CN108735566A - One kind interconnecting scanning electron microscope example support for vacuum - Google Patents
One kind interconnecting scanning electron microscope example support for vacuum Download PDFInfo
- Publication number
- CN108735566A CN108735566A CN201710273192.7A CN201710273192A CN108735566A CN 108735566 A CN108735566 A CN 108735566A CN 201710273192 A CN201710273192 A CN 201710273192A CN 108735566 A CN108735566 A CN 108735566A
- Authority
- CN
- China
- Prior art keywords
- sample
- vacuum
- push rod
- spring
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The present invention relates to vacuum machine fields, more particularly to a kind of for vacuum interconnection scanning electron microscope example support, loading and fixation problem for solving the lower surface sweeping Electronic Speculum wafer sample (wafer) of vacuum interconnection.There is the sample carrier tool three-decker, top layer to be made of sample tray connecting seat (6) bottom of sample tray (5), the sample holddown spring (3) being equally spaced, corresponding radial push rod (2), radial push rod fixed seat (4), center rotation cam (1), bearing (7) and circular structure；Middle layer is a spring prestressed layer, and lower layer is the sample carrier installation interface (9) of one and center rotation cam (1) central shaft interference fit.The sample tray (5) of fixed top layer, rotation bottom sample carrier installation interface (9) can drive center to rotate cam (1) and push or be closed sample holddown spring (3) open to realize loading and the fixation of the lower scanning electron microscope wafer sample of vacuum interconnection.
Description
Technical field
The present invention relates to vacuum machine field more particularly to a kind of sample carriers interconnecting scanning electron microscope for vacuum.
Technical background
Since the ultra clean environment of local may be implemented in artificial vacuum on earth, to certain material growth, prepare with
And scientific research has great importance, as prepared by semiconductor crystal wafer growth, semiconductor device, electronic scanner microscope detection
The interface etc. of object, transmission electron microscope detection material, all carries out under artificial vacuum environment.It is true preferably to utilize
Prepared by the growth of outage cleaning characteristic continuous research material, device, the detection of performance, Chinese Academy of Sciences's Suzhou nanotechnology with receive
Rice bionics fiber is designed and has built a set of vacuum interacted system.In the vacuum interacted system, all relevant material lifes
Prepared by long, device, the equipment of performance detection is all connected using vacuum pipe, and is arranged in the vacuum pipe of interconnection
Magnetic force moving sample transfer bogie for the sample of research is sent to another equipment from an equipment, and is studied sample
Itself need not be exposed in air because sample transmits in Life cycle and introduce pollution.
Scanning electron microscope (SEM) is commonly to be detected in investigation of materials, semiconductor devices preparation process and observation is set
It is standby, and it is connected into one of the equipment of above-mentioned vacuum interacted system.The sample loading of conventional SEM is under air by specimen holder
It holds on SEM sample carriers, is then charged into after SEM vacuum chambers vacuumize and carries out SEM observations, analysis.In above-mentioned vacuum interacted system
In, it is polluted to avoid introducing since sample does not allow to be exposed in atmospheric environment, existing general SEM sample carriers and stowage
Cannot be satisfied the needs that SEM samples are loaded under vacuum, it is therefore desirable to a kind of sample carrier can in vacuum environment by sample to be measured,
Especially complete wafer (wafer), is loaded on SEM observation platforms, and keeps sample motionless in observation process relative sample support.
Invention content
For SEM in above-mentioned vacuum interacted system need it is a kind of can be in vacuum environment by sample to be measured, especially
Complete wafer (wafer), is loaded on SEM observation platforms, and the sample for keeping sample motionless in observation process relative sample support
Support, the present invention propose a kind of product support for vacuum interconnection scanning electron microscope sample, have horizontal, vertical move in conjunction with SEM observation platforms
Existing sample conveyance system in dynamic and 360 ° of functions of rotating in situ and vacuum interacted system is realized under SEM sample vacuum
It loads and sample relative sample support during observation can be kept fixed.
