CN108871483A - A kind of corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer and its manufacturing method - Google Patents

A kind of corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer and its manufacturing method Download PDF

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Publication number
CN108871483A
CN108871483A CN201810771454.7A CN201810771454A CN108871483A CN 108871483 A CN108871483 A CN 108871483A CN 201810771454 A CN201810771454 A CN 201810771454A CN 108871483 A CN108871483 A CN 108871483A
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CN
China
Prior art keywords
pressure
corrosion
fuel gas
sensor
frame
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810771454.7A
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Chinese (zh)
Inventor
鲍先辉
田继忠
孙冰
张建国
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Shenzhen Diantong Wintronic Microelectronics Co Ltd
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Shenzhen Diantong Wintronic Microelectronics Co Ltd
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Application filed by Shenzhen Diantong Wintronic Microelectronics Co Ltd filed Critical Shenzhen Diantong Wintronic Microelectronics Co Ltd
Priority to CN201810771454.7A priority Critical patent/CN108871483A/en
Publication of CN108871483A publication Critical patent/CN108871483A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/02Compensating or correcting for variations in pressure, density or temperature
    • G01F15/04Compensating or correcting for variations in pressure, density or temperature of gases to be measured
    • G01F15/043Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means

Abstract

The present invention relates to a kind of corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer and its manufacturing methods, sensor uses small-sized integrated SMD structure, including frame, cylindrical case, signal condition chip, pressure sensor and platinum resistance temperature sensor, the cylindrical case is arranged on frame, the signal condition chip, pressure sensor and platinum resistance temperature sensor are bonded on frame, and it is encapsulated in cylindrical case by casting glue, the signal condition chip, pressure sensor and platinum resistance temperature sensor are electrically connected by bonding line, the casting glue is fluoride gel.After the completion of the corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer compensation for calibrating errors, a digital pressure signal output is provided, the output of platinum resistance signal temperature is met《Detecting gas meter regulation》It about gas meter, flow meter using temperature and pressure compensated index request, solves the demand for using the product by the user miniaturization, is reserved for user and carry out innovation upgrading with more spaces.

