CN108728896A - A kind of crucible axis lifting gear - Google Patents
A kind of crucible axis lifting gear Download PDFInfo
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- CN108728896A CN108728896A CN201710272634.6A CN201710272634A CN108728896A CN 108728896 A CN108728896 A CN 108728896A CN 201710272634 A CN201710272634 A CN 201710272634A CN 108728896 A CN108728896 A CN 108728896A
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- Prior art keywords
- crucible axis
- chassis
- drive link
- connect
- oil cylinder
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The present invention provides a kind of crucible axis lifting gears, and for driving crucible axis to carry out elevating movement, the lifting gear includes：One driving part, a chassis and at least two lifting parts, the driving part are connect at least two lifting part, for driving at least two lifting part；At least two lifting part is connect with the chassis, for driving the chassis to carry out elevating movement；The chassis is used for and crucible axis connection.In crucible axis lifting gear provided by the invention, rising or falling for crucible axis is driven using at least two lifting parts, to keep crucible axis more stable during driving.
Description
Technical field
The present invention relates to technical field of mechanical design, more particularly to a kind of crucible axis lifting gear.
Background technology
Semi-conductor silicon chip needs the silicon single crystal of very high quality, but is likely to occur in any stage of silicon monocrystal growth
Dislocation or disconnected brilliant line phenomenon (crystal becomes polycrystalline from monocrystalline).The reason of dislocation occurs in silicon single crystal, disconnected crystalline substance line may have：1. melt
In have excessive impurity；2. the thermal field in silicon monocrystal growth is not sufficiently stable and rationally, prevents crystal from stablizing growth；3. monocrystalline silicon
The irregular operation etc. of the mechanical driving device of lifting furnace.
Impurity in melt can select high-purity polycrystalline silicon raw material, high-purity silica pot, and rational argon flow field is more high-purity
The more reasonably reductions such as thermal field material；The thermal field of silicon monocrystal growth, thermal field can be improved by rationally designing thermal field.And machine
The unstable caused melt liquid level vibration of tool transmission device but hardly results in solution, because：1. the driving parts such as crucible axis are not
Can be entirely on the center, asymmetric vibration can occur during silicon monocrystal growth；2. recirculated cooling water, row's tunger tube, ground etc. are no
Evitable vibration source.
The mechanical driving device of pulling silicon single crystal stove essentially consists in crucible axis lifting gear, as silicon single crystal is constantly grown up,
The weight of crucible axis carrying constantly reduces, and intrinsic frequency constantly increases；And workshop exterior vibration source frequency is generally in 26-100Hz
In range, so being vulnerable to the interference of extraneous vibration during crystal pulling, and covibration occurs, liquid level in crucible is caused to shake
And influence silicon monocrystal growth quality.Traditional crucible axis lifting gear causes crucible axis only there are one the supporting point to crucible axis
Load-bearing is uneven, fixed asymmetric, poor so as to cause the stability of crucible axis.
Silicon monocrystal growth requires the temperature field of silicon melt very high at present, and the unstable of crucible axis can seriously affect melt
Thermal field, cause the failure of crystal growth.For this purpose, being badly in need of providing a kind of crucible axis lifting gear of stabilization, to improve silicon single crystal
Quality.
Invention content
In view of this, the purpose of the present invention is to provide a kind of crucible axis lifting gear, to solve existing crucible axis liter
The unstable problem of falling unit.
In order to solve the above technical problems, the present invention provides a kind of crucible axis lifting gear, for driving crucible axis to be risen
Drop movement, the lifting gear include：One driving part, a chassis and at least two lifting parts；
The driving part is connect at least two lifting part, for driving at least two lifting part；
At least two lifting part is connect with the chassis, for driving the chassis to carry out elevating movement；
The chassis is used for and crucible axis connection.
Optionally, the lifting part is screw rod, on the chassis there are at least two threaded holes, each screw rod to pass through
One threaded hole is connect with the chassis, and the driving part drives all screw rods to rotate simultaneously, to pass through the side of screw-driven
Formula drives the chassis to carry out elevating movement.
Optionally, further include transmission mechanism, the driving part is connect by the transmission mechanism with each screw rod.
Optionally, when the quantity of the screw rod is three, the transmission mechanism includes：One first drive link, two
Two drive links and two third drive links；
The driving part is connect with first drive link, and two the second drive links connect with first drive link
It connects, each second drive link is correspondingly connected with a third drive link, and each third drive link is correspondingly connected with a screw rod, and described first passes
Lever connects a screw rod；
The driving part drives the first drive link rotation, first drive link to drive two the second drive link rotations
Turn, the second drive link drives connected third drive link rotation, third drive link to drive connected screw rod rotation.