The technical solution adopted by the present invention is：
One kind having three-decker for vacuum interconnection scanning electron microscope example support, and top layer is sample clamping layer, and middle layer is
Spring prestress application layer, bottom are the sample carrier installation interfaces being connect with SEM observation platforms.Top layer sample clamping layer is the bottom of relative to
Layer sample carrier installs interface, after applying external force and overcoming the frictional force that middle layer pre-add spring stress causes, can do opposite
Rotation；Under no outer force effect, sample carrier top layer and bottom shape under the friction force effect that middle layer spring prestressing force causes
At an entirety, rotation mobile with SEM observation platforms.
Further saying the top layer of the vacuum interconnection scanning electron microscope example support of the present invention is：The sample carrier of one circular
Disk is equidistantly equipped with 2 or 2 or more on the periphery of the sample loading end of sample tray, the sample of sample is compressed in vertical direction
Holddown spring, sample holddown spring are mounted on the radial push rod with return spring, can be with sample loading end on sample tray
Radial motion；
Further saying the top layer of the vacuum interconnection scanning electron microscope example support of the present invention is：In the center bearing of sample tray
One rotation cam of installation, center rotate continuous uniform on cam and are spaced apart protruding point and recessed point, rotated with cam, cam
On protruding point can push radial push rod, allow sample loading end of the sample holddown spring far from sample tray, loaded for sample
Space is provided, the effect of the return spring on recessed point combination radial push rod on cam can make sample holddown spring return
Onto the sample loading end of sample tray, and then compress sample；
Further say that the middle layer of the vacuum interconnection scanning electron microscope example support of the present invention is one and can provide spring and answer in advance
The mechanism of power, acting on top layer sample carrier fixation clamping mechanism in no external force makes sample carrier top layer is motionless to make, the top of sample carrier
Layer and bottom form an entirety under the friction force effect that the spring prestressing force generates, and are moved with bottom sample carrier installation interface
Dynamic, rotation makes sample carrier top layer is motionless to make when there is external force to act on top layer sample carrier circle and determine clamping mechanism, and overcome middle layer this
When the frictional force that spring prestressing force generates, bottom sample carrier installs interface under the drive of SEM observation platforms original position electric rotating machine, meeting
The center rotation cam relative sample pallet rotation in top layer is driven, sample is loaded to push the opening of sample holddown spring to wait for
Product or sample holddown spring return compress sample.
Further saying the bottom of the vacuum interconnection scanning electron microscope example support of the present invention is：One according to scanning electron microscope used original
Position spin motor shaft design, the chip sample support of Intermediate Gray circular hole install interface, and one end of centre bore and the center of top layer rotate
The central shaft of cam is interference fitted to form one, can drive center rotation cam rotation, the other end of centre bore with it is to be installed
The spin motor shafts in situ of SEM sample observation platforms match, can it is horizontal with the progress of SEM observation platforms, vertically move and in situ
360 degree rotation；
It is electrical without motor etc. all using mechanical structure in this vacuum interconnects scanning electron microscope example support, it is seen using SEM
The power of Cha Tai itself and the own sample presentation system of vacuum interacted system realize the vacuum holding of SEM samples under vacuum interacted system
Load and fixation problem, reduce the pollution sources of vacuum and the complexity of electrical connection.
Description of the drawings
Fig. 1 is the sample conveyance system principle signal of SEM observation platforms motion mode and vacuum interacted system.
Fig. 2 is the composition exploded pictorial of vacuum interconnection scanning electron microscope example support.
Fig. 3 is the assembly signal of vacuum interconnection scanning electron microscope example support.
Fig. 4 is the vacuum interconnection tight sample state of scanning electron microscope example backing pressure.
Fig. 5 is that vacuum interconnection scanning electron microscope example support opens sample holddown spring state.
