CN111379021A - Sample holder - Google Patents

Sample holder Download PDF

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Publication number
CN111379021A
CN111379021A CN201811637662.4A CN201811637662A CN111379021A CN 111379021 A CN111379021 A CN 111379021A CN 201811637662 A CN201811637662 A CN 201811637662A CN 111379021 A CN111379021 A CN 111379021A
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CN
China
Prior art keywords
unit
sample holder
hole
sample
fixing
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811637662.4A
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Chinese (zh)
Inventor
梅红萍
李昂
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Shanghai Institute of Microsystem and Information Technology of CAS
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Shanghai Institute of Microsystem and Information Technology of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to CN201811637662.4A priority Critical patent/CN111379021A/en
Publication of CN111379021A publication Critical patent/CN111379021A/en
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/12—Substrate holders or susceptors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2202—Preparing specimens therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2204—Specimen supports therefor; Sample conveying means therefore
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Pathology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

The present invention provides a sample holder, comprising: the first unit comprises a first surface and a second surface opposite to the first surface, and the first unit comprises a first through hole penetrating through the first surface and the second surface; the transmission mode of the first unit comprises horizontal transmission; the fixing unit is positioned on the first surface of the first unit and connected with the first unit, and comprises a second through hole which is communicated with the first through hole; a second unit including a sample part, a fixing part and a connecting part; the sample part is used for bearing a sample, and the fixing part is connected with the fixing unit; the transfer mode of the second unit includes vertical transfer. According to the invention, the sample can be transferred in a large-scale interconnected vacuum system through the sample holder, including horizontal transfer and vertical transfer, so that in-situ growth and in-situ multiple characterization test of the sample in the ultrahigh vacuum interconnected system are ensured, and the problems of impurity pollution and the like in the atmosphere are avoided.

