CN110715944B - Device and method for stable X-ray imaging - Google Patents
Device and method for stable X-ray imaging Download PDFInfo
- Publication number
- CN110715944B CN110715944B CN201911002199.0A CN201911002199A CN110715944B CN 110715944 B CN110715944 B CN 110715944B CN 201911002199 A CN201911002199 A CN 201911002199A CN 110715944 B CN110715944 B CN 110715944B
- Authority
- CN
- China
- Prior art keywords
- rays
- light image
- sample information
- assembly
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The invention relates to a device and a method for stable X-ray imaging, belongs to the technical field of X-ray imaging, and solves the problem of unstable X-ray imaging in the prior art. The device comprises a synchrotron radiation X-ray device for generating X-rays; the incident light imaging assembly is used for receiving the X-rays, converting part of the X-rays into visible light images and detecting the visible light images to obtain incident light images; the emergent light imaging assembly is used for receiving X rays carrying sample information obtained after the sample is vertically irradiated by the rest X rays which are not absorbed and converted by the incident light imaging assembly, converting the X rays into a visible light image carrying the sample information, and detecting the visible light image carrying the sample information to obtain an emergent light image carrying the sample information; and the image processor is used for obtaining a sample image according to the incident light image and the emergent light image. The device reduces unstable factors in the X-ray imaging process, and greatly improves the imaging efficiency and the imaging stability.
Description
Technical Field
The invention relates to the technical field of X-ray imaging, in particular to a device and a method for stable X-ray imaging.
Background
Synchrotron radiation X-rays are generated by electrons in the storage ring which are deflected at high speed. The storage ring is composed of a plurality of magnetic focusing structures. When the electron beam moves in the magnetic focusing structure, the electron beam deviates from the central position of the magnet due to the instability of the beam orbit, and the position and the emergent angle of an X-ray light source which is generated by the electron beam and is shaped like Gaussian distribution change. The small change of the light source position and the emergent angle causes the light intensity distribution detected by the detector to change along with the time. Furthermore, the synchrotron radiation X-ray light source needs to pass through a plurality of optical devices from generation to reception of the detector, and the instability of the components can change the light intensity distribution of an incident light image and an emergent light image.
At present, a detector is generally used to detect an incident light image formed by X-rays and an emergent light image carrying sample information formed after the X-rays irradiate a sample, so as to obtain an image carrying the sample information.
The prior art has the following defects that firstly, an incident light image and an emergent light image cannot be shot simultaneously, and light intensity change caused by instability of a light source and an optical component cannot be avoided; secondly, in the process of shooting an incident light image and an emergent light image by repeatedly moving the sample, the position of the sample is changed in a non-directional way under the influence of the vibration of the displacement table, so that the source of instability of imaging is greatly increased; in order to make the pixel points of the incident light image and the emergent light image correspond one to one, theoretically, the incident light image needs to be continuously detected and the position of the sample needs to be repeatedly adjusted, but due to the uncertainty of the change of the direction of the sample, the pixel points of the incident light image and the emergent light image cannot be in one-to-one correspondence in practice by adjusting the position of the sample; thirdly, the precious synchrotron radiation X-ray light source machine time can be greatly wasted by repeatedly moving the sample.
Disclosure of Invention
In view of the above analysis, the present invention aims to provide an apparatus and a method for stable X-ray imaging, so as to solve the problem of unstable X-ray imaging in the prior art.
In one aspect, the present invention provides an apparatus for X-ray stable imaging, the apparatus comprising a synchrotron radiation X-ray device for generating X-rays; the incident light imaging assembly is used for receiving the X-rays, converting part of the X-rays into visible light images, and detecting the visible light images to obtain incident light images; the emergent light imaging assembly is used for receiving X rays carrying sample information obtained after the sample is vertically irradiated by the rest X rays which are not absorbed and converted by the incident light imaging assembly, converting the X rays into a visible light image carrying the sample information, and detecting the visible light image carrying the sample information to obtain an emergent light image carrying the sample information; and the image processor is used for obtaining an image carrying sample information according to the incident light image and the emergent light image.