Description

A kind of corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer and its manufacturing method
Technical field
The present invention relates to gas meter, flow meter temperature and pressure compensation technical field more particularly to a kind of corrosion-resistant fuel gas table temperature and pressure compensation one Change sensor and its manufacturing method.
Background technique
Gas meter, flow meter is used for gas metering charging, and when calculating is calculated with marking condition condition, and in addition to laboratory, actual condition is very The rare use condition for meeting mark condition, according to the equation of gas state, gas dosing is influenced very big by environment temperature and pressure, is The accuracy for guaranteeing gas metering, needs to measure the temperature and pressure value of natural gas in natural-gas transfer pipeline, passes through temperature Actual condition is converted into standard condition by pressure compensation, realizes the amendment to gas meter, flow meter metering numerical value.
Platinum resistance temperature is respectively adopted one is adopting a split structure in mode that there are two types of existing gas meter, flow meter temperature and pressure compensations Sensor measures temperature and the oil-filled isolation membrane pressure sensor of use measure pressure, carry out temperature and pressure compensation, such structural disadvantages are Volume is big, take up space and structure is complicated;Another is the sensor using temperature and pressure one, and temperature sensor is using partly leading Body PN junction thermometric, and protected using Silica hydrogel encapsulating, semiconductor PN temperature measurement accuracy is not high, is unable to satisfy《Detecting gas meter rule Journey》Temperature index requirement;There is organic solvent and sulfide in natural gas line, Silica hydrogel is also unable to satisfy anticorrosion Requirement.
Summary of the invention
The purpose of the present invention is to provide a kind of miniaturization, using the corrosion-resistant fuel gas table temperature and pressure compensation of SMD encapsulating structure Integrated transducer and its manufacturing method.
The invention is realized in this way:A kind of corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer, using small-sized one Change SMD structure, including frame, cylindrical case, signal condition chip, pressure sensor and platinum resistance temperature sensor, the cylinder Shape shell is arranged on frame, and the signal condition chip, pressure sensor and platinum resistance temperature sensor are bonded on frame, And be encapsulated in cylindrical case by casting glue, the signal condition chip, pressure sensor and platinum resistance temperature sensor pass through The electrical connection of bonding line, the casting glue are fluoride gel.
Wherein, the precision grade of the platinum resistance temperature sensor is A grades.
Wherein, the frame is glass frame, metal framework or ceramic frame.
Wherein, the cylindrical case is metal shell or plastic shell.
Wherein, a height of 6.8mmX6.4mmX3.2mm of sensor outer dimension length and width.
Another technical solution provided by the invention is:The system of the corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer Make method, including step:
(1)Signal condition chip, pressure sensor and platinum resistance temperature sensor are pasted on frame by bonded adhesives, gone forward side by side Row solidification;
(2)Bonding wire connects signal condition chip, pressure sensor and platinum resistance temperature sensor realization electrically using bonding line It connects;
(3)Cylindrical case is pasted on frame by bonded adhesives, and is solidified;
(4)Fluoride gel is perfused into cylindrical case, and is solidified;
(5)Age stability;
(6)Calibration;
(7)Test.
Wherein, in step(4)In, it specifically includes:Fluoride gel is perfused, is vacuumized, then carries out hot setting, most After carry out aging.
Beneficial effects of the present invention are:The corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer is using small-sized integrated SMD structure is all integrated in signal condition chip, pressure sensor and platinum resistance temperature sensor on frame, and passes through bonding Line realizes electrical connection, wherein for pressure sensor for detecting pressure signal, it is defeated that mechanical pressure signal is converted to electric signal Out, platinum resistance temperature sensor realizes high precision measuring temperature, signal condition chip is for acquiring and handling for detecting temperature signal Pressure sensor and chip interior temperature sensor signal realize calibration and temperature-compensating to signal, complete Digital output, Cylindrical case is used to form a pressure cavity, transfers the pressure on pressure sensor(Specially pressure sensor is pressure-sensitive On chip), using fluoride gel as casting glue, for realizing the protection to internal components, especially can satisfy to natural Organic solvent and the corrosion resistant requirement of sulfide and waterproof requirement in feed channel.The corrosion-resistant fuel gas table temperature and pressure compensation integration After the completion of pick up calibration compensation, a digital pressure signal output is provided, the output of platinum resistance signal temperature is met《Combustion gas Table vertification regulation》About gas meter, flow meter using temperature and pressure compensated index request, solves and use the product by the user miniaturization Demand reserves for user and carries out innovation upgrading with more spaces.Using small-sized integrated SMD structure, user's high-volume is solved The problem of producing and using Reflow Soldering.
