CN108832020A - A kind of flexible substrate composite construction and the preparation method and application thereof - Google Patents
A kind of flexible substrate composite construction and the preparation method and application thereof Download PDFInfo
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- CN108832020A CN108832020A CN201810662971.0A CN201810662971A CN108832020A CN 108832020 A CN108832020 A CN 108832020A CN 201810662971 A CN201810662971 A CN 201810662971A CN 108832020 A CN108832020 A CN 108832020A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- H10K77/10—Substrates, e.g. flexible substrates
- H10K77/111—Flexible substrates
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/841—Self-supporting sealing arrangements
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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Abstract
The present invention provides a kind of flexible substrate composite constructions, belong to flexible device technical field.Flexible substrate composite construction provided by the invention successively includes polymeric substrates, barrier film and the graphene film being stacked.The present invention utilizes hydrophobic, the fire resistance characteristic of barrier film and graphene layer, improves the water oxygen barriering effect of polymeric substrates；Meanwhile the heat dissipation performance excellent using graphene, the temperature gradient and junction temperature of composite construction can be reduced, to improve the comprehensive performance and reliability of composite construction.Composite construction can be widely used in the photoelectric device of various structures, and further increase the photoelectric efficiency of device.
Description
Technical field
The present invention relates to flexible device technical field more particularly to a kind of flexible substrate composite construction and preparation method thereof with
Using.
Background technique
Organic electroluminescent (OLED) device has ultra-thin property, all solid state, high brightness and efficiency, excellent color full
The features such as with degree and wide viewing angle, quick response, big temperature limit, therefore have broad application prospects.
Flexible device will be the mankind by advantages such as its flexible, thin design, low-power consumption, durability and portability
Future life bring unlimited imagination space, be smart city, wisdom illumination, wisdom life important extending direction.Meanwhile
The rise of wearable device becomes another potential boosting factor of flexible device manufacturing technology development.
Currently, optional flexible substrate mainly has ultra-thin glass, polymer substrate, metal foil etc..Various flexible substrates
The water-fast of material, oxytolerant and bendability characteristics are different.Although ultra-thin glass can be well isolated from aqueous vapor and air, ultra-thin glass
The poor in flexibility of glass, frangible and at high cost, preparation difficulty is high, and cannot be used alone during flexible package, needs
Polymer coating is wanted to protect erosion of the glass surface not by the damage of mechanical force and chemical reagent, and the epoxy resin at edge is close
Encapsulation technique is unable to reach requirement.The permeable oxygen flow of metal foil is also better than polymer, but metal foil surface is coarse, needs
Planarization process, and be it is opaque, can only be made into using transparent electrode top shine emission structure at top, it is not very practical.
Polymer substrate is frivolous, transparent, and flexibility is also fine, be realize flexible device from it is simple it is flexible to very it is flexible it is only it
Choosing.But the water oxygen transmitance of polymer is higher, and the organic photoelectrical material for being suitable for flexible device invades moisture and oxygen
Losing very sensitive, micro water oxygen will result in the oxidation, crystallization of organic material or the deterioration of electrode in device, influence device
Service life or directly result in the damage of device.Therefore, the method tool for improving polymer flexibility substrate water and oxygen barrier property is found
There is important meaning.
Summary of the invention
In view of this, the purpose of the present invention is to provide a kind of flexible substrate composite constructions and the preparation method and application thereof.
Flexible substrate composite construction provided by the invention has polymeric substrates excellent because of the presence of barrier film and graphene layer
Water oxygen barrier property；It can be advantageously applied in OLED device preparation.
In order to achieve the above-mentioned object of the invention, the present invention provides following technical scheme：
The present invention provides a kind of flexible substrate composite constructions, successively include the polymeric substrates being stacked, barrier film
And graphene film.
Preferably, the barrier film is PMMA film or PDMS film.
Preferably, the outer surface of the polymeric substrates is additionally provided with electrode layer.
Preferably, the barrier film and the overall thickness of graphene film are 20~100 μm.
Preferably, the material of the polymeric substrates includes in PEN, PET, PI, modified PE N, modified PET and modified PI
Any one.
