CN108801158A - A kind of grating scale caliberating device and scaling method - Google Patents
A kind of grating scale caliberating device and scaling method Download PDFInfo
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- CN108801158A CN108801158A CN201810939618.2A CN201810939618A CN108801158A CN 108801158 A CN108801158 A CN 108801158A CN 201810939618 A CN201810939618 A CN 201810939618A CN 108801158 A CN108801158 A CN 108801158A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
Abstract
The present invention provides a kind of grating scale caliberating device, including sports platform and measuring device, sports platform are in closed microenvironment region, and measuring device is set on sports platform；Measuring device includes plummer；4 read heads are provided on plummer, each read head is respectively at the apex of a quadrangle；A plane grating is provided with above each read head；It is each provided with second speculum on the outside of the opposite two sides of plummer, the 4th speculum is extended to form by the second plane, one of other two opposite sides of plummer are provided with the first speculum on the outside of side；Measuring device further includes the first interferometer, the second interferometer and third interferometer, and the second interferometer is arranged with third interferometer and the second speculum homonymy, and the first interferometer and the first speculum homonymy are arranged；Measuring device further includes two third speculums, and a part for the light that the second interferometer is sent out with third interferometer is reflected into third speculum through the 4th speculum.
Description
Technical field
The invention belongs to detection technique fields, and in particular to a kind of grating scale caliberating device and scaling method.
Background technology
Photoetching technique is that the circuit pattern on mask is projected the photoetching coated on crystal column surface using the method for exposure
On glue, occur chemically to become after photosensitive photoresist is exposed, then by techniques such as development, etching, doping, finally exist
Silicon-based electronic circuits are formed on wafer.Litho machine is the core equipment for producing semiconductor chip, during semiconductor chip manufactures
The mask stage of litho machine, the positioning accuracy of work stage directly affect the line width of semiconductor chip processing.Photoetching resolution, alignment essence
Degree and yield are three leading indicators for weighing litho machine performance, in these three indexs, except photoetching resolution is and object lens system
Mutually outside the Pass, other two is directly related with work stage and mask platform for system.Work stage is to carry the six degree of freedom precision fortune of wafer
Dynamic platform, in step-by-step scanning photo-etching device, work stage will complete the pose adjustment of Ultra-precision positioning and ultraprecise to meet alignment
The requirement of system and leveling and focusing system.Therefore, need high-precision position measuring system to ensure mask stage in litho machine
With the positioning accuracy of work stage.
Work stage position measuring system is one of important subsystem of photo-etching machine work-piece platform, it is work stage SERVO CONTROL system
System provides work stage position feedback information, and closed loop is consequently formed, so measurement accuracy is also the important of influence alignment precision
Factor.Accurate location information is the prerequisite of the processes such as work stage motion positions, leveling and focusing and alignment, in litho machine
In the research and development of workpiece table system, work stage Six-freedom super-precision measuring system is a key technology.Currently, meeting work stage
The measuring system of six-degree of freedom position measurement demand has laser interferometer measurement system and plane grating ruler measuring system.
Laser interferometer is to apply a kind of very extensive accurate displacement measuring system at present, and it is dry can be divided into single-frequency laser
Interferometer and two-frequency laser interferometer.The measurement resolution of laser interferometer can reach nanometer scale, and measurement range can reach
Tens of rice are a kind of suitable fine measuring instruments for measuring big stroke, high precision displacement, and have been obtained widely in litho machine
Using.Laser interferometer is using optical maser wavelength as displacement measurement benchmark, when the wavelength of lasing light emitter and the refractive index of air are because of environment
In temperature, humidity etc. when changing, the measurement accuracy of laser interferometer can be by serious influence.Therefore, laser interference
Instrument has very strict requirements to measuring environment when in use, cannot meet 28 nanometers to 14 nano-photoetching machine work stages
Location requirement.
Plane grating ruler measuring system is another accurate displacement measuring system in addition to laser interferometer.Plane grating ruler is surveyed
Measuring basis of the amount system using the pitch of grating as displacement eliminates optical source wavelength variation to displacement measurement from principle
It influences.When using the material manufacture grating of zero thermal expansion coefficient, the temperature change in environment will not cause the variation of grating pitch,
Therefore requirement of the plane grating ruler measuring system to measuring environment is loosely many compared to laser interferometer.Plane grating ruler measures system
The resolving power of system can reach nanometer, sub-nanometer magnitude, and measurement range depends on the size of grating, generally can reach tens of and arrive
Millimeters up to a hundred.Compared to laser interferometer, plane grating ruler simple in measurement system structure, system bulk are small, are more suitable for applying
This body structure is with regard in more complicated manufacturing equipment or measuring instrument.And plane grating ruler can have read head peace during the installation process
Fill error, grating installation error, grating foozle.
Invention content
In view of the foregoing deficiencies of prior art, the purpose of the present invention is to provide a kind of grating scale caliberating device and marks
Determine method.
In order to achieve the above objects and other related objects, the present invention provides a kind of grating scale caliberating device, the caliberating device
Including sports platform 7 and measuring device, the sports platform is in closed microenvironment region 10, and the measuring device is set to fortune
On dynamic platform, moved with sports platform；
The measuring device includes the plummer 907 with the first plane and the second plane, first plane and second
Plane is mutually parallel；4 read heads are provided in first plane, each read head is respectively at the vertex of a quadrangle
Place；A plane grating 908 is provided with above each read head；
Second speculum 905, second reflection are each provided on the outside of the opposite two sides of the plummer
Mirror is set to the upper region of side where second speculum, and the is extended to form along to second plane from the upper regional edge
The angle of four speculums 905, the 4th speculum and second speculum is more than 90 °；
One of other two opposite sides of the plummer are provided with the first speculum 913 on the outside of side；
The measuring device further includes the first interferometer 901, the second interferometer 903 and third interferometer 902, and described second
Interferometer is arranged with third interferometer and the second speculum homonymy, and first interferometer and the first speculum homonymy are arranged；
The measuring device further includes two third speculums, one of the light that the second interferometer is sent out with third interferometer
The 4th speculum of lease making is reflected into third speculum.
Preferably, which further includes frame 8 and platform 3, and the frame is set on the platform, the frame
It is arranged around the detection device；The frame is in the microenvironment region 10, and the plane grating is fixed on the frame
On frame.
Preferably, 4 plane gratings are in same plane.
Preferably, the quadrangle is rectangular or square.
Preferably, two adjacent plane gratings are symmetrical arranged.
Preferably, it mutually hangs down close to the line of the line of two plane gratings of the second interferometer and the two third speculums
Directly.
Preferably, close to the vertical of the line that the line of two plane gratings of the second interferometer is the two third speculums
Bisector.
In order to achieve the above objects and other related objects, the present invention also provides a kind of scaling methods of caliberating device, including
Following steps：
Step 1, measuring route is set in the stroke range of sports platform, chooses measurement point at certain intervals on path；
Step 2, the count value for measuring read head is read in the measurement point of selection along the path of planning, obtains each measure
The displacement of read head；
Step 3, by the displacement movement platform position of wherein 3 read heads,
P=K*S3
Wherein, P is sports platform position, and K is the coefficient matrix of sports platform displacement, S3For the transposed matrix of 3 read heads；
Step 4, the displacement of the 4th read head is calculated by sports platform position P,
S4calc=K-1*P
Wherein, S4calcIndicate the displacement of the 4th read head calculated；
Step 5, it is poor the displacement of the 4th read head of calculating and measured displacements to be made, and obtains the shift differences of read head 4；
Ds4=S4calc-S4act
Wherein, S4actIndicate the actual displacement of the 4th measurement read head；
Step 6, using shift differences fitting and X, Y-direction position related coefficient
Ds4=a*X+b*Y+C
Step 7, grid is planned in stroke range, calculates the displacement surface type of the 4th read head at grid point locations,
S4new=a*Xm+b*Ym+C
Wherein, S4newIndicate the displacement surface type of the 4th read head calculated, Xm、YmRespectively choose the X, Y coordinates of mesh point.
As described above, a kind of grating scale caliberating device of the present invention, has the advantages that：
The position that the present invention can be directly used for work stage measures, for the mark of this layout designs optical grating ruler measurement system
Constant current journey is applied to more convenient in litho machine with scaling method.
Description of the drawings
Fig. 1 is grating scale caliberating device schematic diagram；
Fig. 2 is that optical grating ruler measurement system is laid out with interferometer measuring system；
Fig. 3 is optical grating ruler measurement system and interferometer measuring system X direction views；
Fig. 4 is optical grating ruler measurement system and interferometer measuring system Y-direction view；
Fig. 5 is laser interferometer measurement principle；
Fig. 6 be grating along X to the change schematic diagram of laser frequency when moving；
Fig. 7 is the change schematic diagram of laser frequency when grating is moved along Z-direction；
Fig. 8 is that schematic diagram is arranged in measuring route；
Specific implementation mode
Illustrate that embodiments of the present invention, those skilled in the art can be by this explanations by particular specific embodiment below
Content disclosed by book understands other advantages and effect of the present invention easily.
It please refers to Fig.1 to Fig. 8.It should be clear that structure, ratio, size etc. depicted in this specification institute accompanying drawings, only to
Coordinate the revealed content of specification, so that those skilled in the art understands and reads, being not limited to the present invention can be real
The qualifications applied, therefore do not have technical essential meaning, the tune of the modification of any structure, the change of proportionate relationship or size
It is whole, in the case where not influencing the effect of present invention can be generated and the purpose that can reach, should all still fall in disclosed skill
Art content obtains in the range of capable of covering.Meanwhile in this specification it is cited as "upper", "lower", "left", "right", " centre " and
The term of " one " etc. is merely convenient to being illustrated for narration, rather than to limit the scope of the invention, relativeness
It is altered or modified, in the case where changing technology contents without essence, when being also considered as the enforceable scope of the present invention.
First laser interferometer measurement principle and plane grating ruler measuring principle are carried out describing in detail to the present invention
It introduces.
Laser interferometer measurement principle
As shown in figure 5, the light source of two-frequency laser interferometer is in axial magnetic field, according to Zeemen effect, direction will produce
Opposite left circularly polarized light and right-circularly polarized light, amplitude is equal, but frequency is different, and frequency is respectively f1 and f2.Polarization
Light is separated into two beams after spectroscope I in a points, wherein a branch of pass through analyzer I beat frequencies, becomes the light that frequency is f2-f1, makees
It is received by photodetector unit for reference light.Another light beam continues to move ahead, and two beams are separated into again at the b of polarization spectroscope II,
Wherein a branch of to become the light that frequency is f1 after polarizer reflective, the total reflection of Shu Guangjing fixed prisms I returns to polarization spectro
At the c of mirror II；Another beam becomes f2 by the light frequency of polarization spectroscope II, injects the mobile prism II connected firmly with sports platform,
When sports platform occurs mobile, according to Doppler effect, the light frequency returned from prismatic reflection becomes f2 ± Δ f, the light beam and frequency
Rate is that the another light beam of f1 converges at spectroscopical c, and the light after converging passes through the beat frequency of analyzer II, and it is f2- to become frequency
The measurement light of f1 ± Δs f.Reference light and measurement light pass through the processing of photoelectric conversion unit and laser interferometer numbered card, you can with
Δ f caused by the speed v by sports platform is calculated, movement velocity v and displacement can be found out according to laser interferometer principle formula
ΔL。
The fundamental formular of laser interferometer is：
Wherein, λ is optical maser wavelength, and N is and the relevant count values of Δ f.
Plane grating ruler measuring principle
As shown in fig. 6, frequency be f laser beam with θiAngle is incident to two-dimensional grating, the angle of diffraction of+1 order diffraction light
For θ+1, when grating along X to after moving Δ x, laser frequency becomes f+ Δs f.
By Doppler's frequency principle and optical grating diffraction equation it is found that the frequency variation of+1 order diffraction light can be expressed as：
Its phase change can be indicated with X to the relationship of displacement as follows：
Wherein：vxIndicate grating X to movement speed；P indicates screen periods.
After grating moves Δ z along Z-direction, as shown in Figure 7：
By Doppler's frequency principle it is found that the frequency variation of+1 order diffraction light can be expressed as：
Its phase change and the relationship of Z-direction displacement can indicate as follows：
Wherein：λ is optical maser wavelength；vzIndicate the movement speed of grating Z-direction.
As shown in Figure 1, the present invention provides a kind of grating scale caliberating device, installs and miss for the read head to grid ruler measuring system
The calibration of difference, grating installation error, grating foozle.
As shown in Figure 1, a kind of grating scale caliberating device, which includes sports platform 7 and measuring device, the movement
Platform is in closed microenvironment region 10, and the measuring device is set on sports platform, is moved with sports platform；
As shown in Fig. 2, the measuring device includes the plummer 907 with the first plane and the second plane, described first
Plane is mutually parallel with the second plane, and the first plane is located in the second plane.
In this present embodiment, the first plane of plummer is a square or rectangle plane, is set in first plane
4 read heads (i.e. read head I909, read head II910, read head III911 and read head IV912) are equipped with, each read head is respectively at
The apex of one quadrangle；A plane grating 908 is provided with above each read head；
Second speculum 905 is each provided on the outside of the opposite two sides of the plummer.Specific to this implementation
In example, one the second speculum of each side setting (i.e. Y-direction speculum) of plummer.Second speculum is set to this
The upper region of side where second speculum extends to form the 4th speculum from the upper regional edge edge to second plane
905, the 4th speculum (i.e. 45 ° of speculums of Z-direction) and the angle of second speculum are more than 90 °.
One of other two opposite sides of the plummer are provided with the first speculum 913 on the outside of side,
Specific in the present embodiment, the first speculum (i.e. X to speculum) is set in the leading flank of plummer.
The measuring device further includes the first interferometer 901, the second interferometer 903 and third interferometer 902, and described second
Interferometer (i.e. Y-direction is dry penetrates interferometer) is arranged with third interferometer (i.e. Z-direction is dry penetrates interferometer) and the second speculum homonymy, and described first
Interferometer (i.e. X penetrates interferometer to dry) is arranged with the first speculum homonymy；
The measuring device further includes two third speculums 904, the light that the second interferometer is sent out with third interferometer
A part is reflected into third speculum (i.e. Z-direction speculum) through the 4th speculum (45 ° of speculums of Z-direction).
Since in the present embodiment, 4 read heads are set on plummer, therefore, what the volume and quality of read head will be as possible
It is small.
In another embodiment, the platform is marble platform, and marble platform is set to ground by damping device 2
Upper 1.The sports platform is six-freedom motion platform, and the plummer in measuring device is connected with six-freedom motion platform.
Read head is mounted on plummer upper surface, and the plane mirror of interferometer is fixed on the side of plummer, and plummer is to measure
Object.Marble frame is placed on inside closed microenvironment region, microenvironment region by environmental control system provide gas bath or
Person's vacuum ring
Border.It is emphasized that the read head of grating scale is mounted on plummer, plummer is followed to move, laser signal
Input
Output with measuring signal is all made of the transmission of optical fiber 6.The input signal of interferometer is provided by interferometer laser 4,
Plane
The input signal of grating provides 5 by grating scale laser.
In another embodiment, which further includes frame 8 and platform 3, and the frame is set on the platform,
The frame is arranged around the detection device；The frame is in the microenvironment region 10, and the plane grating is fixed
In on the frame.The frame is marble frame, and plane grating is fixed on marble frame.
In another embodiment, 4 plane gratings are in same plane.
In another embodiment, the quadrangle is rectangular or square.
In another embodiment, two adjacent plane gratings are symmetrical arranged.
In another embodiment, close to the company of the line and the two third speculums of two plane gratings of the second interferometer
Line is mutually perpendicular to.
In another embodiment, the line close to two plane gratings of the second interferometer is the company of the two third speculums
The perpendicular bisector of line.
Optical grating ruler measurement system and the layout of interferometer measuring system as shown in Fig. 2, X to visual angle as shown in figure 3, Y-direction regards
Angle is as shown in Figure 4.
Wherein, X is directed toward from plummer and is defined as X-axis to the direction of interferometer, X is in the positive direction of X-axis to interferometer；By
The direction that plummer is directed toward Y-direction interferometer is defined as Y-axis, and Y-direction interferometer is in the negative direction of Y-axis, and Z-direction interferometer is in Y-axis
Positive direction；The direction that plane grating is directed toward by read head is defined as Z axis, and plane grating is in the positive direction of Z axis.
The layout of plane grating measures read head (hereinafter referred to as shown in Fig. 2, installing 4 two-dimensional grating rulers on sports platform
" read head "), it is symmetrically arranged in the x, y direction, wherein the first read head, the 4th read head are mounted on X-axis forward direction, the second read head and third
Read head is mounted on X-axis negative sense.Each read head corresponds to one block of two-dimensional grating, measures the opposite position between sports platform and plane grating
It moves.
Arrange that 3 measure axis X1, X2, X3,3 degree of freedom X, Rz, Ry for measuring sports platform, in Y-axis in X-axis forward direction
Negative sense arranges that 4 measure axis Y1, Y2, Y3, Z1, and for measuring sports platform 4 degree of freedom Y, Rz, Z, Rx, each measurement axis can
The laser interferometer for regarding an autonomous working as, can measure the displacement of the axial direction, and the combination of two measurement axis can measure
Relevant angular displacement.2 measurement axis are arranged in Y-axis forward direction, and Z2, Z2r measure sports platform Z-direction.In addition, under this layout, it is right
The rotation Rz of sports platform and the measurement for tilting Rx are redundancies, are expressed as from X to the rotation Rz of the sports platform of interferometer measurement
Rzx is expressed as Rzy, by the rotation Rx of the sports platform of Y-direction interferometer measurement by the rotation Rz of the sports platform of Y-direction interferometer measurement
It is expressed as Rxy, Rxz is expressed as by the rotation Rx of the sports platform of Z-direction interferometer measurement.
The horizontal direction displacement of one tested grating of each read head offer and vertical deviation, i.e., arbitrary 3 read heads combination are
The six degree of freedom of sports platform can be calculated.
Under gas bath or vacuum environment, after interferometer measuring system carries out self-calibration using redundant measurement axis, Ke Yiti
For six free positions of accurate sports platform, the measurement error for demarcating grating scale measuring system.
The present invention is used to calibrate the inconsistency of read head measured value
Ideally, the sports platform six-degree of freedom position that arbitrary read head combination calculates should be identical, but due to light
The presence of grid, the installation error of read head and grating face type, there are deviations for the measured value of read head and actual displacement, lead to 3 read head groups
It closes and the sports platform position of 4 read heads combination calculating is inconsistent, the sports platform position that purpose of the present invention is to be calculated using the combination of 4 read heads
Calibrate the inconsistency of read head measured value.Specifically include following steps：
Step 1, it as shown in figure 8, measuring route is arranged in the stroke range of sports platform, is selected at certain intervals on path
Take measurement point；
Step 2, the count value for measuring read head is read in the measurement point of selection along the path of planning, obtains each measure
The displacement of read head；
Step 3, by the displacement movement platform position of wherein 3 read heads,
P=K*S3
Wherein, P is sports platform position, and K is the coefficient matrix of sports platform displacement, S3For the transposed matrix of 3 read heads.
Step 4, the displacement of the 4th read head is calculated by sports platform position P,
S4calc=K-1*P
Wherein, S4calcIndicate the displacement of the 4th read head calculated；
Step 5, it is poor the displacement of the 4th read head of calculating and measured displacements to be made, and obtains the shift differences of read head 4.
Ds4=S4calc-S4act
Wherein, S4actIndicate the actual displacement of the 4th measurement read head.
Step 6, using shift differences fitting and X, Y-direction position related coefficient
Ds4=a*X+b*Y+C
Step 7, grid is planned in stroke range, calculates the displacement surface type of the 4th read head at grid point locations,
S4new=a*Xm+b*Ym+C
Wherein, S4newIndicate the displacement surface type of the 4th read head calculated, Xm、YmRespectively choose the X, Y coordinates of mesh point.
The displacement surface type S of 4th read head4newIt can be used to compensate the displacement of the 4th read head, realize that calibrating 4 read heads surveys
The inconsistent purpose of magnitude.
The above-described embodiments merely illustrate the principles and effects of the present invention, and is not intended to limit the present invention.It is any ripe
The personage for knowing this technology can all carry out modifications and changes to above-described embodiment without violating the spirit and scope of the present invention.Cause
This, institute is complete without departing from the spirit and technical ideas disclosed in the present invention by those of ordinary skill in the art such as
At all equivalent modifications or change, should by the present invention claim be covered.
Claims (8)
1. a kind of grating scale caliberating device, which is characterized in that the caliberating device includes sports platform (7) and measuring device, the fortune
Dynamic platform is in closed microenvironment region (10), and the measuring device is set on sports platform, is moved with sports platform；
The measuring device includes the plummer (907) with the first plane and the second plane, first plane and second flat
Face is mutually parallel；4 read heads are provided in first plane, each read head is respectively at the vertex of a quadrangle
Place；A plane grating (908) is provided with above each read head；
Second speculum (905), second speculum are each provided on the outside of the opposite two sides of the plummer
The upper region of side where being set to second speculum extends to form the 4th from the upper regional edge edge to second plane
The angle of speculum (905), the 4th speculum and second speculum is more than 90 °；
One of other two opposite sides of the plummer are provided with the first speculum (913) on the outside of side；
The measuring device further includes the first interferometer (901), the second interferometer (903) and third interferometer (902), and described
Two interferometers are arranged with third interferometer and the second speculum homonymy, and first interferometer and the first speculum homonymy are arranged；
The measuring device further includes two third speculums, and a part for the light that the second interferometer is sent out with third interferometer passes through
4th speculum is reflected into third speculum.
2. a kind of grating scale caliberating device according to claim 1, which is characterized in that the caliberating device further includes frame
(8) it is set on the platform with platform (3), the frame, the frame is arranged around the detection device；At the frame
In the microenvironment region (10), the plane grating is fixed on the frame.
3. a kind of grating scale caliberating device according to claim 1, which is characterized in that 4 plane gratings are in same
One plane.
4. a kind of grating scale caliberating device according to claim 3, which is characterized in that the quadrangle is rectangle or pros
Shape.
5. a kind of grating scale caliberating device according to claim 4, which is characterized in that two adjacent plane gratings are symmetrically set
It sets.
6. a kind of grating scale caliberating device according to claim 4, which is characterized in that close to two planes of the second interferometer
The line of grating and the line of the two third speculums are mutually perpendicular to.
7. a kind of grating scale caliberating device according to claim 4, which is characterized in that close to two planes of the second interferometer
The line of grating is the perpendicular bisector of the line of the two third speculums.
8. a kind of scaling method of caliberating device as described in claim 1~7, which is characterized in that include the following steps：
Step 1, measuring route is set in the stroke range of sports platform, chooses measurement point at certain intervals on path；
Step 2, the count value for measuring read head is read in the measurement point of selection along the path of planning, obtains each measurement read head
Displacement；
Step 3, by the displacement movement platform position of wherein 3 read heads,
P=K*S3
Wherein, P is sports platform position, and K is the coefficient matrix of sports platform displacement, S3For the transposed matrix of 3 read heads；
Step 4, the displacement of the 4th read head is calculated by sports platform position P,
S4calc=K-1*P
Wherein, S4calcIndicate the displacement of the 4th read head calculated；
Step 5, it is poor the displacement of the 4th read head of calculating and measured displacements to be made, and obtains the shift differences of read head 4；
Ds4=S4calc-S4act
Wherein, S4actIndicate the actual displacement of the 4th measurement read head；
Step 6, using shift differences fitting and X, Y-direction position related coefficient
Ds4=a*X+b*Y+C
Step 7, grid is planned in stroke range, calculates the displacement surface type of the 4th read head at grid point locations,
S4new=a*Xm+b*Ym+C
Wherein, S4newIndicate the displacement surface type of the 4th read head calculated, Xm、YmRespectively choose the X, Y coordinates of mesh point.
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| CN109631757A (en) * | 2018-12-13 | 2019-04-16 | 珠海博明软件有限公司 | A kind of grating scale scaling method, device and vision inspection apparatus |
| WO2020135622A1 (en) * | 2018-12-28 | 2020-07-02 | 上海微电子装备（集团）股份有限公司 | Mounting device and mounting method for grating ruler, grating measurement system and lithography machine |
| WO2020228720A1 (en) * | 2019-05-16 | 2020-11-19 | 清华大学 | Plane grating calibration system |
| CN111964573A (en) * | 2020-08-11 | 2020-11-20 | 桂林电子科技大学 | Device and method for calculating installation error of grating interferometer |
| CN112113509A (en) * | 2019-06-20 | 2020-12-22 | 上海微电子装备（集团）股份有限公司 | Gantry type measuring device and gantry type measuring method |
| CN112344859A (en) * | 2020-09-14 | 2021-02-09 | 桂林电子科技大学 | Displacement measurement method based on grating read head combination |
| CN112947005A (en) * | 2019-11-26 | 2021-06-11 | 上海微电子装备（集团）股份有限公司 | Measuring device for position of objective table and photoetching machine |
| CN113532324A (en) * | 2021-08-31 | 2021-10-22 | 中国科学院重庆绿色智能技术研究院 | Nanometer precision multidimensional optical interference measuring system and measuring method thereof |
| CN115790398A (en) * | 2023-01-06 | 2023-03-14 | 中国科学院长春光学精密机械与物理研究所 | Multi-degree-of-freedom measuring device based on arbitrary cross two-dimensional grating |
| CN117091514A (en) * | 2023-10-19 | 2023-11-21 | 中国科学院长春光学精密机械与物理研究所 | Grating displacement measuring device, method, medium and equipment of double-layer floating reading head |
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| CN115790398B (en) * | 2023-01-06 | 2023-05-12 | 中国科学院长春光学精密机械与物理研究所 | Multi-degree-of-freedom measuring device based on arbitrary crossed two-dimensional grating |
| CN115790398A (en) * | 2023-01-06 | 2023-03-14 | 中国科学院长春光学精密机械与物理研究所 | Multi-degree-of-freedom measuring device based on arbitrary cross two-dimensional grating |
| CN117091514A (en) * | 2023-10-19 | 2023-11-21 | 中国科学院长春光学精密机械与物理研究所 | Grating displacement measuring device, method, medium and equipment of double-layer floating reading head |
| CN117091514B (en) * | 2023-10-19 | 2023-12-19 | 中国科学院长春光学精密机械与物理研究所 | Grating displacement measuring device, method, medium and equipment of double-layer floating reading head |
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