CN108871545A - vibration measuring device - Google Patents

vibration measuring device Download PDF

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Publication number
CN108871545A
CN108871545A CN201810645791.1A CN201810645791A CN108871545A CN 108871545 A CN108871545 A CN 108871545A CN 201810645791 A CN201810645791 A CN 201810645791A CN 108871545 A CN108871545 A CN 108871545A
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CN
China
Prior art keywords
module
laser
vibration
detecting device
mentioned
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Pending
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CN201810645791.1A
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Chinese (zh)
Inventor
吴元芳
韦亚
韦亚一
董立松
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Institute of Microelectronics of CAS
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Institute of Microelectronics of CAS
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Application filed by Institute of Microelectronics of CAS filed Critical Institute of Microelectronics of CAS
Priority to CN201810645791.1A priority Critical patent/CN108871545A/en
Publication of CN108871545A publication Critical patent/CN108871545A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

The application provides a vibration measuring device. This vibration measuring device includes: the laser instrument comprises a plurality of laser modules, wherein the frequencies of laser emitted by at least two laser modules in the plurality of laser modules are different, and each laser module is used for obtaining a vibration signal of a tested structure. In the vibration measuring device, because the laser instrument comprises a plurality of laser modules and the frequency of laser emitted from the laser modules is not completely the same, the laser instrument can obtain a plurality of groups of different test data, and then the average is obtained according to the plurality of groups of different test data, so that the vibration information of the tested structure can be accurately obtained.