The manufacturing method of the corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer is given birth to by SOP production process for encapsulating It produces, using bonded adhesives fixed signal conditioning chip, pressure sensor and platinum resistance temperature sensor, cylindrical case, passes through bonding Line realizes electrical connection, realizes the protection to internal components using casting glue, realizes that the performance of sensor is steady by age stability It is fixed, the calibration and temperature-compensating of pressure detecting are realized by calibration, are stablized cell pressure output, are met requirement, and And use a kind of special encapsulating process for protecting, i.e., the protection to internal components is realized as casting glue using fluoride gel, Meet product anticorrosion in application process and waterproof requirement.
Detailed description of the invention
Fig. 1 is the stereoscopic schematic diagram of corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer embodiment of the present invention;
Fig. 2 is the cross-sectional side view of corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer embodiment of the present invention;
Fig. 3 is the top view of corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer embodiment of the present invention.
1, frame;2, cylindrical case;3, signal condition chip;4, pressure sensor;5, platinum resistance temperature sensor;6, it fills Sealing;7, bonding line.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and It is not used in the restriction present invention.
As corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer embodiment of the present invention, as shown in Figure 1 to Figure 3, Using small-sized integrated SMD structure, including frame 1, cylindrical case 2, signal condition chip 3, pressure sensor 4 and platinum resistance temperature Sensor 5 is spent, the cylindrical case 2 is arranged on frame 1, the signal condition chip 3, pressure sensor 4 and platinum resistance temperature Degree sensor 5 is bonded on frame 1, and is encapsulated in cylindrical case 2 by casting glue 6, and the signal condition chip 3, pressure pass Sensor 4 and platinum resistance temperature sensor 5 are electrically connected by bonding line 7, and the casting glue 6 is fluoride gel(Fluorine silicon is solidifying Glue).
The corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer uses small-sized integrated SMD structure, signal condition Chip, 3 pressure sensors 4 and platinum resistance temperature sensor 5 are all integrated on frame 1, and are realized by bonding line 7 and electrically connected It connects, wherein pressure sensor 4 is converted to electric signal output, platinum resistance temperature for detecting pressure signal, by mechanical pressure signal Sensor 5 realizes high precision measuring temperature, signal condition chip 3 is for acquiring and processing pressure sensor 4 for detecting temperature signal With the signal of chip interior temperature sensor, calibration and temperature-compensating to signal are realized, complete Digital output, cylindrical case 2 are used to form a pressure cavity, transfer the pressure on pressure sensor 4(The specially chip varistor of pressure sensor On), using fluoride gel as casting glue 6, for realizing the protection to internal components, especially can satisfy to natural gas tube Organic solvent and the corrosion resistant requirement of sulfide and waterproof requirement in road.The corrosion-resistant fuel gas table temperature and pressure compensation integrated sensing After the completion of device compensation for calibrating errors, a digital pressure signal output is provided, the output of platinum resistance signal temperature is met《Gas meter, flow meter inspection Set pattern journey》About gas meter, flow meter using temperature and pressure compensated index request, solve the demand for using the product by the user miniaturization, It is reserved for user and carries out innovation upgrading with more spaces.Using small-sized integrated SMD structure, solving user's mass production makes The problem of with Reflow Soldering.
In the present embodiment, the precision grade of the platinum resistance temperature sensor 5 is A grades, and precision fully meets temperature benefit The required precision repaid.
In the present embodiment, the frame 1 is glass frame, metal framework or ceramic frame.
In the present embodiment, the cylindrical case 2 is metal shell or plastic shell.
In the present embodiment, a height of 6.8mmX6.4mmX3.2mm of sensor outer dimension length and width, it is very small and exquisite.
The manufacturing method of corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer of the present invention, including step:
(1)Signal condition chip 3, pressure sensor 4 and platinum resistance temperature sensor 5 are pasted on frame 1 by bonded adhesives, And solidified;
(2)Bonding wire realizes signal condition chip 3, pressure sensor 4 and platinum resistance temperature sensor 5 electrically using bonding line 7 Connection;
(3)Cylindrical case 2 is pasted on frame 1 by bonded adhesives, and is solidified;
(4)Fluoride gel is perfused into cylindrical case 2, and is solidified;
(5)Age stability;
(6)Calibration;
(7)Test.
In the present embodiment, in step(4)In, it specifically includes:Fluoride gel is perfused, is vacuumized, then carries out high Temperature solidification, finally carries out aging.
The manufacturing method of the corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer is given birth to by SOP production process for encapsulating It produces, using bonded adhesives fixed signal conditioning chip 3, pressure sensor 4 and platinum resistance temperature sensor 5, cylindrical case 2, passes through Bonding line 7 realizes electrical connection, realizes the protection to internal components using casting glue 6, realizes sensor by age stability Performance is stablized, and the calibration and temperature-compensating of pressure detecting are realized by calibration, stablizes cell pressure output, meets use and wants It asks, and uses a kind of special encapsulating process for protecting, i.e., realized as casting glue to internal components using fluoride gel Protection meets product anticorrosion in application process and waterproof requirement.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.