The present invention also provides the preparation methods of flexible substrate composite construction described in above-mentioned technology, include the following steps：
(1) graphene film is deposited on the metallic substrate, obtains metallic substrates-graphene film structure；
(2) the graphene film structure in metallic substrates-graphene film structure that the step (1) obtains is transferred to coating
There is the barrier film surface of the polymeric substrates of barrier film, obtains flexible substrate composite construction.
Preferably, the method deposited in the step (1) is chemical vapour deposition technique.
The present invention also provides application of the flexible substrate composite construction described in above-mentioned technical proposal in preparation OLED device.
The present invention provides a kind of flexible substrate composite constructions, successively include the polymeric substrates being stacked, barrier film
And graphene film.The graphene film inherently hydrophobic material contained in flexible substrate composite construction of the invention, moisture are not easy
Film is accumulated on its surface；Simultaneously because of the presence of barrier film, the water oxygen barriering effect of flexible polymer substrate is further improved.
It can be seen that from the embodiment of the present invention：The water contact angle of flexible substrate composite construction is 110.1 °, utilizes the thin-film package
Ca film to place conductivity variation after 20min in an atmosphere be only 20%, it is excellent to illustrate that flexible substrate composite construction has
Hydrophobicity and water oxygen barrier property.
Detailed description of the invention
Fig. 1 is the preparation flow figure of flexible substrate composite construction in embodiment 1；
Fig. 2 is the preparation flow figure of flexible substrate composite construction in embodiment 2.
Specific embodiment
The present invention provides a kind of flexible substrate composite constructions, successively include the polymeric substrates being stacked, barrier film
And graphene film.
In the present invention, the material of the polymeric substrates preferably includes any one in PEN, PET, PI and its modified product
Kind；More preferably PET.
In the present invention, the barrier film is preferably PMMA film or PDMS film.In the present invention, the barrier film with
The overall thickness of graphene film is preferably 20~100 μm, more preferably 30~80 μm, most preferably 35~50 μm.
In the present invention, the outer surface of the polymeric substrates is additionally provided with electrode layer.In the present invention, the electrode layer
Material preferably include Ag.
Depositing because of hydrophobicity, the graphene film of waterproofness and barrier film in flexible substrate composite construction provided by the invention
The water and oxygen barrier property of polymeric substrates is being improved, and then ensure that the water oxygen barrier property of flexible substrate composite construction.
The present invention also provides the preparation methods of flexible substrate composite construction described in above-mentioned technical proposal, including following step
Suddenly：
(1) graphene film is deposited on the metallic substrate, obtains metallic substrates-graphene film structure；
(2) the graphene film structure in metallic substrates-graphene film structure that the step (1) obtains is transferred to coating
There is the barrier film surface of the polymeric substrates of barrier film, obtains flexible substrate composite construction.
The present invention deposits graphene film on the metallic substrate, obtains metallic substrates-graphene film structure.In the present invention,
The method of the deposition preferably includes chemical vapour deposition technique.In an embodiment of the present invention, graphite is deposited on the metallic substrate
Alkene film preferably includes following steps：
(a) metallic substrates are obtained into polishing metal substrate successively through primary cleaning, polishing, secondary cleaning and drying；
(b) using organic carbonaceous gas as carbon source, chemical vapor deposition is carried out to the polishing metal substrate that step (a) obtains,
Obtain metallic substrates-graphene film structure.
In the present invention, the metallic substrates are preferably copper foil or monel foil.In the present invention, the metallic substrates
Purity be preferably greater than 99.8wt%.The present invention does not have special restriction to the thickness of the metallic substrates, in reality of the invention
The thickness for applying metallic substrates in example is preferably 20~30 μm.
In the present invention, the primary cleaning preferably includes successively to be cleaned by ultrasonic in organic solvent, deionized water
20min.In the present invention, the organic solvent preferably includes acetone or isopropanol.