Description

Vibration detecting device
Technical field
This application involves vibration measuring fields, in particular to a kind of vibration detecting device.
Background technique
The measurement and analysis of vibration characteristics are to identify and determine the important means of machine, component functional reliability.It is common Vibration measuring technology be contact type measurement:Acceleration transducer is installed on testee, it is defeated using the charge of acceleration transducer Signal realizes acceleration-speed-displacement measurement of correlation out.If measuring the vibration of the lesser object of quality, additional acceleration Degree sensor mass often will affect the vibration of testee, to generate measurement error.It designs and develops and is novel non-contact Formula, high-precision, the vibration measuring technology of real-time are always the important topic and task of engineering science technical field.
Currently, more mature contactless vibration measurement technique has laser hologram technique and laser doppler vibration measurement side Method.But both methods low measurement accuracy.
Disclosed information above is used only to reinforce the background technique to technology described herein in the background section Understanding may include therefore certain information in background technique, these information are to those skilled in the art and not formed The home known prior art.
Summary of the invention
The main purpose of the application is to provide a kind of vibration detecting device, to solve the measurement of vibration detecting device in the prior art The lower problem of precision.
To achieve the goals above, this application provides a kind of vibration detecting device, which includes:Laser, including The frequency of multiple laser modules, the laser that at least two above-mentioned laser modules in multiple above-mentioned laser modules issue is different, respectively Above-mentioned laser module is for obtaining the vibration signal of measured structure.
Further, each above-mentioned laser module includes laser and photovoltaic converter, and above-mentioned photovoltaic converter will be for that will lead to It crosses the vibration optical signal that above-mentioned laser measures and is converted into vibration electric signal.
Further, above-mentioned laser further includes the amplification module being sequentially connected electrically, filter module, rectification module and mould Number conversion module, above-mentioned amplification module are electrically connected with above-mentioned laser module.
Further, the quantity of above-mentioned amplification module, the quantity of above-mentioned filter module, the quantity of above-mentioned rectification module and The quantity of above-mentioned analog-to-digital conversion module is identical as the quantity of above-mentioned laser module, and above-mentioned laser module, above-mentioned amplification module, on Filter module, above-mentioned rectification module and above-mentioned analog-to-digital conversion module is stated to be electrically connected correspondingly.
Further, above-mentioned photovoltaic converter includes detector.
Further, above-mentioned vibration detecting device further includes host computer, and above-mentioned host computer is at least used to export above-mentioned laser Signal carry out processing analysis.
Further, above-mentioned host computer includes:Data acquisition module is electrically connected with above-mentioned laser, above-mentioned for acquiring The vibration signal of laser output;Analysis and processing module is electrically connected with above-mentioned data acquisition module, and above-mentioned analysis and processing module is used In to above-mentioned data collecting module collected to vibration signal be analyzed and processed.
Further, above-mentioned analysis and processing module includes:First processing module is electrically connected with above-mentioned data acquisition module, The vibration signal that above-mentioned first processing module is used to arrive above-mentioned data collecting module collected carries out calculus calculation process, with To acceleration signal;Second processing module is electrically connected with above-mentioned first processing module, and above-mentioned Second processing module is used for above-mentioned Acceleration signal carries out Fourier transformation, obtains frequency-region signal.
Further, above-mentioned host computer further includes:Parameter setting module is electrically connected with each above-mentioned laser module, on Parameter setting module is stated for carrying out parameter setting to above-mentioned laser module, so that at least two above-mentioned laser modules issue difference The laser of frequency.
Further, above-mentioned parameter includes the frequency of laser.
Further, above-mentioned host computer further includes:Display is electrically connected, aforementioned display device with above-mentioned analysis and processing module For showing the signal obtained after above-mentioned analysis and processing module analysis processing.
Using the technical solution of the application, in above-mentioned vibration detecting device, since laser therein includes multiple modes of laser Block, and the frequency of the laser issued in multiple laser modules is not exactly the same, it is different that this allows for the available multiple groups of laser Test data, and then be averaging according to the different test data of multiple groups, the vibration information of measured structure can be accurately obtained.
Detailed description of the invention
The accompanying drawings constituting a part of this application is used to provide further understanding of the present application, and the application's shows Meaning property embodiment and its explanation are not constituted an undue limitation on the present application for explaining the application.In the accompanying drawings:
Fig. 1 shows the example structure schematic diagram of the vibration detecting device according to the application;
Fig. 2 shows the partial structural diagrams of the vibration detecting device in a kind of embodiment of the application;And
Fig. 3 shows the partial structural diagram of the vibration detecting device in another embodiment of the application.
Wherein, above-mentioned attached drawing includes the following drawings label:
10, laser;11, laser module;12, amplification module;13, filter module;14, rectification module;15, analog-to-digital conversion Module;111, laser;112, photovoltaic converter;20, host computer;21, parameter setting module;22, data acquisition module;23, Analysis and processing module;30, measured structure.
Specific embodiment
It is noted that following detailed description is all illustrative, it is intended to provide further instruction to the application.Unless another It indicates, all technical and scientific terms used herein has usual with the application person of an ordinary skill in the technical field The identical meanings of understanding.
It should be noted that term used herein above is merely to describe specific embodiment, and be not intended to restricted root According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singular Also it is intended to include plural form, additionally, it should be understood that, when in the present specification using term "comprising" and/or " packet Include " when, indicate existing characteristics, step, operation, device, component and/or their combination.