Description

Sample holder
Technical Field
The invention belongs to the field of vacuum equipment, and relates to a sample holder.
Background
Molecular Beam Epitaxy (MBE) is a newly developed new technology for preparing high-quality single crystal thin films in an ultrahigh vacuum environment, can realize single crystal growth of atom layer-by-layer deposition, can prepare artificially modulated two-dimensional thin film materials, and is favored by more and more scientific researchers by obtaining quantum well, superlattice, topological superconductivity equivalent new materials through means of accurately controlling film layer components, doping concentration and the like. The research of the topological superconducting material is the research foundation of quantum computation and quantum communication.
An angle-resolved photoelectron spectroscopy (ARPES) is a method for directly observing an electronic structure of a solid material by utilizing a photoelectric effect in an ultrahigh vacuum environment, is known as a microscope capable of seeing the electronic structure, is an optimal instrument for observing the electronic structure, and can visually obtain an energy band structure on the surface of a sample in a momentum space.
The Scanning Tunneling Microscope (STM) has high atomic-level resolution, can obtain the surface morphology and the atomic structure of a real-space sample in real time, and can image single atoms, so that the STM is widely applied to the field of surface analysis.
Molecular beam epitaxy/angle-resolved photoelectron spectroscopy integrated systems (MBE/ARPES) are becoming more and more widely used because they can solve the problems of impurity contamination during material growth, device process, and test analysis due to sample transfer, and can realize the unique advantages of in-situ growth and in-situ testing. By scanning the tunnel spectrum, surface electronic structure information such as charge density wave and energy gap structure can be obtained. Therefore, in the research of new materials, people increasingly pay more attention to the combined system including an ultrahigh vacuum Scanning Tunneling Microscope (STM) for in-situ growth and in-situ multiple characterization test means of samples.
At present, most of commercialized molecular beam epitaxy/angle-resolved photoelectron spectroscopy integrated systems (MBE/ARPES) adopt a flag-type sample holder and transfer in the horizontal direction; and because of the requirements of liquid helium Dewar and superconducting magnet design, the sample holder of the Scanning Tunneling Microscope (STM) adopts a vertical downward transmission mode, and simultaneously keeps the sample face downward (the magnetic field direction is vertical to the sample surface), so that the integrated system of molecular beam epitaxy/angle-resolved photoelectron spectroscopy (MBE/ARPES) and the sample holder used by the Scanning Tunneling Microscope (STM) have the compatibility problem. When a molecular beam epitaxy/angle-resolved photoelectron spectroscopy integrated system (MBE/ARPES) is interconnected with a low-temperature high-intensity magnetic field Scanning Tunneling Microscope (STM), in order to ensure in-situ growth and in-situ multiple characterization and testing of a sample in an ultrahigh vacuum interconnection system and avoid the problems of impurity pollution and the like under the atmosphere, the compatibility of a transfer mode needs to be considered, and the transfer operation of the sample in a large interconnection vacuum system is realized.
Therefore, it is necessary to design a new sample holder, which can be applied to both molecular beam epitaxy/angle-resolved photoelectron spectroscopy (MBE/ARPES) integrated system and Scanning Tunneling Microscope (STM) to realize the transfer operation of samples in large-scale interconnected vacuum system.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, it is an object of the present invention to provide a sample holder for solving the problem of incompatibility of the prior art integrated system for molecular beam epitaxy/angle-resolved photoelectron spectroscopy (MBE/ARPES) and the sample holder in a Scanning Tunneling Microscope (STM).
To achieve the above and other related objects, the present invention provides a sample holder, comprising:
a first unit including a first surface and a second surface opposite to the first surface, the first unit including a first through-hole penetrating the first surface and the second surface; the transmission mode of the first unit comprises horizontal transmission;
the fixing unit is positioned on the first surface of the first unit and connected with the first unit, and comprises a second through hole which is communicated with the first through hole;
a second unit including a sample part, a fixing part, and a connecting part; the sample part is used for bearing a sample, and the fixing part is connected with the fixing unit; the transfer mode of the second unit comprises vertical transfer.
Optionally, the fixing unit includes a cover plate located at the top, a limiting fixing block located at the bottom, and a spring plate located between the cover plate and the limiting fixing block.
Optionally, the spring plate comprises a tantalum spring plate.
Optionally, the connection mode of the fixing portion and the fixing unit includes one or a combination of a rotary fastening connection, a fastening connection, and a threaded connection.
Optionally, the connection mode of the fixing unit and the first unit includes one or a combination of a rotary clamping connection, a snap connection, a threaded connection, a pin connection, a rivet connection, and a welding connection.
Optionally, the center of the connecting portion coincides with the centers of the first through hole and the second through hole; the end face of the connecting part is positioned in one or a combination of the second through hole and the first through hole.
Optionally, the sample portion protrudes from the second through hole.
Optionally, the sample holder is transferred in a manner including one or a combination of horizontal transfer and vertical transfer.
Optionally, the temperature range of the sample holder application comprises 20 ℃ to 1000 ℃.
Optionally, the sample holder comprises a sample holder applied to one or a combination of molecular beam epitaxy, angle-resolved photoelectron spectroscopy and scanning tunneling microscopy.
As described above, in the sample holder of the present invention, the fixing unit connects the first unit for horizontal transmission and the second unit for vertical transmission, and the connecting part of the second unit is exposed through the first through hole and the second through hole which are communicated with each other, so that the sample holder is compatible with the horizontal transmission and the vertical transmission; the convenience of dismounting the second unit can be improved through the fixing unit; through the spring piece, the connection operation of the second unit and the fixing unit can be smooth, so that the convenience of dismounting and mounting the second unit can be further improved, the second unit can be prevented from vibrating, and the stability is improved; the sample support can be suitable for a high-temperature environment, so that the sample support can be suitable for one or a combination of molecular beam epitaxy, angle-resolved photoelectron spectroscopy and a scanning tunneling microscope, in-situ growth and in-situ multiple characterization tests of a sample in an ultrahigh vacuum interconnection system are realized, and the problems of impurity pollution and the like in the atmosphere are avoided.