In the present invention, the primary cleaning can remove the impurity of metal substrate surface.In the present invention, the throwing
For light preferably using the metallic substrates once cleaned as anode, copper sheet is cathode, carries out electrochemical polish in the electrolytic solution.In the present invention
In, the composition for the electrolyte that the electrochemical polish uses preferably includes deionized water：Phosphoric acid：Ethyl alcohol：Isopropanol：Urea=
100mL：40~60mL：40~60mL：5~20mL：0.5~2g.In the present invention, the time of the electrochemical polish is preferably
70~100s, more preferably 75~95s, most preferably 80~90s.In the present invention, the polishing can be improved metallic substrates
Surface smoothness.
In the present invention, the secondary cleaning preferably include successively organic solvent, deionized water ultrasonic cleaning 10~
15min.In the present invention, the organic solvent preferably includes acetone or alcohol.
In the present invention, the drying preferably carries out under nitrogen atmosphere.In the present invention, the time of the drying is preferred
For 20~70min, more preferably 30~60min, most preferably 40~50min；The temperature of the drying is preferably 30~80 DEG C,
More preferably 40~70 DEG C, most preferably 50~60 DEG C.
In the present invention, the chemical vapor deposition preferably includes to vacuumize chemical vapor deposition room, is passed through gaseous mixture
Body keeps the flow of mixed gas to be warming up to depositing temperature, is passed through organic carbonaceous gas, carry out deposition reaction, obtain to normal pressure
Metallic substrates-graphene film structure.In the present invention, it is described vacuumize after vacuum degree be preferably 1Pa or less.In the present invention
In, the mixed gas preferably includes hydrogen/argon gas mixed gas；In the present invention, the flow of the mixed gas is preferably
100sccm.In the present invention, the volume content of hydrogen is preferably 10~30% in the mixed gas, more preferably 15~
25%, most preferably 20%；Organic carbonaceous gas can be cracked into carbon atom and hydrogen atom by the hydrogen.
In the present invention, the temperature of the deposition reaction is preferably 900~1000 DEG C, and more preferably 920~980 DEG C, most
Preferably 950~960 DEG C.In the present invention, the pressure of the deposition reaction is preferably 500~650Pa, more preferably 550~
600Pa, most preferably 560~580Pa.In the present invention, the time of the deposition reaction is preferably 10~20min, more preferably
For 13~18min, most preferably~15~16min.In the present invention, after the completion of the deposition reaction, organic contain preferably is cut off
Carbon gas, keeps mixed gas flow, and cooled to room temperature obtains metallic substrates-graphene-structured.In the present invention, institute
The stone of single layer can be formed according to gases used flow and reaction time judgement on the metallic substrate by stating chemical vapor deposition method
Black alkene film.
In the present invention, the organic carbonaceous gas preferably includes C2H2Or CH4.In the present invention, the organic carbonaceous gas
The flow of body is preferably 20~100sccm, more preferably 40~80sccm, most preferably 50~60sccm.In the present invention, institute
It states organic carbonaceous gas and is cracked into carbon atom and hydrogen atom under hydrogen effect, formed under metallic substrates catalytic action uniform
Graphene film.In the present invention, the graphene film preferably includes single layer graphene film or bilayer graphene film.The present invention
There is no special restriction to the preparation method of the bilayer graphene film, using transfer superposition side well known to those skilled in the art
Method obtains.
After obtaining metallic substrates-graphene film structure, the present invention is by the graphene film in metallic substrates-graphene film structure
Structure is transferred to the barrier film surface of the polymeric substrates coated with barrier film, obtains flexible substrate composite construction.The present invention couple
The method of the transfer does not have special restriction, using transfer method well known to those skilled in the art, specifically, such as drum
Bubble method, corrosion substrate method or hot method for releasing.The present invention does not have special restriction to the mode of the transfer, using art technology
Branch mode known to personnel, specifically, as roll-to-roll process or small size shift by hand.In the embodiment of the present invention
In, when being shifted using corrosion substrate method, is shifted by hand using small size, be preferably included in metallic substrates-graphene film
One layer of protective film, drying of spin coating on the graphene film of structure, obtain metallic substrates-graphene film-protective film layer structure；Using
Corrode substrate method and etch metallic substrates, then remove protective film, fished for using the polymeric substrates for being coated with barrier film, is done
It is dry, obtain flexible substrate composite construction.In the present invention, the drying temperature after the spin coating protective film is preferably 80~100
DEG C, drying time is preferably 4~5h.In the present invention, the etching solution in the corrosion substrate method is preferably the nitric acid of 1mol/L
Iron.