Further, the image processor obtains the image carrying the sample information by:
according to the light intensity I of the corresponding pixel point in the incident light image1iAnd the intensity of light I in the emergent light image2iPixel point values of an image carrying sample information are obtained by the following formula:
wherein i is the ith pixel point, and k is the percentage of X-rays transmitted through the incident light imaging component.
Further, the incident light imaging assembly includes:
the first preprocessing component is used for converting the received X-rays into visible light images;
the first reflector is used for reflecting light rays emitted by the visible light image;
the first infinite conjugate optical component is used for amplifying the light rays emitted by the reflected visible light image to obtain first light rays;
the first camera is used for receiving the first light to obtain an incident light image.
Further, the emergent light imaging assembly comprises:
the second preprocessing component is used for receiving the X-rays carrying the sample information and converting the X-rays into visible light images carrying the sample information;
the second reflector is used for reflecting light rays emitted by the visible light image carrying the sample information;
the second infinite conjugate optical assembly is used for amplifying the reflected light rays emitted by the visible light image carrying the sample information to obtain second light rays;
and the second camera is used for receiving the second light to obtain an emergent light image.
Further, the first pretreatment assembly and the second pretreatment assembly both comprise a carbon film and a scintillation crystal, the carbon film is used for receiving X rays and shielding external visible light, the scintillation crystal is used for converting the received X rays into visible light images, and the carbon film is positioned on the front side of the scintillation crystal;
the first pretreatment assembly also comprises common glass which is positioned at the rear side of the scintillation crystal;
the second pre-processing assembly further comprises lead glass positioned on the rear side of the scintillation crystal.
And the displacement platform is used for adjusting the alignment of the incident light imaging assembly and the emergent light imaging assembly in the horizontal direction and the vertical direction so as to enable the obtained pixel points of the incident light image and the emergent light image to be in one-to-one correspondence.
Further, the obtained pixel points of the incident light image and the emergent light image are in one-to-one correspondence by the following method:
adjusting X rays generated by the synchrotron radiation X-ray device to vertically enter a first pretreatment assembly, irradiating a sample after penetrating through a first reflector and vertically entering a second pretreatment assembly;
adjusting the optical axis of the first infinite conjugate optical assembly to be parallel to the optical axis of the second infinite conjugate optical assembly;
adjusting the chips of the first camera and the second camera to be respectively positioned on the image focal planes of the first infinite conjugate optical assembly and the second infinite conjugate optical assembly, and respectively positioning the centers of the chips of the first camera and the second camera on the optical axes of the first infinite conjugate optical assembly and the second infinite conjugate optical assembly.
Further, the included angle between the first reflector and the optical axis of the first preprocessing assembly and the optical axis of the first infinite conjugate optical assembly is 45 degrees, and the included angle between the second reflector and the optical axis of the second preprocessing assembly and the optical axis of the second infinite conjugate optical assembly is 45 degrees, so that the visible light image and a virtual image carrying sample information and formed after the light image is reflected are respectively located on the object space focal plane of the first infinite conjugate optical assembly and the object space focal plane of the second infinite conjugate optical assembly.
According to the technical scheme, the invention has the following beneficial effects:
1. the invention utilizes the same light source and two groups of detection assemblies with high consistency to simultaneously detect the incident light image and the emergent light image, thereby avoiding the continuous change of the light intensity and the position caused by the instability of the X-ray light source and the optical component and improving the imaging stability;
2. according to the invention, the positions of the two groups of detection assemblies are adjusted to enable the obtained pixel points of the incident light image and the emergent light image to be in one-to-one correspondence, so that the repeated adjustment of the position of the sample to be measured is avoided in the measurement process, the source of instability is reduced, the imaging efficiency is greatly improved, the synchrotron radiation X-ray light source is fully utilized, and the resource waste is reduced.