Optionally, two the second drive links engage connection with first drive link by gear.
Optionally, each second drive link is connected with the third drive link being connect by universal joint.
Optionally, each third drive link is connected by worm gear mechanism with corresponding screw rod.
Optionally, further include device for exerting, the device for exerting is connect with the chassis, the shake for weakening the chassis
It is dynamic.
Optionally, the device for exerting includes：One vibrations detection device, a controller, an oil pump, an oil cylinder mounting disc with
And at least one oil cylinder；
The vibrations detection device is arranged in the crucible axis, and the vibrations detection device connects with the controller
It connects, the controller is connect with the oil pump, and the oil pump is connect at least one oil cylinder, at least one oil cylinder peace
In the oil cylinder mounting disc, at least one oil cylinder is connect with the chassis；The oil cylinder mounting disc is located at the bottom
It above disk, and is all connected with, and can be risen or fallen along screw rod with each screw rod；
The vibration amplitude of crucible axis described in the vibrations detection, when the vibration amplitude is more than preset value, institute
It states controller and controls the oil pump at least one oil cylinder fuel feeding, so that at least one oil cylinder is applied to the chassis and make
Firmly.
Optionally, the oil cylinder mounting disc has at least two screw holes, and the oil cylinder mounting disc is pacified by being located at the oil cylinder
At least two screw holes in sabot are spun together at least two screw rod.
Optionally, the oil cylinder mounting disc with a crucible axis perforate, the crucible axis pass through the crucible axis perforation with
The chassis connection.
In crucible axis lifting gear provided by the invention, on the one hand the upper of crucible axis is driven using at least two screw rods
It rises or declines, to keep crucible axis more stable during driving；On the other hand one, chassis pressure is given using device for exerting, from
And reduce the vibration amplitude on chassis, to further improve the stability of crucible axis；The raising of crucible axis stability can be with
Greatly improve the growth quality of silicon single crystal.
Description of the drawings
Fig. 1 is the stereoscopic schematic diagram of crucible axis lifting gear in one embodiment of the application；
Fig. 2 is the schematic diagram of transmission mechanism in one embodiment of the application；
Fig. 3 is the structural schematic diagram of universal joint in one embodiment of the application.
In figure：1- driving parts；2- transmission mechanisms；The first drive links of 21-；The second drive links of 22-；23- third drive links；
24- gears；25- universal joints；3- screw rods；The chassis 4-；51- oil cylinder mounting discs；52- oil cylinders；53- oil pumps；54- controllers；55- shakes
Dynamic detection device；6- crucible axis.
Specific implementation mode
Core of the invention thought is to rise or fall using multiple lifting parts driving crucible axis, to improve crucible
Stability of the axis in process of rising or falling.Crucible axis lifting gear includes a driving part, a chassis and at least two
Lifting part, the driving part are connect at least two lifting part, for driving at least two lifting part；
At least two lifting part is connect with the chassis, for driving the chassis to carry out elevating movement；The chassis, is used for
Connect crucible axis.Wherein, crucible axis is generally driven by way of screw-driven, so, screw rod can be selected in lifting part.
Crucible axis lifting gear proposed by the present invention is described in further detail below in conjunction with the drawings and specific embodiments.
According to following explanation and claims, advantages and features of the invention will become apparent from.It should be noted that attached drawing is all made of very
Simplified form and non-accurate ratio is used, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
Refering to fig. 1, it shows a kind of stereoscopic schematic diagram of crucible axis lifting gear, includes mainly：One driving part
1, a chassis 4, transmission mechanism 2 and three screw rods 3,
Wherein, driving part 1 is all connected with three screw rods 3, for driving three screw rods 3 to rotate simultaneously.Chassis 4 has three
A screw hole, chassis 4 is spun together with three screw rods 3 respectively by three screw holes on chassis 4, so three screw rods 3
It is corresponded with three screw holes on chassis 4, and the screw thread of three screw rods 3 is identical, three screw rods 3 rotate simultaneously, chassis 4
It is risen or fallen simultaneously three parts；During three screw rods 3 drive chassis 4 simultaneously, the support to chassis 4 is also functioned to
Effect, so the movement on chassis 4 is more steady.
Crucible axis 6 is connect with chassis 4, to during chassis 4 rises or falls, crucible axis 6 also with rising or
Decline.
The effect of transmission mechanism 2 is the driving force driving part 1 while being transmitted to three screw rods 3, and driving part 1 generally selects
Three screw rods 3 can be respectively driven with three servo motors and are driven to realize if not utilized transmission mechanism 2 with servo motor,
Make the rotary speed of three servo motors identical during transmission, it is also identical to the rotary speed of three screw rods 3.So
The effect of transmission mechanism 2 is that the driving force of the servo motor is transmitted to three simultaneously there are one when servo motor in driving part 1
A screw rod 3.So, that is to say, that the crucible axis lifting gear in the present embodiment can be driven using transmission mechanism 2 as one
Path can not also directly be driven with transmission mechanism 2.It is that may insure three to select an advantageous effect of transmission mechanism 2
A screw rod 3 rotates under the driving of the same servo motor, and synchronism is more preferable.
In order to be better understood from the kind of drive of transmission mechanism 2, the transmission process of transmission mechanism 2 is understood incorporated by reference to Fig. 2.
Fig. 2 is vertical view, it can be seen that screw rod 3 therein is circle.
Specifically, transmission mechanism 2 includes：One first drive link 21, two the second drive links 22, two third drive links
23。
Driving part 1 is connect with the first drive link 21, and two the second drive links 22 are connect with the first drive link 21, one
Second drive link 22 is correspondingly connected with a third drive link 23, and a third drive link 23 is correspondingly connected with a screw rod 3, and two thirds pass
Lever 23 has certain angle, to ensure that the position of three screw rods 3 is not arranged on the same straight line, to three screw rods 3 and chassis 4
Link position may be constructed a plane, stability is more preferable.Specifically, one end of the first drive link 21 connects a screw rod 3,
The other end of first drive link 21 is connect with driving part 1.So three screw rods 3 are located at two third drive links 23
One end of one end and the first drive link 21.
It will be apparent that the quantity of screw rod 3 is not limited to three, two screw rods 3 can equally realize the raising and lowering of crucible axis,
If selecting screw rod 3, it is only necessary to remove a screw rod 3 on the basis of existing.If selecting more than four screw rods 3, this field
Technical staff can increase drive link according to existing structure or change the length realization of drive link, for example, increasing by the first transmission
The length of bar 21, to which screw rod 3 be arranged in the different location of the first drive link 21.Screw rod 3 is located at the planform on chassis 4
Depending on, to realize the supporting & stablizing position design standard to chassis 4.
Further, two the second drive links 22 engage connection with the first drive link 21 by gear 24, specifically,
It is equipped with a gear 24 on first drive link 21 and two the second drive links 22, three gears 24 mesh together, thus
First drive link 21 also drives the rotation of two the second drive links 22 while rotation.Wherein, the gear on the first drive link 21
24 positions are located at gear 24 position of first drive link 21 in an intermediate regional extent, the second drive link 22 and also are located at
Second drive link 22 is close to an intermediate regional extent.
Since two third drive links 23 have certain angle, so the second drive link 22 can pass through with third drive link 23
Universal joint 25 connects, and the concrete structure of universal joint 25 sees Fig. 3.One end of universal joint 25 and one end of the second drive link 22 connect
It connects, the other end of universal joint 25 is connect with one end of third drive link 23.The second drive link of realization 22 of the effect of universal joint 25
It is not coaxially connected with third drive link 23.
According to the above-mentioned introduction to drive mechanism 2 it is found that the process of 2 power transmission of drive mechanism is as follows：Driving part 1 drives
Dynamic first drive link 21 rotation, the first drive link 21 drive two the second drive links 22 to rotate by gear 24, the second drive link
22 drive connected third drive link 23 to rotate by universal joint 25, and third drive link 23 drives connected screw rod 3 to rotate.
Third drive link 23 is connected with the screw rod 3 being connect by worm gear structure, to make 23 horizontal direction of third drive link
Conversion of motion at 3 vertical direction of screw rod movement.
In order to further increase the stability of crucible axis, applicant has further made crucible axis lifting gear to be changed as follows
Into.
Increase device for exerting on the basis of above-mentioned crucible axis lifting gear, the effect of device for exerting is shaken in crucible axis
When larger, 4 one, chassis active force is given, the vibrations on chassis 4 is made to reduce.Specifically, device for exerting is connect with chassis 4, it is used for
When crucible axis vibration amplitude is more than preset value, apply active force to the chassis.