Drawings
Fig. 1 is a schematic structural diagram of a first unit in the present invention.
Fig. 2a to 2c are schematic structural views of the fixing unit of the present invention.
Fig. 3 is a schematic structural diagram of a second unit in the present invention.
Fig. 4a to 4b are schematic views showing an assembly structure of the sample holder according to the present invention.
Description of the element reference numerals
100 first unit
101 sample carrier
102 handle
103 grabbing hole
104 first unit screw hole
105 first via hole
200 fixing unit
201 cover plate
211 cover plate screw hole
221 cover plate groove
231 cover plate through hole
202 limit fixing block
212 position-limiting fixed block screw hole
222 position limiting fixing block boss
232 limiting fixing block through hole
203 spring leaf
213 spring leaf through hole
204 second through hole
300 second unit
301 sample part
302 fixed part
303 connection part
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.
Please refer to fig. 1 to 4 b. It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the type, quantity and proportion of the components in actual implementation may be changed freely, and the layout of the components may be more complicated.
The present invention provides a sample holder, comprising:
a first unit including a first surface and a second surface opposite to the first surface, the first unit including a first through-hole penetrating the first surface and the second surface; the transmission mode of the first unit comprises horizontal transmission;
the fixing unit is positioned on the first surface of the first unit and connected with the first unit, and comprises a second through hole which is communicated with the first through hole;
a second unit including a sample part, a fixing part, and a connecting part; the sample part is used for bearing a sample, and the fixing part is connected with the fixing unit; the transfer mode of the second unit comprises vertical transfer.
According to the sample holder, the fixing unit is connected with the first unit for horizontal transmission and the second unit for vertical transmission, and the connecting part of the second unit is exposed through the first through hole and the second through hole which are communicated with each other, so that the sample holder can be compatible with the horizontal transmission and the vertical transmission; through fixed unit, can improve the convenience of second unit dismouting.
As a further example of this embodiment, the sample holder includes a sample holder applied to a large-scale interconnected vacuum system formed by a combination of molecular beam epitaxy, angle-resolved photoelectron spectroscopy and scanning tunneling microscopy, but is not limited thereto, and the sample holder may also be applied to only one or other of molecular beam epitaxy, angle-resolved photoelectron spectroscopy and scanning tunneling microscopy, and is not limited herein. The sample holder can realize the transfer operation of the sample in a large-scale interconnected vacuum system, including horizontal transfer and vertical transfer, thereby ensuring the in-situ growth and in-situ multiple characterization test of the sample in the ultrahigh vacuum interconnected system and avoiding the problems of impurity pollution and the like in the atmosphere.
Specifically, as shown in fig. 1, which is a schematic structural diagram of the first unit 100 in the present invention, the first unit 100 includes a first surface and a second surface opposite to the first surface, and the first unit includes a first through hole 105 penetrating through the first surface and the second surface. The first unit 100 includes a sample holder modified from a flag type sample holder, which is commonly used, but is not limited thereto, and the forming of the first unit 100 includes: firstly, a flag-type sample holder is provided, the flag-type sample holder comprises a sample bearing part 101 and a handle 102 connected with the sample bearing part 101, the handle 102 may comprise a grabbing hole 103, the shape and type of the flag-type sample holder are not limited thereto, and the transmission mode of the first unit 100 comprises horizontal transmission. In this embodiment, the first unit 100 and the fixing unit are connected by a screw, and therefore, the sample holder 101 includes a first unit screw hole 104, but not limited thereto, and the fixing unit and the first unit 100 may further include one of a rotary clamping connection, a pin connection, a rivet connection, and a welding connection, or one of a combination of a rotary clamping connection, a screw connection, a pin connection, a rivet connection, and a welding connection, and this is not limited herein. The sample bearing part 101 further comprises the first through hole 105 penetrating through the sample bearing part 101, and the first through hole 105 reserves an operation space for the subsequent second unit.
As a further embodiment of the embodiment, the fixing unit comprises a cover plate positioned at the top, a limit fixing block positioned at the bottom and a spring piece positioned between the cover plate and the limit fixing block; the spring plate includes, but is not limited to, a tantalum spring plate, and the spring plate may also be made of other high temperature resistant metal elastic materials, which are not limited herein.
Specifically, as shown in fig. 2a to 2c, which are schematic structural diagrams of the fixing unit 200 of the present invention, the fixing unit 200 includes a cover plate 201 located at the top, a limit fixing block 202 located at the bottom, and a spring plate 203 located between the cover plate 201 and the limit fixing block 202, and the structure of the fixing unit 200 is not limited thereto, and can be set as required.