In another aspect, the present invention provides a method for stable X-ray imaging, comprising the steps of:
a synchrotron radiation X-ray device for generating X-rays;
receiving X-rays, converting part of the X-rays into visible light images, and detecting the visible light images to obtain incident light images;
receiving X-rays carrying sample information obtained after the unconverted rest part of X-rays vertically irradiate the sample, converting the X-rays carrying the sample information into a visible light image carrying the sample information, and detecting the visible light image carrying the sample information to obtain an emergent light image carrying the sample information;
and obtaining an image carrying sample information according to the incident light image and the emergent light image.
Further, the image carrying the sample information is obtained by:
according to the light intensity I of the corresponding pixel point in the incident light image1iAnd the intensity of light I in the emergent light image2iPixel point values of an image carrying sample information are obtained by the following formula:
wherein i is the ith pixel point, and k is the percentage of X-rays transmitted through the incident light imaging component.
Since the method of X-ray stable imaging in the present invention has the same principle as the apparatus of X-ray stable imaging, the method also has the corresponding technical effect as the apparatus.
In the invention, the technical schemes can be combined with each other to realize more preferable combination schemes. Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and drawings.
Drawings
The drawings are only for purposes of illustrating particular embodiments and are not to be construed as limiting the invention, wherein like reference numerals are used to designate like parts throughout.
FIG. 1 is a schematic diagram of an apparatus for X-ray stable imaging;
FIG. 2 is a flowchart of an embodiment of an X-ray stable imaging method.
Reference numerals:
1-X-ray; 2-1-carbon film; 3-1-scintillation crystals; 4-1-common glass; 5-1-a first mirror; 6-1-objective lens; 7-1-tube mirror; 8-1-a first camera; 2-2-carbon film; 3-2-scintillation crystals; 4-2-lead glass; 5-2-second mirror; 6-2-objective lens; 7-2-tube mirror; 8-2-second camera; 9-sample.
Detailed Description
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate preferred embodiments of the invention and together with the description, serve to explain the principles of the invention and not to limit the scope of the invention.
Device embodiment
Instability of the intensity of the X-ray source refers to a change in the intensity distribution of the X-ray image detected at the detector or camera position over time.
In one embodiment of the present invention, an apparatus for X-ray stable imaging is disclosed, as shown in fig. 1. The apparatus includes a synchrotron radiation X-ray device for generating X-rays; the incident light imaging assembly is used for receiving the X-rays, converting part of the X-rays into visible light images, and detecting the visible light images to obtain incident light images; the emergent light imaging assembly is used for receiving X rays carrying sample information obtained after the sample is vertically irradiated by the rest X rays which are not absorbed and converted by the incident light imaging assembly, converting the X rays into a visible light image carrying the sample information, and detecting the visible light image carrying the sample information to obtain an emergent light image carrying the sample information; and the image processor is used for obtaining an image carrying sample information according to the incident light image and the emergent light image.
Based on the device, the incident light image and the emergent light image carrying the sample information can be obtained by simultaneous detection, the image carrying the sample information can be obtained, the defects of instability of a synchrotron radiation X-ray light source and an optical component and unclear image carrying the sample information caused by repeatedly moving the sample are avoided, and the imaging stability and the imaging efficiency are improved.
In the prior art, an emergent light imaging component is used for detecting and obtaining an incident light image and an emergent light image so as to obtain a clear image carrying sample information, however, in order to solve the instability caused by the instability of the incident X-ray and the non-directional change of the sample position caused by repeatedly moving the sample, in the specific implementation process of the invention, the incident light imaging component and the emergent light imaging component are used for respectively detecting and obtaining an incident light image and an emergent light image, when the sample is not placed, part of X-rays are converted into visible light images in the incident light imaging component, and detecting the visible light image to obtain an incident light image, wherein in the emergent light imaging component, the unconverted rest part of the X-ray is converted into the visible light image, and detecting the visible light image to obtain an emergent light image, wherein at the moment, the pixel points of the incident light image and the emergent light image can be in one-to-one correspondence, but the light intensity of the corresponding pixel points is different. Therefore, in the process of actually measuring the sample information, the image processor corrects the light intensity of the pixel points corresponding to the incident light image and the emergent light image carrying the sample information by introducing the absorption coefficient so as to obtain a clear image carrying the sample information:
according to the light intensity I of the corresponding pixel point in the incident light image1iAnd the intensity of light I in the emergent light image2iPixel point values of an image carrying sample information are obtained by the following formula:
wherein i is the ith pixel point, and k is the percentage of X-rays transmitted through the incident light imaging component.