It should be understood that when element (such as layer, film, region or substrate) is described as at another element "upper", this yuan Part can be directly on another element, or intermediary element also may be present.Moreover, in specification and claims, when When description has element " connected " to another element, which " can be directly connected to " to another element, or pass through third element " connected " to another element.
As background technique is introduced, the low measurement accuracy of vibration detecting device in the prior art, in order to solve as above The technical issues of, present applicant proposes a kind of vibration detecting devices.
In a kind of typical embodiment of the application, a kind of vibration detecting device is provided, as shown in Figure 1, the vibration detecting device Including laser 10, laser 10 includes multiple laser modules 11, as shown in Fig. 2, in multiple above-mentioned laser modules 11 at least The frequency for the laser that two above-mentioned laser modules 11 issue is different, and each above-mentioned laser module 11 is for obtaining the vibration of measured structure 30 Dynamic signal, specific vibration measuring process include:Each laser module 11 issues the laser of different frequency and is incident to 30 table of measured structure Face, the reflection laser and incident laser on 30 surface of measured structure interfere, and generate the Doppler frequency-shift with vibration information and believe Number, to obtain the vibration information of measured structure 30.
In above-mentioned vibration detecting device, since laser therein includes multiple laser modules, and sent out in multiple laser modules The frequency of laser out is not exactly the same, this allows for the different test data of the available multiple groups of laser, and then according to more The different test data of group is averaging, and accurately obtains the vibration information of measured structure.
In a kind of specific embodiment, as shown in Figure 2 and Figure 3, each above-mentioned laser module 11 includes laser 111 and photoelectricity Converter 112, above-mentioned photovoltaic converter 112 are used to convert vibration telecommunications for the vibration optical signal measured by laser 111 Number, i.e., the vibration signal that laser module obtains in this embodiment is vibration electric signal.Specifically, laser 111 issues certain frequency The laser of rate, the laser light incident to 30 surface of measured structure, the reflection laser and incident laser on 30 surface of measured structure occur dry It relates to, generates the Doppler frequency-shift signal for having vibration information, the i.e. corresponding optical signal of vibration signal, photovoltaic converter 112 should Optical signal is converted into electric signal, carries out subsequent processing to facilitate.
In order to further handle the vibration signal that laser module obtains, to facilitate the true of subsequent acquisition measured structure Real Vibration Condition, in a kind of embodiment of the application, as shown in figure 3, above-mentioned laser 10 further includes the amplification being sequentially connected electrically Module 12, filter module 13, rectification module 14 and analog-to-digital conversion module 15, above-mentioned amplification module 12 and above-mentioned laser module 11 Electrical connection.Amplification module 12 amplifies vibration signal, carries out anti-aliasing filtering in amplified signal input filter module 13, Filtered ac signal passes through after rectification module 14, becomes direct current signal and is converted to digital letter by analog-to-digital conversion module Number.
Certainly, the subsequent processing module in above-mentioned laser is not limited to above-mentioned structure, can with other structures, It such as does not include rectification module therein etc..
In a kind of specific embodiment, as shown in figure 3, above-mentioned amplification module 12 is electrically connected with photovoltaic converter 112, in this way The corresponding electric signal of vibration signal, which enters in amplification module 12, to be amplified, and such amplification module 12 directly puts electric signal Greatly, i.e., directly electric signal is handled, implements and is easier to, so that the vibration detecting device structure is simpler, cost It is lower.
In order to handle simultaneously multiple groups vibration measuring signal, further such that finally obtained data are more acurrate, and mention The testing efficiency of high vibration detecting device, in a kind of embodiment of the application, the number of the quantity of above-mentioned amplification module, above-mentioned filter module The quantity of amount, the quantity of above-mentioned rectification module and above-mentioned analog-to-digital conversion module is identical as the quantity of above-mentioned laser module, and on Laser module, above-mentioned amplification module, above-mentioned filter module, above-mentioned rectification module and above-mentioned analog-to-digital conversion module is stated to correspond Ground electrical connection.
Certainly, the laser module in the application, above-mentioned amplification module, above-mentioned filter module and above-mentioned analog-to-digital conversion module It can not be one-to-one relationship, can also be multiple laser modules corresponding an above-mentioned amplification module, an above-mentioned filtering Module, an above-mentioned rectification module and an above-mentioned analog-to-digital conversion mould.The vibration signal that laser modules multiple in this way obtain is all It will be by the same above-mentioned amplification module, the same above-mentioned filter module, the same above-mentioned rectification module and same above-mentioned The processing of analog-to-digital conversion mould, specific treatment process can make the vibration signal of multiple laser modules successively pass through by timing control These modules are crossed to be handled.Those skilled in the art can be arranged according to the actual situation appropriate number of above-mentioned amplification module, Above-mentioned filter module, above-mentioned rectification module and above-mentioned analog-to-digital conversion module, so that these modules and laser module have not Same corresponding relationship.
In a kind of specific embodiment, above-mentioned photoelectric conversion module includes detector, and detector makes the vibration detecting device Structure is simpler, and cost is lower.
In order to preferably control the work of laser 10, and the signal for obtaining laser 10 is capable of handling as more Intuitive information, in a kind of embodiment of the application, as shown in Figure 1, above-mentioned vibration detecting device further includes host computer 20, it is above-mentioned upper Signal of the machine 20 at least for exporting to above-mentioned laser 10 carries out processing analysis.
In the another embodiment of the application, as shown in figure 3, above-mentioned host computer 20 includes data acquisition module 22 and analysis Processing module 23, wherein data acquisition module 22 is electrically connected with above-mentioned laser 10, and data acquisition module 22 is above-mentioned for acquiring The vibration signal that laser 10 exports;Analysis and processing module 23 is electrically connected with above-mentioned data acquisition module 22, above-mentioned analysis processing For module 23 for being analyzed and processed to the collected vibration signal of above-mentioned data acquisition module 22, being with processing more can intuitive body Whether existing measured structure 30 vibrates and the information of specific Vibration Condition.
