CN108827503A - Flexible piezoelectric sensors - Google Patents
Flexible piezoelectric sensors Download PDFInfo
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- CN108827503A CN108827503A CN201810920836.1A CN201810920836A CN108827503A CN 108827503 A CN108827503 A CN 108827503A CN 201810920836 A CN201810920836 A CN 201810920836A CN 108827503 A CN108827503 A CN 108827503A
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- flexible
- piezoelectric
- piezoelectric sensors
- piezoelectric device
- flexible material
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- 239000000463 material Substances 0.000 claims abstract description 75
- 238000004519 manufacturing process Methods 0.000 claims description 28
- 238000010438 heat treatment Methods 0.000 claims description 12
- 238000007711 solidification Methods 0.000 claims description 7
- 230000008023 solidification Effects 0.000 claims description 7
- 238000009826 distribution Methods 0.000 claims description 3
- 239000004205 dimethyl polysiloxane Substances 0.000 claims 4
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims 4
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims 4
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims 4
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims 4
- 239000003795 chemical substances by application Substances 0.000 claims 2
- 230000000694 effects Effects 0.000 abstract description 4
- 230000006698 induction Effects 0.000 abstract description 4
- 230000001788 irregular Effects 0.000 abstract description 3
- 238000005259 measurement Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 7
- 210000000988 bone and bone Anatomy 0.000 description 3
- 239000002178 crystalline material Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 241001085205 Prenanthella exigua Species 0.000 description 1
- 238000005273 aeration Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 210000003205 muscle Anatomy 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The present invention relates to sensor technical fields, and in particular to a kind of flexible piezoelectric sensors.The present invention is directed to realize measurement of the piezoelectric transducer to irregular external force face.For this purpose, flexible piezoelectric sensors include at least one piezoelectric device (perhaps piezoelectric device array) and flexible material complaint material portion or piezoelectric device are completely covered the present invention provides a kind of flexible piezoelectric sensors.For the present invention by by complaint material portion or being completely covered on piezoelectric device, piezoelectric transducer can be with the irregular acting surface of the external force of induction effect on it.
Description
Technical field
The present invention relates to sensor technical fields, and in particular to a kind of flexible piezoelectric sensors.
Background technique
What this part provided is only background information relevant to the disclosure, is not necessarily the prior art.
Flexible sensor application currently on the market is very extensive, is mainly used in artificial skin, flexible touch screen and automobile
On force aid system.These flexible sensors use flexible electronic device, flexible to the material of production flexible electronic device to want
It asks, common electronic device is not appropriate for.
Piezoelectric material is to be under pressure to occur the crystalline material of voltage when acting between both ends of the surface, the crystalline substance with piezoelectricity
Body MATERIAL SYMMETRY is lower, and when by external force, deformation occurs, the relative displacement of negative ions makes positive and negative charge in structure cell
Center is no longer overlapped, and causes crystalline material that macroscopic polarization occurs, and plane of crystal surface density of charge is equal to polarization intensity on surface
Projection in normal direction, so both ends of the surface will appear heterocharge when piezoelectric material compression power acts on deformation, to produce in both ends of the surface
Raw potential difference, by measuring this potential difference, the pressure of the available effect of piezoelectric device on the piezoelectric materials, due to piezoresistive material
Material is generally crystalline material, and generally only plane or point contact can act on the piezoelectric materials.Flexible material be it is scalable,
Bending, torsion, the material deformed without losing performance, the flexible material with favorable elasticity can restore after external force revocation
Size and shape originally, PDMS (polydimethysiloxane) are a kind of flexible materials being widely used, wherein soft
Property material include PDMS and curing agent, pass through the ratio for adjusting PDMS and curing agent, the consistency and elasticity of adjustable PDMS, example
It such as, is 10 in the weight of PDMS and the weight of curing agent：Have after the heated solidification of the PDMS made under 1 ratio very good
Elasticity.
