CN108807187B - Printing method - Google Patents
Printing method Download PDFInfo
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- CN108807187B CN108807187B CN201810394147.1A CN201810394147A CN108807187B CN 108807187 B CN108807187 B CN 108807187B CN 201810394147 A CN201810394147 A CN 201810394147A CN 108807187 B CN108807187 B CN 108807187B
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- droplets
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- 238000000034 method Methods 0.000 title claims abstract description 43
- 239000000758 substrate Substances 0.000 claims abstract description 46
- 239000007788 liquid Substances 0.000 description 6
- 239000000470 constituent Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000014509 gene expression Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
- H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4821—Flat leads, e.g. lead frames with or without insulating supports
- H01L21/4825—Connection or disconnection of other leads to or from flat leads, e.g. wires, bumps, other flat leads
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/06—Silver salts
- G03F7/063—Additives or means to improve the lithographic properties; Processing solutions characterised by such additives; Treatment after development or transfer, e.g. finishing, washing; Correction or deletion fluids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
- H01L21/02288—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating printing, e.g. ink-jet printing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4821—Flat leads, e.g. lead frames with or without insulating supports
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0002—Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Ink Jet (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
According to the printing method performed on one substrate including at least two adjacent printing areas having different sizes with a printing apparatus including at least two droplet supply members, the number of respective droplets for each of the printing areas having different sizes can be adjusted with reference to the largest amount of unit droplets among the amounts of unit droplets for each of the printing areas having different sizes. The adjusted number of droplets for each of the print regions having different sizes may be added to confirm the number of all droplets. The number of droplets supplied from each of the droplet-supplying members can be adjusted by dividing the number of all droplets by the number of the droplet-supplying members so as to be substantially the same. The same number of droplets may be supplied from the droplet supply member to respective printing regions having different sizes.
Description
The present application has priority to korean patent application No. 2017-0056017, which was filed 5/2/2017 in the korean patent office.
Technical Field
The present invention relates to a printing method, and more particularly, to a printing method capable of forming a desired pattern on a substrate including at least two adjacent printing areas of different sizes using a printing apparatus including at least two droplet supply members.
Background
Display devices, such as flat panel display devices, can generally be made from one substrate that includes at least two adjacent printed areas of different sizes. For example, one substrate may include a print area for a 65 inch sized plate and another print area for a 32 inch sized plate.
However, since the amount of droplets supplied from the printing device is different in order to form a pattern on a plurality of print areas having substantially different sizes, in the case where one substrate includes these plurality of print areas having different sizes, a desired pattern may not be simultaneously formed on the plurality of print areas of the substrate.
Disclosure of Invention
Technical problem
The invention aims to provide a printing method which can form a required pattern on a substrate by only once executing the printing method on the substrate comprising at least two adjacent printing areas with different sizes.
Technical scheme
According to an exemplary embodiment of the present invention, there is provided a printing method performed with a printing apparatus including at least two droplet supply members on one substrate including adjacent at least two printing areas having substantially different sizes. According to the printing method, the number of the respective droplets for each of the printing regions having substantially different sizes may be adjusted with reference to the largest amount of the unit droplets among the amounts of the unit droplets for each of the printing regions having different sizes. The adjusted number of droplets for each of the print regions having substantially different sizes may be added to confirm the number of all droplets. The number of droplets supplied from each of the droplet-supplying members may be made substantially the same by adjusting the number of all the droplets divided by the number of the droplet-supplying members. The same number of droplets may be supplied from the droplet supply member to respective printing regions having substantially different sizes.
According to example embodiments, each of the printing regions having substantially different sizes may substantially correspond to a plate having substantially different sizes of a display device manufactured using the substrate.
According to an exemplary embodiment, the amount of each of the unit droplets may be obtained by dividing the number of the corresponding droplets for each of the printing regions having substantially different sizes by the amount of the droplets for each of the printing regions having different sizes, respectively.
According to an exemplary embodiment, the step of adjusting the number of the respective droplets for each of the printing regions having substantially different sizes based on the maximum amount of the unit droplet may include the step of adjusting the number of the droplets of the printing region supplied with an amount of the unit droplet smaller than the maximum amount of the unit droplet.
According to an example embodiment, the step of adjusting the number of the droplets of the printing area may include a step of the droplet supply part not supplying the droplets to the printing area.