Claims (7)

1. a kind of corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer, which is characterized in that small-sized integrated SMD structure is used, Including frame, cylindrical case, signal condition chip, pressure sensor and platinum resistance temperature sensor, the cylindrical case setting On frame, the signal condition chip, pressure sensor and platinum resistance temperature sensor are bonded on frame, and by casting glue It is encapsulated in cylindrical case, the signal condition chip, pressure sensor and platinum resistance temperature sensor are electrical by bonding line Connection, the casting glue are fluoride gel.
2. corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer according to claim 1, which is characterized in that the platinum electricity The precision grade for hindering temperature sensor is A grades.
3. corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer according to claim 1, which is characterized in that the frame For glass frame, metal framework or ceramic frame.
4. corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer according to claim 1, which is characterized in that the tubular Shell is metal shell or plastic shell.
5. corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer according to claim 1, which is characterized in that the sensing The a height of 6.8mmX6.4mmX3.2mm of device outer dimension length and width.
6. the manufacturing method of corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer as described in claim 1, which is characterized in that packet Include step:
(1)Signal condition chip, pressure sensor and platinum resistance temperature sensor are pasted on frame by bonded adhesives, gone forward side by side Row solidification;
(2)Bonding wire connects signal condition chip, pressure sensor and platinum resistance temperature sensor realization electrically using bonding line It connects;
(3)Cylindrical case is pasted on frame by bonded adhesives, and is solidified;
(4)Fluoride gel is perfused into cylindrical case, and is solidified;
(5)Age stability;
(6)Calibration;
(7)Test.
7. the manufacturing method of corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer according to claim 6, which is characterized in that In step(4)In, it specifically includes:Fluoride gel is perfused, is vacuumized, then carries out hot setting, it is old finally to carry out timeliness Change.
CN201810771454.7A 2018-07-13 2018-07-13 A kind of corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer and its manufacturing method Pending CN108871483A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110567511A (en) * 2019-08-13 2019-12-13 浙江威星智能仪表股份有限公司 Temperature and pressure detection device
CN111256856A (en) * 2020-01-20 2020-06-09 合肥智感科技有限公司 Waterproof dustproof intelligent cell-phone temperature pressure sensor
WO2022085497A1 (en) * 2020-10-20 2022-04-28 イーグル工業株式会社 Pressure and temperature sensor

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CN201215517Y (en) * 2008-05-28 2009-04-01 伊玛精密电子(苏州)有限公司 Pressure detecting device with temperature compensation
CN102168994A (en) * 2010-12-29 2011-08-31 沈阳仪表科学研究院 Silicon capacitive differential pressure transducer with multi-parameter and compensation method of static pressure influence
CN105551984A (en) * 2015-12-31 2016-05-04 广东爱晟电子科技有限公司 Manufacturing method of waterproof and moisture-proof temperature sensor, and prepared temperature sensor
CN106946213A (en) * 2017-05-26 2017-07-14 芜湖恒铭电子科技有限公司 A kind of pressure sensor and preparation method thereof
CN206847842U (en) * 2017-04-05 2018-01-05 深圳明珠盈升科技有限公司 A kind of encapsulating structure of pressure sensor
CN207335804U (en) * 2017-11-06 2018-05-08 廊坊新奥燃气设备有限公司 A kind of temperature and pressure compensation gas meter, flow meter and its temperature, pressure acquisition module
CN208476328U (en) * 2018-07-13 2019-02-05 深圳电通纬创微电子股份有限公司 A kind of corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201149497Y (en) * 2008-01-22 2008-11-12 南京高华科技有限公司 Sensor for detecting temperature, humidness atmos surroundings
CN201215517Y (en) * 2008-05-28 2009-04-01 伊玛精密电子(苏州)有限公司 Pressure detecting device with temperature compensation
CN102168994A (en) * 2010-12-29 2011-08-31 沈阳仪表科学研究院 Silicon capacitive differential pressure transducer with multi-parameter and compensation method of static pressure influence
CN105551984A (en) * 2015-12-31 2016-05-04 广东爱晟电子科技有限公司 Manufacturing method of waterproof and moisture-proof temperature sensor, and prepared temperature sensor
CN206847842U (en) * 2017-04-05 2018-01-05 深圳明珠盈升科技有限公司 A kind of encapsulating structure of pressure sensor
CN106946213A (en) * 2017-05-26 2017-07-14 芜湖恒铭电子科技有限公司 A kind of pressure sensor and preparation method thereof
CN207335804U (en) * 2017-11-06 2018-05-08 廊坊新奥燃气设备有限公司 A kind of temperature and pressure compensation gas meter, flow meter and its temperature, pressure acquisition module
CN208476328U (en) * 2018-07-13 2019-02-05 深圳电通纬创微电子股份有限公司 A kind of corrosion-resistant fuel gas table temperature and pressure compensation integrated transducer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110567511A (en) * 2019-08-13 2019-12-13 浙江威星智能仪表股份有限公司 Temperature and pressure detection device
CN111256856A (en) * 2020-01-20 2020-06-09 合肥智感科技有限公司 Waterproof dustproof intelligent cell-phone temperature pressure sensor
WO2022085497A1 (en) * 2020-10-20 2022-04-28 イーグル工業株式会社 Pressure and temperature sensor

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