveguide.Near-field microwave probe is fixed, excitation
Probe immobilizes with sample relative position, and the electromagnetic wave accuracy of measurement is high.
Single shaft repetitive positioning accuracy of the invention is 0.01mm, and (resolving accuracy 0.02mm) can be measured inside rectangular waveguide
High-resolution magnetic distribution, and resolution ratio it is adjustable (resolution ratio be greater than 0.1mm, be less than the effective row of one armed robot
Journey).
Detailed description of the invention
Fig. 1 is parallel flat waveguide assembly schematic diagram；
Fig. 2 is level(l)ing device and lifting platform disassemblying structure figure；
Fig. 3 is detachable upper plate beam wave apparatus；
Fig. 4 is two-dimensional surface mobile system；
Fig. 5 is the electromagnetic field measurements schematic diagram that ring resonator inspires in vertical electric field；
Fig. 6 is the electromagnetic field measurements schematic diagram in electromagnetism constraint space.
Specific embodiment
The present invention is described further with reference to the accompanying drawings and examples.
As shown in Figure 1, implementing one：
Parallel flat waveguide measuring device of the invention includes detachable upper plate beam wave apparatus 4, the mobile system of two-dimensional surface
System 1, computer, vector network analyzer, lifting platform 2, level(l)ing device 3 and near-field measurement probe；
In the present embodiment, detachable upper plate beam wave apparatus 4 includes upper plate 42, frame 41；The upper plate is metal plate；Institute
Sample is stated between upper plate and level(l)ing device.For frame preferably with nonmetallic, non-gold is can be used in four side walls of frame
The baffle of category, can also should not baffle, but cannot absolutely use metal baffle.As shown in figure 3,42 intermediate region of upper plate
Detection mouth 44 is offered, near-field measurement probe after the detection mouth 44 on detachable upper plate beam wave apparatus by line card 43 by being clamped
It is fixed on sample upper space；Or near-field measurement probe is clamped and fixed in detection mouth, probe syringe needle and upper plate lower surface
In parallel.As shown in figure 4, the two-dimensional surface mobile system 1 includes the first single armed linear robot 13, the second single armed line straightening machine
Device people 14, equipment base 11, linear guides 12；The first single armed linear robot and the second single armed linear robot wraps
Include servo controller 141, sliding rail 142 and sliding block 143；Servo controller 141 controls sliding block 143 and carries out straight line on sliding rail 142
Movement；Linear guides 12 and the first single armed linear robot 13 are arranged on the equipment base, linear guides and the first list
The sliding rail of arm linear robot is set in parallel, and the two height is equal, and one end of the second single armed linear robot 14 is fixed on
On the sliding block of the first single armed linear robot, the other end is slidably mounted on linear guides, the second single-arm straight
The sliding rail of line robot and the perpendicular installation of linear guides；Lifting platform is fixed on the sliding block of the second single armed linear robot.It is logical
The movement of lifting platform in the horizontal plane can be realized in the driving for crossing two servo controllers.As shown in Fig. 2, the Level tune
Device 3 includes lower plate 32, support limit plate 31, several Level tune parts 33 and cable line card 34；The support limit plate
Upper surface is equipped with recessed portion identical with lower writing board shape, and the recessed portion is for installing lower plate；Level tune part is fixed
On support limit plate, lower flat plate bottom is supported by several Level tune parts.Cable line card 34 for install and
Fixing coaxial line.The Level tune part of the present embodiment is to adjust bolt, totally 4, is distributed in four corners of support limit plate, is led to
The height that the mode that manual or Electronic control is adjusted adjusts each angle of lower plate is crossed, can be suitably used for needing wanting for lower platen parallel state
It asks.
The computer is connected with vector network analyzer, the input terminal of vector network analyzer by RF connection with
Near-field measurement probe is connected, and the output end of vector network analyzer is connected by RF connection with excitation probe, detachable
Upper plate beam wave apparatus includes the frame of upper plate and support upper plate, and upper plate is equipped with detection mouth；Near-field measurement probe is in detection mouth
It is clamped to fix；The lifting platform is fixed on two-dimensional plane coordinate mobile system, and level(l)ing device is fixed on lifting platform；
The two-dimensional surface mobile system controls the movement for driving lifting platform in X-axis and Y direction by computer；Level tune dress
The upper surface and upper plate set are metal material and are arranged in parallel.
(upper plate and lower plate oneself constitute a measurement sample when being measured using the device of the present embodiment parallel flat
Product, detection is exactly the electric field for exciting probe to excite in the space of upper and lower plates), the output of vector network analyzer passes through radio frequency
Connecting line is connected with excitation probe；Excitation probe is located on lower plate for excitation electromagnetic field；Adjust the water on support limit plate
The feed motion of flat regulating part is sustainable to remove plate, and it is relatively flat with upper plate to be adjusted to lower plate by the fine tuning of Level tune part
Row；
The gap under level(l)ing device between plate and upper plate is adjusted by lifting platform, that is, adjusting parallel flat
Spacing；Near-field measurement probe is fixed on above probe fixing card, and probe syringe needle is parallel with upper plate parallel surfaces；All mechanical tune
The big of scanning area is determined by any two in computer installation scanning step, step number and scanning total length after the completion of examination
Small and scanning dot density is provided with rear host computer publication instruction and transfers two-dimensional surface scanning system and vector network analyzer,
In the station acquisition data of each point, it is automatically performed the scanning work of whole region.Parallel flat waveguide measurement can be obtained
The distribution of electromagnetic field of parallel flat inner space (described herein specific examples are only used to explain the present invention, not
For limiting the present invention.)
Implement two：
The present embodiment is to be swashed in vertical electric field using the device of embodiment 1 to samples such as photonic crystal, negative refractive index materials
The electromagnetic field of sending measures,
As shown in figure 5, sample is ring resonator 5, appended drawing reference 6 is RF connection, and sample is placed on Level tune
Under device on plate, when sample has access interface, the output of vector network analyzer passes through RF connection and sample
Access interface is connected；When sample does not have access interface, the output of vector network analyzer passes through RF connection and excitation
Probe is connected；Excitation probe is located on lower plate for excitation electromagnetic field；Excitation probe will depend on sample at a distance from sample；
Energy source of the probe as sample is excited, or excitation probe is to inspire electromagnetic wave, measures sample to ejecting electromagnetic wave
It interacts.
The output end of vector network analyzer is fixed in the line card on level(l)ing device, adjustable by lifting platform
Gap between lower plate and upper plate (i.e. parallel flat waveguide)；Four corners of support limit plate in level(l)ing device respectively have
One adjusting nut, four nuts can support by the feed motion of screw thread and remove plate, and the fine tuning of four adjusting nuts is passed through
It is relatively parallel with upper plate that lower plate can be adjusted to.Near field measurement probe is fixed on above probe fixing card, probe tip
It is parallel with upper plate parallel surfaces.Photonic crystal is placed and is fixed with lower washer, upper and lower plates are manually adjusted by lifting platform
Height gap adjusts and arrives suitable gap.Scanning step, step number and scanning overall length are arranged by host computer after the completion of all debugging
Any two in degree determine the size and scanning dot density of scanning area.Instruction can be issued automatically by being provided with rear host computer
Two-dimensional surface scanning system and vector network analyzer are transferred, in the station acquisition data of each point, is automatically performed excitation sample
The electromagnetic field magnitude excited and phase range scanning survey of product work.(specific embodiment described herein is only to solve
The present invention is released, is not intended to limit the present invention.)
When measuring scattering of the sample to electromagnetic field, equally the output of vector network analyzer by RF connection and is swashed
Probe is sent out to be connected；Excitation probe is located at excitation electromagnetic field on lower plate；It can measure scattering of the sample to electromagnetic field.