In order to further obtain more accurate measured structure Vibration Condition specifying information, a kind of embodiment of the application In, above-mentioned analysis and processing module includes first processing module and Second processing module, and first processing module and above-mentioned data acquire Module electrical connection, the vibration signal that above-mentioned first processing module is used to arrive above-mentioned data collecting module collected carry out calculus fortune Calculation processing, to obtain acceleration signal;Second processing module is electrically connected with above-mentioned first processing module, above-mentioned Second processing module For carrying out Fourier transformation to above-mentioned acceleration signal, frequency-region signal is obtained.
In another embodiment of the application, as shown in figure 3, above-mentioned host computer 20 further includes parameter setting module 21, ginseng Number setup module 21 is electrically connected with each above-mentioned laser module 11, and above-mentioned parameter setup module 21 is used for above-mentioned laser module 11 carry out parameter setting, so that at least two above-mentioned laser modules 11 issue the laser of different frequency.
Specific above-mentioned parameter is the parameter with frequency dependence, and different laser modules could be made to issue different frequencies in this way The laser of rate.Those skilled in the art can select according to the actual situation suitable parameter to be configured, so that different swashs The laser of optical module sending different frequency.
In a kind of specific embodiment, above-mentioned parameter includes the frequency of laser, simpler can efficiently be realized in this way The laser of different laser module output different frequencies.
Certainly, above-mentioned parameter is not limited to include the case where the frequency of laser, and it is sharp to can also be that others can change The parameter of the frequency of light, those skilled in the art can select according to the actual situation suitable parameter to be arranged.
In order to more be intuitive to see the Vibration Condition of measured structure, in a kind of embodiment of the application, above-mentioned host computer It further include display, display is electrically connected with above-mentioned analysis and processing module, and aforementioned display device is for showing above-mentioned analysis processing mould The signal obtained after block analysis processing.
In order to enable those skilled in the art can clearly understand the technical solution and technical effect of the application, with The lower technical solution for illustrating the application by conjunction with specific embodiments.
Embodiment
As shown in Figure 1 to Figure 3, vibration detecting device includes laser 10 and host computer 20, wherein laser 10 includes two and swashs 13, two rectification modules 14 of the filter module of amplification module 12, two of optical module 11, two and two analog-to-digital conversion modules 15, Laser module 11, amplification module 12, filter module 13, rectification module 14 and analog-to-digital conversion module 15 correspond electrical connection; Laser module 11 includes laser 111 and detector, and amplification module 12 and detector are electrically connected.Host computer 20 includes parameter setting Module 21, data acquisition module 22, analysis and processing module 23 and display, data acquisition module 22 and analysis and processing module 23 Electrical connection, display is electrically connected with above-mentioned analysis and processing module 23, and data acquisition module 22 is electrically connected with analog-to-digital conversion module 15 It connecing, parameter setting module 21 is electrically connected with laser 111 by data line, the frequency of the laser of laser 111 is configured, So that the frequency for the laser that different lasers 111 issues is different.Specifically, amplification module 12 is amplifier, filter module 13 For filter, rectification module 14 is rectifier, and analog-to-digital conversion module is analog-to-digital conversion device.
The specific vibration measuring process of the vibration detecting device includes:Parameter setting module 21 sets the frequency of each laser 111 It sets, so that each laser 111 issues the laser of different frequency and is incident to the surface of measured structure 30,30 surface of measured structure Reflection laser and incident laser interfere, and generate the Doppler frequency-shift signal for having vibration information, the Doppler frequency-shift signal For optical signal, detector converts optical signal into electric signal, i.e. vibration signal is the electric signal, which enters through amplifying Device amplifies, and anti-aliasing filtering is carried out in input filter, filtered ac signal is by becoming direct current letter after precision rectifying Number, direct current signal is converted to digital signal by analog-to-digital conversion device, and data acquisition module 22 acquires the digital signal, and is input to point It analyses processing module 23 and carries out data processing, specifically, above-mentioned analysis and processing module 23 includes first processing module and second processing Module, first processing module are electrically connected with above-mentioned data acquisition module 22, and above-mentioned first processing module is for adopting above-mentioned data Collect the collected signal of module 22 and carry out calculus calculation process, to obtain acceleration signal;Second processing module and above-mentioned the The electrical connection of one processing module, above-mentioned Second processing module are used to carry out Fourier transformation to above-mentioned acceleration signal, obtain frequency domain Signal, obtained frequency domain information are shown by the screen of display.
The laser internal circuit of the vibration detecting device is simple and small in size, easy to carry;In conjunction with host computer realize data and The acquisition process of information, can the display waveform of vibration measuring in real time;Vibration measuring precision can be improved using two laser modules, surveyed to vibration Amount brings very big convenience.
It can be seen from the above description that the application the above embodiments realize following technical effect:
In the vibration detecting device of the application, since laser therein includes multiple laser modules, and in multiple laser modules The frequency of the laser of sending is not exactly the same, this allows for the different test data of the available multiple groups of laser, and then basis The different test data of multiple groups is averaging, and can accurately obtain the vibration information of measured structure.
It above are only preferred embodiment of the present application above, be not intended to limit this application, for the skill of this field For art personnel, various changes and changes are possible in this application.Within the spirit and principles of this application, made any to repair Change, equivalent replacement, improvement etc., should be included within the scope of protection of this application.

