CN108766920A - A kind of rewinder silicon chip anticollision device, collision-prevention device - Google Patents
A kind of rewinder silicon chip anticollision device, collision-prevention device Download PDFInfo
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- CN108766920A CN108766920A CN201810936825.2A CN201810936825A CN108766920A CN 108766920 A CN108766920 A CN 108766920A CN 201810936825 A CN201810936825 A CN 201810936825A CN 108766920 A CN108766920 A CN 108766920A
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- silicon chip
- fixed block
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- cylinder
- basket
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- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 73
- 239000010703 silicon Substances 0.000 title claims abstract description 73
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 72
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 10
- 210000003734 kidney Anatomy 0.000 claims description 17
- 230000002787 reinforcement Effects 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 3
- 230000007246 mechanism Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003014 reinforcing effect Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 210000002268 wool Anatomy 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Silicon Compounds (AREA)
Abstract
The invention discloses a kind of rewinder silicon chip anticollision device, collision-prevention devices, it is related to silicon chip production equipment technology, existing rewinder is solved in order to enable silicon chip to have completely into basket, by the way of increasing silicon chip conveying kinetic energy, cause silicon chip that can have rear end inner wall with basket to hit, to make silicon chip generate chipping, it is hidden to split, the problem of damages such as unfilled corner, the present invention includes being placed with the rack of basket tool, L-shaped anticollision pedestal is installed in the rack of basket tool side, anticollision pedestal includes the horizontal fixed block of orthogonal connection and vertical fixed block, horizontal fixed block is mounted in rack, vertical fixed block top is provided with cylinder, the rectangular through-hole passed through for the telescopic rod of cylinder is offered on vertical fixed block, the telescopic rod end of cylinder is connected with anticollison block corresponding with basket tool, anticollison block is made of soft padded coaming.
Description
Technical field
The present invention relates to silicon chip production equipment technologies, more particularly to a kind of rewinder silicon chip anticollision device, collision-prevention device.
Background technology
Silicon chip is the raw material for producing solar battery sheet, and the technological process of production of solar battery sheet is divided into：Silicon chip is examined
Survey-surface wool manufacturing and pickling-diffusion-remove phosphorosilicate glass-plasma etching and pickling-antireflective coating-screen printing
Brush-Fast Sintering etc..Current solar photovoltaic industry, process for etching are that the basket that silicon chip will be housed has in different chemical liquids
Middle immersion generates inverted pyramid matte to reach, removes the purpose of silicon chip surface metal impurities.Before silicon wafer wool making, first will
Silicon chip is encased in using the rewinder of automation in basket tool.
Existing rewinder is that silicon chip is delivered in basket tool by electric belt, and is from top to bottom uniformly put in basket tool
It sets, silicon chip, which is driven by electric belt to the motion state rested on during basket has, to be changed, and is routinely rubbing between silicon chip and basket tool
Wipe what resistance was realized, but this mode is easy that silicon chip is made just not stopped completely into basket having also；So using later
The motion energy for increasing silicon chip in allowing silicon chip can be completely into having to basket, but in this case, be depended merely between silicon chip and basket tool
Frictional resistance can not make silicon chip stop, silicon chip enter basket tool after can strike basket tool rear end inner wall could stop, this
The action of shock can cause silicon chip chipping, it is hidden split, unfilled corner etc., cause silicon chip product quality to decline or even damage.
Invention content
It is an object of the invention to：In order to solve existing rewinder in order to enable silicon chip to have completely into basket, using increasing
The mode of big silicon chip conveying kinetic energy causes silicon chip that can have rear end inner wall with basket and hits, to make silicon chip generate chipping, hidden split, lack
The problem of damages such as angle, the present invention provide a kind of rewinder silicon chip anticollision device, collision-prevention device.
The present invention specifically uses following technical scheme to achieve the goals above：
A kind of rewinder silicon chip anticollision device, collision-prevention device, including it is placed with the rack of basket tool, L-shaped is installed in the rack of basket tool side
Anticollision pedestal, anticollision pedestal includes horizontal fixed block and the vertical fixed block of orthogonal connection, and horizontal fixed block is mounted on
In rack, vertical fixed block top is provided with cylinder, and it is logical that the rectangle passed through for the telescopic rod of cylinder is offered on vertical fixed block
Hole, the telescopic rod end of cylinder are connected with the anticollison block that can be stretched into and stretch out basket tool, and anticollison block is made of soft padded coaming.
Further, horizontal fixed block upper surface is provided with the reinforcement block of triangle with vertical fixed block junction.
Further, horizontal fixed block is connect by bolt with rack, is offered on horizontal fixed block and is coordinated with bolt
The length direction of two kidney slot a arranged side by side, kidney slot are that basket has to the direction of vertical fixed block.
Further, vertical fixed block is connect by bolt with cylinder, is opened up in rectangular through-hole both sides on vertical fixed block
There are the two kidney slot b arranged side by side coordinated with bolt, the length direction of kidney slot b is vertical direction.
Further, an anticollison block side surface corresponding with basket tool is inclined-plane, and the inclined direction on inclined-plane is to be had to anti-by basket
Collision block direction is obliquely.
Further, it is connected through a screw thread between the telescopic rod and anticollison block of cylinder, between anticollison block and cylinder block
Nut is also rotary on telescopic rod, anticollison block is fitted closely with nut.
Beneficial effects of the present invention are as follows：
1, anticollision device, collision-prevention device of the invention drives anticollison block flexible and is coordinated with basket tool, silicon chip is made to enter using cylinder
Basket collides with anticollison block when having rather than collides with basket tool inner wall, utilizes the anticollision made of soft padded coaming
Block absorbs the kinetic energy of silicon chip, and silicon chip is enable to stop rapidly, while the anticollison block of flexible material will not make silicon
Piece generate chipping, it is hidden split, unfilled corner and other issues, saved while improving product quality because what silicon chip damage was brought is produced into
This.
2, connection of the reinforcement block between horizontal fixed block and vertical fixed block is reinforced, due to vertical fixed block
Top is fixed with cylinder, and the frequent stretching motion of cylinder can be such that vertical fixed block bottom occurs with horizontal fixed block junction
It loosens, the reinforcing of reinforcement block is not easy to loosen with regard to the connection of the two.
3, using the cooperation between kidney slot a and bolt, the distance between horizontal fixed block and basket tool can be adjusted, in turn
Adjust the distance between entire anticollision device, collision-prevention device and basket tool, to coordinate cylinder realize anticollison block extend out to the internal difference of basket tool away from
From meeting different use demands.
4, using the cooperation between kidney slot b and bolt, mounting height of the cylinder on vertical fixed block can be adjusted, into
And respective heights of the anticollison block in basket tool are adjusted, the basket to adapt to different size has, and to make anticollison block, face basket has always
Each reviewing position, accurately play the blocking cushioning effect to every a piece of silicon chip.
5, it if an anticollison block side surface corresponding with basket tool is perpendicular, is hit in silicon chip and anticollison block
When, according to active force and reaction force, silicon chip may by the reaction force of anticollison block, to make silicon chip move backward, into
And a part for silicon chip is caused to remove basket tool；And the inclined-plane on anticollison block makes a reaction force part be converted into upward power, subtracts
The component of small reaction force in the horizontal direction, it is therefore prevented that the reverse movement of silicon chip.
6, it is connected through a screw thread between the telescopic rod and anticollison block of cylinder, is convenient for the dismounting and replacement of anticollison block, prevented simultaneously
It is fitted closely between collision block and nut, anticollison block is locked using double nut locking principle, prevents anticollison block from loosening.
Description of the drawings
Fig. 1 is the structural schematic diagram of anticollision device, collision-prevention device of the present invention；
Fig. 2 is the usage state diagram of anticollision device, collision-prevention device of the present invention；
Reference numeral：1- rectangular through-holes, the inclined-planes 2- kidney slots b, 3-, 4- anticollison blocks, 5- anticollision pedestals, 5.1- are fixed vertically
Block, the horizontal fixed blocks of 5.2-, 6- reinforcement blocks, 7- kidney slots a, 8- cylinder, 9- baskets tool, 10- silicon chips, 11- elevating mechanisms, 12- machines
Frame, 13- silicon chip delivery sections.
Specific implementation mode
In order to which those skilled in the art are better understood from the present invention, below in conjunction with the accompanying drawings with following embodiment to the present invention
It is described in further detail.
Embodiment 1
A kind of rewinder silicon chip anticollision device, collision-prevention device, including it is placed with the rack 12 of basket tool 9, pacify in the rack 12 of 9 sides of basket tool
Equipped with L-shaped anticollision pedestal 5, anticollision pedestal 5 includes the horizontal fixed block 5.2 and vertical fixed block 5.1 of orthogonal connection, water
Flat fixed block 5.2 is mounted in rack 12, and 5.1 top of vertical fixed block is provided with cylinder 8, is offered on vertical fixed block 5.1
For the rectangular through-hole 1 that the telescopic rod of cylinder 8 passes through, the telescopic rod end connection of cylinder 8 can stretch into the anticollison block 4 for stretching out basket tool 9,
Anticollison block 4 is made of soft padded coaming.
Operation principle：When rewinder works normally, basket tool 9 is placed on elevating mechanism 11,9 opening side face silicon of basket tool
Piece delivery section 13, anticollision device, collision-prevention device, which is mounted on basket, to be had in the rack 12 of 9 reverse sides.When silicon chip 10 carries out reviewing, basket tool 9 is lifting
Declined under the drive of mechanism 11, the first reviewing position at 9 top of basket tool is concordant with silicon chip delivery section 13 at this time, and cylinder 8 is stretched
Contracting bar, which extend out to anticollison block 4, to be had slightly into basket inside 9, and silicon chip 10 is delivered to basket tool 9 by silicon chip delivery section 13, is reached soon
When basket tool 9, silicon chip 10 is detached with silicon chip delivery section 13 and is moved forward by inertia to entering in basket tool 9, then, silicon chip 10
Front end impact stops under the cushioning effect of anticollison block 4 and rests in basket tool 9 to anticollison block 4；Then, the contraction of cylinder 8 makes to prevent
Collision block 4 is contracted to outside basket tool 9, and basket tool 9 rises a reviewing position under the drive of elevating mechanism 11, and cylinder 8 is extend out to again
Anticollison block 4 has slightly into basket inside 9, carries out the reviewing of second silicon chip 10, is so repeated up to basket tool 9 and fills silicon chip 10.
The anticollision device, collision-prevention device of the present invention, using cylinder drive anticollison block it is flexible have with basket coordinated, make silicon chip into basket
It collides with anticollison block when tool rather than collides with basket tool inner wall, utilize the anticollison block made of soft padded coaming
The kinetic energy of silicon chip is absorbed, silicon chip is enable to stop rapidly, while the anticollison block of flexible material will not make silicon chip
Generate chipping, it is hidden split, unfilled corner and other issues, saved while improving product quality because what silicon chip damage was brought is produced into
This.
Embodiment 2
The present embodiment is improved on the basis of embodiment 1：
5.2 upper surface of horizontal fixed block is provided with the reinforcement block 6 of triangle with 5.1 junction of vertical fixed block.
It should be noted that：It uses between horizontal fixed block 5.2 and vertical fixed block 5.1 and is removably bolted.
The above advantage of improving is：Connection of the reinforcement block between horizontal fixed block and vertical fixed block adds
Gu since vertical fixed block top is fixed with cylinder, and the frequent stretching motion of cylinder can make vertical fixed block bottom and water
Flat fixed block junction loosens, and the reinforcing of reinforcement block is not easy to loosen with regard to the connection of the two.
