CN108827988A - Non-local modulation of X-ray diffraction imaging device and method based on light field High order correletion - Google Patents
Non-local modulation of X-ray diffraction imaging device and method based on light field High order correletion Download PDFInfo
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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Abstract
A kind of non-local modulation of X-ray diffraction imaging device and method based on light field High order correletion, device includes x-ray source, beam splitting chip, object under test, non-local modulator, X-ray surface detector, X-ray point detector and computer, and non-local modulator includes mask modulator and lens modulator.The light that x-ray source issues passes through beam splitting chip, and transmitted light passes through non-local modulator along optical axis direction, and intensity signal is recorded by X-ray surface detector, and along optical axis direction by object under test, intensity signal is recorded reflected light by X-ray point detector.X-ray source is equal to two detector distances.Computer is connected with X-ray surface detector and point detector, has the program that operation is associated to collected light intensity sequence.The present invention is based on the modulation of the non-local of light field High order correletion, can be improved picture quality and resolution ratio that X-ray diffraction imaging restores image.
Description
Technical field
The present invention relates to X-ray diffraction imaging, especially a kind of non-local modulation of X-ray based on light field High order correletion
Diffraction imaging device and method.
Background technique
Existing X-ray Fourier transformation diffraction imaging method, only X-ray coherent diffraction imaging (XCDI) are a kind of, it
It is to be radiated on object under test using coherent X-ray, using the Fraunhofer diffraction intensity distribution of object light field, obtain the object
The Fourier transformation intensity distribution of transmittance function, then amplitude and phase letter using Phase Retrieve Algorithm recovery object under test
Breath.This X-ray coherent diffraction imaging technology mainly has following limitation：
1) imaging beam must be coherent X-ray, and sample to be tested size is limited by X-ray lateral coherence scale.To
For three generations's synchrotron radiation X-ray imaging device, maximum sample to be tested size is only 10 micron dimensions；For using X-ray tube
Conventional compact x-ray imaging device can not carry out X-ray coherent diffraction imaging since its spatial coherence is poor completely.
2) imaging beam must transmit longer distance (meeting fraunhofer condition) after object, can just detect
The Fourier transformation strength information of object transmittance function.For forth generation synchrotron radiation X-ray imaging device, although energy
Meet the relevant condition of light beam large area, but sample to be tested size is limited by Fraunhofer diffraction condition, such as：Using wavelength 1nm
Coherent X-ray diffraction imaging is carried out to the sample of size 1mm, required detection range reaches 1 kilometer.
3) it since X-ray has high penetrability, carries out corresponding in detector center when X-ray coherent diffraction imaging
There is high-intensitive transmitted light in position, often absorbed using beam stop in actual imaging device, therefore, obtained to spread out
Penetrate in intensity distribution that there are the direct current of image and low-frequency components to lack.
4) the Fourier transformation intensity distribution for the object transmittance function that detection obtains, needs to carry out Phase Retrieve Algorithm
Restore the amplitude and phase of object under test.The algorithm of extensive utilization is HIO algorithm at present, which cannot be guaranteed to converge to complete
Office's optimal solution, and it is more sensitive for initial value.
For the phase retrieval problem in X-ray coherent diffraction imaging, Candas of Stanford University et al. proposes one
Phase Retrieve Algorithm (E.J.Candes, et., al, " the Phase retrieval from that kind is modulated based on random coded
coded diffraction patterns,”Appl.Comput.Harmon.Anal.,vol.39,no.2,pp. 277–299,
2015).The algorithm can significantly improve the recovery picture quality of phase recovery.However the algorithm is needed in object plane to light field
It is modulated, non-local modulator is needed to be completely coincident with object under test, it is relatively difficult to achieve in practice.