In the present invention, the drying temperature of the flexible substrate composite construction is preferably 60~70 DEG C, and drying time is preferred
For 3~4h.
In an embodiment of the present invention, it when being shifted using hot pressing, Bubbling method, using roll-to-roll process, preferably wraps
It includes and is transferred to metallic substrates-graphene film structure using hot pressing, Bubbling method in the glass substrate of coating photoresist, obtain glass
Substrate-metallic substrates-graphene film structure；It is revolved on the graphene film of the glass substrate-metallic substrates-graphene film structure
Protective film layer is applied, glass substrate-metallic substrates-graphene film-protective film layer structure is obtained；Etching removal metallic substrates, make glass
Glass substrate, graphene film-protective film layer separation, the polymer matrix for thering is barrier film, backside coating to have electrode layer using front surface coated
Plate fishes for graphene film-protective film layer, obtains electrode layer-polymeric substrates-barrier film-graphene film-protective film layer structure；It goes
It is dry except protective film layer, obtain the flexible substrate composite construction.In the present invention, the temperature of the hot pressing be preferably 120~
130 DEG C, more preferably 122~128 DEG C, most preferably 125~126 DEG C.In the present invention, the solution of the bubbling is preferably matter
The NaOH solution that concentration is 20% is measured, the voltage of the bubbling is preferably 26V.In the present invention, the temperature of the drying is preferred
It is 70~80 DEG C, the dry time is preferably 3~4h.
In the present invention, described to fish for graphene film layer using the polymeric substrates for being coated with barrier film, it can make to polymerize
Barrier film and graphene film are stacked gradually on object substrate；The presence of graphene film and barrier film can be improved the water of polymeric substrates
Oxygen barrier performance.
The present invention also provides application of the flexible substrate composite construction described in above-mentioned technical proposal in preparation OLED device.
In the present invention, the flexible substrate composite construction has excellent water oxygen barrier property, can be applied to OLED device system
In standby.
Below with reference to embodiment to a kind of flexible substrate composite construction provided by the invention and the preparation method and application thereof into
Row detailed description, but they cannot be interpreted as limiting the scope of the present invention.
Embodiment 1
A kind of flexible substrate composite construction successively includes polymeric substrates, barrier film and the graphene film being stacked, gathers
The material of polymer substrates is PET, and the barrier layer is PMMA film, and the overall thickness of the barrier film and graphene film is 30 μm.
Preparation method includes the following steps：
(1) graphene film is deposited on the metallic substrate, obtains metallic substrates-graphene film structure：Specific steps include：
(a) will be with a thickness of 20 μm, purity>The copper foil (1cm*1cm) of 99.8wt% is successively cleaned by ultrasonic in acetone and deionized water
20min obtains once cleaning copper foil；Copper foil after primary cleaning is made into polishing anode, copper sheet makees cathode, carries out electrochemical polish
Processing；Purpose is to improve copper foil surface flatness；Wherein, the proportion of electrolyte is deionized water：Phosphoric acid：Ethyl alcohol：Isopropanol：Urine
Element=100mL：50mL：50mL：10mL：1g；Copper foil after polishing is successively cleaned by ultrasonic by acetone and deionized water again
15min obtains secondary cleaning copper foil；Secondary cleaning copper foil is dry with high pure nitrogen, obtains polishing copper foil；(b) copper foil will be polished
It is placed in CVD reaction chamber, is evacuated to pressure in reaction chamber and is down to 1Pa hereinafter, being passed through hydrogen and argon gas mixed gas (wherein hydrogen
The volume content of gas is 20%) to normal pressure, and after repeating this step 5 time, control mixed gas flow is 100sccm, is warming up to
1000 DEG C, it is passed through organic carbonaceous gas C2H2(it is cracked into carbon atom and hydrogen atom under hydrogen effect, under copper foil catalytic action
Form graphene), 40min is kept the temperature under flow 300sccm, pressure 600Pa, cuts off organic carbonaceous gas, keeps mixed gas
Flow velocity is constant, is cooled to room temperature；Obtain copper foil-graphene film structure；The graphene film structure is bilayer graphene film；Using
The transfer addition method well known in the art prepares bilayer graphene membrane structure.