Reference numeral includes：
It is the horizontal y moving directions Z of SEM sample observation platforms is SEM observation platforms that X, which is the horizontal x moving directions Y of SEM sample observation platforms,
Vertical z moving directions R is that the sample carrier C of SEM sample observation platforms original position motor 360 degree rotation direction H vacuum interacted systems is true
Center rotation cam 2 of fixation forks 1 of the sample transmission fork G in SEM sample cavities with central shaft in empty interacted system is radial
4 radial push rod fixed seat 4-1 vias of push rod 3 sample holddown spring of 2-1 radial guidance 2-2 return springs, 5 sample tray 5-1
Radial guide groove 5-2 sample loading ends 5-3 fixes screens and sample fork disengaging 6 sample tray connecting seat 6-1 screw holes 6-2 of position
7 bearing of bearing mounting hole, 8 prestressing mechanism, 9 sample carrier installs interface 9-1 cams shaft mounting hole and the original positions SEM electric rotating machine
10 sample holddown spring of mounting hole installs 11 sample carrier of screw and assembles screw
Specific implementation mode
Below in conjunction with the accompanying drawings and specific embodiment is described in further details the present invention.
Fig. 1 is the sample conveyance system principle schematic of SEM observation platforms motion mode and vacuum interacted system.In Fig. 1
Coordinate system indicate the motion mode that may be implemented of SEM observation platforms.If by the sample carrier H in Fig. 1 mounted in SEM observation platforms
On 360 degree rotation motor shaft in situ, sample stage horizontal can carry out X, Y, vertical Z in SEM sample cavities in H with sample observation platform
Direction is moved, and can also be rotated along R under the drive of SEM 360 electric rotating machines in situ.
In patent " a kind of sample conveyance system applied to vacuum interacted system " (application number 201611000379.1)
Propose the sample conveyance system of a set of operation of complete mechanical under vacuum.In the set sample conveyance system, in Fig. 1
Sample transmits fork-C and is moved forward and backward along horizontal X direction under the drive of Vacuum Magnetic bar.For the sample with wafer (wafer)
After fork-C is entered in the sample cavity of SEM, position is fixed with respect to SEM sample cavities.SEM observation platforms can drive sample carrier-H
The lower end of movable sleeving sample fork-C, rises after being directed at the notch of sample fork-C along Z axis, wafer (wafer) is accessed sample-H, so
The notch of backed off after random sample fork-C in X direction afterwards, that is, complete the sample transmit process of vacuum interacted system.It is passed in existing sample
The loading that can be carried out on system and sample carrier-H under SEM sample vacuum is sent, but is not carried out sample consolidating on SEM sample carriers
It is fixed, it cannot meet and keep the fixed requirement of relative sample support during observation of SEM samples.
Specific embodiment
Below just by taking the sample conveyance system of 2 inch wafer (wafer) vacuum interconnection as an example, illustrate that vacuum interconnects in the present invention
The structure and working method of scanning electron microscope example support.