Each optical device in the incident light imaging assembly and the emergent light imaging assembly is respectively fixed in the same shell, and the transmission percentage k can be determined by the following formula:
k＝e-μd，
where μ is the linear absorption coefficient of the incident light imaging component and d is the thickness of the incident light imaging component.
Specifically, the intensity of the X-ray irradiated to the incident light imaging component is I1iThe intensity of X-ray transmitted through the incident light imaging component is I1Light intensity of I1The intensity of the X-ray obtained after the X-ray irradiates the sample is I2iI.e., the intensity of X-rays detected by the exit light imaging assembly, wherein,
I1＝k×I1i，
I2i＝I1×Ii，
pixel point values of an image carrying sample information may be obtained according to the above equation:
when the local information of the sample needs to be detected, the local part of the sample is irradiated by X-rays, and pixel points of the obtained image carrying the sample information all carry the sample information, namely the sample image; when the information of the whole sample needs to be detected, the range of the sample irradiated by the X-ray is larger than or equal to the size of the sample; when the range of the sample irradiated by the X-ray is larger than the size of the sample, part of pixel points in the obtained image carrying the sample information do not carry the sample information, and the value of the corresponding pixel point is about 1; when the range of the sample irradiated by the X-ray is equal to the size of the sample, pixel points in the obtained image carrying the sample information carry the sample information, namely the sample image.
In this device, incident light formation of image subassembly and emergent light formation of image subassembly's structure and formation of image principle all are the same, and is preferred, incident light formation of image subassembly includes:
the first preprocessing component is used for converting the received X-rays into visible light images;
the first reflector is used for reflecting light rays emitted by the visible light image;
the first infinite conjugate optical component is used for amplifying the light rays emitted by the reflected visible light image to obtain first light rays;
the first camera is used for receiving the first light to obtain an incident light image.
Preferably, the outgoing light imaging module includes:
the second preprocessing component is used for receiving the X-rays carrying the sample information and converting the X-rays into visible light images carrying the sample information;
the second reflector is used for reflecting light rays emitted by the visible light image carrying the sample information;
the second infinite conjugate optical assembly is used for amplifying the reflected light rays emitted by the visible light image carrying the sample information to obtain second light rays;
and the second camera is used for receiving the second light to obtain an emergent light image.
The X-rays carrying the sample information refer to X-rays carrying the sample information obtained after the remaining portion of the X-rays, which are not absorbed and converted by the incident light imaging assembly, perpendicularly irradiate the sample.
Wherein the remaining portion of the X-rays that are not absorbed and converted by the incident light imaging component are X-rays transmitted through the first mirror.
Specifically, the first reflector and the second reflector have the same structural parameters, preferably, the surface of the reflector is a silver coating, the thickness of the coating is about 10 microns, the substrate of the reflector is quartz glass, and the thickness of the quartz glass is about 4 mm, so that the reflectivity of the first reflector and the second reflector to visible light reaches over 90%, and simultaneously, the X-ray can easily penetrate through the first reflector and vertically irradiate a sample.
Preferably, the first infinite conjugate optical assembly and the second infinite conjugate optical assembly are the same and both include the same objective lens and tube lens, the objective lens is configured to converge light rays emitted from the visible light image reflected by the mirror to obtain parallel light, the tube lens is configured to focus the parallel light, and an optical axis of the objective lens and an optical axis of the tube lens are located on the same straight line, that is, an optical axis of the infinite conjugate optical assembly.
The first camera and the second camera are also the same, so that the pixel points of the incident light image and the emergent light image can be conveniently adjusted to be in one-to-one correspondence, meanwhile, the first camera and the second camera convert the detected light signals of the incident light image and the emergent light image into electric signals and output the electric signals to the image processor, and the image processor obtains and outputs clear images carrying sample information according to the received electric signals.