(2) the graphene film structure in copper foil-graphene film structure that the step (1) obtains is transferred to and is coated with resistance
On the polymeric substrates of diaphragm, flexible substrate composite construction is obtained；Specific steps include：In copper foil-graphene film structure
Spin coating layer protecting film layer PMMA on graphene film, dries 5h at 80 DEG C；Copper foil-graphene-structured of spin coating protective film is set
Etching removes copper-based bottom in 1mol/L iron nitrate aqueous solution, rinses 3 times in deionized water, then get rid of protective film layer PMMA,
There is the pet polymer substrate of protective film PMMA to fish for graphene film with positive spin coating, obtains polymeric substrates-PMMA- stone
Black alkene film flexible substrate composite construction, dries 3h at 60 DEG C, obtains the flexible substrate composite construction.Fig. 1 is the present embodiment
The process of middle preparation flexible substrate composite construction.
The hydrophobic properties of flexible substrate composite construction are tested：The water of measurement flexible substrate composite construction, which contacts, is
110.1 °, it can thus be seen that the flexible substrate composite construction that the present embodiment obtains has good hydrophobicity.
The water oxygen barrier property performance test of flexible substrate composite construction：Flexible substrate composite construction in the present embodiment
Calcium film is deposited on polymeric substrates, then successively encapsulates PMMA film and graphene film, obtained composite construction is placed
In an atmosphere after 20min, the conductivity variation of calcium film is only 20% after test encapsulation, it can thus be seen that the present embodiment
Flexible substrate composite construction has excellent water oxygen barrier property.
Embodiment 2
A kind of flexible substrate composite construction successively includes electrode layer, polymeric substrates, barrier film and the graphite being stacked
Alkene film, the material of polymeric substrates are PET, and the barrier layer is PDMS film, the overall thickness of the barrier film and graphene film
It is 100 μm；The electrode layer be Ag, the electrode layer with a thickness of 12nm.
Preparation method includes the following steps：
(1) graphene film is deposited on the metallic substrate, obtains metallic substrates-graphene film structure：Specific steps include：
(a) will be with a thickness of 20 μm, purity>(cupro-nickel mass ratio is 9 to the corronil foil of 99.8wt%:1, having a size of 6cm*1cm) successively
It is cleaned by ultrasonic 20min in isopropanol and deionized water, obtains once cleaning corronil foil；Cupro-nickel after primary cleaning is closed
Goldleaf makees polishing anode, and copper sheet makees cathode, carries out electrochemical polishing treatment；Purpose is to improve corronil foil surface smoothness；
Wherein, the proportion of electrolyte is deionized water：Phosphoric acid：Ethyl alcohol：Isopropanol：Urea=100mL：50mL：50mL：10mL：1g；It throws
Copper foil after light is successively cleaned by ultrasonic 15min by ethyl alcohol and deionized water again, obtains secondary cleaning copper foil；Secondary cleaning copper foil
It is dry with high pure nitrogen, obtain polishing corronil foil；(b) polishing corronil foil is placed in roll-to-roll PECVD reaction chamber,
Pressure in reaction chamber is evacuated to be down to 1Pa (wherein the volume content of hydrogen is hereinafter, being passed through hydrogen/argon gas mixed gas
30%) to normal pressure, after repeating this step 5 time, control mixed gas flow is 100sccm, is warming up to 900 DEG C, adjusts radio frequency electrical
Source power is that 400W generates homogeneous tube plasma glow；It is passed through organic carbonaceous gas CH4, flow 100sccm, pressure 500Pa, if
Determining corronil foil movement speed is 100cm/h, and organic carbonaceous gas is cut off after growth, keeps mixed gas flow not
Become, is cooled to room temperature；Obtain web-like corronil foil-graphene film structure；The graphene film structure is bilayer graphene film；
Bilayer graphene membrane structure is prepared using the transfer addition method well known in the art.
(2) web-like corronil foil-graphene film structure that the step (1) obtains is transferred to coated with barrier film
On polymeric substrates, flexible substrate composite construction is obtained：Obtained web-like corronil foil-graphene film structure is placed in volume pair
In migration volume device, it is transferred in the glass substrate coated with 20 μm of photoresists by hot pressing, bubbling；Wherein：Hot pressing temperature is
120 DEG C, being bubbled solution is the NaOH solution that weight ratio is 20%, and bubbling voltage is 26V, corronil foil-graphene and glass
Substrate movement speed is 60cm/h, and dry 3h, obtains glass substrate-corronil foil-graphene film structure at 100 DEG C；
The spin coating protective film layer PMMA on the glass substrate-corronil foil-graphene film structure graphene film, obtains glass lined
Bottom-corronil foil-- PMMA layers of graphene film；Above structure is placed in etching removal cupro-nickel in 1mol/L iron nitrate aqueous solution
Alloy Foil separates-PMMA layers of structure of graphene film and glass substrate, while there have PDMS film reverse side to be covered with front spin coating to be ultra-thin
The PET substrate of silver electrode fishes for graphene film, gets rid of PMMA later, dries 3h at 70 DEG C, obtains silver electrode-PET-
PDMS- graphene film flexible substrate composite construction.Fig. 2 is the process that flexible substrate composite construction is prepared in the present embodiment.
The hydrophobic properties of flexible substrate composite construction are tested：The water of measurement flexible substrate composite construction, which contacts, is
107.7 °, it can thus be seen that the flexible substrate composite construction that the present embodiment obtains has good hydrophobicity.
The water oxygen barrier property performance test of flexible substrate composite construction：By the flexible substrate composite construction in the present embodiment
Calcium film is deposited on polymeric substrates, then successively encapsulates PDMS film and graphene film, composite construction will be obtained and be placed on greatly
In gas after 20min, the conductivity variation for changing film after test encapsulation is only 18%, it can thus be seen that the present embodiment is soft
Property substrate composite construction have excellent water oxygen barrier property.
As can be seen that the flexible substrate composite construction of body-sensing of the present invention has excellent hydrophobicity from the embodiment of the present invention
And water oxygen barrier property.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also answered
It is considered as protection scope of the present invention.
Claims (8)
1. a kind of flexible substrate composite construction successively includes polymeric substrates, barrier film and the graphene film being stacked.
2. flexible substrate composite construction according to claim 1, which is characterized in that the barrier film be PMMA film or
PDMS film.
3. flexible substrate composite construction according to claim 1, which is characterized in that the outer surface of the polymeric substrates is also
It is provided with electrode layer.
4. flexible substrate composite construction according to claim 1, which is characterized in that the barrier film and graphene film it is total
With a thickness of 20~100 μm.
5. flexible substrate composite construction according to any one of claims 1 to 4, which is characterized in that the polymeric substrates
Material include any one in PEN, PET, PI, modified PE N, modified PET and modified PI.
6. the preparation method of flexible substrate composite construction described in claim 1, includes the following steps：
(1) graphene film is deposited on the metallic substrate, obtains metallic substrates-graphene film structure；
(2) the graphene film structure in metallic substrates-graphene film structure that the step (1) obtains is transferred to and is coated with resistance
The barrier film surface of the polymeric substrates of diaphragm, obtains flexible substrate composite construction.
7. preparation method according to claim 6, which is characterized in that the method deposited in the step (1) is chemical gas
Phase sedimentation.
8. application of the described in any item flexible substrate composite constructions of Claims 1 to 4 in preparation OLED device.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109786551A (en) * | 2019-01-04 | 2019-05-21 | 无锡第六元素电子薄膜科技有限公司 | A kind of preparation method of the substrate for being used to prepare flexible OLED and flexibility OLED |
| CN110350107A (en) * | 2019-07-15 | 2019-10-18 | 上海大学 | A kind of transferable flexible electrode and its preparation method and application |
| CN113390937A (en) * | 2021-06-11 | 2021-09-14 | 上海大学 | Wearable flexible printed electrode |
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