Refering to fig. 1, device for exerting includes：One vibrations detection device 55, a controller 54, an oil pump 53, oil cylinder installation
Disk 51 and three oil cylinders 52.Vibrations detection device 55 is set in crucible axis 6, the vibration amplitude for detecting crucible axis 6；
Vibrations detection device 55 is electrically connected with controller 54, and controller 54 is electrically connected with oil pump 53, oil pump 53 and three oil
Cylinder 52 is connected by high-pressure oil pipe, and three oil cylinders 52 are mounted in oil cylinder mounting disc 51, and three oil cylinders 52 connect with chassis 4
It connects；Oil cylinder mounting disc 51 is located at the top of chassis 4, and be connected on three screw rods 3, and can be risen or fallen along three screw rods 3.
The course of work of device for exerting includes：The vibration amplitude that detection device 55 detects crucible axis 6 is shaken, and by the vibrations
Amplitude is transmitted to controller 54, and when the vibration amplitude is more than the preset value of controller 54,54 control oil pump 53 of controller gives three
52 fuel feeding of a oil cylinder makes three oil cylinders 52 apply active force to chassis 4.
Wherein, the structure of oil cylinder mounting disc 51 is similar to the structure on chassis 4, and different places is that oil cylinder mounting disc 51 has
There is crucible axis perforation, crucible axis 6 is perforated across crucible axis, and is fixed on the chassis.It is also fitted in oil cylinder mounting disc 51
That answers is provided with screw hole, and is spun together with three screw rods 3.During three screw rods 3 rotate, 51 He of oil cylinder mounting disc
Chassis 4 rises or falls simultaneously, so distance between the two is equal always, when oil cylinder 52 applies active force to chassis 4, oil
Cylinder mounting disc 51 and chassis 4 and the connection of screw rod 3 are closer, to inhibit the vibration of crucible axis 6 to a certain extent, until earthenware
The Oscillation Amplitude limit of crucible axis 6 is less than the preset value of controller 54, depending on the preset value is according to the long brilliant demand of silicon single crystal.
Further, crucible axis 6 includes lower crucible axis and upper crucible axis, and lower crucible axis is fixed on chassis 4, and upper crucible axis can
Under being connected to of rotation in crucible axis.Crucible axis lifting gear further includes crucible shaft rotating device, is specifically as follows a servo
Motor, lower crucible axis and upper crucible axis are connect with crucible shaft rotating device.Crucible shaft rotating device can drive crucible axis phase
Lower crucible axis is rotated.
In conclusion in crucible axis lifting gear provided by the invention, on the one hand driven using at least two screw rods
Crucible axis rises or falls, to keep crucible axis more stable during driving；On the other hand using device for exerting to chassis
One pressure, to reduce the vibration amplitude on chassis, to further improve the stability of crucible axis；Crucible axis stability
Raising can greatly improve the growth quality of silicon single crystal.
Each embodiment is described by the way of progressive in this specification, the highlights of each of the examples are with other
The difference of embodiment, just to refer each other for identical similar portion between each embodiment.For system disclosed in embodiment
For, due to corresponding to the methods disclosed in the examples, so description is fairly simple, related place is referring to method part illustration
?.
Foregoing description is only the description to present pre-ferred embodiments, not to any restriction of the scope of the invention, this hair
Any change, the modification that the those of ordinary skill in bright field does according to the disclosure above content, belong to the protection of claims
Range.
Claims (11)
1. a kind of crucible axis lifting gear, for driving crucible axis to carry out elevating movement, which is characterized in that the lifting gear packet
It includes：One driving part, a chassis and at least two lifting parts,
The driving part is connect at least two lifting part, for driving at least two lifting part；
At least two lifting part is connect with the chassis, for driving the chassis to carry out elevating movement；
The chassis, for connecting crucible axis.
2. crucible axis lifting gear as described in claim 1, which is characterized in that the lifting part is screw rod, the chassis
Upper that there are at least two threaded holes, each screw rod to be connect with the chassis by a threaded hole, the driving part drives institute
There is screw rod while rotating, to drive the chassis to carry out elevating movement by way of screw-driven.
3. crucible axis lifting gear as claimed in claim 2, which is characterized in that further include transmission mechanism, the driving part
It is connect with each screw rod by the transmission mechanism.
4. crucible axis lifting gear as claimed in claim 3, which is characterized in that when the quantity of the screw rod is three, institute
Stating transmission mechanism includes：One first drive link, two the second drive links and two third drive links；
The driving part is connect with first drive link, and two the second drive links are connect with first drive link, often
A second drive link is correspondingly connected with a third drive link, and each third drive link is correspondingly connected with a screw rod, first drive link
Connect a screw rod；
The driving part drives the first drive link rotation, first drive link to drive two the second drive link rotations,
Second drive link drives connected third drive link rotation, third drive link to drive connected screw rod rotation.