Preferably, the first pretreatment assembly and the second pretreatment assembly both comprise a carbon film and a scintillation crystal, the carbon film is used for receiving X-rays and shielding external visible light, the scintillation crystal is used for converting the received X-rays into visible light images, and the carbon film is positioned on the front side of the scintillation crystal;
the first pretreatment assembly also comprises common glass which is positioned at the rear side of the scintillation crystal and used for preventing the scintillation crystal from being polluted by external dust;
the second pretreatment assembly further comprises lead glass, the lead glass is located on the rear side of the scintillation crystal and used for preventing pollution of outside dust to the scintillation crystal and absorbing converted X rays which are not absorbed by the scintillation crystal so as to reduce radiation damage of the X rays to the infinite conjugate optical assembly.
In order to adjust the incident light imaging component and the emergent light imaging component to keep the height consistency, the device also comprises a displacement table, wherein the displacement table is used for adjusting the incident light imaging component and the emergent light imaging component to be aligned in the horizontal direction and the vertical direction so as to enable the obtained incident light image and the obtained emergent light image to be in one-to-one correspondence with each other, the precision of the displacement table can reach 200nm magnitude, the precision of the displacement table is higher than the detection precision of 400nm spatial resolution of the device, and the requirement of the adjustment precision of the device is met.
During specific adjustment, the displacement table is moved in the horizontal direction or the vertical direction to adjust alignment of the shell in which the incident light imaging assembly is fixed and the shell in which the emergent light imaging assembly is fixed.
In order to enable the detector to simultaneously and accurately detect the incident light image and the emergent light image, the pixel points of the obtained incident light image and the emergent light image are in one-to-one correspondence by the following method:
adjusting X rays generated by the synchrotron radiation X-ray device to vertically enter a first pretreatment assembly, irradiating a sample after penetrating through a first reflector and vertically entering a second pretreatment assembly;
adjusting the optical axis of the first infinite conjugate optical assembly to be parallel to the optical axis of the second infinite conjugate optical assembly;
adjusting the chips of the first camera and the second camera to be respectively positioned on the image focal planes of the first infinite conjugate optical assembly and the second infinite conjugate optical assembly, and respectively positioning the centers of the chips of the first camera and the second camera on the optical axes of the first infinite conjugate optical assembly and the second infinite conjugate optical assembly.
Preferably, the included angles between the first reflector and the optical axes of the first preprocessing component and the first infinite conjugate optical component are 45 °, and the included angles between the second reflector and the optical axes of the second preprocessing component and the second infinite conjugate optical component are 45 °, so that the visible light image and the virtual image carrying the sample information and formed by reflecting the visible light image are respectively located on the object space focal planes of the first infinite conjugate optical component and the second infinite conjugate optical component, as shown in fig. 1, in the incident light imaging component, a point a in the visible light image obtained by converting the scintillation crystal forms a virtual image point a1 on the object space focal plane of the first infinite conjugate optical component after being reflected by the reflector, and forms a corresponding point a2 on the first camera, and similarly, in the emergent light imaging component, a point B in the visible light image carrying the sample information obtained by converting the scintillation crystal forms a virtual image on the object space focal plane of the second infinite conjugate optical component after being reflected by the reflector Point B1 and corresponding point B2 is imaged on the second camera.
Compared with the prior art, the device for stable X-ray imaging provided by the embodiment has the advantages that firstly, the same light source and two groups of detection assemblies with high consistency are used for simultaneously detecting the incident light image and the emergent light image, so that the continuous change of the light intensity and the position caused by the instability of the X-ray light source and the optical component is avoided, and the imaging stability is improved; secondly, the positions of the two groups of detection assemblies are adjusted to enable the pixel points of the obtained incident light image and the pixel points of the emergent light image to be in one-to-one correspondence, so that the repeated adjustment of the position of a sample to be measured is avoided in the measurement process, the source of instability is reduced, the imaging efficiency is greatly improved, the synchrotron radiation X-ray light source is fully utilized, and the resource waste is reduced.
