CN115692145A - SEM sample placer - Google Patents
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- CN115692145A CN115692145A CN202211714403.3A CN202211714403A CN115692145A CN 115692145 A CN115692145 A CN 115692145A CN 202211714403 A CN202211714403 A CN 202211714403A CN 115692145 A CN115692145 A CN 115692145A
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Abstract
The invention discloses a SEM sample placement device, which comprises a sample holder and a detection circuit, wherein the sample holder is provided with a plurality of sample holes; the sample support comprises a detection PCB and a sample support main body, the sample support main body is fixed on the SEM sample table, and the detection PCB is superposed and fixed on the sample support main body; a slot is arranged from top to bottom on the same side of the detection PCB and the sample support main body, and is used for providing a moving space for the manipulator when the manipulator places a conductive sample; a first detection area and a second detection area are respectively arranged on the two sides of the slot on the upper surface of the detection PCB, the outlines of the first detection area and the second detection area are the same as the outline of the bottom of the conductive sample and are covered with a conductive coating, and the first detection area and the second detection area are connected with a detection circuit through PCB wiring; the technical scheme provided by the invention can detect whether the conductive sample is accurately placed.
Description
Technical Field
The invention relates to the field of SEM industry, in particular to a SEM sample placement device.
Background
Scanning Electron Microscope (SEM) is an Electron optical instrument, which uses focused Electron beams to scan line by line on the surface of a conductive sample, the Electron beams bombard the surface of the conductive sample to generate secondary electrons or backscattered electrons, the secondary electrons or backscattered electrons generated on the surface of the conductive sample are collected, the Scanning position of the Electron beams on the surface of the conductive sample and the quantity of the generated secondary electrons or backscattered electrons are expressed in a two-dimensional image form, and the secondary Electron image or backscattered Electron image of the Scanning Electron Microscope is obtained, which plays an irreplaceable role in the fields of new materials, new energy sources, national defense, scientific research and the like.
With the development of technology, the use of scanning electron microscopes in production lines is increasing, and in order to improve the efficiency of production lines, it is generally necessary to transfer a conductive sample into an SEM sample chamber by a robot through a pre-pump chamber or a vacuum interconnection device. The SEM sample chamber is a vacuum environment, the vacuum degree is generally better than 10 < -3 > Pa, and a manipulator needs to place the sample on a receiving mechanism of the sample stage. In order to ensure that the conductive sample is placed at the designated position, the system needs to detect whether the conductive sample is placed at the designated position before the SEM electron beam scans the conductive sample.
Three methods are commonly used in the prior art to detect whether the conductive sample is accurately placed at a specified position. The first is to use an industrial camera, the manipulator places the sample in a receiving position, the position is calibrated by photographing, and then the sample placement position is determined by some image algorithms. However, the volume of the SEM sample chamber is generally limited, and when the camera is placed in the sample chamber in a vacuum environment, precious space resources in the sample chamber can be occupied due to the large volume of the camera, on the other hand, more camera components can bring about more gas adsorption, and adverse effects are brought to the vacuum degree of the SEM; the second method is to place a sensor, such as a pressure sensor, at the front end of the manipulator for detection, but this method can only prove that the sample leaves the manipulator, and cannot effectively prove that the sample is placed correctly; the third method is to design a sample holder and to design a sensor combination such as a photoelectric sensor, a pressure sensor, etc. on the sample holder, which makes the design of the sample holder relatively complicated.
Disclosure of Invention
In view of this, the embodiment of the present invention provides an SEM sample placing apparatus, so as to achieve accurate placement detection of a conductive sample without occupying too much space of an SEM sample chamber and affecting a vacuum degree of the SEM sample chamber.
According to a first aspect, an embodiment of the present invention is an SEM sample placement device comprising a sample holder and a detection circuit; the sample support comprises a detection PCB and a sample support main body, the sample support main body is fixed on an SEM sample table, and the detection PCB is fixedly superposed on the sample support main body; a slot is arranged on the same side of the detection PCB and the sample support main body from top to bottom and is used for providing a moving space for a manipulator when the manipulator places a conductive sample; a first detection area and a second detection area are respectively arranged on the two sides of the slot on the upper surface of the detection PCB, the outlines of the first detection area and the second detection area are the same as the outline of the bottom of the conductive sample and are covered with a conductive coating, and the first detection area and the second detection area are connected with the detection circuit through PCB wiring; when the manipulator places a conductive sample on the detection PCB and the bottom of the conductive sample is coincided with the first detection area and the second detection area simultaneously, the detection circuit forms a path through the first detection area, the second detection area and the conductive sample, so that the detection circuit sends out a signal for accurate placement.
Optionally, the sample holder further comprises a sample guide plate, the sample guide plate is fixed on the detection PCB plate in an overlapping manner, and the center of the sample guide plate comprises a guide hole for guiding the conductive sample to pass through; the sample guide board align to detect the fluting position of PCB board and be equipped with the same fluting to the fluting that will set up extends to the bullport for when the electrically conductive sample is placed to the manipulator provides the removal space.
Optionally, the edge of the guide hole is provided with a slope with a preset angle.
Optionally, the detection circuit comprises: the device comprises a first power supply, a second power supply, a photoelectric coupler, a detection resistor and a detection chip; the first power supply is connected with the second detection area, and the first detection area is connected with the ground; the input end of the control side of the photoelectric coupler is connected with the first power supply, and the output end of the control side of the photoelectric coupler is connected with the ground; the input end of the controlled side of the photoelectric coupler is connected with the second power supply through the detection resistor, and the output end of the controlled side of the photoelectric coupler is connected with the ground; and a detection pin of the detection chip is connected between the detection resistor and the input end of the controlled side of the photoelectric coupler.
Optionally, the detection circuit further comprises a relay; the relay is used for controlling the connection and disconnection of a line between the first power supply and the second detection area and controlling the connection and disconnection of a line between the first detection area and the ground.
Optionally, the device further comprises an alarm circuit and a ground ring; the sample guide plate is made of metal; the sample holder main body is made of metal; the sample guide plate and the detection PCB are fixed on the sample support main body through metal screws; the sample holder main body is fixed on the SEM sample table through a fixing column; one end of the grounding ring is sleeved on one fixing column of the sample holder main body, and the other end of the grounding ring is connected to a first input end of the alarm circuit; a second input end of the alarm circuit is connected to the ground; when the sample guide plate is in contact with a pole shoe of the SEM, the sample guide plate is grounded, so that the first input end of the alarm circuit is grounded, and the first input end and the second input end of the alarm circuit are conducted, so that the alarm circuit sends out an alarm signal.
Optionally, a third detection area and a fourth detection area are further respectively arranged on two sides of the slot on the upper surface of the detection PCB, and when the conductive sample is correctly placed, the bottom of the conductive sample can contact the third detection area and the fourth detection area; the third detection area and the fourth detection area are coated with conductive coatings; the other areas of the upper surface of the detection PCB except the third detection area, the fourth detection area, the first detection area and the second detection area are also coated with conductive coatings; the third detection area and the fourth detection area are both directly connected with the other areas; when the conductive sample is contacted with the pole shoe of the SEM, the conductive sample is grounded, so that the first input end of the alarm circuit is grounded, and further the first input end and the second input end of the alarm circuit are conducted, so that the alarm circuit sends out an alarm signal.
Optionally, the conductive coating is a copper coating.
Optionally, the first and second detection areas are connected by PCB wiring to a vacuum feedthrough aerial socket through which the detection circuitry is connected.
Optionally, the alarm circuit comprises a buzzer.
The technical scheme provided by the application has the following advantages:
the technical scheme provided by the application provides an SEM sample placement device, which comprises a sample support and a detection circuit; the sample support comprises a detection PCB and a sample support main body, the sample support main body is fixed on the SEM sample table, and the detection PCB is superposed and fixed on the sample support main body; a slot is arranged from top to bottom on the same side of the detection PCB and the sample support main body, and is used for providing a moving space for the manipulator when the manipulator places a conductive sample; a first detection area and a second detection area are respectively arranged on the two sides of the slot on the upper surface of the detection PCB, the outlines of the first detection area and the second detection area are the same as the outline of the bottom of the conductive sample and are covered with a conductive coating, and the first detection area and the second detection area are connected with a detection circuit through PCB wiring; when the manipulator accurately places the conductive sample on the detection PCB, and the bottom outline of the conductive sample is simultaneously coincided with the first detection area and the second detection area, the detection circuit forms a complete path through the first detection area, the second detection area and the conductive sample, so that the detection circuit starts to work and can send out a signal for accurate placement, and the scheme for accurately placing the conductive sample on the SEM sample stage is realized. Compared with an industrial camera, the device occupies less space of the SEM sample chamber, cannot influence the SEM vacuum degree, is easy to obtain materials used by the device, is simpler in elements and circuits, and ensures that the device is lower in implementation cost.
Drawings
The features and advantages of the present invention will be more clearly understood by reference to the accompanying drawings, which are illustrative and not to be construed as limiting the invention in any way, and in which:
FIG. 1 shows a schematic diagram of an SEM sample placement device according to one embodiment of the invention;
FIG. 2 is a schematic diagram illustrating a structure of a test PCB according to an embodiment of the present invention;
FIG. 3 shows another schematic diagram of an SEM sample placement device according to one embodiment of the invention;
FIG. 4 shows a schematic diagram of a detection circuit in one embodiment of the present invention;
FIG. 5 shows another schematic diagram of the detection circuit in one embodiment of the present invention;
FIG. 6 shows a schematic structural diagram of a ground ring in one embodiment of the present invention;
FIG. 7 is a schematic diagram showing the connection between the sample holder and the alarm circuit according to one embodiment of the present invention;
FIG. 8 is another schematic diagram of the structure for inspecting PCB in one embodiment of the present invention;
FIG. 9 shows a schematic diagram of an alarm circuit in one embodiment of the present invention;
the reference numbers in the figures are: 1-detecting a PCB (printed Circuit Board), 2-a sample holder main body, 3-a notch, 4-a first detection area, 5-a second detection area, 6-a detection circuit, 7-a sample guide plate, 8-a photoelectric coupler, VCC 1-a first power supply, VCC 2-a second power supply, R1-a detection resistor, a MCU-a detection chip, a RELAY-RELAY, R2/R3-a current limiting resistor, 9-an alarm circuit, 10-a grounding ring, 11-a third detection area, 12-a fourth detection area, and 13-other areas.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings of the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without inventive step based on the embodiments of the present invention, are within the scope of the present invention.
Referring to fig. 1 and 2, in one embodiment, an SEM sample placement apparatus includes a sample holder and a detection circuit 6; the sample holder comprises a detection PCB (printed circuit board) 1 and a sample holder main body 2, the sample holder main body 2 is fixed on an SEM (SEM is the prior art and is not shown in figure 1), the detection PCB 1 is superposed and fixed on the sample holder main body 2, and the fixing mode can be adhesion, bolting, riveting and the like; a slot 3 is arranged from top to bottom on the same side of the detection PCB 1 and the sample support main body 2 and is used for providing a moving space for a manipulator when the manipulator places a conductive sample; a first detection area 4 and a second detection area 5 are respectively arranged on two sides of the slot 3 on the upper surface of the detection PCB board 1, the outlines of the first detection area 4 and the second detection area 5 are the same as the outline of the bottom of the conductive sample, the conductive sample is covered with a conductive coating, and the first detection area 4 and the second detection area 5 are connected with a detection circuit 6 through PCB wiring. In fig. 1, a cylindrical conductive sample is taken as an example, the bottom of the conductive sample is circular, and thus the first detection area 4 and the second detection area 5 are fan-shaped areas. In practical applications, the outlines of the first detection region 4 and the second detection region 5 need to be adjusted according to the actual shape of the bottom of the conductive sample, for example, the conductive sample is a cube, and the first detection region 4 and the second detection region 5 should be rectangles distributed on two sides of the slot 3.
According to the SEM sample placing device provided by the embodiment of the invention, the manipulator places the conductive sample on the detection PCB 1, if the position of the conductive sample is accurately placed, the bottom outline of the conductive sample is coincided with the first detection area 4 and the second detection area 5 at the same time, and as the conductive coatings are coated on the first detection area 4 and the second detection area 5, the detection circuit 6 forms a complete passage through the first detection area 4, the second detection area 5 and the conductive sample, so that the detection circuit 6 can be electrified to start working, and a signal with accurate placement is sent out to inform the SEM controller of subsequent scanning work. If the conductive sample is not accurately placed, the detection circuit 6 cannot form a complete path through the first detection area 4, the second detection area 5 and the conductive sample, so that the detection circuit 6 cannot be electrified to start working and cannot send out a signal for accurate placement.
Specifically, as shown in fig. 3, in an embodiment, the sample holder provided in the embodiment of the present invention further includes a sample guide plate 7, the sample guide plate 7 is fixed on the detection PCB 1 in an overlapping manner, and a fixing manner such as a screw fixing manner, or a fixing manner such as adhesion or riveting may be used in fig. 3, which is not particularly limited in this embodiment. The center of the sample guide plate 7 includes a guide hole for guiding the conductive sample to pass through, and in fig. 3, taking a cylindrical conductive sample as an example, the shape of the sample guide hole adapted to the bottom of the conductive sample is also circular, and in practical applications, the shape of the sample guide hole needs to be adapted to the actual shape of the conductive sample, such as a rectangle, a triangle, and the like, and the embodiment of the present invention is not limited in particular. The sample guide plate 7 is provided with the same slot aligned with the slot position of the detection PCB board 1, and extends the set slot to the guide hole for providing a moving space for the manipulator when placing the conductive sample. The sample guide plate 7 provided by the embodiment of the invention limits the moving space of the conductive sample, and the auxiliary manipulator places the conductive sample on the detection PCB 1 through the guide hole on the sample guide plate 7, so that the conductive sample can be more easily aligned to the first detection area 4 and the second detection area 5 of the detection PCB 1 and placed on the detection PCB 1, the accuracy success rate of placing the conductive sample is further improved, and the accuracy rate of subsequent SEM scanning work is ensured.
Specifically, in the embodiment of the present invention, a slope of a predetermined angle, for example, a slope of an inclination angle of 45 degrees, is further provided at the edge of the guide hole of the sample-guide plate 7. When the robot hand places the conductive sample through the guide hole, even if the edge of the guide hole and the bottom edge of the conductive sample have slight misalignment, the conductive sample can slide to the right center of the guide hole through the slope of the preset angle, thereby further assisting the robot hand to place the conductive sample through the guide hole more easily.
Specifically, as shown in fig. 4, in the embodiment of the present invention, the detection circuit 6 includes: first power VCC1, second power VCC2, optoelectronic coupler 8, detection resistance R1, detection chip MCU. The first power source VCC1 is connected with the second detection area 5, and the first detection area 4 is connected with the ground; the input end of the control side of the photoelectric coupler 8 is connected with a first power supply VCC1, and the output end of the control side of the photoelectric coupler 8 is connected with the ground; the input end of the controlled side of the photoelectric coupler 8 is connected with a second power supply VCC2 through a detection resistor R1, and the output end of the controlled side of the photoelectric coupler 8 is connected with the ground; and a detection pin of the detection chip MCU is connected between the detection resistor R1 and the controlled input end of the photoelectric coupler 8.
Specifically, if the conductive sample is not accurately placed on the first detection area 4 and the second detection area 5, the first power VCC1 and the ground cannot be connected, so the first power VCC1 outputs current to the input end of the control side of the photoelectric coupler 8, and outputs current to the ground from the output end of the control side of the photoelectric coupler 8, thereby lighting the light emitting diode in the photoelectric coupler 8, conducting the circuit of the controlled side of the photoelectric coupler 8, and allowing the second power VCC2 to output current to the ground sequentially through the detection resistor R1 and the controlled side of the photoelectric coupler 8, because the detection pin of the detection chip MCU is connected between the detection resistor R1 and the input end of the controlled side of the photoelectric coupler 8, the detection chip MCU detects the voltage on the ground side, obtaining a low level signal, and representing that the conductive sample is not accurately placed. If electrically conductive sample accuracy has been placed on first detection area 4 and second detection area 5, through the conductive coating and electrically conductive sample itself of first detection area 4 and second detection area 5, first power VCC1 directly switches on with the ground, optoelectronic coupler 8 control side can not exported to first power VCC 1's electric current, and then optoelectronic coupler 8 is controlled the circuit of side and can not switch on, the voltage that detects chip MCU's detection pin detected this moment is equivalent to second power VCC 2's voltage, obtain high level signal, the electrically conductive sample of sign has accomplished the accuracy and has placed.
In particular, the first and second detection areas are connected by PCB wiring to vacuum feedthrough aerial sockets, through which the detection circuitry is connected to further protect the vacuum of the SEM sample chamber.
Specifically, as shown in fig. 5, in the embodiment of the present invention, the detection circuit 6 further includes a RELAY and a current limiting resistor R2/R3; the RELAY is used for controlling the on-off of a line between the first power source VCC1 and the second detection area 5, and controlling the on-off of a line between the first detection area 4 and the ground. When the SEM starts to work, firstly, the RELAY RELAY is closed (the circuit where the diode D1 is located is electrified), so that the pins a and b and the pins c and D of the RELAY RELAY are connected, and when a conductive sample is accurately placed, the first power supply VCC1 can be connected with the ground; if the RELAY RELAY is not closed, the first power supply VCC1 and the ground cannot be connected when the conductive sample is accurately placed, so that the condition that the detection circuit 6 is conducted by mistake when the SEM does not work is avoided through the RELAY RELAY. In addition, the current limiting resistor R2/R3 limits the current in the detection circuit 6, thereby protecting the detection circuit 6.
Specifically, as shown in fig. 6 and 7, the SEM sample placing apparatus provided by the embodiment of the present invention further includes an alarm circuit 9 and a ground ring 10; the sample guide plate 7 is made of metal; the sample holder main body 2 is made of metal; the sample guide plate 7 and the detection PCB 1 are bolted on the sample holder main body 2 through metal screws; the sample holder main body 2 is fixed on an SEM sample table through a fixing column; one end of the grounding ring 10 is sleeved on one fixing column of the sample holder main body 2, and the other end of the grounding ring is connected to a first input end of the alarm circuit 9; a second input of the alarm circuit 9 is connected to ground.
Specifically, in practical application, the sample holder placed on the SEM sample stage is separated from other elements, the SEM sample stage has an adjustable function of up-down, left-right, and if the sample holder touches the lower pole shoe of the SEM objective lens during adjustment, the pole shoe is easily damaged. To address this issue, the SEM sample placement device provided by embodiments of the present disclosure also provides pole piece collision detection functionality. In this embodiment, sample guide plate 7 and sample hold in the palm main part 2 and are the metal material, and sample guide plate 7 with detect PCB board 1 and pass through metal screw to be fixed on sample holds in the palm main part 2 for the sample that sample guide plate 7 and sample held in the palm the main part 2 formation holds in the palm wholly is an object that can electrically conduct.
The sample support main body 2 comprises a plurality of fixing columns which are fixed on the SEM sample table, a grounding ring 10 is sleeved on one fixing column of the sample support main body 2, the other end of the grounding ring 10 is connected to a first input end of an alarm circuit 9, and the specific connection method is as follows: the fixed column of sample support is connected to the first pin of vacuum BNC socket through ground ring 10, and vacuum BNC socket is whole to be installed on the outer wall of SEM sample room, and the first pin of vacuum BNC socket is connected to the first input of alarm circuit 9 through vacuum BNC plug and a plug connector to be equivalent to that the sample holds in the palm whole and alarm circuit 9's first input is connected. In addition, the second input end of the alarm circuit 9 is connected to the ground, and the specific connection method is as follows: the second input end of the alarm circuit 9 is connected with the second pin of the vacuum BNC socket through the plug connector, and the second pin of the vacuum BNC socket is directly connected with the outer wall of the SEM sample chamber, so that the second input end of the alarm circuit 9 is directly connected with the ground.
In an application scenario, it should be understood that the sample chamber, the lens barrel, and the pole shoe under the objective lens involved in the SEM main body are all connected to the ground. If the sample guide plate 7 does not touch the pole shoe of the SEM objective lens, which is equivalent to the whole suspension of the sample holder, the first input end of the alarm circuit 9 is suspended, the second input end of the alarm circuit 9 is grounded, the whole position of the alarm circuit 9 at the first input end and the second input end is in a broken circuit state, and the alarm circuit 9 cannot send out an alarm signal. If the sample guide plate 7 touches the pole shoe of the SEM objective lens, the pole shoe of the SEM objective lens is grounded, which is equivalent to the grounding of the whole sample holder, which is equivalent to the grounding of the first input end of the alarm circuit 9, and the grounding of the second input end of the alarm circuit 9, so that the positions of the whole alarm circuit 9 at the first input end and the second input end are equivalent to the communication state, and the alarm circuit 9 forms a loop capable of working, and then sends out an alarm signal. Through the scheme provided by the embodiment, the sample guide plate 7 of the sample support can give an alarm in time when touching the pole shoe, so that a user can adjust the position of the SEM sample stage in time, the pole shoe is prevented from being damaged by collision, and the reliability of the SEM working process is ensured.
In particular, in practical applications, the conductive sample may be higher than the sample guide plate 7, if the conductive sample is higher, the sample guide plate 7 is lower, and when the user moves the SEM sample stage, there may be a case where the conductive sample hits the objective lens pole piece but there is no alarm because the sample guide plate 7 does not touch the pole piece.
In order to solve the problem, as shown in fig. 8, the embodiment of the present invention provides a further improvement, wherein a third detection area 11 and a fourth detection area 12 are respectively disposed on two sides of the slot 3 on the upper surface of the detection PCB 1, and when the conductive sample is correctly placed, the bottom of the conductive sample can contact the third detection area 11 and the fourth detection area 12; the third detection area 11 and the fourth detection area 12 are also coated with a conductive coating; the other areas 13 of the upper surface of the detection PCB board 1 except the third detection area 11, the fourth detection area 12, the first detection area 4 and the second detection area 5 are also covered with the conductive coating; also, the third detection area 11 and the fourth detection area 12 are both in direct communication with the other area 13 (note that the first detection area 4 and the second detection area 5 are not in direct communication with the other area 13 of the detection PCB 1).
Because sample guide plate 7, detect PCB board 1 and sample support main part 2 stack fixedly, so detect other region 13 and the sample guide plate 7 contact of PCB board 1, because sample guide plate 7 and sample support main part 2 are the metal material to through metal screw connection, so sample guide plate 7, detect the whole that PCB board 1 and sample support main part 2 three component constitution is equivalent to a conductive object equally. When a conductive sample firstly touches an objective pole shoe, the conductive sample is grounded, and the conductive sample is contacted with the third detection area 11 and the fourth detection area 12, so that the third detection area 11 and the fourth detection area 12 of the detection PCB 1 are grounded, the third detection area 11 and the fourth detection area 12 are connected with the whole sample support through other areas 13 of the detection PCB 1, so that the sample support is integrally grounded, the first input end of the alarm circuit 9 is grounded through the grounding ring 10, which is equivalent to the first input end and the second input end of the alarm circuit 9 being simultaneously grounded, and the positions of the alarm circuit 9 integrally at the first input end and the second input end are equivalent to a communicated state, so that the alarm circuit 9 forms a loop capable of working, and further sends an alarm signal. Through the scheme that this embodiment provided, be higher than sample guide board 7 messenger at electrically conductive sample, can in time report to the police to the condition that electrically conductive sample touched the pole shoe, make the position of user in time adjustment SEM sample platform, avoid the pole shoe to be damaged by the collision, further guaranteed the reliability of SEM working process.
Specifically, as shown in fig. 9, the alarm circuit 9 provided in the embodiment of the present invention is a buzzer alarm circuit 9 composed of a resistor R4, a resistor R5, a resistor R6, a triode Q1, diodes D2, D3, D4, and D5, and a buzzer J3, so that when the sample holder or the conductive sample touches the pole shoe, the first input terminal and the second input terminal are simultaneously grounded and connected, and the alarm circuit 9 is turned on to issue a buzzer alarm, so as to more obviously notify the user to adjust the position of the SEM sample stage in time.
Specifically, in the embodiment of the present invention, the conductive coating on the detection PCB 1 is a copper coating, so that the detection PCB 1 has good conductivity.
Specifically, in the present embodiment, the first detection region 4 and the second detection region 5 are connected to the vacuum BNC socket through PCB wiring, and are connected to the detection circuit 6 through the vacuum BNC socket, so as to further protect the vacuum environment of the SEM sample chamber.
Through the cooperative cooperation of the above components, the technical scheme provided by the application provides an SEM sample placement device, which comprises a sample holder and a detection circuit 6; the sample holder comprises a detection PCB (printed circuit board) 1 and a sample holder main body 2, the sample holder main body 2 is fixed on an SEM (scanning electron microscope) sample table, and the detection PCB 1 is superposed and fixed on the sample holder main body 2; a slot 3 is arranged from top to bottom on the same side of the detection PCB 1 and the sample support main body 2 and is used for providing a moving space for a manipulator when the manipulator places a conductive sample; a first detection area 4 and a second detection area 5 are respectively arranged on two sides of the slot 3 on the upper surface of the detection PCB board 1, the outlines of the first detection area 4 and the second detection area 5 are the same as the outline of the bottom of the conductive sample, and the conductive sample is covered with a conductive coating, and the first detection area 4 and the second detection area 5 are connected with a detection circuit 6 through PCB wiring; when the manipulator accurately places the conductive sample on the detection PCB board 1, and the bottom outline of the conductive sample is coincided with the first detection area 4 and the second detection area 5 at the same time, the detection circuit 6 forms a complete path with the conductive sample through the first detection area 4, the second detection area 5, so that the detection circuit 6 starts to work and can send out a signal for accurately placing the conductive sample, and the scheme for accurately placing the conductive sample on the SEM sample stage is realized. Compared with an industrial camera, the device occupies less space of an SEM sample chamber, cannot influence the SEM vacuum degree, is higher in accuracy compared with a scheme for installing a sensor by a manipulator, is easy to obtain materials used by the device, is simpler in elements and circuits, and ensures that the device is lower in implementation cost.
Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations fall within the scope defined by the appended claims.
Claims (10)
1. An SEM sample placement device is characterized by comprising a sample holder and a detection circuit;
the sample support comprises a detection PCB and a sample support main body, the sample support main body is fixed on an SEM sample table, and the detection PCB is fixedly superposed on the sample support main body;
a slot is arranged on the same side of the detection PCB and the sample support main body from top to bottom and is used for providing a moving space for the manipulator when the manipulator places a conductive sample;
a first detection area and a second detection area are respectively arranged on the two sides of the slot on the upper surface of the detection PCB, the outlines of the first detection area and the second detection area are the same as the outline of the bottom of the conductive sample and are covered with a conductive coating, and the first detection area and the second detection area are connected with the detection circuit through PCB wiring;
when the manipulator places a conductive sample on the detection PCB and the bottom of the conductive sample is coincided with the first detection area and the second detection area simultaneously, the detection circuit forms a path through the first detection area, the second detection area and the conductive sample, so that the detection circuit sends out a signal for accurate placement.
2. The device of claim 1, wherein the sample holder further comprises a sample guide plate, the sample guide plate is fixed on the detection PCB plate in an overlapping manner, and the center of the sample guide plate comprises a guide hole for guiding the conductive sample to pass through; the sample guide board align to detect the fluting position of PCB board and be equipped with the same fluting to the fluting that will set up extends to the bullport for when the electrically conductive sample is placed to the manipulator provides the removal space.
3. The apparatus of claim 2, wherein the guide hole edge is provided with a slope of a predetermined angle.
4. The apparatus of claim 1, wherein the detection circuit comprises: the device comprises a first power supply, a second power supply, a photoelectric coupler, a detection resistor and a detection chip;
the first power supply is connected with the second detection area, and the first detection area is connected with the ground;
the input end of the control side of the photoelectric coupler is connected with the first power supply, and the output end of the control side of the photoelectric coupler is connected with the ground;
the input end of the controlled side of the photoelectric coupler is connected with the second power supply through the detection resistor, and the output end of the controlled side of the photoelectric coupler is connected with the ground;
and a detection pin of the detection chip is connected between the detection resistor and the input end of the controlled side of the photoelectric coupler.
5. The apparatus of claim 4, wherein the detection circuit further comprises a relay;
the relay is used for controlling the connection and disconnection of a line between the first power supply and the second detection area and controlling the connection and disconnection of a line between the first detection area and the ground.
6. The device of claim 2, further comprising an alarm circuit and a ground ring; the sample guide plate is made of metal; the sample holder main body is made of metal; the sample guide plate and the detection PCB are fixed on the sample support main body through metal screws;
the sample holder main body is fixed on the SEM sample table through a fixing column;
one end of the grounding ring is sleeved on one fixing column of the sample holder main body, and the other end of the grounding ring is connected to a first input end of the alarm circuit;
a second input end of the alarm circuit is connected to the ground;
when the sample guide plate is in contact with a pole shoe of the SEM, the sample guide plate is grounded, so that the first input end of the alarm circuit is grounded, and the first input end and the second input end of the alarm circuit are conducted, so that the alarm circuit sends out an alarm signal.
7. The device of claim 6, wherein the upper surface of the detection PCB is further provided with a third detection area and a fourth detection area respectively arranged at two sides of the slot, and when the conductive sample is correctly placed, the bottom of the conductive sample can contact the third detection area and the fourth detection area;
the third detection area and the fourth detection area are coated with conductive coatings;
the other areas of the upper surface of the detection PCB except the third detection area, the fourth detection area, the first detection area and the second detection area are also coated with conductive coatings;
the third detection area and the fourth detection area are both directly connected with the other areas;
when the conductive sample is contacted with the pole shoe of the SEM, the conductive sample is grounded, so that the first input end of the alarm circuit is grounded, and further the first input end and the second input end of the alarm circuit are conducted, so that the alarm circuit sends out an alarm signal.
8. The apparatus of claim 7, wherein the conductive coating is a copper coating.
9. The apparatus of claim 1, wherein the first and second detection areas are connected to a vacuum feedthrough aviation socket by PCB wiring, through which the detection circuitry is connected.
10. The device of claim 6, wherein the alarm circuit comprises a buzzer.
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10185781A (en) * | 1996-12-25 | 1998-07-14 | Mitsubishi Electric Corp | Sample holder for electron microscope, and its manufacturing method |
| US20080290290A1 (en) * | 2007-05-21 | 2008-11-27 | Hitachi High-Technologies Corporation | Heating stage for a micro-sample |
| CN108735566A (en) * | 2017-04-24 | 2018-11-02 | 上海磐颖实业有限公司 | One kind interconnecting scanning electron microscope example support for vacuum |
| CN216900305U (en) * | 2021-12-20 | 2022-07-05 | 北京中科科仪股份有限公司 | Sample access device and scanning electron microscope |
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2022
- 2022-12-30 CN CN202211714403.3A patent/CN115692145B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10185781A (en) * | 1996-12-25 | 1998-07-14 | Mitsubishi Electric Corp | Sample holder for electron microscope, and its manufacturing method |
| US20080290290A1 (en) * | 2007-05-21 | 2008-11-27 | Hitachi High-Technologies Corporation | Heating stage for a micro-sample |
| CN108735566A (en) * | 2017-04-24 | 2018-11-02 | 上海磐颖实业有限公司 | One kind interconnecting scanning electron microscope example support for vacuum |
| CN216900305U (en) * | 2021-12-20 | 2022-07-05 | 北京中科科仪股份有限公司 | Sample access device and scanning electron microscope |
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