CN108767649A - Disresonance subnanosecond pulse laser - Google Patents
Disresonance subnanosecond pulse laser Download PDFInfo
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
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- H—ELECTRICITY
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Abstract
本发明涉及激光器技术领域，提供了一种非谐振亚纳秒脉冲激光器。该激光器包括退压调Q模块、泵浦源以及沿泵浦源的发射光路方向依次设置的泵浦耦合单元、双色镜、激光增益介质、Q开关和反射镜；泵浦耦合单元用于将泵浦源发射的泵浦光透过双色镜聚焦到激光增益介质上，双色镜倾斜设置，激光增益介质朝向双色镜的一端镀设有高透膜；退压调Q模块与Q开关电连接。本发明通过在激光增益介质朝向双色镜的一端镀设高透膜，并利用泵浦耦合单元将泵浦源发射的泵浦光穿过双色镜后全部聚焦在高透膜上，不仅保证了激光在腔内一次渡越即可输出、有效控制了脉冲宽度，而且还提高了单脉冲能量。另外，由于该激光器采用了退压调Q模块，因此无需再设置1/4波片。
The invention relates to the technical field of lasers and provides a non-resonant subnanosecond pulse laser. The laser includes a depressurization Q-switching module, a pump source, and a pump coupling unit, a dichroic mirror, a laser gain medium, a Q switch, and a reflector arranged sequentially along the emission path of the pump source; the pump coupling unit is used to combine the pump The pump light emitted by the pump source is focused on the laser gain medium through the dichroic mirror. The dichroic mirror is set obliquely. The end of the laser gain medium facing the dichromatic mirror is coated with a high-transmittance film; the back pressure Q-switching module is electrically connected to the Q switch. In the present invention, a high-transparency film is coated on the end of the laser gain medium facing the dichroic mirror, and the pump light emitted by the pump source is focused on the high-transparency film after passing through the dichroic mirror by using a pump coupling unit, which not only ensures the laser The output can be output in one transition in the cavity, the pulse width is effectively controlled, and the single pulse energy is also increased. In addition, since the laser adopts a decompression Q-switching module, there is no need to set a 1/4 wave plate.
Description
技术领域technical field
本发明涉及激光器技术领域，具体涉及一种非谐振亚纳秒脉冲激光器。The invention relates to the technical field of lasers, in particular to a non-resonant subnanosecond pulse laser.
背景技术Background technique
随着激光技术的迅速发展，激光技术在各个领域所起的作用越来越巨大，从军用到民用，从科研到教学，从工业到农副业等众多领域。而在工程应用中，一些对加工热影响敏感的材料对激光的脉冲宽度有了更高的要求。实验证明，脉宽处于亚纳秒区间的激光在加工中具有更高效率，例如当在阳极氧化铝表面打黑时，采用脉宽在500ps～1ns之间的激光比采用脉宽5ns～10ns之间的激光的黑度提高20～30％，与此同时，其加工速度也提高了50～100％。因此，脉宽处于亚纳秒区间的激光在激光测距、激光雷达、激光探测和医疗领域都有越来越广泛的应用。With the rapid development of laser technology, laser technology plays an increasingly important role in various fields, from military to civilian, from scientific research to teaching, from industry to agricultural and sideline industries and many other fields. In engineering applications, some materials that are sensitive to processing heat have higher requirements on the pulse width of the laser. Experiments have proved that lasers with a pulse width in the sub-nanosecond range have higher efficiency in processing. For example, when blackening the surface of anodized aluminum, using a laser with a pulse width between 500 ps and 1 ns is more efficient than using a laser with a pulse width between 5 ns and 10 ns. The blackness of the laser is increased by 20-30%, and at the same time, the processing speed is also increased by 50-100%. Therefore, lasers with pulse widths in the sub-nanosecond range are more and more widely used in laser ranging, laser radar, laser detection and medical fields.
目前，现有的亚纳秒脉冲激光器主要通过削波法、饱和吸收体被动锁模法或微片激光法来发射亚纳秒区间的激光。其中，削波法要求在极短时间内打开开关，因此这种激光器对电路方面要求较高、稳定性差；而饱和吸收体被动锁模法因采用Cr:YAG、GaAs等晶片作为可饱和吸收体来获得亚纳秒激光，因此激光的稳定性差且重复频率不能控制；微片激光器法由于利用很短的腔长压缩脉宽，因此难以获得较高的单脉冲能量。At present, the existing sub-nanosecond pulsed lasers mainly use the clipping method, the saturable absorber passive mode-locking method or the microchip laser method to emit laser light in the sub-nanosecond interval. Among them, the clipping method requires the switch to be turned on in a very short time, so this kind of laser has high requirements on the circuit and poor stability; and the saturable absorber passive mode-locking method uses chips such as Cr:YAG and GaAs as the saturable absorber. Therefore, the stability of the laser is poor and the repetition rate cannot be controlled; the microchip laser method uses a very short cavity length to compress the pulse width, so it is difficult to obtain a higher single pulse energy.
