CN108844914B - 一种基于金属探针的太赫兹超分辨成像装置及成像方法 - Google Patents
一种基于金属探针的太赫兹超分辨成像装置及成像方法 Download PDFInfo
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- CN108844914B CN108844914B CN201810520030.3A CN201810520030A CN108844914B CN 108844914 B CN108844914 B CN 108844914B CN 201810520030 A CN201810520030 A CN 201810520030A CN 108844914 B CN108844914 B CN 108844914B
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- 239000002184 metal Substances 0.000 title claims abstract description 69
- 238000003384 imaging method Methods 0.000 title claims abstract description 49
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- 239000007769 metal material Substances 0.000 claims description 2
- 238000012544 monitoring process Methods 0.000 claims 1
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
- G01N21/3586—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation by Terahertz time domain spectroscopy [THz-TDS]
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Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
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CN109696422A (zh) * | 2018-12-27 | 2019-04-30 | 雄安华讯方舟科技有限公司 | 太赫兹近场成像装置和方法 |
CN109917407A (zh) * | 2019-03-22 | 2019-06-21 | 中国科学院重庆绿色智能技术研究院 | 一种基于激光反射的近场探针测距方法及装置 |
CN109959938A (zh) * | 2019-04-10 | 2019-07-02 | 中国计量大学 | 基于合成孔径聚焦的聚乙烯材料太赫兹时域光谱成像方法 |
CN110057776B (zh) * | 2019-05-10 | 2021-10-15 | 南开大学 | 一种基于波导结构的集成式太赫兹共焦成像装置及成像方法 |
CN110687319B (zh) * | 2019-10-24 | 2022-11-01 | 赫智科技(苏州)有限公司 | 一种超高分辨率的原子力显微镜扫描探针及其测量方法 |
CN112083196B (zh) * | 2020-09-17 | 2021-09-28 | 电子科技大学 | 一种太赫兹近场成像系统及方法 |
CN115236038B (zh) * | 2022-07-26 | 2024-03-22 | 合肥综合性国家科学中心能源研究院(安徽省能源实验室) | 一种精子顶体空泡太赫兹成像方法 |
CN116818704B (zh) * | 2023-03-09 | 2024-02-02 | 苏州荣视软件技术有限公司 | 一种半导体瑕疵ai高精度全自动检测方法、设备及介质 |
CN117405624B (zh) * | 2023-10-27 | 2024-05-07 | 合肥综合性国家科学中心能源研究院(安徽省能源实验室) | 一种精度优于10纳米的太赫兹近场成像系统测量方法 |
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KR100434447B1 (ko) * | 2002-03-26 | 2004-06-04 | 한국과학기술원 | 주사 시스템에 사용되는 근접 전장 탐사기 |
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