Analogy rainbow of Shanghai Optics and Precision Mechanics institute, Chinese Academy of Sciences et al. devises incoherent X-ray diffraction imaging
Device (Noncoherent X ray diffraction imaging device, 201110148476.6), and X-ray Fourier transformation was completed in 2016
The principle demonstration of relevance imaging (XFGI) tests (H.Yu et al., " Fourier-Transform Ghost Imaging
with Hard X Rays,"Phys.Rev.Lett.,vol.117,no. 11,2016).The imaging method does not need coherent light
Source can be obtained by the Fourier transformation intensity distribution of object transmittance function, recover object by Phase Retrieve Algorithm later
Body, obtained result are similarly limited to Phase Retrieve Algorithm.
Summary of the invention
The technical problem to be solved in the present invention is that overcoming the defect of above-mentioned first technology, provide a kind of based on non-local
The incoherent light X-ray diffraction imaging device and method of modulation, by adding non-local on the reference arm of light beam Free propagation
Modulator, to obtain better phase recovery result using new Phase Retrieve Algorithm.
Technical solution of the invention is as follows：
A kind of non-local modulation of X-ray diffraction imaging device based on light field High order correletion, feature are that its composition includes
X-ray source, beam splitting chip, object under test, non-local modulator, X-ray surface detector, X-ray point detector and computer, it is non-
Local modulator includes mask modulator and lens modulator, and the light that the X radiographic source issues is divided into transmission by beam splitting chip
Light and reflected light are successively non-local modulator and X-ray surface detector along transmission light direction, are to be measured along reflection light direction
Object and X-ray point detector, the distance of the x-ray source to the X-ray surface detector and the x-ray source
To being equidistant for the X-ray point detector, the input terminal of the computer and the X-ray surface detector and
The output end of point detector is connected, and the computer has the program that operation is associated to collected light intensity sequence.
The x-ray source is true thermal X-rays source or counterfeit thermal X-rays source.
The size of the non-local modulator is greater than object under test, and there are mainly two types of modulation types：
<1>Mask modulation：Mask modulator and object under test away from the x-ray source apart from identical, in one experiment
In the same size there may be multiple random mask modulators, structure distribution is different, and a kind of structure distribution is a kind of non-local
Modulation；
<2>Lens modulation：With fixed focal length.
It is special using the imaging method of the above-mentioned non-local modulation of X-ray diffraction imaging device based on light field High order correletion
Point is that the imaging method includes the following steps：
<1>It adjusts x-ray source and beam splitting chip, X-ray surface detector, X-ray point detector is coaxial, and two detectors
Apart from being equidistant for x-ray source, distance is d, object under test is put into optical path, the distance away from X-ray point detector is
d2, adjust object under test and light path coaxial；
<2>Within a coherence time of x-ray source, the X-ray surface detector and the exposure of X-ray point detector
Once, it obtains without modulation reference picture and detection light intensity, respectivelyWith
<3>Within the coherence time of x-ray source, the lens modulator is put into optical path, focal length f, with
Distance d of the lens modulator apart from X-ray surface detector2' meet following relationship：
The exposure of X-ray surface detector is primary, obtains lens and modulates reference picture
<4>Within the coherence time of x-ray source, lens modulator is removed into optical path, mask modulator is moved into light
Road, the exposure of X-ray surface detector is primary, obtains mask and modulates reference picture
<5>Different mask modulators is replaced by the way of moving in and out, and obtains mask on X-ray surface detector
Reference picture is modulated,N therein is the quantity of whole mask modulators, N be 3 or more it is just whole
Number；
<6>Step is repeated several times<2>,<3>,<4>,<5>, obtain relevance imaging sequenceWith
Wherein n=1 ..., N, k=1 ..., K, K are total pendulous frequency；
<7>Operation is associated to relevance imaging sequence, specific practice is：
1. by a certain group of relevance imaging sequence without modulation reference pictureOn different location xrThe light intensity value at placeWith detection light intensityIt is associated operation, obtains a certain moment unmodulated intensity correlation in relevance imaging sequence
DistributionThe intensity correlation distribution of different moments is subjected to statistical average again, is obtained
2. calculating detection light intensity sequenceThe average value of k=1 ..., KIt calculates without modulation reference image sequenceThe average value of k=1 ..., KFinally calculate?