发明内容Contents of the invention
本发明的目的是提供一种单脉冲能量高、稳定性强的非谐振亚纳秒脉冲激光器。The object of the present invention is to provide a non-resonant subnanosecond pulse laser with high single pulse energy and strong stability.
为实现上述目的，本发明提供了一种非谐振亚纳秒脉冲激光器，该激光器包括退压调Q模块、泵浦源以及沿所述泵浦源的发射光路方向依次设置的泵浦耦合单元、双色镜、激光增益介质、Q开关和反射镜；所述泵浦耦合单元用于将所述泵浦源发射的泵浦光透过所述双色镜聚焦到所述激光增益介质上，所述双色镜倾斜设置，所述激光增益介质朝向所述双色镜的一端镀设有高透膜；所述退压调Q模块与所述Q开关电连接。In order to achieve the above object, the present invention provides a non-resonant sub-nanosecond pulsed laser, which includes a decompression Q-switched module, a pump source, and a pump coupling unit sequentially arranged along the direction of the emission optical path of the pump source, A dichroic mirror, a laser gain medium, a Q switch, and a mirror; the pump coupling unit is used to focus the pump light emitted by the pump source onto the laser gain medium through the dichroic mirror, and the dichroic The mirror is arranged obliquely, and the end of the laser gain medium facing the dichroic mirror is coated with a high-transparency film; the depressurization Q-switching module is electrically connected to the Q switch.
其中，所述双色镜与所述反射镜之间的距离小于150mm。Wherein, the distance between the dichroic mirror and the reflecting mirror is less than 150mm.
其中，所述双色镜用于透射所述泵浦光和反射激光，且所述双色镜的反射率大于95％、透过率大于90％；所述反射镜为半透半反镜。Wherein, the dichroic mirror is used to transmit the pump light and reflect the laser light, and the reflectance of the dichroic mirror is greater than 95%, and the transmittance is greater than 90%; the reflector is a half mirror.
其中，所述Q开关为电光Q开关。Wherein, the Q switch is an electro-optical Q switch.
其中，所述电光Q开关的材质为KTP、BBO、RTP或LN。Wherein, the material of the electro-optic Q switch is KTP, BBO, RTP or LN.
其中，激光增益介质的材质为Nd:GdVO4、Nd:YVO4、Nd:YAG或Yb:YAG。Wherein, the material of the laser gain medium is Nd:GdVO 4 , Nd:YVO 4 , Nd:YAG or Yb:YAG.
其中，所述泵浦源为光纤耦合二极管或半导体激光二极管。Wherein, the pumping source is a fiber-coupled diode or a semiconductor laser diode.
其中，所述泵浦耦合单元为泵浦二极管激光的准直聚焦单元。Wherein, the pump coupling unit is a collimating and focusing unit for pumping diode laser.
其中，所述激光增益介质朝向所述Q开关的一端为斜面。Wherein, one end of the laser gain medium facing the Q switch is a slope.
其中，所述斜面的倾斜角度为布儒斯特角。Wherein, the inclination angle of the slope is Brewster's angle.
本发明结构简单、操作便捷，通过在激光增益介质朝向所述双色镜的一端镀设高透膜，并利用泵浦耦合单元将泵浦源发射的泵浦光穿过双色镜后全部聚焦在高透膜上，就可使激光增益介质中的反转粒子数大幅增加，从而不仅保证了激光在腔内一次渡越即可输出，进而有效控制了脉冲宽度，而且还提高了单脉冲能量。另外，由于该激光器采用了退压调Q模块，因此无需再设置1/4波片，在降低成本同时还保证了脉宽输出的稳定性。The invention has simple structure and convenient operation. A high-transmittance film is coated on the end of the laser gain medium facing the dichroic mirror, and the pump light emitted by the pump source is focused on the high On the transparent film, the number of inversion particles in the laser gain medium can be greatly increased, which not only ensures that the laser can be output in one transition in the cavity, effectively controls the pulse width, but also improves the single pulse energy. In addition, because the laser adopts a voltage-reducing Q-switching module, there is no need to install a 1/4 wave plate, which reduces the cost and ensures the stability of the pulse width output.
附图说明Description of drawings
图1是本发明实施例中的一种非谐振亚纳秒脉冲激光器的结构示意图。Fig. 1 is a schematic structural diagram of a non-resonant sub-nanosecond pulsed laser in an embodiment of the present invention.