5. crucible axis lifting gear as claimed in claim 4, which is characterized in that two the second drive links are passed with described first
Lever is engaged by gear and is connected.
6. crucible axis lifting gear as claimed in claim 4, which is characterized in that each second drive link with connect
Three drive links are connected by universal joint.
7. crucible axis lifting gear as claimed in claim 4, which is characterized in that each third drive link passes through worm and gear
Mechanism is connected with corresponding screw rod.
8. crucible axis lifting gear as claimed in claim 2, which is characterized in that further include device for exerting, the device for exerting
It is connect with the chassis, the vibrations for weakening the chassis.
9. crucible axis lifting gear as claimed in claim 8, which is characterized in that the device for exerting includes：One vibrations detection
Device, a controller, an oil pump, an oil cylinder mounting disc and at least one oil cylinder；
The vibrations detection device is arranged in the crucible axis, and the vibrations detection device is connect with the controller, institute
It states controller to connect with the oil pump, the oil pump is connect at least one oil cylinder, and at least one oil cylinder is mounted on
In the oil cylinder mounting disc, at least one oil cylinder is connect with the chassis；The oil cylinder mounting disc is located on the chassis
Side, and be all connected with each screw rod, and can be risen or fallen along screw rod；
The vibration amplitude of crucible axis described in the vibrations detection, when the vibration amplitude is more than preset value, the control
Device processed controls the oil pump at least one oil cylinder fuel feeding, and at least one oil cylinder is made to be acted on to the chassis application
Power.
10. crucible axis lifting gear as claimed in claim 9, which is characterized in that the oil cylinder mounting disc has at least two spiral shells
Hole, the oil cylinder mounting disc are screwed by least two screw holes in the oil cylinder mounting disc at least two screw rod
Together.
11. the crucible axis lifting gear as described in claim 9 or 10, which is characterized in that the oil cylinder mounting disc has an earthenware
Crucible axis is perforated, and the crucible axis passes through crucible axis perforation to be connect with the chassis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710272634.6A CN108728896B (en) | 2017-04-24 | 2017-04-24 | Crucible shaft lifting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710272634.6A CN108728896B (en) | 2017-04-24 | 2017-04-24 | Crucible shaft lifting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108728896A true CN108728896A (en) | 2018-11-02 |
| CN108728896B CN108728896B (en) | 2020-11-13 |
Family
ID=63934504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710272634.6A Active CN108728896B (en) | 2017-04-24 | 2017-04-24 | Crucible shaft lifting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108728896B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI736440B (en) * | 2019-10-10 | 2021-08-11 | 德商世創電子材料公司 | Apparatus and method for pulling a single crystal of semiconductor material |
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| CN103832837A (en) * | 2012-11-23 | 2014-06-04 | 陕西子竹电子有限公司 | Lifting structure of large-area aluminum substrate output unit |
| CN203999904U (en) * | 2014-04-28 | 2014-12-10 | 上海卡姆丹克太阳能科技有限公司 | The crucible jacking-rotating device that a kind of crystal growing furnace is used |
| CN104444942A (en) * | 2014-10-30 | 2015-03-25 | 绵阳市维博电子有限责任公司 | Double-screw synchronous lifting mechanism |
| CN204417039U (en) * | 2014-08-27 | 2015-06-24 | 郭嘉川 | A kind of multiple-effect manual type diving pump jacking system |
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2017
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| CN202350512U (en) * | 2011-11-03 | 2012-07-25 | 湖北新华光信息材料有限公司 | Test smelting furnace for smelting optical glass |
| CN103832837A (en) * | 2012-11-23 | 2014-06-04 | 陕西子竹电子有限公司 | Lifting structure of large-area aluminum substrate output unit |
| CN203999904U (en) * | 2014-04-28 | 2014-12-10 | 上海卡姆丹克太阳能科技有限公司 | The crucible jacking-rotating device that a kind of crystal growing furnace is used |
| CN204417039U (en) * | 2014-08-27 | 2015-06-24 | 郭嘉川 | A kind of multiple-effect manual type diving pump jacking system |
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| TWI736440B (en) * | 2019-10-10 | 2021-08-11 | 德商世創電子材料公司 | Apparatus and method for pulling a single crystal of semiconductor material |
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|---|---|
| CN108728896B (en) | 2020-11-13 |
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