Summary of the invention
The present invention provides a kind of flexible piezoelectric sensors, it is therefore an objective at least solve above-mentioned problems of the prior art
One of, which is achieved through the following technical solutions：
The first aspect of the present invention provides a kind of flexible piezoelectric sensors, and flexible piezoelectric sensors include at least one pressure
Electrical part and flexible material, complaint material portion or are completely covered an at least piezoelectric device.
Preferably, when piezoelectric transducer includes multiple piezoelectric devices, multiple piezoelectric devices are according to specified array distribution
In flexible material.
Preferably, the surface of flexible material and each piezoelectric device all has complete contact surface.
Preferably, flexible material has specified thickness, and flexible material can be according to the external force acted on flexible material
Acting surface deformation occurs.
Preferably, flexible material package piezoelectric device and with piezoelectric device Elastic Contact, flexible material have good bullet
Property, after the pressure acted on flexible material disappears, flexible material can restore to original state.
The second aspect of the present invention additionally provides a kind of production method of flexible piezoelectric sensors, flexible piezoelectric sensors
Production method is used to make the flexible piezoelectric sensors of first aspect present invention, and the production method of flexible piezoelectric sensors includes step
Suddenly：S10：Piezoelectric device array is placed in glassware as needed；S12：PDMS and curing agent are poured into glassware
Mixed liquor；S14：The glassware for filling piezoelectric device array and mixed liquor is put into vacuum evacuation device and is removed in mixed liquor
Bubble；S16：Glassware is put into oven after 1-2 hour and is heating and curing with 120 DEG C of temperature；S18：Heating one
The solidification PDMS for being bonded with piezoelectric device array is removed from glassware after a hour.
The third aspect of the present invention additionally provides a kind of production method of flexible piezoelectric sensors, flexible piezoelectric sensors
Production method is used to make the flexible piezoelectric sensors of first aspect present invention, and the production method of flexible piezoelectric sensors includes step
Suddenly：S20：Piezoelectric device array is fixed in fixed link as needed, and the external wire of piezoelectric device array is put in fixation
In bar；S22：The fixed link for being fixed with piezoelectric device array is put into mold；S24：PDMS and curing agent are poured into mold
Mixed liquor；S26：The mold for filling piezoelectric device array and mixed liquor is put into the gas removed in mixed liquor in vacuum evacuation device
Bubble；S28：Mold is put into oven after 1-2 hour and is heating and curing with 120 DEG C of temperature；S30：Heat a hour
The solidification PDMS for being bonded with piezoelectric device array is removed from glassware afterwards.
It will be appreciated to those of skill in the art that the present invention is by by complaint material portion or being completely covered piezoelectricity device
On part, piezoelectric transducer can be with the irregular acting surface of induction effect external force on it.Specifically, flexible material can be according to work
Deformation occurs for the acting surface of external force on flexible material, and flexible material passes through self-deformation for pressure signal transmission to piezoelectricity
Device, further, flexible material also have good elasticity, after the pressure acted on flexible material disappears, flexible material
Material can restore to original state, and therefore, flexible piezoelectric sensors of the invention may be reused.
Further, the production method of flexible piezoelectric sensors of the invention will be by that will fill piezoelectric device array and mixing
The mold of liquid is put into the bubble in vacuum evacuation device in removal mixed liquor, occurs gas between piezoelectric device and flexible material to reduce
Visionary hope rings the phenomenon that flexible piezoelectric sensors sensitivity.
Detailed description of the invention
By reading the following detailed description of the preferred embodiment, various other advantages and benefits are common for this field
Technical staff will become clear.The drawings are only for the purpose of illustrating a preferred embodiment, and is not considered as to the present invention
Limitation.And throughout the drawings, the same reference numbers will be used to refer to the same parts.In the accompanying drawings：
Fig. 1 is the main view of the flexible piezoelectric sensors of one embodiment of the invention.
Fig. 2 is the top view of the flexible piezoelectric sensors of one embodiment of the invention.
Fig. 3 is the working state schematic representation of the flexible piezoelectric sensors of one embodiment of the invention.
Fig. 4 is the working state schematic representation of the flexible piezoelectric sensors of another embodiment of the present invention.
Fig. 5 is the working state schematic representation of the flexible piezoelectric sensors of further embodiment of the present invention.
Fig. 6 is the flow diagram of the flexible piezoelectric sensors production method of one embodiment of the invention.
Fig. 7 is the flow diagram of the flexible piezoelectric sensors production method of another embodiment of the present invention.
Fig. 8 is that the flexible piezoelectric sensors of one embodiment of the invention make the structural schematic diagram of state.
Wherein, 10, piezoelectric device；20, flexible material；30, press object；40, fixed link；50, mold.
Specific embodiment
The illustrative embodiments of the disclosure are more fully described below with reference to accompanying drawings.Although showing this public affairs in attached drawing
The illustrative embodiments opened, it being understood, however, that may be realized in various forms the disclosure without the reality that should be illustrated here
The mode of applying is limited.It is to be able to thoroughly understand the disclosure on the contrary, providing these embodiments, and can be by this public affairs
The range opened is fully disclosed to those skilled in the art.It should be noted that the present invention passes through using PDMS as flexible material
Material is a preferred embodiment, is not the limitation to flexible material of the present invention, for example, flexible material of the invention can be with
For other materials, protection scope of this adjustment without departing from flexible material of the present invention.
It should be understood that term used herein merely for description particular example embodiment purpose, and have no intention into
Row limitation.Unless the context clearly indicates otherwise, otherwise singular " one " as used in the text, "one" and " described "
Can also indicate to include plural form.The terms "include", "comprise" and " having " are inclusives, and therefore indicate that institute is old
The presence of feature, element and/or the component stated, but presence is not precluded or adds one or more of the other feature, element, portion
Part, and/or their combination.
Although multiple element, component, region, layer and/or portion can be described using term first, second etc. in the text
Section still these component, assembly units, region, layer and/or is limited by these terms than Duan Buying.These terms can only be used to
One component, assembly unit, region, layer or section are distinguished with another region, layer or section.In addition, in the description of the present invention,
Unless otherwise clearly defined and limited, term " setting ", " connection " shall be understood in a broad sense, for example, it may be fixedly connected,
Can be detachably connected or integral type connection；It can be directly connected, it can also be indirectly connected through an intermediary.For
For those skilled in the art, the concrete meaning of above-mentioned term in the present invention can be understood as the case may be.
For ease of description, an element as illustrated in the diagram can be described use space relativeness term in the text
Either for feature relative to another element or the relationship of feature, these relativeness terms are, for example, " surface ", "upper", "inner"
Deng.This spatial correlation term be intended to include the device in use or operation in addition to the orientation described in figure not
Same orientation.For example, being described as " below other elements or feature " or " at it if the device in figure is overturn
The element of its element or feature lower section " will be then orientated " on other elements or feature " or " in other elements
Or above feature ".Therefore, exemplary term " in ... lower section " may include in orientation upper and under.In addition device can be
It orients (being rotated by 90 ° or in other directions) and spatial correlation descriptor used herein explains accordingly.
Fig. 1 is the main view of the flexible piezoelectric sensors of one embodiment of the invention, and Fig. 2 is one embodiment of the invention
The top view of flexible piezoelectric sensors
As depicted in figs. 1 and 2, soft according to an embodiment of the invention, of the invention provide a kind of flexible piezoelectric sensors
Property piezoelectric transducer includes at least one piezoelectric device 10 and flexible material 20, and flexible material 20 partly or completely covers at least
One piezoelectric device 10, further, those skilled in the art can match such as PDMS by specified PDMS and curing agent
Weight ratio with curing agent is 10：1 lower generation has the flexible material 20 of certain toughness and thickness, the thickness of flexible material 20
It can be determined according to actual application environment, not only be able to satisfy flexible piezoelectric sensors to requirement flexible, but also be able to satisfy flexible piezoelectric
The requirement of sensor protection piezoelectric device 10.The present invention is by the way that piezoelectric device 10 to be set in flexible material 20, flexible material
20 can experience the external force of three dimensionality, and the external force afforded is transferred to piezoelectric device 10, to improve flexible piezoelectric sensing
The sensitivity of device induction external force.Further, flexible material 20 also has the function of supporting piezoelectric device 10, can also reduce outer
The phenomenon that portion's environmental corrosion piezoelectric device 10, meanwhile, flexible material 20 can also improve the toughness of flexible piezoelectric sensors and strong
The phenomenon that degree, reduction damage piezoelectric device 10.
Fig. 3 is the working state schematic representation of the flexible piezoelectric sensors of one embodiment of the invention, and Fig. 4 is that the present invention is another
The working state schematic representation of the flexible piezoelectric sensors of a embodiment, Fig. 5 are that the flexible piezoelectric of further embodiment of the present invention passes
The working state schematic representation of sensor.
With continued reference to Fig. 1 and Fig. 2 and refering to Fig. 3 to Fig. 5, according to an embodiment of the invention, piezoelectric transducer includes more
When a piezoelectric device 10, multiple piezoelectric devices 10 form multiple piezoelectric devices according to specified array distribution in flexible material 20
The surface of array, flexible material 20 and each piezoelectric device 10 all has complete contact surface.Specifically, piezoelectricity of the invention passes
Sensor includes five piezoelectric devices 10, and when external pressure object 30 contacts piezoelectric transducer, flexible material 20 can will be outer
The external force of portion's pressure object 30 is transferred to five piezoelectric devices 10, and the controller connecting with five piezoelectric devices 10 can be according to five
The pressure position of potential change analysis external pressure object 30 in a piezoelectric device 10 and pressure pressure size, to improve soft
The induction sensitivity of property piezoelectric transducer.As shown in Figures 3 to 5, what pressure object 30 was contacted with flexible piezoelectric sensors contacts
Face is plane, cambered surface or serrated face, and plane, cambered surface or serrated face are it is difficult to ensure that pressure object 30 is accurately pressed in a piezoelectricity
The surface of device 10, when pressing the pressing of object 30 on flexible material 20, it is possible that five in flexible material 20
Piezoelectric device 10 senses that the pressure signal of pressure object 30, five piezoelectric devices 10 are sensed pressure signal by leading
Electrode is sent to the controller of flexible piezoelectric sensors out, and controller senses that pressure signal is simulated according to each piezoelectric device 10
The contact surface of pressure object 30 and flexible material 20 determines pressure object according to the contact surface of pressure object 30 and flexible material 20
30 pressure size and pressure position.Further, flexible material 20 can be according to the external force acted on flexible material 20
Acting surface deformation occurs, and flexible material 20 wrap up piezoelectric device 10 and with 10 Elastic Contact of piezoelectric device, flexible material 20
With good elasticity, after the pressure acted on flexible material 20 disappears, flexible material 20 can restore to original state, because
This, flexible piezoelectric sensors of the invention may be reused.
It should be noted that it is the preferred embodiment of the present invention that piezoelectric transducer, which includes five piezoelectric devices 10, not
It is the limitation to 10 quantity of piezoelectric device of the present invention, for example, piezoelectric transducer of the invention is also provided with multiple piezoelectricity devices
It is part 10 such as seven, this to adjust the protection scope for belonging to piezoelectric transducer of the present invention.
Fig. 6 is the flow diagram of the flexible piezoelectric sensors production method of one embodiment of the invention.
As shown in fig. 6, the second aspect of the present invention additionally provides a kind of production method of flexible piezoelectric sensors, flexibility pressure
For making flexible piezoelectric sensors of the invention, the production method of flexible piezoelectric sensors includes the production method of electric transducer
Step：S10：Piezoelectric device array is placed in glassware as needed；S12：PDMS and curing agent are poured into glassware
Mixed liquor；S14：The glassware for filling piezoelectric device array and mixed liquor is put into vacuum evacuation device and is removed in mixed liquor
Bubble；S16：Glassware is put into oven after 1-2 hour and is heating and curing with 120 DEG C of temperature；S18：Heating
The solidification PDMS for being bonded with piezoelectric device array is removed from glassware after one hour.Those skilled in the art should be bright
White, the PDMS without being heating and curing is flow-like, make sensor when can first be arranged in glassware what a or
Multiple piezoelectric device arrays, are then added the PDMS of flow-like, and the PDMS of flow-like can wrap up piezoelectric device array well
Without being limited by piezoelectric device array surface shape, in flow-like PDMS under the effect of gravity contact surface formed it is smooth
Surface, therefore, the bottom of PDMS has with piezoelectric device array and contacts well after being heating and curing, and upper face is smooth table
Face.Further, the production method of flexible piezoelectric sensors of the invention, which passes through, will fill piezoelectric device array and mixed liquor
Glassware is put into the bubble in vacuum evacuation device in removal mixed liquor, occurs between piezoelectric device array and mixed liquor to reduce
The phenomenon that aeration flexible piezoelectric sensors performance.
Fig. 7 is the flow diagram of the flexible piezoelectric sensors production method of another embodiment of the present invention, and Fig. 8 is this hair
The structural schematic diagram of the flexible piezoelectric sensors production state of bright one embodiment.
As shown in Figure 7 and Figure 8, the third aspect of the present invention additionally provides a kind of production method of flexible piezoelectric sensors,
The production method of flexible piezoelectric sensors is for making flexible piezoelectric sensors of the invention, the production side of flexible piezoelectric sensors
Method includes step：S20：Piezoelectric device array is fixed on as needed in fixed link 40, and by the external wire of piezoelectric transducer
It is put in fixed link 40；S22：The fixed link 40 for being fixed with piezoelectric device array is put into mold 50；S24：Into mold 50
Pour into the mixed liquor of PDMS and curing agent；S26：The mold 50 for filling piezoelectric device array and mixed liquor is put into vacuum evacuation device
Bubble in interior removal mixed liquor；S28：Mold 50 is put into oven after 1-2 hour and is heated admittedly with 120 DEG C of temperature
Change；S30：The solidification PDMS for being bonded with piezoelectric device array is removed from glassware after heating a hour.The present invention is logical
It crosses and piezoelectric device array is fixed on as needed on such as bone of fixed link 40, piezoelectric device array is formed on bone is similar to muscle
Then the fixed link 40 for being fixed with piezoelectric device array is put into mold 50 by the shape of bone, poured into mold 50 PDMS and
The mixed liquor of curing agent, mixed liquor final curing simultaneously cover fixed link 40 and piezoelectric device array, form the pressure for being similar to skin
Electric transducer, when the pressure object of piezoelectric transducer and outside contacts, flexible material 20 passes the pressure of external pressure object
It is handed to piezoelectric device array, the piezoelectric signal received is sent to controller by leadout electrode by piezoelectric device array, control
Device determines the pressure size and pressure application surface for acting on flexible material 20 object that presses according to piezoelectric signal.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
In the technical scope disclosed by the present invention, any changes or substitutions that can be easily thought of by anyone skilled in the art,
It should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with the protection model of the claim
Subject to enclosing.
Claims (7)
1. a kind of flexible piezoelectric sensors, which is characterized in that the flexible piezoelectric sensors include at least one piezoelectric device and
Flexible material, the complaint material portion or is completely covered at least one described piezoelectric device.
2. flexible piezoelectric sensors according to claim 1, which is characterized in that when the piezoelectric transducer includes multiple pressures
When electrical part, the multiple piezoelectric device is according to specified array distribution in the flexible material.
3. flexible piezoelectric sensors according to claim 2, it is characterised in that：The flexible material and each piezoelectric device
Surface all have complete contact surface.
4. flexible piezoelectric sensors according to claim 3, it is characterised in that：The flexible material can be according to acting on
Deformation occurs for the acting surface of external force on the flexible material.
5. flexible piezoelectric sensors according to claim 4, it is characterised in that：The flexible material has good bullet
Property, after the pressure acted on the flexible material disappears, the flexible material can restore to original state.
6. a kind of production method of flexible piezoelectric sensors, which is characterized in that the production method of the flexible piezoelectric sensors is used
The flexible piezoelectric sensors described in production any one of claims 1 to 5, the production method packet of the flexible piezoelectric sensors
Include step：
S10：Piezoelectric device array is placed in glassware as needed；
S12：The mixed liquor of PDMS and curing agent is poured into the glassware；
S14：The glassware for filling the piezoelectric device array and the mixed liquor is put into vacuum evacuation device and is removed
Bubble in the mixed liquor；
S16：The glassware is put into oven after 1-2 hour and is heating and curing with 120 DEG C of temperature；
S18：The solidification PDMS for being bonded with the piezoelectric device array is removed from the glassware after heating a hour.
7. a kind of production method of flexible piezoelectric sensors, which is characterized in that the production method of the flexible piezoelectric sensors is used
The flexible piezoelectric sensors described in production any one of claims 1 to 5, the production method packet of the flexible piezoelectric sensors
Include step：
S20：Piezoelectric device array is fixed in fixed link as needed, and the external wire of the piezoelectric device array is put in
In the fixed link；
S22：The fixed link for being fixed with the piezoelectric device array is put into mold；
S24：The mixed liquor of PDMS and curing agent is poured into the mold；
S26：The mold for filling the piezoelectric device array and the mixed liquor is put into vacuum evacuation device described in removal
Bubble in mixed liquor；
S28：The mold is put into oven after 1-2 hour and is heating and curing with 120 DEG C of temperature；
S30：The solidification PDMS for being bonded with the piezoelectric device array is removed from the glassware after heating a hour.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810920836.1A CN108827503A (en) | 2018-08-14 | 2018-08-14 | Flexible piezoelectric sensors |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810920836.1A CN108827503A (en) | 2018-08-14 | 2018-08-14 | Flexible piezoelectric sensors |
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| Publication Number | Publication Date |
|---|---|
| CN108827503A true CN108827503A (en) | 2018-11-16 |
Family
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| CN201810920836.1A Pending CN108827503A (en) | 2018-08-14 | 2018-08-14 | Flexible piezoelectric sensors |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101059380A (en) * | 2007-02-16 | 2007-10-24 | 中国科学院上海微系统与信息技术研究所 | Flexible capacitance type touch sensor production method |
| CN105300572A (en) * | 2015-11-20 | 2016-02-03 | 浙江大学 | Piezoelectric-type flexible three-dimensional tactile sensing array and preparation method of same |
| CN106025060A (en) * | 2016-07-15 | 2016-10-12 | 北京大学 | Wavy piezoelectric composite device and preparation method and application thereof |
| CN106805954A (en) * | 2017-02-28 | 2017-06-09 | 华中科技大学 | A kind of Wearable pliable pressure sensor and preparation method thereof |
| CN106946221A (en) * | 2017-03-20 | 2017-07-14 | 中北大学 | Pliable pressure sensor production method based on " V " type groove array electrode |
-
2018
- 2018-08-14 CN CN201810920836.1A patent/CN108827503A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101059380A (en) * | 2007-02-16 | 2007-10-24 | 中国科学院上海微系统与信息技术研究所 | Flexible capacitance type touch sensor production method |
| CN105300572A (en) * | 2015-11-20 | 2016-02-03 | 浙江大学 | Piezoelectric-type flexible three-dimensional tactile sensing array and preparation method of same |
| CN106025060A (en) * | 2016-07-15 | 2016-10-12 | 北京大学 | Wavy piezoelectric composite device and preparation method and application thereof |
| CN106805954A (en) * | 2017-02-28 | 2017-06-09 | 华中科技大学 | A kind of Wearable pliable pressure sensor and preparation method thereof |
| CN106946221A (en) * | 2017-03-20 | 2017-07-14 | 中北大学 | Pliable pressure sensor production method based on " V " type groove array electrode |
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Application publication date: 20181116 |
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