To the information without the object under test under modulation, i.e. Fourier's information of object under test；
3. a certain group of relevance imaging sequence lens are modulated reference pictureOn different location xrThe light intensity value at placeWith detection light intensityIt is associated operation, obtains a certain moment unmodulated intensity correlation in relevance imaging sequence
DistributionThe intensity correlation distribution of different moments is subjected to statistical average again, is obtained
4. calculating lens reference image sequenceThe average value of k=1 ..., KFinally calculateObtain the information of the object under test under lens modulation, i.e. object under test
Low resolution real space information；
5. the mask of a certain group of relevance imaging sequence certain structure is modulated reference pictureOn different location xrPlace
Light intensity valueWith detection light intensityIt is associated operation, it is unmodulated to obtain a certain moment in relevance imaging sequence
Intensity correlation distributionThe intensity correlation distribution of different moments is subjected to statistical average again, is obtained
6. calculating the mask modulation reference image sequence of certain structureThe average value of k=1 ..., K
Finally calculateObtain the object under test under the mask modulation of certain structure
Information, that is, modulate after object under test Fourier's information；
<8>It utilizes<7>Obtained in Fourier's information of object under test, the low resolution real space information of object under test with
And Fourier's information of object under test carries out phase recovery after N kind difference mask modulation, obtains the high-resolution occupied space of object under test
Between be distributed.
Technical effect of the invention is as follows：
The present invention utilizes incoherent X-ray, can realize X-ray Fourier transformation diffraction imaging in Fresnel region, have
The existing advantage of Noncoherent X ray diffraction imaging device based on light field High order correletion.
The present invention in reference arm addition non-local modulation, can be improved the image that X-ray diffraction imaging restores image simultaneously
Quality and resolution ratio.
Detailed description of the invention
Fig. 1 is the structural representation of the non-local modulation of X-ray diffraction imaging device the present invention is based on light field High order correletion
Scheme, in figure：
1：X-ray source, 2：Beam splitting arrangement, 3：Object under test, 4：Non-local modulator, 401:Mask modulator, 402：Thoroughly
Mirror modulator；5：X-ray planar array detector, 6：X-ray point detector, 7：Computer.
Fig. 2 is the non-local modulation of X-ray diffraction imaging technology mask modulating mode the present invention is based on light field High order correletion
Flowering structure schematic diagram.
Fig. 3 is the non-local modulation of X-ray diffraction imaging device lens modulating mode the present invention is based on light field High order correletion
Flowering structure schematic diagram.
Fig. 4 is the phase distribution structural schematic diagram of the mask modulator of certain distribution.
Specific embodiment
The present invention is based on the non-local modulation of X-ray diffraction imaging devices of light field High order correletion, as shown in Figure 1, including X
Radiographic source 1, beam splitting arrangement 2, object under test 3, non-local modulator 4, X-ray surface detector 5, X-ray point detector 6 and meter
Calculation machine 7.X-ray source 1, beam splitting arrangement 2, object under test 3, random non-local modulator 4, X-ray surface detector 5 and point detection
Device 6 is in sustained height.Non-local modulator 4 includes mask modulator 401 and lens modulator 402.X-ray source 1 is penetrated to X
The distance of line surface detector 5 and being equidistant to X-ray point detector 6.It is penetrated by the intensity information of object under test 3 by X
Line point detector 6 receives record, is recorded and receives by X-ray surface detector 5 by the intensity information of non-local modulator.Institute
The computer 7 stated is connected with the output end of two X-ray detectors, has and is associated operation to collected light intensity sequence
Program, more object informations are obtained using the modulation of different non-locals, so as to preferably recover object under test.
Non-local modulation of X-ray diffraction imaging device of the present embodiment based on light field High order correletion mainly includes three kinds of works
Operation mode：
(1) without modulating mode (as shown in Figure 1)：Mask modulator 401 and lens modulator 402 are removed into optical path, X is penetrated
The direct recording light intensity information of line surface detector 5.