Method embodiment
The invention discloses a method for stable X-ray imaging, which comprises the following steps:
a synchrotron radiation X-ray device for generating X-rays;
receiving X-rays, converting part of the X-rays into visible light images, and detecting the visible light images to obtain incident light images;
receiving X-rays carrying sample information obtained after the unconverted rest part of X-rays vertically irradiate the sample, converting the X-rays carrying the sample information into a visible light image carrying the sample information, and detecting the visible light image carrying the sample information to obtain an emergent light image carrying the sample information;
and obtaining an image carrying sample information according to the incident light image and the emergent light image.
Specifically, the image carrying the sample information is obtained through the following process:
according toCorresponding light intensity I of pixel point in incident light image1iAnd the intensity of light I in the emergent light image2iPixel point values of an image carrying sample information are obtained by the following formula:
wherein i is the ith pixel point, and k is the percentage of X-rays transmitted through the incident light imaging component.
Compared with the prior art, the method for stable imaging of the X-ray provided by the embodiment has the advantages that firstly, the device simultaneously detects the incident light image and the emergent light image by using the same light source and two groups of detection assemblies with high consistency, so that the continuous change of the light intensity and the position caused by the instability of the X-ray light source and the optical component is avoided, and the imaging stability is improved; secondly, the positions of the two groups of detection assemblies are adjusted to enable the pixel points of the obtained incident light image and the pixel points of the emergent light image to be in one-to-one correspondence, so that the repeated adjustment of the position of a sample to be measured is avoided in the measurement process, the source of instability is reduced, the imaging efficiency is greatly improved, the synchrotron radiation X-ray light source is fully utilized, and the resource waste is reduced.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention.
Claims (8)
1. An apparatus for X-ray stable imaging, comprising:
a synchrotron radiation X-ray device for generating X-rays;
the incident light imaging assembly comprises a first preprocessing assembly and a first reflector and is used for receiving the X-rays, converting part of the X-rays into a visible light image and detecting the visible light image to obtain an incident light image;
the emergent light imaging assembly comprises a second preprocessing assembly and a second processing assembly, wherein the second preprocessing assembly is used for receiving X rays carrying sample information obtained after the sample is vertically irradiated by the residual X rays which are not absorbed and converted by the incident light imaging assembly, converting the X rays into a visible light image carrying the sample information, and detecting the visible light image carrying the sample information to obtain an emergent light image carrying the sample information;
adjusting X rays generated by a synchrotron radiation X-ray device to vertically enter the first pretreatment assembly, irradiating a sample after penetrating through the first reflector and vertically entering the second pretreatment assembly;
the image processor is used for obtaining an image carrying sample information according to the incident light image and the emergent light image, and specifically comprises:
according to the light intensity I of the corresponding pixel point in the incident light image1iAnd the intensity of light I in the emergent light image2iPixel point values of an image carrying sample information are obtained by the following formula:
wherein i is the ith pixel point, and k is the percentage of X-rays transmitted through the incident light imaging component.
2. The apparatus of claim 1, wherein the incident light imaging assembly comprises:
the first preprocessing component is used for converting the received X-rays into visible light images;
the first reflector is used for reflecting light rays emitted by the visible light image;
the first infinite conjugate optical component is used for amplifying the light rays emitted by the reflected visible light image to obtain first light rays;
the first camera is used for receiving the first light to obtain an incident light image.
3. The apparatus of claim 2, wherein the emergent light imaging assembly comprises:
the second preprocessing component is used for receiving the X-rays carrying the sample information and converting the X-rays into visible light images carrying the sample information;
the second reflector is used for reflecting light rays emitted by the visible light image carrying the sample information;
the second infinite conjugate optical assembly is used for amplifying the reflected light rays emitted by the visible light image carrying the sample information to obtain second light rays;
and the second camera is used for receiving the second light to obtain an emergent light image.