附图标记：Reference signs:
1、泵浦源；2、泵浦耦合单元；2-1、透镜；3、双色镜；1. Pump source; 2. Pump coupling unit; 2-1. Lens; 3. Dichroic mirror;
4、激光增益介质；5、Q开关；6、反射镜。4. Laser gain medium; 5. Q switch; 6. Mirror.
具体实施方式Detailed ways
为使发明的目的、技术方案和优点更加清楚，下面将结合发明中的附图，对发明中的技术方案进行清楚地描述，显然，所描述的实施例是发明一部分实施例，而不是全部的实施例。基于发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于发明保护的范围。In order to make the purpose, technical solutions and advantages of the invention clearer, the technical solutions in the invention will be clearly described below in conjunction with the accompanying drawings in the invention. Obviously, the described embodiments are part of the embodiments of the invention, not all of them. Example. Based on the embodiments of the invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the invention.
在本发明的描述中，除非另有说明，术语“上”、“下”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的激光器或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。In the description of the present invention, unless otherwise specified, the orientation or positional relationship indicated by the terms "upper", "lower" and the like are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description. It is not intended to indicate or imply that the referenced laser or element must have a particular orientation, be constructed in a particular orientation, and operate, and thus should not be construed as limiting the invention.
如图1所示，本发明提供了一种非谐振亚纳秒脉冲激光器，该激光器包括退压调Q模块、泵浦源1以及沿泵浦源1的发射光路方向依次设置的泵浦耦合单元2、双色镜3、激光增益介质4、Q开关5和反射镜6；泵浦耦合单元2用于将泵浦源1发射的泵浦光透过双色镜3聚焦到激光增益介质4上，双色镜3倾斜设置，激光增益介质4朝向双色镜3的一端镀设有高透膜；退压调Q模块与Q开关5电连接。As shown in Figure 1, the present invention provides a non-resonant sub-nanosecond pulsed laser, which includes a decompression Q-switched module, a pump source 1, and a pump coupling unit sequentially arranged along the emission path direction of the pump source 1 2. Dichroic mirror 3, laser gain medium 4, Q switch 5 and reflector 6; the pump coupling unit 2 is used to focus the pump light emitted by the pump source 1 onto the laser gain medium 4 through the dichroic mirror 3, the dichroic The mirror 3 is arranged obliquely, and the end of the laser gain medium 4 facing the dichroic mirror 3 is coated with a high-transparency film; the depressurization Q-switching module is electrically connected to the Q switch 5 .
由此，当启动泵浦源1时，泵浦源1发射的泵浦光便依次通过泵浦耦合单元2、双色镜3、激光增益介质4和Q开关5后被反射镜6全反射，经反射镜6反射后的光束则再次通过Q开关5和激光增益介质4并由反射镜6反射输出。可见，该激光器结构简单、操作便捷，通过在激光增益介质4朝向双色镜3的一端镀设高透膜，并利用泵浦耦合单元2将泵浦源1发射的泵浦光穿过双色镜3后全部聚焦在高透膜上，就可使激光增益介质4中的反转粒子数大幅增加，从而不仅显著提高了增益、保证激光在腔内一次渡越即可输出，进而有效控制了脉冲宽度，而且提高了单脉冲能量。另外，由于该激光器采用了退压调Q模块，因此无需再设置1/4波片，在降低成本同时还保证了脉宽输出的稳定性。Thus, when the pump source 1 is activated, the pump light emitted by the pump source 1 passes through the pump coupling unit 2, the dichroic mirror 3, the laser gain medium 4 and the Q switch 5 in turn, and is totally reflected by the reflector 6, and passes through the The light beam reflected by the mirror 6 passes through the Q switch 5 and the laser gain medium 4 again and is reflected by the mirror 6 to output. It can be seen that the laser has a simple structure and is easy to operate. By coating the end of the laser gain medium 4 facing the dichroic mirror 3 with a highly transparent film, and using the pump coupling unit 2 to pass the pump light emitted by the pump source 1 through the dichroic mirror 3 Finally, all of them are focused on the high-transparency film, which can greatly increase the number of inversion particles in the laser gain medium 4, thereby not only significantly improving the gain, but also ensuring that the laser can be output in one transition in the cavity, and effectively controlling the pulse width. , and increased the single pulse energy. In addition, because the laser adopts a voltage-reducing Q-switching module, there is no need to install a 1/4 wave plate, which reduces the cost and ensures the stability of the pulse width output.
优选地，双色镜3与反射镜6之间的距离小于150mm。例如，双色镜3与反射镜6之间的距离为35mm。其中，双色镜3倾斜45°设置。另外，双色镜3和反射镜6的镜型可以根据实际的输出功率进行选择，例如反射镜6可以但不限于是半透半反镜，双色镜3用于透射泵浦光和反射激光，且双色镜3的反射率大于95％、透过率大于90％，也就是说，泵浦源1发射的泵浦光经泵浦耦合单元2聚焦后可直接穿过双色镜3照射在激光增益介质4上，而腔内产生的激光则会被双色镜3直接反射出去。Preferably, the distance between the dichroic mirror 3 and the reflecting mirror 6 is less than 150mm. For example, the distance between the dichroic mirror 3 and the mirror 6 is 35 mm. Wherein, the dichroic mirror 3 is set at an inclination of 45°. In addition, the mirror types of the dichroic mirror 3 and the reflector 6 can be selected according to the actual output power. For example, the reflector 6 can be but not limited to be a half mirror, and the dichroic mirror 3 is used to transmit pump light and reflect laser light, and The reflectivity of the dichroic mirror 3 is greater than 95%, and the transmittance is greater than 90%. That is to say, the pump light emitted by the pump source 1 can be directly irradiated on the laser gain medium through the dichroic mirror 3 after being focused by the pump coupling unit 2. 4, and the laser generated in the cavity will be directly reflected by the dichroic mirror 3.
优选地，Q开关5为电光Q开关5。其中，电光Q开关5的材质为KTP、BBO、RTP或LN。Preferably, the Q switch 5 is an electro-optical Q switch 5 . Wherein, the material of the electro-optical Q switch 5 is KTP, BBO, RTP or LN.
优选地，激光增益介质4的材质为Nd:GdVO4、Nd:YVO4、Nd:YAG或Yb:YAG。例如，本实施例中激光增益介质4采用掺杂浓度为0.3％的Nd:YVO4晶体，且该激光增益介质4朝向双色镜3的一端镀设透过率为99.8％的高透膜。Preferably, the material of the laser gain medium 4 is Nd:GdVO 4 , Nd:YVO 4 , Nd:YAG or Yb:YAG. For example, in this embodiment, the laser gain medium 4 adopts Nd:YVO 4 crystal with a doping concentration of 0.3%, and the end of the laser gain medium 4 facing the dichroic mirror 3 is plated with a high-transmittance film with a transmittance of 99.8%.
优选地，泵浦源1为光纤耦合二极管或半导体激光二极管。Preferably, the pumping source 1 is a fiber-coupled diode or a semiconductor laser diode.
优选地，泵浦耦合单元2为泵浦二极管激光的准直聚焦单元。更优选地，泵浦耦合单元2包括多个沿泵浦源1的发射光路方向依次设置的透镜2-1。例如，泵浦耦合单元2包括两个平行设置的透镜2-1，由此，启动泵浦源1后，泵浦源1发射的泵浦光穿过两个透镜2-1后便聚焦为直径为230μm的光斑，该光斑穿过双色镜3后就直接照射在激光增益介质4上，使其局部反转粒子数大幅增加。Preferably, the pump coupling unit 2 is a collimating and focusing unit for pumping diode laser. More preferably, the pump coupling unit 2 includes a plurality of lenses 2 - 1 sequentially arranged along the emission light path direction of the pump source 1 . For example, the pump coupling unit 2 includes two lenses 2-1 arranged in parallel, thus, after the pump source 1 is activated, the pump light emitted by the pump source 1 is focused into a diameter The light spot is 230 μm, and the light spot is directly irradiated on the laser gain medium 4 after passing through the dichroic mirror 3, so that the number of local inversion particles is greatly increased.
进一步地，为了避免激光增益介质4产生寄生振荡，激光增益介质4朝向Q开关5的一端为斜面。其中，斜面的倾斜角度优选为布儒斯特角，由此，该激光器就无需再设置偏振片。Further, in order to avoid parasitic oscillation of the laser gain medium 4 , the end of the laser gain medium 4 facing the Q switch 5 is inclined. Wherein, the inclination angle of the slope is preferably Brewster's angle, so that the laser does not need to be provided with a polarizer.
最后应说明的是：以上实施例仅用以说明发明的技术方案，而非对其限制；尽管参照前述实施例对发明进行了详细的说明，本领域的普通技术人员应当理解：其依然可以对前述各实施例所记载的技术方案进行修改，或者对其中部分技术特征进行等同替换；而这些修改或者替换，并不使相应技术方案的本质脱离发明各实施例技术方案的精神和范围。Finally, it should be noted that: the above embodiments are only used to illustrate the technical scheme of the invention, rather than limiting it; although the invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: it still can The technical solutions described in the foregoing embodiments are modified, or some of the technical features are replaced equivalently; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the various embodiments of the invention.
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