(2) mask modulating mode (as shown in Figure 2)：The amplitude of mask modulator 401 is 1 in the present embodiment, and phase is random
The modulator of distribution, mask modulator 401 are equidistant with object under test 3 away from x-ray source 1.May exist in one experiment
Multiple mask modulators, structure distribution are different, and a kind of structure distribution is that a kind of non-local is modulated, and Fig. 3 show a kind of mask
The schematic diagram of distributed architecture.A kind of Fourier that mask modulation passes through object under test 3 after the association available coded modulation of operation
Strength information.
(3) lens modulating mode (as shown in Figure 3)：With fixed focal length.Lens modulator 402 is along optical axis direction
Can be with vertical adjustment, each lengthwise position is a kind of modulation of non-local.A kind of lens modulation is available by association operation
The low resolution real space information of object under test 3, the low real space information of differentiating can be used as the supported collection quickening phase of phase recovery
Bit recovery convergence rate.
It is imaged using the non-local modulation of X-ray diffraction imaging device based on light field High order correletion of the present embodiment,
Its imaging method includes the following steps：
<1>It adjusts x-ray source 1 and beam splitting chip 2, X-ray surface detector 5, X-ray point detector 6 is coaxial, and two spies
Survey device being equidistant apart from x-ray source 1, distance be d, object under test 3 is put into optical path, away from X-ray point detector away from
From for d2, adjust itself and light path coaxial；
The distance d of two detector distance x-ray sources is 40 centimetres in the present embodiment, and object under test is apart from X-ray point
The distance d of detector2It is 30 centimetres；
<2>Within a coherence time of x-ray source 1, X-ray surface detector 5 and the exposure of X-ray point detector 6 one
It is secondary, it obtains without modulation reference picture and detection light intensity, respectivelyWith
<3>Within the coherence time of x-ray source 1, lens modulator 402 is put into optical path, focal length f, with it
Distance d apart from X-ray surface detector 52' meet following relationship：
X-ray surface detector 5 exposes once, obtains lens and modulates reference picture；
In the present embodiment, the focal length of lens is 4.16 centimetres, and the distance away from X-ray surface detector 5 is 25 centimetres, full
It is enough co-relation.
<4>Within the coherence time of x-ray source 1, lens modulator 402 is removed into optical path, by mask modulator 401
Optical path is moved into, X-ray surface detector 5 exposes once, obtains mask and modulates reference picture
<5>Different mask modulators 401 is replaced by the way of moving in and out, and is obtained on X-ray surface detector 5
Mask modulates reference picture,N therein is the quantity of whole mask modulators 401；
The x-ray source 1 of the present embodiment is counterfeit thermal light source, coherence time T0It is 40 seconds.Mask modulator 401 shares 3 kinds not
Same distributed architecture, i.e. N=3, lens modulator 402 have a determining position, replace 401 time of mask modulator every time
It is 5 seconds, the time of replacement lens modulator 402 is 8 seconds, and X-ray surface detector 5 and each time for exposure of point detector 6 are 1
Second.Therefore obtaining 4 width modulation reference arm image in one group of relevance imaging and detecting the time interval T of light intensity is 28 seconds, meets and closes
Join image-forming condition：T < T0。
<6>Step is repeated several times<2>,<3>,<4>,<5>, obtain relevance imaging sequenceWith
Wherein n=1 ..., N, k=1 ..., K, K are total pendulous frequency；
<7>Operation is associated to relevance imaging sequence, specific practice is：
1. by a certain group of relevance imaging sequence without modulation reference pictureOn different location xrThe light intensity value at placeWith detection light intensityIt is associated operation, obtains a certain moment unmodulated intensity correlation in relevance imaging sequence
DistributionThe intensity correlation distribution of different moments is subjected to statistical average again, is obtained
2. calculating detection light intensity sequenceThe average value of k=1 ..., KIt calculates without modulation reference image sequenceThe average value of k=1 ..., KFinally calculate?
To certain information without the object under test under modulation, i.e. Fourier's information of object under test.