4. The device for X-ray stable imaging is characterized in that the first pretreatment assembly and the second pretreatment assembly respectively comprise a carbon film and a scintillation crystal, the carbon film is used for receiving X-rays and shielding external visible light, the scintillation crystal is used for converting the received X-rays into visible light images, and the carbon film is positioned on the front side of the scintillation crystal;
the first pretreatment assembly also comprises common glass which is positioned at the rear side of the scintillation crystal;
the second pre-processing assembly further comprises lead glass positioned on the rear side of the scintillation crystal.
5. The apparatus of claim 4, further comprising a displacement stage for adjusting the alignment of the incident light imaging assembly and the emergent light imaging assembly in the horizontal direction and the vertical direction, so that the obtained incident light image and the emergent light image have pixel points corresponding to each other.
6. The device of claim 5, wherein the obtained incident light image and emergent light image have pixel points corresponding to each other in a one-to-one manner by:
adjusting the optical axis of the first infinite conjugate optical assembly to be parallel to the optical axis of the second infinite conjugate optical assembly;
adjusting the chips of the first camera and the second camera to be respectively positioned on the image focal planes of the first infinite conjugate optical assembly and the second infinite conjugate optical assembly, and respectively positioning the centers of the chips of the first camera and the second camera on the optical axes of the first infinite conjugate optical assembly and the second infinite conjugate optical assembly.
7. The device of claim 6, wherein the included angles between the first reflecting mirror and the optical axes of the first preprocessing component and the first infinite conjugate optical component are 45 °, and the included angles between the second reflecting mirror and the optical axes of the second preprocessing component and the second infinite conjugate optical component are 45 °, so that the virtual images formed by the visible light image and the visible light image carrying the sample information after reflection are located on the object focal planes of the first infinite conjugate optical component and the second infinite conjugate optical component respectively.
8. A method of X-ray stable imaging, which is implemented by the apparatus of X-ray stable imaging according to any one of claims 1-7, the method of X-ray stable imaging comprising the steps of:
a synchrotron radiation X-ray device for generating X-rays;
receiving X-rays, converting part of the X-rays into visible light images, and detecting the visible light images to obtain incident light images;
receiving X-rays carrying sample information obtained after the unconverted residual X-rays vertically irradiate the sample, converting the X-rays carrying the sample information into a visible light image carrying the sample information, and detecting the visible light image carrying the sample information to obtain an emergent light image carrying the sample information;
obtaining an image carrying sample information according to the incident light image and the emergent light image, which specifically comprises the following steps:
according to the light intensity I of the corresponding pixel point in the incident light image1iAnd the intensity of light I in the emergent light image2iPixel point values of an image carrying sample information are obtained by the following formula:
wherein i is the ith pixel point, and k is the percentage of X-rays transmitted through the incident light imaging component.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911002199.0A CN110715944B (en) | 2019-10-21 | 2019-10-21 | Device and method for stable X-ray imaging |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911002199.0A CN110715944B (en) | 2019-10-21 | 2019-10-21 | Device and method for stable X-ray imaging |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110715944A CN110715944A (en) | 2020-01-21 |
| CN110715944B true CN110715944B (en) | 2021-03-30 |
Family
ID=69212981
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911002199.0A Active CN110715944B (en) | 2019-10-21 | 2019-10-21 | Device and method for stable X-ray imaging |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110715944B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116156721B (en) * | 2023-02-23 | 2023-12-12 | 无锡日联科技股份有限公司 | X-ray source adopting bipolar low-ripple high-precision controllable constant current source circuit |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106618623A (en) * | 2017-01-11 | 2017-05-10 | 合肥工业大学 | Imaging method of hard X-ray grating interferometer with single exposure |