Embodiment 3
The present embodiment is improved on the basis of embodiment 1：
Horizontal fixed block 5.2 is connect by bolt with rack 12, and two coordinated with bolt are offered on horizontal fixed block 5.2
A kidney slot a7 arranged side by side, the length direction of kidney slot are the direction that basket tool 9 arrives vertical fixed block 5.1.
The above advantage of improving is：Using the cooperation between kidney slot a and bolt, horizontal fixed block can be adjusted and had with basket
The distance between, and then the distance between entire anticollision device, collision-prevention device and basket tool are adjusted, to coordinate cylinder to realize, anticollison block is extend out to
Different distance inside basket tool, meets different use demands.
Embodiment 4
The present embodiment is improved on the basis of above example：
Vertical fixed block 5.1 is connect by bolt with cylinder 8, is offered in 1 both sides of rectangular through-hole on vertical fixed block 5.1
Length direction with two kidney slot b2 arranged side by side of bolt cooperation, kidney slot b2 is vertical direction.
The above advantage of improving is：Using the cooperation between kidney slot b and bolt, cylinder can be adjusted in vertical fixed block
On mounting height, and then adjust anticollison block basket tool in respective heights, with adapt to different size basket have, to make anticollision
Block each reviewing position that face basket has always, accurately plays the blocking cushioning effect to every a piece of silicon chip.
Embodiment 5
The present embodiment is improved on the basis of above example：
It is inclined-plane 3 that anticollison block 4 has a 9 corresponding side surfaces with basket, and the inclined direction on inclined-plane 3 is by basket tool 9 to anticollison block 4
Direction is obliquely.
The above advantage of improving is：If an anticollison block side surface corresponding with basket tool is perpendicular, in silicon chip
When being hit with anticollison block, according to active force and reaction force, silicon chip may be by the reaction force of anticollison block, to make
Silicon chip moves backward, and then a part for silicon chip is caused to remove basket tool；And the inclined-plane on anticollison block makes a reaction force part turn
Upward power is turned to, reduces the component of reaction force in the horizontal direction, it is therefore prevented that the reverse movement of silicon chip.
Embodiment 6
The present embodiment is improved on the basis of above example：
It is connected through a screw thread between the telescopic rod and anticollison block 4 of cylinder 8, the telescopic rod between 8 cylinder body of anticollison block 4 and cylinder
On be also rotary with nut, anticollison block 4 is fitted closely with nut.
The above advantage of improving is：It is connected through a screw thread between the telescopic rod and anticollison block of cylinder, convenient for tearing open for anticollison block
It unloads and replaces, while being fitted closely between anticollison block and nut, anticollison block is locked using double nut locking principle, is prevented
Anticollison block loosens.
The above, only presently preferred embodiments of the present invention, are not intended to limit the invention, patent protection model of the invention
It encloses and is subject to claims, equivalent structure variation made by every specification and accompanying drawing content with the present invention, similarly
It should be included within the scope of the present invention.
Claims (6)
1. a kind of rewinder silicon chip anticollision device, collision-prevention device, including it is placed with the rack (12) of basket tool (9), it is characterised in that：Basket tool (9) one
L-shaped anticollision pedestal (5) is installed, anticollision pedestal (5) includes the horizontal fixed block of orthogonal connection in the rack (12) of side
(5.2) with vertical fixed block (5.1), in rack (12), vertical fixed block (5.1) top is set horizontal fixed block (5.2)
It is equipped with cylinder (8), the rectangular through-hole (1) passed through for the telescopic rod of cylinder (8), cylinder (8) are offered on vertical fixed block (5.1)
Telescopic rod end be connected with can stretch into stretch out basket tool (9) anticollison block (4), anticollison block (4) using soft padded coaming make.
2. rewinder silicon chip anticollision device, collision-prevention device according to claim 1, it is characterised in that：Horizontal fixed block (5.2) upper surface
The reinforcement block (6) of triangle is provided with vertical fixed block (5.1) junction.
3. rewinder silicon chip anticollision device, collision-prevention device according to claim 1, it is characterised in that：Horizontal fixed block (5.2) passes through spiral shell
Bolt is connect with rack (12), and the two kidney slot a (7) arranged side by side coordinated with bolt, kidney-shaped are offered on horizontal fixed block (5.2)
The length direction in hole is the direction that basket has that (9) arrive vertical fixed block (5.1).
4. rewinder silicon chip anticollision device, collision-prevention device according to claim 1, it is characterised in that：Vertical fixed block (5.1) passes through spiral shell
Bolt is connect with cylinder (8), and coordinate with bolt two are offered side by side in rectangular through-hole (1) both sides on vertical fixed block (5.1)
Kidney slot b (2), the length direction of kidney slot b (2) is vertical direction.
5. rewinder silicon chip anticollision device, collision-prevention device according to claim 1, it is characterised in that：Anticollison block (4) is corresponding with basket tool (9)
A side surface be inclined-plane (3), the inclined direction of inclined-plane (3) is to have (9) to anticollison block (4) direction obliquely by basket.
6. rewinder silicon chip anticollision device, collision-prevention device according to claim 1, it is characterised in that：The telescopic rod of cylinder (8) and anticollision
Block is connected through a screw thread between (4), and nut, anticollison block are also rotary on the telescopic rod between anticollison block (4) and cylinder (8) cylinder body
(4) it is fitted closely with nut.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810936825.2A CN108766920A (en) | 2018-08-16 | 2018-08-16 | A kind of rewinder silicon chip anticollision device, collision-prevention device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810936825.2A CN108766920A (en) | 2018-08-16 | 2018-08-16 | A kind of rewinder silicon chip anticollision device, collision-prevention device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108766920A true CN108766920A (en) | 2018-11-06 |
Family
ID=63967090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810936825.2A Pending CN108766920A (en) | 2018-08-16 | 2018-08-16 | A kind of rewinder silicon chip anticollision device, collision-prevention device |
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| Country | Link |
|---|---|
| CN (1) | CN108766920A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114093805A (en) * | 2022-01-17 | 2022-02-25 | 杭州中欣晶圆半导体股份有限公司 | Silicon wafer rewinding machine device and operation method |
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| KR20130007110U (en) * | 2012-06-01 | 2013-12-11 | 구뎅 프리시젼 인더스트리얼 코포레이션 리미티드 | Apparatus for transporting wafer carrier |
| CN106364909A (en) * | 2016-10-28 | 2017-02-01 | 上海锴士自动化科技有限公司 | Full-automatic silicon chip inserting machine |
| CN106783675A (en) * | 2016-12-07 | 2017-05-31 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of lateral Chu Zhou mechanisms of graphite boat with reviewing detection means |
| CN208507645U (en) * | 2018-08-16 | 2019-02-15 | 通威太阳能（成都）有限公司 | A kind of rewinder silicon wafer anticollision device, collision-prevention device |
-
2018
- 2018-08-16 CN CN201810936825.2A patent/CN108766920A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20130007110U (en) * | 2012-06-01 | 2013-12-11 | 구뎅 프리시젼 인더스트리얼 코포레이션 리미티드 | Apparatus for transporting wafer carrier |
| CN106364909A (en) * | 2016-10-28 | 2017-02-01 | 上海锴士自动化科技有限公司 | Full-automatic silicon chip inserting machine |
| CN106783675A (en) * | 2016-12-07 | 2017-05-31 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of lateral Chu Zhou mechanisms of graphite boat with reviewing detection means |
| CN208507645U (en) * | 2018-08-16 | 2019-02-15 | 通威太阳能（成都）有限公司 | A kind of rewinder silicon wafer anticollision device, collision-prevention device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114093805A (en) * | 2022-01-17 | 2022-02-25 | 杭州中欣晶圆半导体股份有限公司 | Silicon wafer rewinding machine device and operation method |
| CN114093805B (en) * | 2022-01-17 | 2022-05-06 | 杭州中欣晶圆半导体股份有限公司 | Silicon wafer rewinding machine device and operation method |
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