Fig. 2a is a schematic structural diagram of the cover plate 201 in the fixing unit 200, wherein the cover plate 201 includes a cover plate screw hole 211, a cover plate groove 221 and a cover plate through hole 231; the cover plate groove 221 is used for providing a containing space for the spring plate 203; FIG. 2c shows a schematic view of the spring plate 203, wherein the spring plate 203 includes a spring plate through hole 213; fig. 2b is a schematic structural view of the limit fixing block 202, where the limit fixing block 202 includes a limit fixing block screw hole 212, a limit fixing block protrusion 222, and a limit fixing block through hole 232; the protruding portion 222 of the fixed block is used for subsequent connection with the second unit, in this embodiment, the fixed portion of the second unit is connected with the fixing unit 200 by a rotary fastening connection, so the protruding portion 222 of the fixed block is disposed in the fixing unit 200, so that the protruding portion 222 of the fixed block is connected with the fixed portion of the second unit by the rotary fastening connection, so as to facilitate disassembly and assembly, but not limited thereto, and the connection manner of the fixed portion of the second unit and the fixing unit 200 may further include one of a snap connection and a threaded connection or one of a combination of a rotary fastening connection, a snap connection and a threaded connection, and the connection is not limited herein. The elasticity of the spring plate 203 can make the fixing part of the second unit perform rotating, clamping and connecting operations in the fixing unit 200 smoothly, and can avoid the second unit from generating vibration, the spring plate 203 can be a tantalum spring plate, so that the spring plate 203 can meet the requirements of elasticity and high temperature resistance at the same time, and the spring plate 203 can also be made of other high temperature resistant metal elastic materials, which is not limited here.
The coupling step of the fixing unit 200 includes: the spring plate 203 is placed in the cover plate groove 221, the cover plate 201 is placed on the limiting fixing block 202 after being turned over, and then the cover plate 201, the spring plate 203, the limiting fixing block 202 and the first unit 100 enter from the second surface of the first unit 100 through countersunk screws and are integrally installed through the first unit screw hole 104, the limiting fixing block screw hole 232 and the cover plate screw hole 211. The countersunk head screw may be used to make the second surface of the first unit 100 have a horizontal plane, but is not limited thereto. The connected fixing unit 200 forms the second through hole through the cover plate through hole 231, the spring piece through hole 213 and the limiting fixing block through hole 232, and the second through hole is communicated with the first through hole 105 to provide an accommodating space for the subsequent second unit.
Fig. 3 is a schematic diagram of a second unit 300 according to the present invention.
Specifically, the second unit 300 is formed by modifying a sample holder of a scanning tunneling microscope, which is commonly used, but not limited to this, and the second unit 300 includes: a sample portion 301, a fixing portion 302, and a connecting portion 303; the sample portion 301 is used for carrying a sample, the fixing portion 302 is connected to the fixing unit 200, and the transmission manner of the second unit 300 includes vertical transmission.
As a further example of this embodiment, the center of the connecting portion 303 coincides with the centers of the first through hole 105 and the second through hole; the end surface of the connecting part 303 is located in one or a combination of the second through hole and the first through hole 105; the sample portion 301 protrudes from the second through hole.
Specifically, fig. 4a to 4b are schematic views showing an assembly structure of the sample holder according to the present invention. The second unit 300 is inserted into the second through hole 204 from the cover plate through hole 231, and the second unit 300 and the fixing unit 200 can be assembled and disassembled through the fixing portion 302 by rotating the second unit 300, so that the operation convenience can be improved, the connection mode of the second unit 300 and the fixing unit 200 is not limited to this, and the fixing portion 302 can also be connected with the spring plate 203, so that the rotation operation of the second unit 300 in the fixing unit 200 is further smooth through the elastic force of the spring plate 203, and the second unit 300 can be further fixed to avoid vibration. When the center of the connecting portion 303 coincides with the centers of the first through hole 105 and the second through hole 204, the convenience of operation can be further improved; the end surface of the connecting portion 303 is located in one or a combination of the second through hole 204 and the first through hole 105, so that the end surface of the connecting portion 303 does not exceed the second surface of the first unit 100, and thus the second surface of the first unit 100 can have a horizontal plane to facilitate horizontal transfer; the sample portion 301 protrudes from the second through hole 204, which is beneficial for carrying a sample.
As a further embodiment of this embodiment, the sample holder is transferred in one or a combination of horizontal transfer and vertical transfer.
Specifically, since the first unit 100 may perform horizontal transfer and the second unit 300 may perform vertical transfer, when the sample holder is formed by combining the first unit 100 and the second unit 300, the combination of the horizontal transfer and the vertical transfer of the sample holder may be achieved, and thus, the application range of the sample holder may be increased.
As a further example of this embodiment, the sample holder is applied at a temperature in the range of 20 ℃ to 1000 ℃.
Specifically, the material of the sample holder includes a high temperature resistant material, the temperature range of the high temperature resistant material includes 20 ℃ to 1000 ℃, such as 600 ℃, 800 ℃, and the like, wherein except that the spring plate 203 selects the tantalum spring plate or other high temperature resistant metal elastic materials with high elasticity, the material of other parts can be selected from molybdenum materials with high temperature resistance, and the selection of specific materials can be selected according to specific needs, and is not limited herein.
In summary, in the sample holder of the present invention, the fixing unit is connected to the first unit for horizontal transmission and the second unit for vertical transmission, and the connecting portion of the second unit is exposed through the first through hole and the second through hole, so that the sample holder is compatible with the horizontal transmission and the vertical transmission; the convenience of dismounting the second unit can be improved through the fixing unit; through the spring piece, the connection operation of the second unit and the fixing unit can be smooth, so that the convenience of dismounting and mounting the second unit can be further improved, the second unit can be prevented from vibrating, and the stability is improved; the sample support can be suitable for a high-temperature environment, so that the sample support can be suitable for one or a combination of molecular beam epitaxy, angle-resolved photoelectron spectroscopy and a scanning tunneling microscope, in-situ growth and in-situ multiple characterization tests of a sample in an ultrahigh vacuum interconnection system are realized, and the problems of impurity pollution and the like in the atmosphere are avoided. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.

Claims (10)

1. A sample holder, characterized in that it comprises:
a first unit including a first surface and a second surface opposite to the first surface, the first unit including a first through-hole penetrating the first surface and the second surface; the transmission mode of the first unit comprises horizontal transmission;
the fixing unit is positioned on the first surface of the first unit and connected with the first unit, and comprises a second through hole which is communicated with the first through hole;
a second unit including a sample part, a fixing part, and a connecting part; the sample part is used for bearing a sample, and the fixing part is connected with the fixing unit; the transfer mode of the second unit comprises vertical transfer.
2. The sample holder according to claim 1, characterized in that: the fixing unit comprises a cover plate positioned at the top, a limiting fixing block positioned at the bottom and a spring piece positioned between the cover plate and the limiting fixing block.
3. The sample holder according to claim 2, characterized in that: the spring plate comprises a tantalum spring plate.
4. The sample holder according to claim 1, characterized in that: the connection mode of the fixing part and the fixing unit comprises one or a combination of rotary clamping connection, buckling connection and threaded connection.
5. The sample holder according to claim 1, characterized in that: the connection mode of the fixing unit and the first unit comprises one or a combination of rotary clamping connection, buckle connection, threaded connection, pin connection, riveting connection and welding connection.
6. The sample holder according to claim 1, characterized in that: the center of the connecting part is coincided with the centers of the first through hole and the second through hole; the end face of the connecting part is positioned in one or a combination of the second through hole and the first through hole.
7. The sample holder according to claim 1, characterized in that: the sample part protrudes out of the second through hole.
8. The sample holder according to claim 1, characterized in that: the transmission mode of the sample holder comprises one or a combination of horizontal transmission and vertical transmission.
9. The sample holder according to claim 1, characterized in that: the temperature range of the sample holder application comprises 20-1000 ℃.
10. The sample holder according to any one of claims 1 to 9, wherein: the sample holder comprises a sample holder applied to one or a combination of molecular beam epitaxy, angle-resolved photoelectron spectroscopy and a scanning tunneling microscope.
CN201811637662.4A 2018-12-29 2018-12-29 Sample holder Pending CN111379021A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811637662.4A CN111379021A (en) 2018-12-29 2018-12-29 Sample holder

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Application Number Priority Date Filing Date Title
CN201811637662.4A CN111379021A (en) 2018-12-29 2018-12-29 Sample holder

Publications (1)

Publication Number Publication Date
CN111379021A true CN111379021A (en) 2020-07-07

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CN201811637662.4A Pending CN111379021A (en) 2018-12-29 2018-12-29 Sample holder

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101100763A (en) * 2007-05-17 2008-01-09 浙江大学 Growth device for preparing IV-VI species semiconductor single-crystal thin film
US20120244038A1 (en) * 2009-07-31 2012-09-27 The Regents Of The University Of California Scanning Tunneling Microscope Assembly, Reactor, and System
CN108735566A (en) * 2017-04-24 2018-11-02 上海磐颖实业有限公司 One kind interconnecting scanning electron microscope example support for vacuum
CN209307512U (en) * 2018-12-29 2019-08-27 中国科学院上海微系统与信息技术研究所 Sample carrier

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101100763A (en) * 2007-05-17 2008-01-09 浙江大学 Growth device for preparing IV-VI species semiconductor single-crystal thin film
US20120244038A1 (en) * 2009-07-31 2012-09-27 The Regents Of The University Of California Scanning Tunneling Microscope Assembly, Reactor, and System
CN108735566A (en) * 2017-04-24 2018-11-02 上海磐颖实业有限公司 One kind interconnecting scanning electron microscope example support for vacuum
CN209307512U (en) * 2018-12-29 2019-08-27 中国科学院上海微系统与信息技术研究所 Sample carrier

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