Fig. 2 is the composition exploded view of this vacuum interconnection scanning electron microscope example support.1 is the center rotation cam with central shaft,
The length and diameter of central shaft will meet the thickness and diametric requirements of 2 inch wafer (wafer) bulk sample supports, in the present embodiment
Respectively 20mm and 18mm, center rotation cam -1 on have uniformly, be spaced apart, the protruding point of continuous and derivable transition with it is recessed
Number is identical each other for point, protruding point and recessed hall, the number phase with equidistantly distributed of the radial push rod -2 on sample tray -5
Match, and with the tip contact of radial push rod -2.In the present embodiment, the sample tray of 2 inch wafers (wafer) of carrying is a diameter of
2 sets of sample holddown spring -3 are distributed on 56mm, the sample loading end -5-3 of sample tray -5, as shown in Figure 2, as needed
Can be 3 sets, 4 sets of even more sets, principle is consistent.Center rotation cam -1 uses oval structure, long axis 22mm, short axle
18mm, protruding point and recessed each 2 of point row, are evenly spaced on, path difference 2mm.Sample holddown spring -3 can be according to sample
The requirement progress of pressing force is separately adjustable, uses the SUS303 flexural spring pieces of the thickness 0.3mm of Finger in this example,
Width 5mm, as shown in the component -3 in Fig. 2.Sample holddown spring 3 is fixed to by screw -10 on radial push rod -2, with radial direction
Guide rail -2-1 and return spring -2-2 collectively forms sample holddown spring mechanism.Radial guidance -2-1 and the diameter on sample tray -5
Match to guide groove -5-1, use the square stepped groove that thickness is 1mm in the present embodiment, ensures sample holddown spring -3 along sample
The radial motion of product pallet -5, into or leave sample loading end -5-2.It is made of sample holddown spring 3 and radial push rod -2
Samples holddown spring mechanism passes through radial guide groove mark -5-1 on sample tray -5, is inserted into radial push rod fixed seat -
4 via -4-1, centre installation return spring 2-2, is installed to screw -11 on sample carrier -5.Center rotation with central shaft
Cam -1 is installed to by bearing -7 on the bearing mounting hole -6-2 of sample tray connecting seat -6, in the present embodiment, bearing -7
Using centre bore 18mm, the zanjon ball miniature bearing of outer diameter 24mm, thickness 4mm, outside the central shaft that cam -1 is rotated with center
The internal diameter of diameter and bearing mounting hole -6-2 using interference fit, formed be not readily separated can relative rotation structure.Radial push rod
Fixed seat -4, sample tray -5 are fixed to sample tray connecting seat -6 by via with screw -11 and connecting screw hole -6-1
On, form the top layer of this vacuum interconnection scanning electron microscope example support.After the top layer for assembling vacuum interconnection scanning electron microscope example support, edge
The central shaft of center rotation cam -1 is inserted in spring prestressing mechanism -8 and forms spring prestressing force middle layer, uses in this example
The waveform spring of the two-sided salient points of SUS303 of thickness 0.1mm, interior diameter 20mm, overall diameter 40mm, such as -8 institute of component in Fig. 2
Show, other spring prestressed structures, such as 3 points or more the equally distributed ball prestressing force knots with spring compression can also be used
Structure.The prestressing force of waveform spring -8 is adjusted to be the 1/4 of the original positions SEM electric rotating machine driving force used in the present embodiment, is not having
When having the edge fixation screens -5-3 that external force acts on sample tray -5, spring prestressing force is in product pallet connecting seat -6 and sample carrier
The frictional force generated between installation interface -9 can make the original positions SEM electric rotating machine drive entire sample carrier rotation.Spring is installed to answer in advance
After force mechanisms -8, sample carrier is installed to the interior central shaft through rotating cam -1 with center of the cam shaft mounting hole -9-1 of interface -9
Outer diameter interference fit installation, upper, middle and lower-ranking is connected, and is formed a complete vacuum and is interconnected scanning electron microscope example support, such as schemes
Shown in 3.Sample carrier installs the interface of the original position the mounting hole -9-1 and SEM electric rotating machine of interface -9, with spin motor shaft in situ
Depending on type.
Below with reference to Fig. 1, the use of vacuum interconnection scanning electron microscope example support in the present invention is explained further, elaborates sample
The loading process of product wafer (wafer).Vacuum interconnection scanning electron microscope example support in the present invention installs interface -9 by sample carrier
Mounting hole -9-1 be installed on the motor of SEM sample observation platforms original position, as shown in sample carrier-H in figure.In SEM sample cavities with
Sample fork-C fixes another fixation fork-G similar with sample fork-C-structure into the consistent position of outgoing direction, fixation fork-G's
Position height is less than the position of sample fork-C, the width phase one of the opening of fixation fork G and the fixation screens -5-3 of sample tray -5
It causes, as shown in Figure 2, uses the width of 42mm in the present embodiment.The band of sample carrier in the present invention in SEM sample observation platforms
Horizontal X-Y movements, when the fixation screens -5-3 of sample tray -5 is caught in fixation fork-G, the sample carrier of this sample carrier are done under dynamic
Disk -5 is stuck motionless, starts the original positions SEM electric rotating machine at this time, the spring prestressing force of spring prestressing mechanism -8 is overcome to generate
Frictional force will drive the rotation cam -1 of the center in top layer to be rotated relative to sample tray -5 as shown in Figure 2.When cam -1
Recessed point and radial push rod -2 when contacting, sample holddown spring -3 is caught in sample tray -5 under the action of return spring 2-2
Sample loading end 5-2, compress sample, as shown in Figure 4；When the protruding point that center rotates cam -1 is contacted with radial push rod -2
When, center rotates the open-top radial push rod -2 of cam -1, and sample holddown spring -3 is pushed away to the sample loading end 5- of sample tray -5
3, as shown in figure 5, loading slot milling for wafer sample, SEM observation platforms continue to increase this sample carrier, such as Fig. 1 along Z-direction at this time
In coordinate system shown in, into the gap of sample transmission fork-C, into sample tray -5, then wafer sample (wafer) is tapped into
Sample transmission fork-C is withdrawn from X direction.It is rotated further the original positions SEM motor, the concave point of cam -1 starts to contact radial push rod -2,
In Fig. 2 under the action of return spring 2-2, holddown spring -3 returns to surface wafer (wafer) on sample tray -5, by sample pressure
Tightly.The process for unloading wafer sample is opposite with the above process.
In the present embodiment only the present invention is elaborated so that 2 inch wafers are the SEM under standard sample vacuum interacted system as an example
Vacuum interconnection scanning electron microscope example support composition and application mode, be vacuum interconnection scanning electron microscope example support citation form,
Obviously, the described embodiments are merely a part of the embodiments of the present invention, rather than whole embodiments, for the art
For technical staff, under the premise of not departing from the present invention program route, several improvements and modifications can also be made, these improvement
Do not have essential change with retouching and will be regarded as protection scope of the present invention yet.
Claims (8)
1. one kind interconnecting scanning electron microscope example support for vacuum, it is characterised in that：Described one kind is for vacuum interconnection scanning electricity
The sample carrier of mirror has three-decker, and top layer is sample clamping layer, and middle layer is spring prestress application layer, and bottom is sample carrier
Interface is installed；Top layer sample clamping layer installs interface relative to bottom sample carrier, and middle layer pre-add bullet is overcome applying external force
After the frictional force that spring stress causes, relative rotary motion can be done；Under no outer force effect, sample carrier top layer is with bottom in
An entirety is formed under the friction force effect that interbed spring prestressing force causes, the mobile, rotation with mounted surface sweeping Electronic Speculum observation platform
Turn.
2. according to claim 1 a kind of for vacuum interconnection scanning electron microscope example support, it is characterised in that：The top layer
Sample clamping layer be the sample holddown spring (3) being equally spaced by the sample tray (5) of pref. cylindrical structure, at least two, with
The corresponding radial push rod of sample holddown spring (3) quantity (2), radial push rod corresponding with radial push rod (2) quantity are fixed
The sample tray connecting seat (6) of seat (4), center rotation cam (1), bearing (7) and circular structure, passes through screw (11)
Locking is constituted；Holddown spring (3) by screw (10) be fixed to radial push rod (2) sample tray (5) sample loading end (5-
2) on one end, holddown spring (3) can be separately adjustable according to the needs of sample pressing force.
3. one kind according to claim 1 and claim 2 interconnects scanning electron microscope example support for vacuum, feature exists
In：On the sample tray (5) in addition to sample loading end (5-2), also there is the radial guidance with radial push rod (2)
The radial guide groove (5-1) and sample carrier that (2-1) structure matches fix screens (5-3)；Radial push rod (2) passes through sample tray
(5) the radial guide groove (5-1) on is inserted into the via (4-1) of radial push rod fixed seat (4), and centre is equipped with return spring (2-
2), radial push rod fixed seat (4) is connected on sample tray (5) with screw (11)；It is connected to radial push rod with screw (10)
(2) the sample holddown spring (3) on does radial fortune with radial push rod (2) on the sample loading end (5-2) of sample tray (5)
It is dynamic.
4. one kind according to claim 1 and claim 2 interconnects scanning electron microscope example support for vacuum, feature exists
In：The center rotation cam (1) is fixed on product pallet connecting seat (6) by bearing (7) with central shaft, relative to same
The sample tray (5) that sample is fixed on sample tray connecting seat (6) can rotate；Center rotates the center of cam (1)
Axis passes through middle springs prestress application layer, preferred wave shape form spring (8), the centre bore (9- with bottom sample carrier installation interface (9)
1) top interference fit makes the upper, middle and lower-ranking of vacuum interconnection scanning electron microscope example support be connected.
5. one kind according to claim 1, claim 2 and claim 4 interconnects scanning electron microscope example support for vacuum,
It is characterized in that：The center rotation cam (1) has continuous and derivable transition, the protruding point being spaced apart and recessed point, convex
Go out a little identical as the recessed number of point, matches with distribution number of the radial push rod (2) on sample tray (5), and and radial push rod
(2) tip contact；The top of radial push rod (2) is in recessed of center rotation cam (1), in return spring (2-2)
The lower sample holddown spring (3) of effect is caught on the sample loading end (5-2) of sample tray (5), can compress sample；Radial push rod
(2) at the protruding point of center rotation cam (1), cam (1) prolongs the open-top radial push rod of radial direction of sample tray (5) on top
(2), sample holddown spring (3) is lifted off to the sample loading end (5-2) of sample tray (5), space is provided for sample loading.
6. according to claim 1 a kind of for vacuum interconnection scanning electron microscope example support, it is characterised in that：The centre
Layer is spring prestress application layer, can be waveform spring (8), can also be to be evenly distributed on sample tray connecting seat (6)
Little spring top roll structure, preferred wave shape form spring (8) structure；Further middle springs prestress application layer is in sample
When top edge being ask to fix screens (5-3) without outer force effect, the frictional force generated using spring prestressing force is by sample carrier top layer
Sample clamping layer and bottom sample carrier installation interface (9) keep one, do not produce relative rotation；When one external force of application is in fixation
When blocking sample carrier top layer in screens (5-3), rotation bottom sample carrier installation interface (9) overcomes rubbing for spring prestressing force generation
Power is wiped, center can be driven to rotate cam (1) relative sample pallet (5) and rotated.
7. according to claim 1 a kind of for vacuum interconnection scanning electron microscope example support, it is characterised in that：The bottom
It is a sample carrier installation interface (9) designed according to scanning electron microscope home position spin motor shaft used, sample carrier installs interface (9)
The central shaft for rotating cam (1) with center by part on intermediate mounting hole (9-1) is interference fitted, and is connected, can be driven
Center rotates cam (1) and is rotated relative to sample tray (5).