According to example embodiments, the step of the droplet supply part not supplying the droplets to the printing region may be performed along a diagonal direction on the substrate.
According to example embodiments, the at least two droplet supply parts may be adjacent to each other in parallel, and a pattern may be formed on the substrate in a scanning manner.
Technical effects
According to the printing method of the exemplary embodiment of the present invention, the number of the droplets supplied to the different printing areas of the substrate may be adjusted according to the amount of the unit droplet, and each of the droplet supply parts may supply substantially the same number of droplets to each of the printing areas of the substrate by dividing the number of all the droplets by the number of the droplet supply parts of the printing device. Therefore, the required pattern can be formed on the substrate by only performing one printing process on the substrate including at least two printing areas with different sizes. Such a printing method can be effectively applied to a printing process for manufacturing a display device such as a flat panel display device or an organic light emitting display device.
However, the effects of the present invention are not limited to the above-described effects, and various expansions may be made without departing from the spirit and scope of the present invention.
Drawings
Fig. 1 is a schematic plan view illustrating a printing apparatus for performing a printing method of an exemplary embodiment of the present invention and a substrate to which the printing method is applied;
fig. 2 is a flowchart illustrating a printing method according to an exemplary embodiment of the present invention.
Detailed Description
Illustrative embodiments of the invention are described below. The present invention may be variously modified and may have various forms, and the exemplary embodiments are specifically described in the specification. However, the present invention is not limited to the specific forms disclosed, and the present invention should be understood to include all modifications, equivalents, and alternatives falling within the spirit and scope of the present invention. In the description of the drawings, like components are denoted by like reference numerals. The terms first, second, etc. may be used to describe various elements, but the elements are not limited by the terms. The terms are only used to distinguish one constituent element from other constituent elements. The terminology used in the description presented herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. Singular expressions also include plural expressions without other explicit indications in the specification. The terms "comprises" or "comprising" or the like in the present application should be interpreted as specifying the presence of the stated features, integers, steps, acts, elements, components, or groups thereof, but should not be interpreted as precluding the presence of one or more other features, integers, steps, acts, elements, components, or groups thereof.
Unless otherwise defined, all terms used herein including technical and scientific terms have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms defined in commonly used dictionaries should be interpreted as having a meaning that is consistent with the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
A printing method according to an exemplary embodiment of the present invention will be described below with reference to the drawings. The same or similar constituent elements are denoted by the same or similar reference numerals in the respective drawings.
Fig. 1 is a schematic plan view illustrating a printing apparatus for performing a printing method according to an exemplary embodiment of the present invention and a substrate to which the printing method is applied.
Referring to fig. 1, a substrate 200, which can be an object for performing the printing method of the exemplary embodiment, may have at least two printing regions 21, 23. In this case, the at least two printing areas 21, 23 may be arranged adjacent to each other. Also, the at least two printing areas 21, 23 may have sizes substantially different from each other. For example, one print area 21 may have a size of about 65 inches and another print area 23 may have a size of about 32 inches. Wherein two relatively small print areas 23 may correspond to one relatively large print area 21. Also, the printing regions 21, 23 of the substrate 200 having different sizes may substantially correspond to different sized plates of a display device, such as a flat panel display device or an organic electroluminescent display device, which can be made with the substrate 200.
In the printing method of the exemplary embodiment, a printing process may be performed once for at least two printing regions 21, 23 of the substrate 200, so that a desired pattern may be formed on the substrate 200. To accomplish such a printing process, the printing apparatus 100 may include at least two droplet supply units 11. In this case, the at least two droplet supply members 11 may be disposed adjacent to each other. For example, the droplet supply section 11 of the printing apparatus 100 may be configured to substantially correspond to the printing regions 21, 23 of the substrate 200, respectively. The printing device 100 may form a desired pattern on the printing areas 21, 23 of the substrate 200, for example, using a scanning method.
According to an exemplary embodiment, the printing apparatus 100 may have a structure in which eight droplet supply members, denoted by H1 through H8, are substantially arranged in parallel to correspond to the printing regions 21, 23 of the substrate 200. In this case, the droplet supply means represented by H1 to H5 may supply droplets onto a relatively large print area 21 having a size of about 65 inches, the droplet supply means represented by H6 may supply droplets onto a relatively large print area 21 having a size of about 65 inches and a relatively small print area 23 having a size of about 32 inches except for scribe lines (scriber lines) 25, and the droplet supply means represented by H7 and H8 may supply droplets onto a relatively small print area 23 having a size of about 32 inches.
As described below, the amounts of the respective droplets supplied from the droplet-supplying parts 11, which are denoted by H1 to H8, respectively, can be adjusted, and thus one printing process can be performed on one substrate 200 in which at least two printing regions 21, 23 are adjacently disposed to form a desired pattern on the substrate 200.
The droplet supply unit 11 of the printing apparatus 100 may substantially correspond to an inkjet head of an existing printing apparatus. Although not shown, in an exemplary embodiment, the printing apparatus 100 may further include a base, a substrate supporting member, a gantry (gantry), a gantry transfer unit, a droplet supply member transfer unit, a droplet measurement unit capable of measuring a supply amount of the corresponding droplet, and the like. Wherein the substrate supporting part may support the substrate 200 during the printing process, and the arch may support the droplet supply part 11. The arch transfer unit may move the arch forward and backward in the printing process, and the droplet supply unit transfer unit may move the droplet supply unit 11. In particular, the droplet measuring unit may measure the supply amount of the respective droplets supplied onto the substrate 200 by the droplet supply unit 11 at the time of the printing process.
A plurality of nozzles (not shown) capable of ejecting the liquid droplets onto the substrate 200 may be disposed on a bottom surface of each of the liquid droplet supply parts 11. For example, each of the droplet supply parts 11 may include about 128 nozzles or about 256 nozzles on the bottom surface thereof. In this case, the nozzles may be substantially arranged in a line at predetermined intervals. Each of the nozzles may eject the droplet in nanograms (ng) or picoliters (pl) onto the substrate 200.
Piezoelectric elements may be disposed on the nozzles of the droplet supply unit 11. Wherein the number of the piezoelectric elements may be substantially equal to the number of the nozzles. The liquid droplets may be supplied onto the substrate 200 through the nozzle based on the action of such a piezoelectric element. The amounts of the liquid droplets ejected from the nozzles of the liquid droplet supply section 11 can be adjusted independently by controlling the voltages applied to the piezoelectric elements, respectively.
A printing method using a printing apparatus including at least two droplet supply members, which is performed on one substrate having adjacent at least two printing areas of different sizes, is described below.
Fig. 2 is a flowchart illustrating a printing method according to an exemplary embodiment of the present invention.
Referring to fig. 2, the respective numbers of droplets are adjusted for respective printing areas having different sizes in step S31. In this case, the number of the respective droplets may be adjusted based on the number of the largest droplets among the numbers of droplets supplied by the droplet supply means to the respective printing regions having different sizes.
Example embodiments may separately identify the number of each respective drop for each of the print regions having different sizes when adjusting the number of the respective drops. For example, the number of corresponding drops for a relatively large print area of about 65 inches in size and the number of corresponding drops for a relatively small print area of about 32 inches in size may be identified, respectively. Here, the number of corresponding drops for three of the relatively large print areas of about 65 inches in size and the number of corresponding drops for six of the relatively small print areas of about 32 inches in size may be substantially the same. However, the number of their respective drops may vary within the tolerance of the printing method.
Also, the amount of each corresponding droplet for each of the printing areas having different sizes can be confirmed. For example, the amount of corresponding drops for a relatively large print area of about 65 inches in size and the amount of corresponding drops for a relatively small print area of about 32 inches in size may be separately identified. In this case, the respective amounts of drops for three of the relatively large print areas having a size of about 65 inches and for six of the relatively small print areas having a size of about 32 inches may be substantially the same. However, the amounts of their respective droplets may vary within the tolerance of the printing method.
According to an exemplary embodiment, the amount of each of the respective droplets for each of the printing regions having different sizes may be divided by the number of each of the respective droplets for each of the printing regions having different sizes, respectively. Therefore, the amount of liquid droplets supplied to the unit cell having each of the printing areas of different sizes can be obtained. As a result, the number of the respective droplets for the printing regions having different sizes can be adjusted based on the largest unit droplet amount among the unit droplet amounts for the unit cells having printing regions having different sizes. For example, in the case where the amount of the unit droplet for the relatively large printing area having the size of about 65 inches is a first unit droplet amount, and the amount of the unit droplet for the relatively small printing area having the size of about 32 inches is a second unit droplet amount, when the second unit droplet amount is greater than the first unit droplet amount, the number of the corresponding droplets of the relatively large printing area having the size of about 65 inches may be adjusted based on the second unit droplet amount. When the number of droplets that are not adjusted according to the amount of the second unit droplets is supplied to the relatively large printing area having the size of 65 inches, a defective process may occur due to an excessive amount of supplied droplets. According to example embodiments, the number of the respective droplets adjusted according to the amount of the second unit droplets can be supplied to the relatively large printing area having the size of 65 inches, and thus engineering failure of the relatively large printing area can be prevented.
As described above, in the case where the number of the respective droplets of each of the printing areas having different sizes is adjusted based on the maximum amount of the unit droplet, the respective droplets can be appropriately supplied to each of the printing areas having different sizes.
According to an exemplary embodiment, the number of the respective droplets having the printing areas of different sizes may be adjusted by causing a droplet supply part of the printing apparatus not to supply the droplets to the printing areas for a predetermined time. In this case, a failure in the process may occur when the droplet is not supplied to a part of the printing region for a predetermined time or more by the droplet supply means. Therefore, according to some embodiments, the droplet supply member may not supply the droplets onto the printing region along the diagonal direction on the substrate.
Referring again to fig. 2, in step S33, the numbers of droplets adjusted as above for the print areas having different sizes may all be added up to confirm the number of all droplets. Wherein the number of all droplets may be substantially equal to the sum of the number of droplets adjusted according to the amount of the second unit droplet. For example, the number of all of the droplets may be substantially equal to the sum of all of the respective droplets for three relatively large print areas of about 65 inches in size and all of the respective droplets for six relatively small print areas of about 32 inches in size, adjusted according to the amount of the second unit droplet. Thus, the number of all of the drops can be reduced by turning down the number of drops for three of the relatively large print areas having a size of about 65 inches.
In step S35, the number of droplets supplied from each of the droplet-supplying members may be adjusted so as to be substantially the same by dividing the number of all droplets by the number of droplet-supplying members. That is, it is possible to adjust so that the number of droplets supplied from one droplet-supplying member is substantially the same as the number of droplets supplied from another droplet-supplying member. That is, one droplet supply member may be caused to supply droplets of substantially the same number as the number of droplets supplied from another droplet supply member by dividing the number of all droplets by the number of droplet supply members. For example, referring to fig. 1, the droplet-supplying members denoted by H1 to H8 can be made to supply substantially the same number of droplets by dividing the number of all droplets by the number of eight droplet-supplying members.
In step S37, the droplet supply means may supply substantially the same number of droplets to the respective printing regions, respectively. That is, the at least two droplet supply members adjusted to supply substantially the same number of droplets can supply droplets to the printing areas having different sizes, respectively. For example, referring to fig. 1, the droplet supply parts, denoted by H1 to H8, may supply substantially the same number of droplets onto the printing regions 21, 23 of the substrate 200 in a scanning manner, respectively.
According to exemplary embodiments of the present invention, the number of droplets supplied to different printing regions of the substrate may be adjusted according to the amount of the unit droplet, and each droplet supply part may be enabled to supply a substantially equal number of droplets to the printing regions of the substrate by dividing the number of all droplets by the number of droplet supply parts of the printing device. Therefore, a desired pattern can be formed on one substrate including at least two printing areas of different sizes by performing a printing process only once on the substrate. Such a printing method can be effectively applied to a printing process for manufacturing a display device such as a flat panel display device, an organic light emitting display device, or the like.
The foregoing has been described with reference to exemplary embodiments of the invention, but it will be understood by those of ordinary skill in the art that: the present invention may be modified and changed in various ways without departing from the spirit and scope of the present invention described in the claims.