Without under modulating mode, cross-correlation intensity distribution function and object transmitance distribution function (including amplitude and phase)
Between relationship (J.Cheng and S.Han, " Incoherent coincidence can be indicated with formula below
imaging and its applicability in X-ray diffraction,”Phys Rev Lett,vol.92,
no.9,p.93903,2004.)：
Wherein xrFor the position on reference picture, xtFor the position on detection image, x in the present embodimentr=0 is solid for one
Fixed point, d are distance of the object under test to X-ray point detector, and t is the transmittance function of object under test, and F is that object under test is saturating
Cross the Fourier transformation of rate function.
3. a certain group of relevance imaging sequence lens are modulated reference pictureOn different location xrThe light intensity value at placeWith detection light intensityIt is associated operation, obtains a certain moment unmodulated intensity correlation in relevance imaging sequence
DistributionThe intensity correlation distribution of different moments is subjected to statistical average again, is obtained
4. calculating lens reference image sequenceThe average value of k=1 ..., KFinally calculateObtain the information of the object under test under the modulation of certain lens, i.e., it is to be measured
The low resolution real space information of object.
Under lens modulating mode, relationship between cross-correlation intensity distribution function and object transmitance distribution function can be with
It is indicated with formula below：
Wherein d2The distance of X-ray point detector 6, d are arrived for object under test 32' it is that lens modulator 402 arrives X-ray face battle array
The distance of detector 5.The enlargement ratio of low-resolution image is 5 times in the present embodiment, by adjusting the focal length and lens of lens
Lengthwise position, other enlargement ratios can be obtained.
5. the mask of a certain group of relevance imaging sequence certain structure is modulated reference pictureOn different location xrPlace
Light intensity valueWith detection light intensityIt is associated operation, it is unmodulated to obtain a certain moment in relevance imaging sequence
Intensity correlation distributionThe intensity correlation distribution of different moments is subjected to statistical average again, is obtained
6. calculating the mask modulation reference image sequence of certain structureThe average value of k=1 ..., K
Finally calculateObtain the object under test under the mask modulation of certain structure
Information, that is, modulate after object under test Fourier's information.
Under mask modulating mode, relationship between cross-correlation intensity distribution function and object transmitance distribution function can be with
It is indicated with formula below：
Wherein SnFor the transmitance of the mask modulator 401 of n distributed architecture, in the present embodiment, non-local modulation
Device is phase-only modulation, and phase difference π, the minimum unit size of modulation is 1.5 × 1.5 μm, and total size is 15 × 15 μm,
Phase distribution such as Fig. 4.
<8>It utilizes<7>Obtained in Fourier's information of object under test, the low resolution real space information of object under test with
And Fourier's information of object under test carries out phase recovery after N kind difference mask modulation, obtains the high-resolution occupied space of object under test
Between be distributed.
It is to sum up told, the present invention is a kind of based on the non-local modulation of X-ray diffraction imaging device of light field High order correletion and side
Method can realize X-ray Fourier transformation diffraction imaging in Fresnel region, have based on light field height using incoherent X-ray
The existing advantage of the associated Noncoherent X ray diffraction imaging device of rank.Simultaneously in reference arm addition non-local modulation, Neng Gouyou
Improve picture quality and resolution ratio in effect ground.
Claims (4)
1. a kind of non-local modulation of X-ray diffraction imaging device based on light field High order correletion is characterized in that its composition is penetrated including X
Line source (1), beam splitting chip (2), object under test (3), non-local modulator (4), X-ray surface detector (5), X-ray point detector
(6) and computer (7), non-local modulator include mask modulator (401) and lens modulator (402), the x-ray source
(1) light issued is divided into transmitted light and reflected light by beam splitting chip (2), is successively non-local modulator (4) along transmission light direction
It is object under test (3) and X-ray point detector (6), the x-ray source along reflection light direction with X-ray surface detector (5)
(1) the X-ray point detector (6) is arrived to the distance of the X-ray surface detector (5) and the x-ray source (1)
It is equidistant, the output end of the input terminal of the computer (7) and the X-ray surface detector (5) and point detector (6)
It is connected, the computer (7) has the program that operation is associated to collected light intensity sequence.
2. the non-local modulation of X-ray diffraction imaging device according to claim 1 based on light field High order correletion, feature
It is that the x-ray source (1) is true thermal X-rays source or counterfeit thermal X-rays source.