Claims (11)

1. a kind of vibration detecting device, which is characterized in that the vibration detecting device includes:
Laser, including multiple laser modules, what at least two laser modules in multiple laser modules issued swashs The frequency of light is different, and each laser module is for obtaining the vibration signal of measured structure.
2. vibration detecting device according to claim 1, which is characterized in that each laser module includes that laser and photoelectricity turn Change device, the photovoltaic converter is used to convert vibration electric signal for the vibration optical signal measured by the laser.
3. vibration detecting device according to claim 1, which is characterized in that the laser further includes the amplification being sequentially connected electrically Module, filter module, rectification module and analog-to-digital conversion module, the amplification module are electrically connected with the laser module.
4. vibration detecting device according to claim 3, which is characterized in that the quantity of the amplification module, the filter module Quantity, the quantity of the quantity of the rectification module and the analog-to-digital conversion module it is identical as the quantity of the laser module, And the laser module, the amplification module, the filter module, the rectification module and the analog-to-digital conversion module are one by one Accordingly it is electrically connected.
5. vibration detecting device according to claim 2, which is characterized in that the photovoltaic converter includes detector.
6. vibration detecting device according to claim 1, which is characterized in that the vibration detecting device further includes host computer, it is described on Position machine is at least used to carry out processing analysis to the signal that the laser exports.
7. vibration detecting device according to claim 6, which is characterized in that the host computer includes:
Data acquisition module is electrically connected with the laser, for acquiring the vibration signal of the laser output;And
Analysis and processing module is electrically connected with the data acquisition module, and the analysis and processing module is used to acquire the data The collected vibration signal of module is analyzed and processed.
8. vibration detecting device according to claim 7, which is characterized in that the analysis and processing module includes:
First processing module is electrically connected with the data acquisition module, and the first processing module is used to acquire the data The collected vibration signal of module carries out calculus calculation process, to obtain acceleration signal;And
Second processing module is electrically connected with the first processing module, and the Second processing module is used to believe the acceleration Number carry out Fourier transformation, obtain frequency-region signal.
9. vibration detecting device according to claim 7, which is characterized in that the host computer further includes:
Parameter setting module is electrically connected with each laser module, and the parameter setting module is used for the mode of laser Block carries out parameter setting, so that at least two laser modules issue the laser of different frequency.
10. vibration detecting device according to claim 9, which is characterized in that the parameter includes the frequency of laser.
11. vibration detecting device according to claim 7, which is characterized in that the host computer further includes:
Display is electrically connected with the analysis and processing module, and the display is for showing at the analysis and processing module analysis The signal obtained after reason.
CN201810645791.1A 2018-06-21 2018-06-21 vibration measuring device Pending CN108871545A (en)

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Application Number Priority Date Filing Date Title
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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1096272A3 (en) * 1999-10-29 2003-01-15 Litton Systems, Inc. Acoustic sensing system for downhole seismic applications utilizing an array of fiber optic sensors
US20120301072A1 (en) * 1999-04-09 2012-11-29 Qinetiq Limited Optical fibre sensor assembly
CN103196541A (en) * 2013-04-22 2013-07-10 四川大学 Object vibration spectrum measurement system based on laser
CN103983340A (en) * 2014-05-20 2014-08-13 厦门大学 Micro vibration measuring system and measuring method based on long-distance pulse laser speckles
JP5768231B2 (en) * 2010-11-09 2015-08-26 学校法人福岡大学 MEMS measurement method
CN106323447A (en) * 2016-10-18 2017-01-11 南京航空航天大学 Portable laser vibrometer based on mobile phone and method thereof

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120301072A1 (en) * 1999-04-09 2012-11-29 Qinetiq Limited Optical fibre sensor assembly
EP1096272A3 (en) * 1999-10-29 2003-01-15 Litton Systems, Inc. Acoustic sensing system for downhole seismic applications utilizing an array of fiber optic sensors
JP5768231B2 (en) * 2010-11-09 2015-08-26 学校法人福岡大学 MEMS measurement method
CN103196541A (en) * 2013-04-22 2013-07-10 四川大学 Object vibration spectrum measurement system based on laser
CN103983340A (en) * 2014-05-20 2014-08-13 厦门大学 Micro vibration measuring system and measuring method based on long-distance pulse laser speckles
CN106323447A (en) * 2016-10-18 2017-01-11 南京航空航天大学 Portable laser vibrometer based on mobile phone and method thereof

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Application publication date: 20181123