Claims (6)
1. A printing method performed on one substrate including at least two adjacent printing areas having different sizes by a printing apparatus including at least two droplet supply members, comprising:
a step of adjusting the number of respective droplets for each of the printing areas having different sizes, with reference to the amount of the largest unit droplet among the amounts of the unit droplets for each of the printing areas having different sizes;
a step of adding the adjusted numbers of the droplets for the respective printing areas having different sizes to confirm the numbers of all the droplets;
a step of adjusting so that the number of droplets supplied from each of the droplet-supplying members is the same by dividing the number of all droplets by the number of the droplet-supplying members; and
a step of supplying the same number of the droplets from the droplet supply member to respective printing areas having different sizes,
the step of adjusting the number of the respective droplets for each of the printing areas having different sizes based on the maximum amount of the unit droplets includes:
a step of adjusting the number of droplets of the printing area to which an amount of unit droplets smaller than the maximum amount of unit droplets is supplied.
2. A printing method according to claim 1, characterized in that:
each of the printing regions having different sizes corresponds to a plate having different sizes of a display device manufactured using the substrate.
3. A printing method according to claim 1, characterized in that:
the amount of each of the unit droplets is obtained by dividing the number of the corresponding droplets for each of the printing areas having different sizes by the amount of the droplets for each of the printing areas having different sizes, respectively.
4. The printing method of claim 1, wherein the step of adjusting the number of drops of the print zone comprises:
a step in which the droplet supply member does not supply the droplets to the printing region.
5. The printing method according to claim 4, wherein:
the step of the droplet supply member not supplying the droplets to the printing area is performed along a diagonal direction on the substrate.
6. A printing method according to claim 1, characterized in that:
the at least two droplet supply members are juxtaposed adjacent to each other to form a pattern on the substrate in a scanning manner.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020170056017A KR101960273B1 (en) | 2017-05-02 | 2017-05-02 | Printing Method |
| KR10-2017-0056017 | 2017-05-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108807187A CN108807187A (en) | 2018-11-13 |
| CN108807187B true CN108807187B (en) | 2021-12-28 |
Family
ID=64094028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810394147.1A Active CN108807187B (en) | 2017-05-02 | 2018-04-27 | Printing method |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR101960273B1 (en) |
| CN (1) | CN108807187B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000177153A (en) * | 1998-12-17 | 2000-06-27 | Canon Inc | Ink jet printing method |
| JP2007029830A (en) * | 2005-07-25 | 2007-02-08 | Toppan Printing Co Ltd | Ink-jet coating method and apparatus |
| JP2010224248A (en) * | 2009-03-24 | 2010-10-07 | Toppan Printing Co Ltd | Method and device for generating discharge pattern, color filter, and organic electroluminescence element |
| CN104128292A (en) * | 2013-04-30 | 2014-11-05 | 细美事有限公司 | Substrate processing apparatus and substrate processing method |
| CN104827770A (en) * | 2014-02-07 | 2015-08-12 | 株式会社村田制作所 | Printing method and printing device |
| CN106024589A (en) * | 2016-07-22 | 2016-10-12 | 华南理工大学 | Inkjet printing preparation method of thin film, and preparation method of thin film transistor |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140130003A (en) * | 2013-04-30 | 2014-11-07 | 세메스 주식회사 | Apparatus and method for treating substrate |
-
2017
- 2017-05-02 KR KR1020170056017A patent/KR101960273B1/en active IP Right Grant
-
2018
- 2018-04-27 CN CN201810394147.1A patent/CN108807187B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000177153A (en) * | 1998-12-17 | 2000-06-27 | Canon Inc | Ink jet printing method |
| JP2007029830A (en) * | 2005-07-25 | 2007-02-08 | Toppan Printing Co Ltd | Ink-jet coating method and apparatus |
| JP2010224248A (en) * | 2009-03-24 | 2010-10-07 | Toppan Printing Co Ltd | Method and device for generating discharge pattern, color filter, and organic electroluminescence element |
| CN104128292A (en) * | 2013-04-30 | 2014-11-05 | 细美事有限公司 | Substrate processing apparatus and substrate processing method |
| CN104827770A (en) * | 2014-02-07 | 2015-08-12 | 株式会社村田制作所 | Printing method and printing device |
| CN106024589A (en) * | 2016-07-22 | 2016-10-12 | 华南理工大学 | Inkjet printing preparation method of thin film, and preparation method of thin film transistor |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101960273B1 (en) | 2019-03-20 |
| KR20180122063A (en) | 2018-11-12 |
| CN108807187A (en) | 2018-11-13 |
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