| CN107219241A (en) * | 2017-05-05 | 2017-09-29 | 中国科学院上海光学精密机械研究所 | The measurement apparatus and measuring method of time resolution X-ray absorption spectra in situ |
| CN107632029A (en) * | 2017-09-18 | 2018-01-26 | 西南交通大学 | A kind of digital image correlation technique experimental provision based on X-ray transmission imaging |
| CN108414541A (en) * | 2017-02-10 | 2018-08-17 | 东芝It·控制系统株式会社 | Cryptoscopy device |
| CN108827988A (en) * | 2018-06-12 | 2018-11-16 | 中国科学院上海光学精密机械研究所 | Non-local modulation of X-ray diffraction imaging device and method based on light field High order correletion |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014090967A (en) * | 2012-11-06 | 2014-05-19 | Canon Inc | X-ray imaging apparatus |
-
2019
- 2019-10-21 CN CN201911002199.0A patent/CN110715944B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106618623A (en) * | 2017-01-11 | 2017-05-10 | 合肥工业大学 | Imaging method of hard X-ray grating interferometer with single exposure |
| CN108414541A (en) * | 2017-02-10 | 2018-08-17 | 东芝It·控制系统株式会社 | Cryptoscopy device |
| CN107219241A (en) * | 2017-05-05 | 2017-09-29 | 中国科学院上海光学精密机械研究所 | The measurement apparatus and measuring method of time resolution X-ray absorption spectra in situ |
| CN107632029A (en) * | 2017-09-18 | 2018-01-26 | 西南交通大学 | A kind of digital image correlation technique experimental provision based on X-ray transmission imaging |
| CN108827988A (en) * | 2018-06-12 | 2018-11-16 | 中国科学院上海光学精密机械研究所 | Non-local modulation of X-ray diffraction imaging device and method based on light field High order correletion |
Non-Patent Citations (2)
| Title |
|---|
| X射线光栅相位衬度成像技术研究;杨萌;《中国优秀硕士学位论文全文数据库（电子期刊）》;20170115(第1期);第1-60页 * |
| X射线相位衬度成像技术与方法研究;邵其刚;《中国博士学位论文全文数据库（电子期刊）》;20170915(第9期);第1-93页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110715944A (en) | 2020-01-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108444410B (en) | Device and method for measuring parallelism of convergent laser emission optical axis and tracking visual axis | |
| MXPA03004979A (en) | Off-center tomosynthesis. | |
| CN106052585B (en) | A kind of surface shape detection apparatus and detection method | |
| CN109186548B (en) | Device and method for measuring inclination angle of lobster eye lens square hole channel | |
| CN106767545A (en) | A kind of high accuracy high-space resolution angel measuring instrument and angle measurement method | |
| US5923034A (en) | Pattern transfer mask, mask inspection method and a mask inspection apparatus | |
| CN106970411B (en) | Electron beam divergence angle distribution measuring device and measuring method | |
| CN210863591U (en) | X-ray synchronous imaging detection device | |
| CN110715944B (en) | Device and method for stable X-ray imaging | |
| CN210220974U (en) | Automatic detection and positioning device for laser spot focus | |
| Lee et al. | Soft x-ray spectromicroscope at the Pohang Light Source | |
| CN218036511U (en) | X-ray photoelectron spectrometer | |
| CN109031174B (en) | Multi-cascade distributed micro CT imaging system | |
| CN111076900A (en) | Vacuum test device and method for measuring focusing performance of plane lobster eye optical device | |
| CN116184679A (en) | Terahertz imaging light path, adjustment system and method, and imaging light path construction method | |
| CN111061064B (en) | Double-beam optical trap beam auxiliary alignment device and method | |
| CN114509923A (en) | Focusing and leveling device in design of deep ultraviolet objective lens and application thereof | |
| CN113984815A (en) | Efficient Compton scattering imaging system based on inverse Compton scattering X-ray source | |
| CN109470147B (en) | Self-adaptive high-resolution stereo vision system and measuring method | |
| CN112461260A (en) | Testing device and testing method for MSO optical system | |
| CN118138750B (en) | Test system for ground simulation camera working condition | |
| CN214537975U (en) | Visible light extended target simulation device | |
| CN114089310B (en) | Laser beam target coupling sensor | |
| US11992350B2 (en) | System and method for compact laminography utilizing microfocus transmission x-ray source and variable magnification x-ray detector | |
| CN218601190U (en) | Ultrasonic suspension sample table for synchrotron radiation X-ray scattering test |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |