CN108793054B - Micro-nano electrode preparation device and preparation method based on bidirectional pulse power supply - Google Patents
Micro-nano electrode preparation device and preparation method based on bidirectional pulse power supply Download PDFInfo
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- CN108793054B CN108793054B CN201810730212.3A CN201810730212A CN108793054B CN 108793054 B CN108793054 B CN 108793054B CN 201810730212 A CN201810730212 A CN 201810730212A CN 108793054 B CN108793054 B CN 108793054B
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- metal ring
- platinum metal
- power supply
- pulse power
- electrode
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- 230000002457 bidirectional effect Effects 0.000 title claims abstract description 25
- 238000002360 preparation method Methods 0.000 title claims abstract description 24
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims abstract description 36
- 239000003792 electrolyte Substances 0.000 claims abstract description 21
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims abstract description 11
- 238000009434 installation Methods 0.000 claims abstract description 4
- 239000007788 liquid Substances 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 7
- 238000009826 distribution Methods 0.000 description 7
- 238000003754 machining Methods 0.000 description 5
- 238000005868 electrolysis reaction Methods 0.000 description 3
- 238000000992 sputter etching Methods 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 238000010008 shearing Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00111—Tips, pillars, i.e. raised structures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B1/00—Devices without movable or flexible elements, e.g. microcapillary devices
- B81B1/006—Microdevices formed as a single homogeneous piece, i.e. wherein the mechanical function is obtained by the use of the device, e.g. cutters
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Computer Hardware Design (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
The invention provides a micro-nano electrode preparation device and a preparation method based on a bidirectional pulse power supply. The preparation device comprises: the device comprises a work table plate, an electrolyte tank, a convex bracket block, a bidirectional pulse power supply, a connecting shaft, a platinum metal ring, a transverse bracket arm and a vertical bracket arm. The preparation method comprises the following steps: loading potassium hydroxide solution in the electrolyte tank, and enabling the liquid level of the potassium hydroxide solution to be higher than the installation height of the platinum metal ring; the upper end of the electrode rod is clamped on the chuck, the lower end of the electrode rod penetrates through the central annular hole of the platinum metal ring, and the electrode rod and the central annular hole of the platinum metal ring are coaxially arranged; and (3) alternately transmitting forward pulse with the pulse width of 100ns-150ns to the chuck and transmitting reverse pulse with the pulse width of 150ns-160ns to the platinum metal ring by utilizing the bidirectional pulse power supply period, so as to etch the electrode rod. The micro-nano electrode preparation device and the preparation method are characterized in that the taper of the prepared nano electrode can be reduced by adopting a bidirectional pulse power supply under the condition of not applying any external motion.
Description
Technical Field
The invention relates to a micro-nano electrode preparation device and a preparation method, in particular to a micro-nano electrode preparation device and a preparation method based on a bidirectional pulse power supply.
Background
The micro-nano electrode is a necessary condition for micro-machining, and the current method for preparing the micro-nano electrode mainly comprises mechanical shearing, focused ion milling, electrolytic machining and the like. The electrode prepared by mechanical shearing is mainly a pointed cone-shaped electrode, the success rate is low, and the preparation precision is difficult to ensure. The focused ion milling can prepare electrodes with various morphologies, but the focused ion milling equipment is expensive, the processing efficiency is low, and the cost for preparing the electrodes is high. The electrolytic processing is the most commonly used method for preparing the micro-nano electrode at present, and the electrode size is controllable and simpler.
By adopting the electrolytic machining method, the machined tool electrode is in a conical shape with a big upper part and a small lower part due to the accumulation state of electrolytic products in the machining process, and the conical electrode limits the use of the tool electrode for machining to a certain extentPrecision. If the electrode with the shape is used for electrolytic punching, the side wall of the processed hole has great taper. In order to reduce the taper of the prepared electrode and increase the length-diameter ratio of the electrode, various movements are also often applied to the processing process, so that the distribution of electrolytic products tends to be uniform. Using piezoelectric ceramics to perform frequency of 35H on electrolyte film in electrolytic machining process Z The electrode vibrates up and down, so that the influence of the diffusion layer on the electrode morphology is reduced, and the taper of the nano electrode is reduced, but a vibration system is additionally arranged in the electrode preparation device.
Disclosure of Invention
The invention aims to solve the technical problems that the existing preparation device and preparation method require an additional auxiliary device, and the preparation cost is increased.
In order to solve the technical problems, the invention provides a micro-nano electrode preparation device based on a bidirectional pulse power supply, which comprises a work table plate, an electrolyte tank, a convex bracket block, a bidirectional pulse power supply, a connecting shaft, a platinum metal ring, a transverse bracket arm and a vertical bracket arm; the electrolyte tank is arranged on the work table plate, and the vertical support arm is vertically and fixedly arranged on the work table plate; one end of the transverse support arm is fixedly arranged on the vertical support arm through a first mounting bolt; one end of the connecting shaft is fixedly arranged on the other end of the transverse support arm through a second mounting bolt; the connecting shaft is parallel to the vertical support arm; the convex support block is fixedly arranged in the electrolyte tank, the platinum metal ring is horizontally arranged on the convex support block through the cantilever, and the platinum metal ring is positioned in the electrolyte tank; the lower end of the connecting shaft points to the central annular hole of the platinum metal ring; the lower end of the connecting shaft is provided with a chuck for clamping and fixing the electrode rod; the positive electrode end of the bidirectional pulse power supply is electrically connected with the chuck through a waterproof wire; the negative electrode end of the bidirectional pulse power supply is electrically connected with the platinum metal ring through a waterproof wire.
Further, the thickness of the ring piece of the platinum metal ring is 2-3mm, and the diameter of the central ring hole is 6-7mm.
Further, the method comprises the following steps:
step 1, loading potassium hydroxide solution in an electrolyte tank, and enabling the liquid level of the potassium hydroxide solution to be higher than the installation height of a platinum metal ring;
step 2, clamping the upper end of the electrode rod on the chuck, and enabling the lower end of the electrode rod to penetrate through a central annular hole of the platinum metal ring, wherein the electrode rod and the central annular hole of the platinum metal ring are coaxially arranged;
and 3, alternately transmitting forward pulse with the pulse width of 100ns-150ns to the chuck and transmitting reverse pulse with the pulse width of 150ns-160ns to the platinum metal ring by utilizing a bidirectional pulse power supply period, so as to etch the electrode rod.
Further, the solubility of the potassium hydroxide solution loaded in the electrolytic bath was 1.5mol/L.
The invention has the beneficial effects that: in order to obtain a better length-diameter ratio, measures are taken to ensure that the distribution of electrolysis products around the electrode rod tends to be uniform, and the invention aims at reducing the taper of the prepared nano electrode by adopting a bidirectional pulse power supply without applying any external motion; during forward pulse, the electrode rod serving as an anode is electrochemically dissolved, and the product moves downwards under the action of gravity and accumulates around the electrode rod to form cone-shaped accumulation; when in reverse pulse, the electrode rod is used as a cathode to generate hydrogen, and the formation and escape of hydrogen bubbles form disturbance on electrolytic products accumulated around the electrode rod when in forward pulse, so that the product distribution tends to be uniform or dispersed in the electrolyte, the conductivity around the electrode rod tends to be uniform, and the prepared tool electrode has good length-diameter ratio.
Drawings
FIG. 1 is a schematic diagram of the whole structure of a micro-nano electrode preparation device of the invention;
FIG. 2 shows the distribution of the electrolysis products around the tungsten rod during the forward pulse according to the invention;
FIG. 3 shows the distribution of the electrolysis products around the tungsten rod during the reverse pulse according to the invention.
Detailed Description
As shown in fig. 1, the micro-nano electrode preparation device based on the bidirectional pulse power supply provided by the invention comprises: a work platen 1, an electrolyte tank 2, a convex bracket block 4, a bidirectional pulse power supply 6, a connecting shaft 9, a platinum metal ring 12, a transverse bracket arm 13 and a vertical bracket arm 15; the electrolyte tank 2 is arranged on the work table plate 1, and the vertical support arm 15 is vertically and fixedly arranged on the work table plate 1; one end of the transverse support arm 13 is fixedly mounted on the vertical support arm 15 by a first mounting bolt 14; one end of the connecting shaft 9 is fixedly arranged on the other end of the transverse bracket arm 13 through a second mounting bolt 8; the connecting shaft 9 is parallel to the vertical support arm 15; the convex support block 4 is fixedly arranged in the electrolyte tank 2 through the screw 3, the platinum metal ring 12 is horizontally arranged on the convex support block 4 through a cantilever, the end part of the cantilever is arranged on the convex support block 4 through the screw 3, and the platinum metal ring 12 is positioned in the electrolyte tank 2; the lower end of the connecting shaft 9 points to a central annular hole of the platinum metal ring 12; a clamping head 10 for clamping and fixing the electrode rod 11 is arranged at the lower end of the connecting shaft 9; the positive electrode end of the bidirectional pulse power supply 6 is electrically connected with the clamping head 10 through a waterproof wire 7; the negative terminal of the bi-directional pulse power supply 6 is electrically connected with a platinum metal ring 12 through a waterproof wire 7. The thickness of the ring piece of the platinum metal ring 12 is 2-3mm, and the diameter of the central ring hole is 6-7mm.
The invention provides a preparation method of a micro-nano electrode based on a bidirectional pulse power supply, which comprises the following steps:
step 1, loading potassium hydroxide solution in an electrolyte tank 2, wherein the liquid level of the potassium hydroxide solution 5 is higher than the installation height of a platinum metal ring 12, and the solubility of the potassium hydroxide solution 5 is 1.5mol/L;
step 2, clamping the upper end of the electrode rod 11 on the chuck 10, and enabling the lower end of the electrode rod 11 to penetrate through a central annular hole of the platinum metal ring 12, wherein the electrode rod 11 and the central annular hole of the platinum metal ring 12 are coaxially arranged;
step 3, a bidirectional pulse power supply 6 is utilized to alternately send forward pulse with the pulse width of 100ns-150ns to the chuck 10 and reverse pulse with the pulse width of 150ns-160ns to the platinum metal ring 12, namely after the forward pulse with the pulse width of 100ns-150ns is sent to the chuck 10, the reverse pulse with the pulse width of 150ns-160ns is sent to the platinum metal ring 12, the forward pulse and the reverse pulse are alternately circulated in such a way that the amplitude of the forward pulse and the reverse pulse is 4V, so that the electrode rod 11 is etched, when the forward pulse is generated, the electrode rod 11 is gradually etched in the electrolyte tank 2 due to the progress of electrolytic reaction, electrolytic products are accumulated around the electrode rod 11, and a distribution state with small top and large bottom is formed due to the action of gravity, as shown in fig. 2; when the reverse pulse is generated, the electrode rod 11 is equivalent to a negative electrode connected with a power supply, a large amount of bubbles are generated, and the electrolytic products around the electrode rod 11 are disturbed due to the floating and blasting of the bubbles, so that the distribution of the electrolytic products around the electrode rod 11 tends to be uniformly distributed, and the process is repeated, as shown in fig. 3, so that the taper of the prepared micro-nano electrode is smaller.
Claims (1)
1. The preparation method of the micro-nano electrode based on the bidirectional pulse power supply is characterized by comprising the steps of preparing the micro-nano electrode based on the bidirectional pulse power supply, wherein the micro-nano electrode based on the bidirectional pulse power supply comprises a work table plate (1), an electrolyte tank (2), a convex bracket block (4), a bidirectional pulse power supply (6), a connecting shaft (9), a platinum metal ring (12), a transverse bracket arm (13) and a vertical bracket arm (15);
the electrolyte tank (2) is arranged on the work table plate (1), and the vertical support arm (15) is vertically and fixedly arranged on the work table plate (1); one end of the transverse support arm (13) is fixedly arranged on the vertical support arm (15) through a first mounting bolt (14); one end of the connecting shaft (9) is fixedly arranged on the other end of the transverse bracket arm (13) through a second mounting bolt (8); the connecting shaft (9) is parallel to the vertical support arm (15); the convex support block (4) is fixedly arranged in the electrolyte tank (2), the platinum metal ring (12) is horizontally arranged on the convex support block (4) through a cantilever, and the platinum metal ring (12) is positioned in the electrolyte tank (2); the lower end of the connecting shaft (9) points to a central annular hole of the platinum metal ring (12); a clamping head (10) for clamping and fixing the electrode rod (11) is arranged at the lower end of the connecting shaft (9); the positive end of the bidirectional pulse power supply (6) is electrically connected with the clamping head (10) through a waterproof wire (7); the negative end of the bidirectional pulse power supply (6) is electrically connected with the platinum metal ring (12) through a waterproof wire (7);
the thickness of the ring piece of the platinum metal ring (12) is 2-3mm, and the diameter of the central ring hole is 6-7mm;
the solution loaded in the electrolyte tank (2) is 1.5mol/L potassium hydroxide solution;
the method comprises the following steps:
step 1, loading potassium hydroxide solution in an electrolyte tank (2), and enabling the liquid level of the potassium hydroxide solution to be higher than the installation height of a platinum metal ring (12);
step 2, clamping the upper end of an electrode rod (11) on a chuck (10), enabling the lower end of the electrode rod (11) to penetrate through a central annular hole of a platinum metal ring (12), and enabling the electrode rod (11) and the central annular hole of the platinum metal ring (12) to be coaxially arranged;
and 3, periodically and alternately sending forward pulses with the pulse width of 100ns-150ns to the chuck (10) and reverse pulses with the pulse width of 150ns-160ns to the platinum metal ring (12) by using the bidirectional pulse power supply (6), so as to etch the electrode rod (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201810730212.3A CN108793054B (en) | 2018-07-05 | 2018-07-05 | Micro-nano electrode preparation device and preparation method based on bidirectional pulse power supply |
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| CN201810730212.3A CN108793054B (en) | 2018-07-05 | 2018-07-05 | Micro-nano electrode preparation device and preparation method based on bidirectional pulse power supply |
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| CN108793054A CN108793054A (en) | 2018-11-13 |
| CN108793054B true CN108793054B (en) | 2023-11-07 |
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| CN110649828A (en) * | 2019-10-11 | 2020-01-03 | 昆明医科大学 | Non-invasive guide electrode and direct current power supply for providing stimulation current for non-invasive guide electrode |
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