3. the non-local modulation of X-ray diffraction imaging device according to claim 1 based on light field High order correletion, feature
It is that the size of the non-local modulator (4) is greater than object under test (3), there are mainly two types of modulation types：
<1>Mask modulation：Mask modulator and object under test (3) apart from identical, are once being tested away from the x-ray source (1)
In may exist multiple random mask modulators, in the same size, structure distribution is different, and a kind of structure distribution is a kind of non-local
Modulation；
<2>Lens modulation：With fixed focal length.
4. the non-local modulation of X-ray diffraction imaging technology based on light field High order correletion told using claim 1, feature
It is that the imaging method includes the following steps：
<1>Adjust x-ray source (1) and beam splitting chip (2), X-ray surface detector (5), X-ray point detector (6) coaxially, and two
Detector distance x-ray source (1) is equidistant, and distance is d, and object under test (3) is put into optical path, is visited away from X-ray point
The distance for surveying device (6) is d2, adjust object under test (3) and light path coaxial；
<2>Within a coherence time of x-ray source (1), the X-ray surface detector (5) and X-ray point detector (6)
Exposure is primary, obtains without modulation reference picture and detection light intensity, respectivelyWith
<3>Within the coherence time of x-ray source (1), the lens modulator (402) is put into optical path, focal length is
F, the distance d with lens modulator (402) apart from X-ray surface detector (5)2' meet following relationship：
X-ray surface detector (5) exposure is primary, obtains lens and modulates reference picture
<4>Within the coherence time of x-ray source (1), lens modulator (402) are removed into optical path, by mask modulator (401)
Optical path is moved into, X-ray surface detector (5) exposure is primary, obtains mask and modulates reference picture
<5>Different mask modulators (401) is replaced by the way of moving in and out, and is obtained on X-ray surface detector (5)
Mask modulates reference picture,N therein is the quantity of whole mask modulators (401), N be 3 with
On positive integer；
<6>Step is repeated several times<2>,<3>,<4>,<5>, obtain relevance imaging sequenceWithWherein
N=1 ..., N, k=1 ..., K, K are total pendulous frequency；
<7>Operation is associated to relevance imaging sequence, specific practice is：
1. by a certain group of relevance imaging sequence without modulation reference pictureOn different location xrThe light intensity value at placeWith
Detect light intensityIt is associated operation, obtains a certain moment unmodulated intensity correlation distribution in relevance imaging sequenceThe intensity correlation distribution of different moments is subjected to statistical average again, is obtained
2. calculating detection light intensity sequenceK=1 ..., the average value of KIt calculates without modulation reference image sequenceK=1 ..., the average value of KFinally calculate?
To the information without the object under test under modulation, i.e. Fourier's information of object under test；
3. a certain group of relevance imaging sequence lens are modulated reference pictureOn different location xrThe light intensity value at place
With detection light intensityIt is associated operation, obtains a certain moment unmodulated intensity correlation distribution in relevance imaging sequenceThe intensity correlation distribution of different moments is subjected to statistical average again, is obtained
4. calculating lens reference image sequenceK=1 ..., the average value of KFinally calculateObtain the information of the object under test under lens modulation, i.e. object under test
Low resolution real space information.
5. the mask of a certain group of relevance imaging sequence certain structure is modulated reference pictureOn different location xrThe light intensity at place
ValueWith detection light intensityIt is associated operation, a certain moment unmodulated intensity in relevance imaging sequence is obtained and closes
Connection distributionThe intensity correlation distribution of different moments is subjected to statistical average again, is obtained
6. calculating the mask modulation reference image sequence of certain structureK=1 ..., the average value of KFinally
It calculatesObtain the letter of the object under test under the mask modulation of certain structure
Breath, that is, Fourier's information of object under test after modulating.
<8>It utilizes<7>Obtained in Fourier's information of object under test, the low resolution real space information of object under test and N kind
Fourier's information of object under test carries out phase recovery after different mask modulation, obtains the high-resolution real space point of object under test
Cloth.
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