8. according to claim 1 a kind of for vacuum interconnection scanning electron microscope example support, it is characterised in that：Described one kind
Interconnected for vacuum in the sample carrier upper, middle and lower-ranking structure of scanning electron microscope does not have electrical equipment in component, overcomes electrical equipment
The deficiency of pollution sources is distributed in a vacuum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710273192.7A CN108735566A (en) | 2017-04-24 | 2017-04-24 | One kind interconnecting scanning electron microscope example support for vacuum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710273192.7A CN108735566A (en) | 2017-04-24 | 2017-04-24 | One kind interconnecting scanning electron microscope example support for vacuum |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108735566A true CN108735566A (en) | 2018-11-02 |
Family
ID=63934546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710273192.7A Pending CN108735566A (en) | 2017-04-24 | 2017-04-24 | One kind interconnecting scanning electron microscope example support for vacuum |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108735566A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111379021A (en) * | 2018-12-29 | 2020-07-07 | 中国科学院上海微系统与信息技术研究所 | Sample holder |
| CN111381074A (en) * | 2018-12-29 | 2020-07-07 | 中国科学院上海微系统与信息技术研究所 | Needle tip transmission support of scanning tunnel microscope |
| CN113804909A (en) * | 2020-06-12 | 2021-12-17 | 中国科学院苏州纳米技术与纳米仿生研究所 | Vacuum interconnect sample transfer assembly |
| CN113884707A (en) * | 2020-07-02 | 2022-01-04 | 中国科学院苏州纳米技术与纳米仿生研究所 | Heating frame interconnection assembly and transfer vacuum sample holder |
| CN115692145A (en) * | 2022-12-30 | 2023-02-03 | 北京中科科仪股份有限公司 | SEM sample placer |
-
2017
- 2017-04-24 CN CN201710273192.7A patent/CN108735566A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111379021A (en) * | 2018-12-29 | 2020-07-07 | 中国科学院上海微系统与信息技术研究所 | Sample holder |
| CN111381074A (en) * | 2018-12-29 | 2020-07-07 | 中国科学院上海微系统与信息技术研究所 | Needle tip transmission support of scanning tunnel microscope |
| CN113804909A (en) * | 2020-06-12 | 2021-12-17 | 中国科学院苏州纳米技术与纳米仿生研究所 | Vacuum interconnect sample transfer assembly |
| CN113804909B (en) * | 2020-06-12 | 2023-12-12 | 中国科学院苏州纳米技术与纳米仿生研究所 | Vacuum interconnection sample transfer assembly |
| CN113884707A (en) * | 2020-07-02 | 2022-01-04 | 中国科学院苏州纳米技术与纳米仿生研究所 | Heating frame interconnection assembly and transfer vacuum sample holder |
| CN115692145A (en) * | 2022-12-30 | 2023-02-03 | 北京中科科仪股份有限公司 | SEM sample placer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108735566A (en) | One kind interconnecting scanning electron microscope example support for vacuum | |
| CN206711864U (en) | One kind is used for vacuum interconnection scanning electron microscope example support | |
| KR102171889B1 (en) | Substrate inverting device, substrate processing apparatus, and substrate supporting device, and substrate inverting method, substrate processing method, and substrate supporting method | |
| CN101651112B (en) | Foup opening/closing device and probe apparatus | |
| US7284760B2 (en) | Holding device for disk-shaped objects | |
| CN100443911C (en) | Electronic device test system | |
| CN100570817C (en) | Substrate board treatment and substrate handling method | |
| US8869811B2 (en) | Liquid processing apparatus and liquid processing method | |
| US20080124206A1 (en) | Wafer transfer apparatus | |
| CN105081961B (en) | Grinding device | |
| WO2000067290A3 (en) | Integrated microcolumn and scanning probe microscope arrays | |
| CN103226178B (en) | For the proving installation of electron device | |
| CN105874342B (en) | Electronic component carrying device | |
| TW200834755A (en) | The sorting apparatus for semiconductor chip | |
| KR20130024738A (en) | Substrate processing apparatus | |
| CN101231932B (en) | Manipulator for rotating and translating a sample holder | |
| CN110178210A (en) | Element processor | |
| US7775853B2 (en) | Configurable polishing apparatus | |
| KR20150100161A (en) | Apparatus for loading and unloading sample holder | |
| US9352471B1 (en) | Substrate gripper apparatus and methods | |
| JP2005123583A5 (en) | ||
| US8276898B2 (en) | Electrode transporter and fixture sets incorporating the same | |
| KR20190000479A (en) | Device transfer tool and device transfer method using the same | |
| CA2630807A1 (en) | Device and method for holding a substrate | |
| TW202122813A (en) | Radio frequency electric component test device and test operation equipment applying the same achieving the practical benefit of increasing the test yield |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20181102 |