Implement three：
The present embodiment measures rectangular waveguide built-in field；The device of the present embodiment can be the dress of embodiment two
It sets,
When passing in and out measurement to rectangular waveguide built-in field, rectangular waveguide milling removes a face, will mill the square for removing a plane
Shape waveguide is placed and secured in lower washer, mill remove it is face-up parallel with upper plate, by lifting platform manually adjust selection close
Available gap is fitted, rectangular waveguide and upper plate is made to keep minimum spacing (0.1-0.2mm or following), sample fortune opposite with upper plate
It is generated when dynamic without friction.Then scanning step is arranged by the host computer procedure in computer and determines the big of scanning area with step number
Small and scanning dot density.Instruction transfer two-dimensional surface scanning system and vector network point can be issued automatically by being provided with rear host computer
Analyzer is automatically performed the number of rectangular waveguide built-in field amplitude and phase in the station acquisition electromagnetic wave data of each point
It works according to scanning collection.(described herein specific examples are only used to explain the present invention, is not intended to limit the present invention.)
Level is adjusted with four adjusting nuts in level(l)ing device in present example, only to explain this hair
It is bright, it is not used to limit the mode for using four adjusting nuts comprising all its Level tunes that can achieve similar with its are made
With or function structure or device, and within the spirit and principles in the present invention made by any modification, equivalent replacement and change
Into etc., it should be included within the scope of the present invention.
As shown in fig. 6, the molding example figure of external electromagnetic field is fettered for electromagnetism, a table of the milling except electromagnetism constraint space
Face mills the face-up and upper plate removed by milling except the sample of a plane is placed and secured in washer under level(l)ing device
In parallel, so that sample and upper plate is kept minimum spacing (0.1-0.2mm or following) by the lift adjustment of lifting platform, guarantee sample
It is generated with when upper plate relative motion without friction.The measurement process of electromagnetic field is identical with embodiment 3.
The shape of upper plate, lower plate in present example is not limited only to rectangle and plane, only to explain the present invention,
Other various can achieve with shape and structures of the similar function of the present invention and made within the spirit and principles in the present invention
Any modifications, equivalent replacements, and improvements etc., should be included within the scope of the present invention.By lifting platform come real in example
The function in the gap of upper plate and lower plate is now adjusted, but it is not used to limit using lifting platform only to explain the present invention
Mode, within the spirit and principles in the present invention made by any modifications, equivalent replacements, and improvements and for other mechanisms, dress
Set, system, structure etc. can achieve same effect or function etc., should be included within the scope of the present invention.
The foregoing is merely illustrative of the preferred embodiments of the present invention, only to explain the present invention, not to limit this
Invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in this hair
Within bright protection scope.
Claims (8)
1. a kind of parallel flat waveguide measuring device, it is characterised in that including：Detachable upper plate beam wave apparatus, two-dimensional surface move
Dynamic system, computer, vector network analyzer, lifting platform, level(l)ing device and near-field measurement probe；
The computer is connected with vector network analyzer, and the input terminal of vector network analyzer passes through RF connection and near field
Measuring probe is connected, and the output end of vector network analyzer is connected by RF connection with sample or excitation probe, detachably
Formula upper plate beam wave apparatus includes the frame of upper plate and support upper plate, and upper plate is equipped with detection mouth；Near-field measurement probe is in detection mouth
Interior clamped fixation；The lifting platform is fixed on two-dimensional plane coordinate mobile system, and level(l)ing device is fixed on lifting platform
On；The two-dimensional surface mobile system is controlled by computer drives lifting platform mobile in X-axis and Y direction；Level tune
The upper surface of device and upper plate are metal material and are arranged in parallel.
2. parallel flat waveguide measuring device according to claim 1, it is characterised in that the level(l)ing device packet
Include lower plate, support limit plate and several Level tune parts；The support limit plate upper surface is equipped with and lower writing board shape phase
Same recessed portion, the recessed portion is for installing lower plate；Level tune part is fixed on support limit plate, lower flat plate bottom
It is supported by several Level tune parts.
3. parallel flat waveguide measuring device according to claim 2, it is characterised in that the Level tune part is uniform
It is distributed in the lower section of the lower plate edge.
4. parallel flat waveguide measuring device according to claim 1, it is characterised in that the mobile system of the two-dimensional surface
System includes the first single armed linear robot, the second single armed linear robot, equipment base, linear guides；First single armed
Linear robot and the second single armed linear robot include servo controller, sliding rail and sliding block；Servo controller controls sliding block
It moves along a straight line on the slide rail；Linear guides and the first single armed linear robot are arranged on the equipment base, linearly
The sliding rail of guide rail and the first single armed linear robot is set in parallel, and the two height is equal, the second single armed linear robot
One end is fixed on the sliding block of the first single armed linear robot, and the other end is slidably mounted on linear guides,
The sliding rail of second single armed linear robot and the perpendicular installation of linear guides；Lifting platform is fixed on the second single armed linear robot
On sliding block.
5. the guide measuring method of parallel flat waveguide measuring device described in a kind of claim 2, it is characterised in that：To parallel flat
When plate measures, the output of vector network analyzer is connected by RF connection with excitation probe；Excitation probe is located at lower plate
It is upper to be used for excitation electromagnetic field；The feed motion for adjusting the Level tune part on support limit plate, which can support, removes plate, passes through water
It is relatively parallel with upper plate that the fine tuning of flat regulating part is adjusted to lower plate；
The gap under level(l)ing device between plate and upper plate is adjusted by lifting platform, that is, between adjusting parallel flat
Away from；Near-field measurement probe is fixed in probe fixing card, and probe syringe needle is parallel with upper plate parallel surfaces；All mechanical debugging are completed
The size and scanning of scanning area are determined by any two in computer installation scanning step, step number and scanning total length afterwards
Dot density is provided with rear host computer publication instruction and transfers two-dimensional surface scanning system and vector network analyzer, at each
The station acquisition data of point, are automatically performed the scanning work of whole region.
6. the guide measuring method of parallel flat waveguide measuring device described in a kind of claim 2, it is characterised in that：
Sample is placed under level(l)ing device on plate, when sample has access interface, the output of vector network analyzer
It is connected by RF connection with the access interface of sample；When sample does not have access interface or needs to measure sample to electromagnetic field
Scattering when, the output of vector network analyzer is connected by RF connection with probe is excited；Excitation probe is located at lower plate
It is upper to be used for excitation electromagnetic field；
The feed motion for adjusting the Level tune part on support limit plate, which can support, removes plate, passes through the fine tuning of Level tune part
It is relatively parallel with upper plate to be adjusted to lower plate；The gap under level(l)ing device between plate and upper plate is adjusted by lifting platform；
Near-field measurement probe is fixed on above probe fixing card, and probe syringe needle is parallel with upper plate parallel surfaces；All mechanical debugging are completed
It determines the size of scanning area by any two in computer installation scanning step, step number and scanning total length afterwards and sweeps
Described point density is provided with rear host computer publication instruction and transfers two-dimensional surface scanning system and vector network analyzer, each
The station acquisition data of a point, are automatically performed the scanning work of whole region.
7. a kind of electromagnetism of parallel flat waveguide measuring device described in claim 1 fetters spatial measuring method, it is characterised in that：
By milling except the sample of a plane is placed and secured in washer under level(l)ing device, the face-up and upper plate removed is milled
In parallel, sample and upper plate is made to keep spacing small as far as possible by the lift adjustment of lifting platform, and when sample and upper plate relative motion
It is generated without friction；Then scanning is determined by any two in computer installation scanning step, step number and scanning total length
The size and scanning dot density in region are provided with rear computer publication instruction and transfer two-dimensional surface scanning system and vector network
Analyzer is automatically performed the data of sample interior electromagnetic field magnitude and phase in the station acquisition electromagnetic wave data of each point
Scanning collection work.
8. according to the method described in claim 7, it is characterized in that：The electromagnetism constraint space is rectangular waveguide or resonance
Chamber.
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| CN201810737509.2A CN108872268A (en) | 2018-07-06 | 2018-07-06 | Parallel flat waveguide measuring device and method |
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| CN109921868A (en) * | 2019-02-27 | 2019-06-21 | Oppo广东移动通信有限公司 | A kind of technological equipment and a kind of measurement method of the radiation value of electronic device |
| CN113092874A (en) * | 2021-03-24 | 2021-07-09 | 中国舰船研究设计中心 | High-precision large-area electromagnetic field two-dimensional space field distribution scanning device and method |
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